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CC B
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se
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C
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p
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A
uth
o
r
:
J
ea
n
M.
C
ap
an
an
g
An
alo
g
Dev
ices I
n
c.
Ge
n
er
al
T
r
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av
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Ph
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p
in
es
T
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n
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lo
g
ical
Un
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s
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f
th
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Ph
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p
in
es T
ag
u
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g
,
Ph
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p
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Km
,
1
4
E
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v
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R
d
.
W
ester
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B
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tan
,
T
ag
u
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C
ity
,
Ph
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p
in
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m
ail: Jean
.
C
ap
an
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co
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1.
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NT
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SO
1
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6
4
4
-
1
p
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tan
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tr
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clas
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clea
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with
in
t
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ctio
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f
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r
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f
elec
tr
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n
ic
p
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u
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co
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p
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C
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s
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el
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p
an
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ar
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d
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to
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f
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ar
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an
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h
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d
le
d
p
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d
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T
h
e
m
icr
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-
elec
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m
ec
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an
ical
s
y
s
tem
s
(
ME
MS
)
clea
n
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m
f
o
r
waf
e
r
lev
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l
ch
i
p
s
ca
le
p
ac
k
ag
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(
W
L
C
SP
)
is
an
en
clo
s
ed
wo
r
k
a
r
ea
em
p
lo
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in
g
c
o
n
tr
o
ls
wh
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e
th
e
co
n
ce
n
tr
atio
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o
f
air
b
o
r
n
e
p
ar
ticles
with
tem
p
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h
u
m
id
ity
,
n
o
n
-
s
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a
n
d
air
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I
t
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th
e
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n
s
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ilit
y
o
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th
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p
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f
lo
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m
an
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to
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p
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test
in
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ag
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ie.
T
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p
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o
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tam
in
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n
ts
is
v
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p
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d
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o
f
v
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s
en
s
itiv
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to
d
ir
t
elec
tr
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n
ic
pa
ck
ag
es
[
1
]
.
T
h
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p
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d
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cts
s
h
o
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ld
b
e
o
f
ac
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p
ta
b
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q
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ality
.
T
h
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p
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o
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m
icr
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d
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d
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h
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r
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tr
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with
r
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d
s
to
clea
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r
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m
p
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am
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s
[
2
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-
[
4
]
.
T
em
p
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r
atu
r
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h
u
m
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d
ity
,
an
d
f
o
r
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p
ar
ti
cles
h
av
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ea
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in
f
l
u
en
ce
in
th
e
m
icr
o
f
ab
r
icatio
n
o
f
ME
MS
[
5]
-
[
9
]
.
I
t
is
cr
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th
at
ev
en
b
ef
o
r
e
f
a
b
r
icatio
n
,
s
im
u
latio
n
s
s
h
o
u
ld
b
e
co
n
d
u
cted
to
s
ee
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at
o
th
er
Evaluation Warning : The document was created with Spire.PDF for Python.
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J
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&
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p
Sci,
Vo
l.
23
,
No
.
2
,
Au
g
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s
t
20
21
:
701
-
7
0
8
702
p
ar
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ca
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v
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ab
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p
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[
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[
1
7
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ar
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it
o
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lled
[
1
8
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[
2
0
]
.
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e
lay
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to
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t f
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k
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itio
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th
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v
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f
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en
s
o
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Ph
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th
e
m
an
u
al
d
ata
g
ath
er
in
g
ev
er
y
two
wee
k
s
to
m
o
n
ito
r
th
e
air
b
o
r
n
e
p
ar
ticles.
An
y
f
lu
ctu
atio
n
with
th
is
p
ar
am
eter
is
n
o
t
n
o
ticea
b
le
f
o
r
th
e
p
eo
p
le
wo
r
k
in
g
in
s
id
e.
T
h
er
ef
o
r
e,
au
t
o
m
ated
m
o
n
ito
r
in
g
is
n
ee
d
ed
s
o
th
at
th
e
q
u
ality
o
f
th
e
p
r
o
d
u
cts
will
n
o
t
b
e
co
m
p
r
o
m
is
ed
,
an
d
th
er
eb
y
av
o
id
in
g
r
ejec
ts
an
d
d
o
w
n
tim
e.
Ma
n
y
p
r
o
ce
s
s
es
in
th
e
p
r
o
d
u
c
tio
n
o
f
elec
tr
o
n
ic
p
ac
k
a
g
es
h
av
e
b
ee
n
au
to
m
ated
s
u
ch
as
th
e
p
r
e
-
s
ea
l
b
ak
e
p
r
o
ce
s
s
,
wh
ich
in
tu
r
n
af
f
ec
ts
th
e
tem
p
er
at
u
r
e
in
th
e
p
r
o
d
u
ctio
n
lin
e
r
o
o
m
[
2
1
]
.
Mo
n
ito
r
in
g
o
f
p
ar
am
eter
s
is
o
f
h
ig
h
im
p
o
r
tan
ce
in
cr
itical
e
n
v
ir
o
n
m
en
ts
.
So
m
e
ex
am
p
les
o
f
th
ese
m
o
n
ito
r
in
g
s
y
s
tem
s
u
s
e
d
if
f
er
en
t
c
o
m
p
u
tin
g
s
o
f
twar
e
an
d
co
n
t
r
o
ller
s
[
2
2
]
,
[
2
3
]
.
Ot
h
er
s
h
av
e
also
p
r
esen
te
d
wir
e
less
co
m
m
u
n
icatio
n
f
o
r
m
o
n
ito
r
in
g
m
o
b
ilit
y
f
o
r
s
u
p
er
v
is
o
r
y
co
n
tr
o
l
[
2
4
]
-
[
2
9
]
.
Dif
f
er
en
t
co
n
t
r
o
ls
lik
e
p
r
o
p
o
r
ti
o
n
al
-
in
teg
r
al
-
d
er
iv
ativ
e
(
PID
)
an
d
f
u
zz
y
s
y
s
tem
s
ar
e
u
s
ed
f
o
r
co
n
t
r
o
llin
g
th
ese
p
ar
am
eter
s
b
ec
au
s
e
o
f
t
h
e
co
m
p
lex
ity
an
d
n
o
n
lin
ea
r
ity
[
3
0
]
-
[
3
2
]
.
