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[
1
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[
2
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,
m
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g
in
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[
3
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,
[
4
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an
d
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n
d
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[
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-
[
8
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p
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[
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[
9
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T
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f
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eq
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p
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ater
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1
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ased
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ater
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o
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id
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[
1
2
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,
[
1
3
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,
L
ea
d
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ir
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ate
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itan
ate
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T
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[
1
4
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[
1
6
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T
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[
1
7
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1
8
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l
u
m
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Nitr
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l1
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x
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[
1
9
]
as
p
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tr
ic
m
ater
ial
f
o
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p
ar
ticu
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o
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n
ar
r
o
w
b
ea
m
n
atu
r
e
[
1
2
]
.
Me
an
w
h
ile,
th
e
P
Z
T
-
5
H
is
u
s
ed
in
ap
p
licatio
n
w
h
ic
h
r
eq
u
ir
ed
h
i
g
h
s
en
s
iti
v
it
y
.
P
Z
T
-
5
H
h
a
v
e
h
i
g
h
p
iezo
elec
tr
ic
co
n
s
tan
t
(
d
3
1
)
an
d
lo
w
d
ielec
tr
ic
lo
s
s
[
1
6
]
,
th
u
s
it
w
ill
in
d
u
ce
d
h
ig
h
d
is
p
lace
m
e
n
t se
n
s
it
iv
it
y
w
it
h
o
u
t d
c
o
f
f
s
et.
A
f
lex
u
r
al
d
iap
h
r
a
g
m
ar
e
i
n
t
r
o
d
u
ce
d
p
r
ev
io
u
s
p
ap
er
s
i
n
p
ap
er
to
in
cr
ea
s
e
d
e
f
o
r
m
atio
n
[
2
0
]
.
I
n
f
le
x
u
r
al
m
o
d
e
tr
an
s
d
u
ce
r
s
ar
r
ay
,
th
e
b
an
d
w
id
th
i
s
m
a
x
i
m
ize
d
b
y
m
i
n
i
m
izi
n
g
th
e
p
itch
,
i.e
.
b
y
m
a
x
i
m
izi
n
g
th
e
r
atio
o
f
th
e
ac
tiv
e
to
to
tal
ar
ea
.
T
h
e
f
lex
u
r
al
d
iap
h
r
ag
m
ca
n
w
o
r
k
eit
h
er
in
d
3
1
o
r
d
3
3
m
o
d
e
d
iap
h
r
ag
m
.
T
h
e
d
3
3
m
o
d
e
w
it
h
f
le
x
u
r
al
d
iap
h
r
ag
m
w
ill i
m
p
r
o
v
ed
th
e
s
e
n
s
iti
v
it
y
o
f
r
ec
eiv
in
g
ac
o
u
s
tic
tr
an
s
d
u
ce
r
s
[
2
1
]
.
I
n
th
is
p
ap
er
,
th
e
th
eo
r
y
o
f
d
3
3
m
o
d
e
p
o
lar
izatio
n
is
e
x
p
lai
n
ed
in
s
ec
tio
n
2
,
th
e
d
esi
g
n
o
f
d
3
3
m
o
d
e
P
A
T
i
s
elab
o
r
ated
d
etail
in
s
ec
tio
n
3
,
th
e
f
ab
r
icatio
n
o
f
P
A
T
is
e
x
p
lain
ed
in
s
ec
tio
n
4
,
t
h
e
e
x
p
er
im
e
n
tal
s
et
u
p
o
f
P
u
ls
e
-
E
c
h
o
m
et
h
o
d
is
p
r
esen
t
ed
in
s
ec
tio
n
5
,
th
e
r
esu
lt
a
n
d
d
is
cu
s
s
io
n
is
d
is
cu
s
s
ed
in
s
ec
tio
n
6
an
d
last
l
y
s
ec
tio
n
is
t
h
e
co
n
cl
u
s
io
n
.
2.
T
H
E
O
RY
O
F
d
33
M
O
DE
P
O
L
ARI
Z
A
T
I
O
N
d
33
m
o
d
e
p
o
lar
izat
io
n
in
P
AT
is
ac
h
iev
ed
b
y
p
o
lar
ized
p
iezo
elec
tr
ic
m
ater
ial,
f
o
r
ex
a
m
p
le,
lead
zir
co
n
ate
tita
n
ate,
P
Z
T
-
5
H
a
s
a
s
en
s
i
n
g
ele
m
en
t
is
s
u
p
p
lied
w
it
h
a
D
C
-
v
o
lta
g
e
a
n
d
it
w
i
ll
in
d
u
ce
d
a
n
elec
tr
i
c
f
ield
.
T
h
e
s
ch
e
m
atic
d
ia
g
r
a
m
o
f
d
3
3
m
o
d
e
p
o
lar
izatio
n
is
s
h
o
w
n
in
Fi
g
u
r
e
1
.