I
n
cr
i
tical
p
r
o
ce
s
s
es
s
u
ch
as
in
ME
MS,
ca
r
ef
u
l
m
o
n
ito
r
in
g
o
f
th
e
tem
p
er
atu
r
e
,
h
u
m
id
ity
,
a
n
d
s
an
ity
o
r
clea
n
li
n
ess
o
f
th
e
r
o
o
m
b
y
p
ar
ticle
c
o
u
n
t is v
ital
[
3
3
]
,
[
34]
.
T
h
is
r
esear
ch
p
r
esen
ts
a
m
e
th
o
d
o
f
d
e
v
elo
p
m
e
n
t
o
f
an
au
to
m
ated
d
ata
m
o
n
it
o
r
in
g
o
f
ME
MS’
clea
n
r
o
o
m
p
ar
am
etr
ic
r
eq
u
ir
e
m
en
ts
.
A
tem
p
er
atu
r
e
m
ea
s
u
r
em
en
t
s
y
s
tem
was
b
u
ilt
wh
ic
h
u
s
es
a
DHT
1
1
s
en
s
o
r
k
it,
wh
ich
is
co
m
m
o
n
an
d
b
est
s
u
ited
f
o
r
m
ea
s
u
r
i
n
g
te
m
p
er
at
u
r
e
an
d
h
u
m
id
ity
in
a
clea
n
r
o
o
m
.
A
Sh
ar
p
d
u
s
t
s
en
s
o
r
is
u
s
ed
f
o
r
th
e
p
ar
ticle
co
u
n
t.
I
t
p
r
o
v
id
es
v
is
ib
ilit
y
o
f
th
e
p
ar
am
eter
s
th
r
o
u
g
h
a
d
e
v
elo
p
ed
g
r
ap
h
ical
u
s
er
in
ter
f
ac
e
(
GUI
)
m
o
n
ito
r
.
Ad
d
itio
n
ally
,
a
u
d
ib
le
an
d
v
is
u
al
aler
ts
th
at
d
is
p
la
y
th
e
tem
p
er
atu
r
e,
r
elativ
e
h
u
m
id
ity
,
an
d
p
ar
ticle
co
u
n
t
in
s
id
e
th
e
r
o
o
m
ar
e
in
c
lu
d
ed
.
W
h
en
th
e
r
ea
l
-
tim
e
p
ar
am
eter
s
ex
ce
ed
th
e
allo
wab
le
r
an
g
e,
an
alar
m
will
b
e
tr
ig
g
er
ed
.
T
h
e
p
r
o
to
ty
p
e
will
b
e
h
elp
f
u
l
in
d
eter
m
in
in
g
th
e
f
r
eq
u
en
c
y
o
f
clea
n
in
g
th
e
clea
n
r
o
o
m
.
2.
M
E
T
H
O
D
2
.
1
.
P
ro
j
ec
t
d
esig
n a
nd
d
ev
elo
pm
ent
T
h
is
p
r
o
ject
m
o
n
ito
r
s
th
e
q
u
ality
o
f
th
e
en
v
i
r
o
n
m
e
n
t
in
th
e
ME
MS
clea
n
r
o
o
m
ar
ea
f
o
r
th
e
p
ar
am
eter
s
:
tem
p
er
atu
r
e,
h
u
m
id
ity
an
d
p
ar
ticle
co
u
n
t.
Air
b
o
r
n
e
p
ar
ticles,
wh
ich
ar
e
p
o
te
n
tial
co
n
tam
in
an
ts
s
h
o
u
ld
b
e
co
n
tr
o
lled
i
n
s
p
ec
if
ied
lim
its
.
T
h
e
p
r
o
ject
will
b
e
well
s
itu
ated
in
s
id
e
th
e
cl
ea
n
r
o
o
m
wh
e
r
e
th
e
p
ar
am
eter
s
m
en
tio
n
ed
will b
e
v
is
ib
le
to
th
e
p
er
s
o
n
n
el
wo
r
k
i
n
g
in
s
id
e.
I
n
a
n
u
ts
h
ell,
th
e
p
r
o
ject
is
p
r
esen
ted
in
Fig
u
r
e
1.
Fig
u
r
e
1
.
Pro
ject
b
lo
ck
d
iag
r
a
m
T
em
p
er
atu
r
e
an
d
h
u
m
id
ity
is
m
ea
s
u
r
ed
u
s
in
g
th
e
DHT
1
1
s
en
s
o
r
.
I
t
ca
n
b
e
co
n
f
ig
u
r
e
d
d
i
r
ec
tly
to
a
m
icr
o
co
n
tr
o
ller
f
o
r
an
al
y
s
is
a
n
d
co
n
tr
o
l.
Du
s
t p
ar
ticles ar
e
d
etec
ted
an
d
m
ea
s
u
r
ed
u
s
in
g
t
h
e
GP2
Y1
0
1
0
AU0
F
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
A
u
to
ma
ted
d
a
ta
mo
n
ito
r
in
g
o
f
MEMS
clea
n
r
o
o
m
p
a
r
a
metric req
u
ir
eme
n
ts
(
Je
a
n
M.
C
a
p
a
n
a
n
g
)
703
d
u
s
t sen
s
o
r
.
T
h
e
d
ata
co
llecte
d
ar
e
s
en
t to
an
Ar
d
u
in
o
AT
M
E
GA
2
5
6
0
m
icr
o
co
n
tr
o
ller
.
I
t
is
also
d
is
p
lay
ed
o
n
th
e
L
C
D
m
o
n
it
o
r
.
T
h
e
s
am
p
lin
g
p
er
io
d
s
et
is
o
n
e
m
i
n
u
te,
o
r
as
p
r
ef
er
r
ed
b
y
th
e
p
er
s
o
n
n
el
u
s
in
g
th
e
p
r
o
to
ty
p
e.
See
Fig
u
r
e
2
.
An
au
d
ib
le
alar
m
a
n
d
L
E
D
lig
h
t
will
b
e
tr
ig
g
er
ed
wh
en
t
h
e
s
en
s
ed
d
ata
is
o
u
t
o
f
r
an
g
e
o
r
t
o
ler
an
ce
to
o
n
e
o
f
t
h
e
p
ar
am
eter
s
.
All
th
e
d
ata
co
llected
is
s
to
r
ed
in
a
d
ata
lo
g
g
er
in
.
csv
f
o
r
m
at
s
o
th
at
it
ca
n
b
e
g
r
a
p
h
ically
p
r
esen
ted
.
T
h
e
in
ter
co
n
n
ec
tio
n
o
f
th
e
d
ev
ices
is
p
r
esen
ted
in
Fig
u
r
e
3
.
T
h
e
s
ch
em
atic
d
iag
r
am
f
o
r
in
ter
c
o
n
n
ec
tin
g
th
ese
d
e
v
ices is sh
o
wn
in
Fig
u
r
e
4
.
Fig
u
r
e
2
.
Sy
s
tem
f
lo
w
c
h
ar
t
Fig
u
r
e
3
.
I
n
ter
f
ac
in
g
b
lo
c
k
d
ia
g
r
am
Fig
u
r
e
4
.
C
o
n
tr
o
l sy
s
tem
s
ch
em
atic
d
iag
r
am
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4
7
5
2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci,
Vo
l.
23
,
No
.
2
,
Au
g
u
s
t
20
21
:
701
-
7
0
8
704
2
.
2
.
D
a
t
a
p
ro
ce
s
s
ing
A
s
er
ial
co
n
n
ec
tio
n
is
estab
li
s
h
ed
in
p
r
o
ce
s
s
in
g
th
e
d
ata
c
o
llected
f
r
o
m
th
e
s
en
s
o
r
s
d
o
wn
to
th
e
co
n
tr
o
ller
.
See
Fig
u
r
e
4
f
o
r
t
h
e
s
ch
em
atic
d
ia
g
r
am
.
An
e
x
ec
u
tab
le
a
p
p
licatio
n
was
d
e
v
elo
p
ed
to
r
u
n
th
e
s
y
s
tem
au
to
m
atica
lly
wh
en
t
h
e
co
m
p
u
ter
is
b
o
o
ted
.
A
L
AN
co
n
n
ec
tio
n
was
also
estab
lis
h
ed
f
o
r
s
u
p
e
r
v
is
o
r
y
m
o
n
ito
r
in
g
an
d
d
ata
lo
g
g
in
g
.
T
h
e
tem
p
er
atu
r
e
r
ea
d
in
g
s
ar
e
d
is
p
lay
ed
in
d
eg
r
ee
s
C
elsi
u
s
,
r
elativ
e
h
u
m
id
ity
in
%
R
H,
an
d
p
ar
ticles
co
u
n
t
in
p
ar
ticles
p
er
cu
b
ic
m
eter
(
PC
M)
.
E
ac
h
p
ar
am
eter
is
in
d
iv
id
u
ally
p
r
esen
ted
in
g
r
ap
h
s
with
r
esp
ec
t to
its
tim
e
s
tam
p
.
2.
3
.
T
ests a
nd
e
v
a
lua
t
io
n
A
co
m
p
ar
ativ
e
an
al
y
s
is
is
co
n
d
u
cted
b
etwe
en
th
e
d
ata
co
lle
cted
in
a
clea
n
r
o
o
m
an
d
n
o
n
-
c
lean
r
o
o
m
.
T
h
is
an
aly
s
is
is
co
n
d
u
cted
s
o
th
at
a
r
ea
l scen
ar
io
o
f
d
etec
tin
g
d
if
f
er
en
t p
a
r
am
eter
co
n
d
itio
n
s
ca
n
b
e
test
ed
an
d
ev
alu
ated
.
T
h
e
d
u
s
t
s
en
s
o
r
is
ca
lib
r
ated
with
th
e
eq
u
iv
alen
t
f
u
n
ctio
n
ac
co
r
d
in
g
to
t
h
e
s
en
s
o
r
ch
ar
ac
ter
is
tics
.
See
Fig
u
r
e
5
.
T
h
is
s
en
s
o
r
is
s
elec
ted
b
ased
o
n
th
e
wo
r
k
in
g
p
ar
am
eter
in
th
e
clea
n
r
o
o
m
w
ith
m
ar
g
in
s
th
at
ca
n
d
etec
t
lar
g
e
d
ev
iatio
n
s
f
r
o
m
th
e
wo
r
k
in
g
p
ar
am
eter
s
f
o
r
t
h
e
p
u
r
p
o
s
e
o
f
ev
alu
atin
g
th
e
d
if
f
er
en
ce
s
in
th
e
r
ea
d
in
g
b
etwe
en
th
e
clea
n
r
o
o
m
an
d
n
o
n
-
clea
n
r
o
o
m
.
Fig
u
r
e
5
.
Du
s
t d
e
n
s
ity
v
s
.
o
u
t
p
u
t v
o
ltag
e
o
f
th
e
d
u
s
t
s
en
s
o
r
(
Sh
ar
p
GP2
Y1
0
1
0
AUF0
F)
3.
RE
SU
L
T
S
A
ND
D
IS
CU
SS
I
O
N
3
.
1
.
P
ro
j
ec
t
d
ev
elo
pm
ent
T
h
e
ass
em
b
ly
co
n
s
is
ts
o
f
a
cir
cu
it
b
o
ar
d
an
d
ter
m
i
n
als
in
wh
ich
th
e
elem
en
ts
o
f
th
e
p
r
o
to
ty
p
e
will
b
e
co
n
n
ec
ted
.
T
h
e
p
r
o
t
o
ty
p
e
is
p
r
o
tecte
d
b
y
an
en
clo
s
u
r
e
as
p
r
esen
ted
in
Fig
u
r
e
6
(
a
)
a
n
d
Fig
u
r
e
6
(
b
)
.
T
h
e
tem
p
er
atu
r
e
a
n
d
d
u
s
t
s
en
s
o
r
s
ar
e
co
n
n
ec
ted
s
er
ially
to
th
e
m
icr
o
co
n
tr
o
ller
u
n
it
f
o
r
m
o
n
i
to
r
in
g
a
n
d
c
o
n
tr
o
l.
See
Fig
u
r
e
6
(
c
)
a
n
d
Fig
u
r
e
6
(
d
)
f
o
r
th
e
m
o
n
ito
r
in
g
o
f
th
e
te
m
p
er
atu
r
e
a
n
d
h
u
m
id
ity
p
ar
a
m
eter
s
.
(
a)
(
b
)
(
c)
(
d
)
Fig
u
r
e
6
.
Pro
t
o
ty
p
e
;
(
a
)
test
s
etu
p
,
(
b
)
p
r
o
to
ty
p
e
en
clo
s
u
r
e,
(
c)
DHT
1
1
s
en
s
o
r
m
o
n
ito
r
,
(
d
)
d
u
s
t sen
s
o
r
m
o
n
ito
r
3
.
2
.
So
f
t
wa
re
des
ig
n a
nd
v
irt
ua
l r
epre
s
ent
a
t
io
n
T
h
e
v
is
u
al
r
ep
r
esen
tatio
n
o
f
t
h
e
d
ata
p
r
o
ce
s
s
ed
b
y
th
e
co
n
t
r
o
ller
is
p
r
esen
ted
in
g
r
a
p
h
s
b
y
a
v
is
u
al
C
#
p
r
o
g
r
am
f
o
r
th
e
co
m
p
u
ter
GUI
as
p
r
esen
ted
i
n
Fig
u
r
e
7
.
Fo
r
t
h
e
q
u
ick
m
o
n
ito
r
in
g
o
f
th
e
p
a
r
am
eter
s
an
L
C
D
d
is
p
lay
is
ad
d
ed
f
o
r
th
e
p
er
s
o
n
n
el
ch
ec
k
in
g
th
e
d
e
v
ice.
T
h
is
is
p
r
esen
ted
in
Fig
u
r
e
8
.
T
h
is
v
is
u
al
m
o
n
ito
r
ca
n
b
e
h
elp
f
u
l w
h
en
a
tten
u
ato
r
s
m
alf
u
n
ctio
n
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
A
u
to
ma
ted
d
a
ta
mo
n
ito
r
in
g
o
f
MEMS
clea
n
r
o
o
m
p
a
r
a
metric req
u
ir
eme
n
ts
(
Je
a
n
M.
C
a
p
a
n
a
n
g
)
705
Fig
u
r
e
7
.
Gr
a
p
h
ical
p
r
esen
tati
o
n
o
f
p
ar
am
eter
s
in
th
e
GUI
Fig
u
r
e
8
.
L
C
D
d
is
p
lay
f
o
r
m
o
n
ito
r
in
g
3.
3
.
F
ield T
ests a
nd
E
v
a
lua
t
io
n
T
h
e
p
r
o
to
ty
p
e
is
test
ed
in
b
o
th
clea
n
r
o
o
m
a
n
d
n
o
n
-
clea
n
r
o
o
m
s
.
T
h
e
s
en
s
o
r
s
a
r
e
s
itu
a
ted
in
t
h
e
p
r
o
d
u
ctio
n
ar
ea
clo
s
e
to
th
e
p
er
s
o
n
n
el
an
d
th
e
p
r
o
d
u
ct
b
e
in
g
o
p
er
ated
.
Fig
u
r
e
9
p
r
ese
n
ts
th
e
tem
p
er
atu
r
e
s
am
p
les
m
o
n
ito
r
ed
f
o
r
ea
ch
m
in
u
te
f
o
r
2
0
m
in
u
tes.
T
h
e
c
o
n
t
r
o
lled
wo
r
k
in
g
tem
p
er
at
u
r
e
in
s
id
e
th
e
clea
n
r
o
o
m
is
at
2
1
-
23
o
C
wh
ile
in
t
h
e
n
o
n
-
clea
n
r
o
o
m
is
at
2
5
-
27
o
C
.
T
h
e
p
r
o
to
ty
p
e
d
is
p
lay
s
a
n
alar
m
wh
en
it
is
p
lace
d
in
th
e
n
o
n
-
clea
n
r
o
o
m
b
ec
au
s
e
o
f
th
e
in
cr
ea
s
e
in
tem
p
er
atu
r
e.
Me
an
wh
ile,
th
e
r
elativ
e
h
u
m
i
d
ity
in
th
e
clea
n
r
o
o
m
is
at
6
4
-
6
7
%
R
H.
See
Fig
u
r
e
10
t
h
e
p
ar
ticle
co
u
n
t
o
n
th
e
o
t
h
er
h
an
d
is
n
o
t
g
r
ea
ter
th
an
1
2
0
p
ar
ticles
f
o
r
th
e
clea
n
r
o
o
m
.
T
h
e
p
a
r
ticle
co
u
n
t
in
th
e
n
o
n
-
clea
n
r
o
o
m
is
at
6
3
8
-
6
5
0
PP
M
f
o
r
th
e
2
0
-
m
i
n
u
t
e
s
am
p
lin
g
.
T
h
ese
ar
e
illu
s
tr
ated
in
Fig
u
r
e
1
1
r
es
p
ec
tiv
ely
.
Fig
u
r
e
9
.
T
e
m
p
er
atu
r
e
in
clea
n
r
o
o
m
an
d
n
o
n
-
clea
n
r
o
o
m
Fig
u
r
e
10
.
R
elativ
e
h
u
m
id
ity
i
n
clea
n
r
o
o
m
an
d
n
o
n
-
clea
n
r
o
o
m
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4
7
5
2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci,
Vo
l.
23
,
No
.
2
,
Au
g
u
s
t
20
21
:
701
-
7
0
8
706
Fig
u
r
e
11
.
Par
ticle
co
u
n
t in
clea
n
r
o
o
m
an
d
n
o
n
-
clea
n
r
o
o
m
T
h
e
d
if
f
er
e
n
ce
s
in
th
e
d
ata
g
a
th
er
ed
f
o
r
ea
ch
p
a
r
am
eter
f
o
r
b
o
th
clea
n
r
o
o
m
a
n
d
n
o
n
-
clea
n
r
o
o
m
a
r
e
s
ig
n
if
ican
t
ev
id
e
n
ce
th
at
t
h
e
p
r
o
t
o
ty
p
e
w
o
r
k
s
well
in
m
o
n
ito
r
in
g
th
ese
p
a
r
am
eter
s
.
T
h
e
alar
m
s
ca
n
b
e
ad
ju
s
ted
b
ased
o
n
th
e
co
llect
ed
wo
r
k
in
g
lev
els
f
o
r
ea
ch
p
a
r
am
eter
.
Dev
iatio
n
f
r
o
m
th
e
s
p
ec
if
ied
r
an
g
es
o
f
p
ar
am
etr
ic
r
eq
u
ir
em
en
ts
will tr
ig
g
er
th
e
alar
m
to
ca
ll
o
u
t th
e
atten
tio
n
f
o
r
clea
n
u
p
o
r
m
ain
t
en
an
ce
.
4.
CO
NCLU
SI
O
N
AND
F
U
T
U
RE
WO
RK
T
h
e
p
r
o
d
u
cti
o
n
o
f
ME
MS
n
e
ed
s
s
tr
ict
m
o
n
ito
r
i
n
g
o
f
e
n
v
ir
o
n
m
en
tal
p
ar
am
eter
s
in
o
r
d
er
to
av
o
id
co
m
p
r
o
m
is
in
g
th
e
p
r
o
d
u
ct
q
u
ality
.
T
h
is
p
r
o
ject
e
n
ab
led
au
to
m
atin
g
th
e
m
o
n
ito
r
in
g
s
y
s
t
em
o
f
t
h
e
ME
MS
clea
n
r
o
o
m
s
o
th
at
u
n
s
ch
ed
u
le
d
clea
n
in
g
m
ig
h
t
b
e
co
n
d
u
cte
d
as
n
e
ed
ed
.
T
h
e
d
ata
ar
e
d
is
p
lay
ed
in
b
o
th
GUI
an
d
L
C
D
d
is
p
lay
f
o
r
m
o
n
ito
r
i
n
g
f
o
r
b
o
t
h
f
ield
p
er
s
o
n
n
el
an
d
s
u
p
er
v
is
o
r
y
p
er
s
o
n
n
el.
T
h
e
s
ig
n
if
ican
t
ch
a
n
g
es
in
th
e
r
ea
d
in
g
s
o
f
th
e
th
r
ee
p
ar
am
eter
s
,
p
ar
ticu
lar
ly
;
te
m
p
er
atu
r
e,
r
elativ
e
h
u
m
id
ity
,
an
d
p
ar
ticle
co
u
n
t
(b
etwe
en
an
av
er
a
g
e
o
f
2
2
.
2
o
C
an
d
2
5
.
9
5
o
C
,
6
5
.
9
%R
H
an
d
6
%R
H,
an
d
1
0
1
.
1
2
5
PP
M
an
d
6
4
4
.
2
7
7
5
PP
M
r
esp
ec
tiv
ely
)
co
llected
in
a
2
0
-
m
in
u
te
d
ata
g
ath
er
in
g
,
v
alid
a
tin
g
th
e
ef
f
ec
tiv
e
n
ess
o
f
th
e
p
r
o
to
ty
p
e.
T
h
e
d
at
a
lo
g
s
ar
e
also
h
elp
f
u
l in
in
v
esti
g
atin
g
s
ce
n
ar
io
s
o
n
h
o
w
t
o
av
o
id
ME
MS’
co
m
p
r
o
m
is
ed
p
r
o
d
u
ctio
n
q
u
ality
.
I
n
th
e
f
u
tu
r
e,
m
u
ltip
le
s
en
s
o
r
s
will
b
e
p
lace
d
ac
r
o
s
s
th
e
cl
ea
n
r
o
o
m
f
o
r
m
o
n
ito
r
in
g
an
d
s
u
p
er
v
is
o
r
y
co
n
tr
o
l.
W
ir
eless
co
n
n
ec
tiv
it
y
ca
n
also
b
e
in
teg
r
ate
d
f
o
r
m
o
b
ile
ap
p
licatio
n
s
.
T
h
is
o
p
en
s
a
win
d
o
w
f
o
r
i
m
p
r
o
v
em
e
n
t f
o
r
ME
MS
clea
n
r
o
o
m
co
n
tr
o
l a
n
d
m
ain
ten
an
c
e.
ACK
NO
WL
E
DG
E
M
E
NT
S
First
o
f
all,
t
h
e
au
t
h
o
r
s
ac
k
n
o
wled
g
e
th
e
L
o
r
d
J
esu
s
C
h
r
is
t
as
th
e
s
o
u
r
ce
o
f
all
p
r
o
v
i
s
io
n
.
T
h
e
au
th
o
r
s
also
ac
k
n
o
wled
g
e
A
n
alo
g
Dev
ices
I
n
c.
Gen
er
al
T
r
ias
C
av
ite,
Ph
ilip
p
in
es
an
d
th
e
T
ec
h
n
o
lo
g
ical
Un
iv
er
s
ity
o
f
th
e
Ph
ilip
p
in
es
T
ag
u
ig
f
o
r
th
e
f
r
u
itfu
l
co
lla
b
o
r
atio
n
in
c
o
n
d
u
ctin
g
th
is
s
tu
d
y
f
o
r
in
d
u
s
tr
ial
au
to
m
atio
n
.
RE
F
E
R
E
NC
E
S
[1
]
C.
R.
Co
p
e
lan
d
,
C
.
D.
M
c
g
ra
y
,
J.
G
e
ist,
a
n
d
S
.
M
.
S
tav
is,
“
P
a
rti
c
le
Trac
k
in
g
o
f
M
icro
e
lec
tro
m
e
c
h
a
n
ica
l
S
y
ste
m
P
e
rfo
rm
a
n
c
e
a
n
d
Re
li
a
b
il
it
y
,
”
in
J
o
u
r
n
a
l
o
f
M
icr
o
e
lec
tro
me
c
h
a
n
ica
l
S
y
ste
ms
,
v
o
l
.
2
7
,
n
o
.
6
,
p
p
.
9
4
8
-
9
5
0
,
De
c
.
2
0
1
8
,
d
o
i
:
1
0
.
1
1
0
9
/JM
E
M
S
.
2
0
1
8
.
2
8
7
4
7
7
1
.
[2
]
M
.
Hira
n
o
,
H.
Ku
wa
n
o
,
a
n
d
J.
W
.
Weijt
m
a
n
s,
“
S
u
p
e
rl
u
b
rici
ty
M
e
c
h
a
n
ism
fo
r
M
icro
El
e
c
tro
m
e
c
h
a
n
ica
l
S
y
ste
m
s,
”
in
Pro
c
e
e
d
i
n
g
s
I
EE
E
T
h
e
T
e
n
t
h
An
n
u
a
l
I
n
ter
n
a
ti
o
n
a
l
W
o
rk
sh
o
p
o
n
M
icr
o
El
e
c
tro
M
e
c
h
a
n
ica
l
S
y
ste
ms
.
A
n
In
v
e
stig
a
ti
o
n
o
f
M
icr
o
S
tru
c
tu
re
s,
S
e
n
s
o
rs
,
Act
u
a
t
o
rs
,
M
a
c
h
in
e
s
a
n
d
Ro
b
o
ts
,
1
9
9
7
,
p
p
.
4
3
6
-
4
4
1
,
d
o
i:
1
0
.
1
1
0
9
/M
E
M
S
YS.
1
9
9
7
.
5
8
1
8
8
5
.
[3
]
A.
Iz
a
d
b
a
k
h
s
h
a
n
d
S
.
M
.
R.
Ra
fie
i
,
“
Ro
b
u
st
C
o
n
tr
o
l
M
e
t
h
o
d
o
l
o
g
ies
fo
r
Op
ti
c
a
l
M
icro
E
lec
tro
M
e
c
h
a
n
ica
l
S
y
ste
m
-
Ne
w
a
p
p
ro
a
c
h
e
s
a
n
d
Co
m
p
a
riso
n
,
”
in
2
0
0
8
1
3
th
I
n
ter
n
a
ti
o
n
a
l
P
o
we
r
El
e
c
tro
n
ics
a
n
d
M
o
ti
o
n
Co
n
t
ro
l
C
o
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fer
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c
e
,
2
0
0
8
,
p
p
.
2
1
0
2
-
2
1
0
7
,
d
o
i:
1
0
.
1
1
0
9
/E
P
E
P
EM
C.
2
0
0
8
.
4
6
3
5
5
7
7
.
[4
]
O.
Tab
a
ta,
K.
S
h
o
m
a
o
k
a
,
a
n
d
S
.
S
ig
u
y
a
m
a
,
“
In
S
it
u
Ob
se
rv
a
ti
o
n
a
n
d
An
a
l
y
sis
o
f
Wet
Et
c
h
i
n
g
P
r
o
c
e
ss
fo
r
M
icro
El
e
c
tro
M
e
c
h
a
n
ica
l
S
y
ste
m
s,”
in
[
1
9
9
1
]
Pr
o
c
e
e
d
in
g
s.
IEE
E
M
icr
o
El
e
c
tro
M
e
c
h
a
n
ica
l
S
y
ste
ms
,
1
9
9
1
,
p
p
.
9
9
-
1
0
2
,
d
o
i:
1
0
.
1
1
0
9
/M
E
M
S
YS.
1
9
9
1
.
1
1
4
7
7
6
.
[5
]
S
.
G
ra
u
b
y
,
S
.
Dil
h
a
ire,
S
.
Jo
re
z
,
a
n
d
W
.
Clae
y
s,
“
Tem
p
e
ra
tu
re
Va
riatio
n
M
a
p
p
i
n
g
o
f
a
M
icro
e
l
e
c
tro
m
e
c
h
a
n
ica
l
S
y
ste
m
b
y
T
h
e
rm
o
re
flec
tan
c
e
I
m
a
g
in
g
,
”
in
I
EE
E
El
e
c
tro
n
De
v
ice
L
e
tt
e
rs
,
v
o
l.
2
6
,
n
o
.
2
,
p
p
.
7
8
-
8
0
,
F
e
b
.
2
0
0
5
,
d
o
i:
1
0
.
1
1
0
9
/L
ED.
2
0
0
4
.
8
4
1
4
6
8
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
A
u
to
ma
ted
d
a
ta
mo
n
ito
r
in
g
o
f
MEMS
clea
n
r
o
o
m
p
a
r
a
metric req
u
ir
eme
n
ts
(
Je
a
n
M.
C
a
p
a
n
a
n
g
)
707
[6
]
Z.
P
e
n
g
e
t
a
l.
,
“
Im
p
a
c
t
o
f
Hu
m
id
it
y
o
n
Die
lec
tri
c
Ch
a
rg
in
g
in
RF
M
EM
S
Ca
p
a
c
it
i
v
e
S
witc
h
e
s,”
in
IEE
E
M
icr
o
wa
v
e
a
n
d
W
ire
les
s
Co
mp
o
n
e
n
ts
L
e
tt
e
rs
,
v
o
l.
1
9
,
n
o
.
5
,
p
p
.
2
9
9
-
3
0
1
,
M
a
y
2
0
0
9
,
d
o
i:
1
0
.
1
1
0
9
/L
M
WC.
2
0
0
9
.
2
0
1
7
5
9
5
.
[7
]
M
.
Ho
n
,
F
.
W.
De
lRi
o
,
C.
Ca
rra
ro
,
a
n
d
R.
M
a
b
o
u
d
ian
,
“
Eff
e
c
ts
o
f
Re
lativ
e
Hu
m
id
it
y
a
n
d
Ac
tu
a
t
io
n
Vo
lt
a
g
e
o
n
M
EM
S
,
”
in
T
RA
NS
DU
CER
S
2
0
0
7
-
2
0
0
7
I
n
ter
n
a
ti
o
n
a
l
S
o
li
d
-
S
t
a
te
S
e
n
so
rs
,
Act
u
a
t
o
rs
a
n
d
M
icr
o
sy
ste
ms
Co
n
fer
e
n
c
e
,
2
0
0
7
,
p
p
.
3
6
7
-
3
7
0
,
d
o
i:
1
0
.
1
1
0
9
/
S
ENS
OR.
2
0
0
7
.
4
3
0
0
1
4
4
.
[8
]
T.
S
u
g
a
a
n
d
N.
Ho
s
o
d
a
,
“
A
No
v
e
l
Ap
p
ro
a
c
h
t
o
As
se
m
b
ly
a
n
d
In
terc
o
n
n
e
c
ti
o
n
f
o
r
M
icro
El
e
c
tr
o
M
e
c
h
a
n
ica
l
S
y
ste
m
s,”
in
Pro
c
e
e
d
i
n
g
s
I
EE
E
M
icr
o
El
e
c
tro
M
e
c
h
a
n
ica
l
S
y
ste
ms
.
1
9
9
5
,
1
9
9
5
,
p
p
.
4
1
3
-
4
1
8
,
d
o
i:
1
0
.
1
1
0
9
/M
E
M
S
YS.
1
9
9
5
.
4
7
2
5
8
9
.
[9
]
L.
Zh
a
n
,
H.
S
a
n
,
G
.
Li
,
P
.
X
u
,
a
n
d
X.
C
h
e
n
,
“
Eff
e
c
ts
o
f
S
i
-
n
a
n
o
c
ry
sta
l
fo
rm
a
ti
o
n
in
d
iele
c
tri
c
lay
e
rs
o
n
re
li
a
b
i
li
ty
o
f
RF
M
EM
S
S
witch
e
s,”
in
2
0
0
8
3
rd
IE
EE
In
ter
n
a
ti
o
n
a
l
Co
n
fer
e
n
c
e
o
n
Na
n
o
/
M
icr
o
En
g
i
n
e
e
re
d
a
n
d
M
o
lec
u
la
r
S
y
ste
ms
,
2
0
0
8
,
p
p
.
5
4
8
-
5
5
1
,
d
o
i:
1
0
.
1
1
0
9
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M
S
.
2
0
0
8
.
4
4
8
4
3
9
2
.
[1
0
]
L.
G
.
S
a
lmo
n
,
“
Tes
ti
n
g
Re
q
u
irem
e
n
ts
fo
r
M
icr
o
e
lec
tro
m
e
c
h
a
n
ica
l
S
y
ste
m
s
(M
EM
S
),
”
i
n
1
9
9
8
IE
EE
AUT
OTE
S
T
CON
Pro
c
e
e
d
i
n
g
s.
I
EE
E
S
y
ste
ms
Rea
d
in
e
ss
T
e
c
h
n
o
l
o
g
y
Co
n
fer
e
n
c
e
.
T
e
st
T
e
c
h
n
o
lo
g
y
fo
r
th
e
2
1
st
Ce
n
tu
ry
(Ca
t
.
No
.
9
8
CH
3
6
1
7
9
)
,
1
9
9
8
,
p
p
.
1
6
0
-
,
d
o
i:
1
0
.
1
1
0
9
/AUT
ES
T.
1
9
9
8
.
7
1
3
4
3
6
.
[1
1
]
X.
Zh
a
n
g
,
X
.
Ke
,
a
n
d
Z
.
Z
h
a
n
g
,
“
Re
se
a
rc
h
o
n
M
icro
-
El
e
c
tro
-
M
e
c
h
a
n
ica
l
-
S
y
ste
m
s
d
i
g
it
a
l
g
e
o
p
h
o
n
e
,
”
i
n
2
0
1
0
In
ter
n
a
t
io
n
a
l
Co
n
fer
e
n
c
e
o
n
Arti
fi
c
ia
l
In
telli
g
e
n
c
e
a
n
d
Co
mp
u
ta
ti
o
n
a
l
In
tel
li
g
e
n
c
e
,
2
0
1
0
,
p
p
.
4
1
4
-
4
1
7
,
d
o
i:
1
0
.
1
1
0
9
/AICI.
2
0
1
0
.
3
2
4
.
.
[1
2
]
X.
Zh
a
o
,
B
.
Lu
,
G
.
Lu
,
a
n
d
Y.
Hu
a
n
g
,
“
Virtu
a
l
Re
a
li
ty
-
Ba
se
d
Ra
p
id
P
r
o
to
ty
p
in
g
De
sig
n
f
o
r
M
icro
-
El
e
c
tro
-
M
e
c
h
a
n
ica
l
S
y
ste
m
,
”
in
1
9
9
7
IEE
E
In
ter
n
a
ti
o
n
a
l
C
o
n
fer
e
n
c
e
o
n
I
n
telli
g
e
n
t
Pro
c
e
ss
in
g
S
y
ste
ms
(Ca
t
.
No
.
9
7
T
H8
3
3
5
)
,
1
9
9
7
,
p
p
.
1
7
6
5
-
1
7
6
8
v
o
l.
2
,
d
o
i:
1
0
.
1
1
0
9
/ICIP
S
.
1
9
9
7
.
6
6
9
3
5
8
.
[1
3
]
S
.
S
a
a
d
o
n
a
n
d
O.
S
id
e
k
,
“
Tran
sie
n
t
a
n
a
ly
sis
o
f
a
m
b
ien
t
v
ib
ra
ti
o
n
-
b
a
se
d
m
icro
-
e
lec
tro
-
m
e
c
h
a
n
ica
l
sy
ste
m
s
(M
EM
S
)
p
iez
o
e
lec
tri
c
e
n
e
rg
y
h
a
rv
e
ste
r
u
sin
g
AN
S
YS
a
n
d
COV
ENTORW
ARE
a
p
p
ro
a
c
h
e
s,”
i
n
2
0
1
1
IEE
E
In
ter
n
a
t
io
n
a
l
C
o
n
fer
e
n
c
e
o
n
C
o
mp
u
ter
A
p
p
l
ica
ti
o
n
s
a
n
d
In
d
u
stria
l
El
e
c
tro
n
ics
(ICCAIE
)
,
2
0
1
1
,
p
p
.
4
1
-
4
4
,
d
o
i:
1
0
.
1
1
0
9
/ICCAIE.
2
0
1
1
.
6
1
6
2
1
0
1
.
[1
4
]
F
.
S
a
m
m
o
u
ra
,
M
.
Ha
n
c
e
r,
a
n
d
K.
Ya
n
g
,
“
Th
e
Eff
e
c
t
o
f
S
u
rfa
c
e
Ch
e
m
istry
o
n
M
EM
S
S
ti
c
ti
o
n
in
a
n
Ultralo
w
-
Hu
m
id
it
y
E
n
v
ir
o
n
m
e
n
t
,
”
in
J
o
u
r
n
a
l
o
f
M
icr
o
e
lec
tro
me
c
h
a
n
ica
l
S
y
ste
ms
,
v
o
l.
2
0
,
n
o
.
2
,
p
p
.
5
2
2
-
5
2
6
,
Ap
ril
2
0
1
1
,
d
o
i:
1
0
.
1
1
0
9
/JM
E
M
S
.
2
0
1
0
.
2
1
0
0
0
2
9
.
[1
5
]
F
.
S
a
m
m
o
u
ra
,
A.
S
p
a
r
k
s,
W.
S
a
wy
e
r,
M
.
Bh
a
g
a
v
a
t,
M
.
Ju
d
y
,
a
n
d
K.
Ya
n
g
,
“
S
ti
c
ti
o
n
i
n
Lo
w
Hu
m
id
it
y
En
v
ir
o
n
m
e
n
t
,
”
in
2
0
0
9
IEE
E
2
2
n
d
I
n
ter
n
a
t
io
n
a
l
C
o
n
fer
e
n
c
e
o
n
M
icr
o
El
e
c
tro
M
e
c
h
a
n
ica
l
S
y
ste
ms
,
2
0
0
9
,
p
p
.
8
8
-
9
1
,
d
o
i:
1
0
.
1
1
0
9
/M
E
M
S
Y
S
.
2
0
0
9
.
4
8
0
5
3
2
6
.
[1
6
]
R.
Ra
n
g
a
n
a
t
h
a
n
,
G
.
S
iv
a
k
u
m
a
r,
R.
G
a
le,
a
n
d
T.
D
a
ll
a
s,
“
Ch
a
r
a
c
teriz
a
ti
o
n
o
f
S
ti
c
ti
o
n
Ac
c
ru
a
l
in
a
M
EM
S
,
”
in
J
o
u
rn
a
l
o
f
M
icr
o
e
lec
tro
me
c
h
a
n
ica
l
S
y
ste
ms
,
v
o
l.
1
8
,
n
o
.
5
,
p
p
.
1
1
4
9
-
1
1
5
9
,
Oc
t.
2
0
0
9
,
d
o
i:
1
0
.
1
1
0
9
/JM
E
M
S
.
2
0
0
9
.
2
0
2
7
5
0
3
.
[1
7
]
P
.
M
c
c
lu
sk
e
y
,
“
De
sig
n
fo
r
Re
l
iab
il
it
y
o
f
M
icro
-
E
lec
tro
-
M
e
c
h
a
n
ica
l
S
y
ste
m
s
(M
EM
S
),
”
i
n
5
2
n
d
E
lec
tro
n
ic
Co
mp
o
n
e
n
ts
a
n
d
T
e
c
h
n
o
lo
g
y
Co
n
fer
e
n
c
e
2
0
0
2
.
(C
a
t.
No
.
0
2
CH3
7
3
4
5
)
,
2
0
0
2
,
p
p
.
7
6
0
-
7
6
2
,
d
o
i:
1
0
.
1
1
0
9
/E
CTC
.
2
0
0
2
.
1
0
0
8
1
8
3
.
[1
8
]
S
.
S
c
o
tt
,
F
.
S
a
d
e
g
h
i,
a
n
d
D.
P
e
ro
u
li
s,
“
An
In
h
e
re
n
tl
y
-
R
o
b
u
st
3
0
0
C
M
E
M
S
Tem
p
e
ra
tu
re
S
e
n
s
o
r
fo
r
Wi
re
les
s
He
a
lt
h
M
o
n
it
o
ri
n
g
o
f
Ba
ll
a
n
d
Ro
ll
in
g
El
e
m
e
n
t
Be
a
rin
g
s,”
i
n
S
ENS
OR
S
,
2
0
0
9
IEE
E
,
2
0
0
9
,
p
p
.
9
7
5
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9
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0
]
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[2
1
]
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.
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.
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Ortiz,
a
n
d
M
.
J.
B.
En
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“
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to
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2
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.
[2
3
]
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.
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.
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g
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.
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4
]
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Li
,
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.
Xu
,
J.
Ca
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,
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Da
i,
a
n
d
J.
Zh
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g
,
“
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n
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2
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.
[2
5
]
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.
,
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2
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.
[2
6
]
T.
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o
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.
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,
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2
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[2
7
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8
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,
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sig
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[2
9
]
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Lai,
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.
Qi,
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d
L.
Cu
i,
“
De
sig
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Tem
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2
0
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2
3
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Ch
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1
]
L.
Zh
e
n
g
,
Y.
Yi
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d
W.
Wa
n
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,
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to
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M
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5
4
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4
.
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2
]
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Ch
a
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Z
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n
g
,
“
De
sig
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[3
3
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2
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.
[3
4
]
L.
Wan
g
,
J.
Tan
g
a
n
d
Q
.
Hu
a
n
g
,
“
Eff
e
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En
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Ch
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