I
f
n
o
e
x
ter
n
a
l
p
r
ess
u
r
e
o
n
P
Z
T
-
5
H,
th
e
p
o
lar
izatio
n
is
s
ca
tte
r
ed
in
s
id
e
P
Z
T
-
5
H
m
a
ter
ial
an
d
if
an
e
x
ter
n
a
l
u
ltra
s
o
n
ic
w
a
v
e
p
r
ess
u
r
e
i
s
p
er
p
en
d
icu
lar
l
y
ap
p
lied
to
th
e
m
e
m
b
r
a
n
e,
th
e
s
tr
ess
e
s
ar
e
in
d
u
ce
d
in
P
Z
T
-
5
H.
R
ef
er
to
Fi
g
u
r
e
1
,
th
e
elec
tr
i
c
f
ie
ld
,
E
,
th
e
elec
tr
ic
d
is
p
la
ce
m
en
t,
D,
an
d
th
e
p
o
lar
izati
o
n
v
ec
to
r
b
et
w
ee
n
p
o
s
itiv
e
elec
tr
o
d
e
a
n
d
n
e
g
ativ
e
elec
tr
o
d
e
ar
e
p
a
r
allel
to
th
e
m
ai
n
p
lan
ea
n
d
alo
n
g
x
3
ax
i
s
.
T
h
e
s
tr
ess
ed
i
n
x
3
ax
is
lead
to
c
h
ar
g
es
in
t
h
e
x
3
ax
is
d
ir
ec
tio
n
,
a
n
d
th
i
s
w
il
l
m
ad
e
tr
an
s
d
u
ce
r
wo
r
k
in
g
i
n
d
33
m
o
d
e.
T
h
e
p
iezo
elec
tr
icity
co
n
s
tit
u
ti
v
e
eq
u
atio
n
ca
n
b
e
r
ep
r
esen
te
d
in
E
q
u
atio
n
1
.
(
1
)
Fig
u
r
e
1
.
Sch
e
m
atic
o
f
d
3
3
m
o
d
e
p
o
la
r
izatio
n
in
P
Z
T
5
H
T
h
e
s
u
b
s
cr
ip
t
d
en
o
tes
t
h
e
c
o
m
p
o
n
en
t
s
i
n
x
3
ax
is
,
an
d
d
3
3
is
th
e
p
ie
zo
elec
tr
ic
co
e
f
f
icien
t
o
f
p
iezo
elec
tr
ic
m
ater
ial,
P
Z
T
-
5
H.
I
f
th
e
th
ick
n
e
s
s
o
f
P
Z
T
-
5
H
is
m
u
c
h
less
co
m
p
ar
ed
to
d
is
tan
ce
b
et
w
ee
n
e
lectr
o
d
es,
th
e
elec
tr
ic
f
ield
,
in
P
Z
T
5
H
b
en
ea
th
u
n
d
er
p
o
s
itiv
e
elec
tr
o
d
es
is
al
m
o
s
t
b
elo
n
g
to
h
o
r
izo
n
tal
co
m
p
o
n
e
n
t
s
o
f
th
e
elec
tr
ical
d
is
p
lace
m
e
n
t,
b
et
w
ee
n
t
w
o
e
lectr
o
d
es.
T
h
e
ca
p
ac
itan
ce
o
f
th
e
t
w
o
e
lectr
o
d
es
ca
n
b
e
ca
lc
u
lated
u
s
i
n
g
Ge
v
o
r
g
ian
’
s
m
o
d
el
[
2
2
]
,
w
h
ich
is
co
m
p
licated
a
n
d
in
co
n
v
e
n
ie
n
t.
T
h
en
t
h
e
m
o
d
el
w
a
s
s
i
m
p
li
f
ied
an
d
th
e
d
ev
ice
ca
p
ac
itan
ce
ca
n
b
e
ca
lcu
lated
as
a
p
ar
al
lel
p
late
ca
p
ac
ito
r
b
y
i
n
tr
o
d
u
cin
g
an
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esia
n
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4752
Desig
n
F
lexu
r
a
l P
iezo
elec
tr
ic
A
co
u
s
tic
Tr
a
n
s
d
u
ce
r
s
A
r
r
a
y
B
a
s
ed
d
3
3
Mo
d
e
P
o
la
r
iz
a
tio
n
(
K
.
A
.
A
h
ma
d
)
61
ef
f
ec
tiv
e
ar
ea
,
A
e,
w
h
ic
h
is
d
ef
in
ed
as
th
e
eq
u
ip
o
ten
t
ia
l
ar
ea
o
n
w
h
ic
h
th
e
elec
tr
ic
f
ield
v
ec
to
r
s
ac
t
p
er
p
en
d
icu
lar
l
y
.
T
h
en
t
h
e
eq
u
atio
n
f
o
r
d
ev
ice
ca
p
ac
itan
ce
c
an
b
e
ap
p
r
o
x
im
a
ted
b
y
(
2
)
w
h
er
e
ԑ
d
en
o
tes
th
e
p
er
m
itti
v
i
t
y
o
f
P
Z
T
-
5
H,
A
e
d
en
o
tes
t
h
e
af
f
ec
tiv
e
ar
ea
,
w
is
w
id
t
h
o
f
el
ec
tr
o
d
e,
l
is
len
g
t
h
o
f
elec
tr
o
d
e
an
d
G
i
s
g
ap
b
et
w
ee
n
t
w
o
elec
tr
o
d
es.
T
h
en
t
h
e
elec
tr
ic
ch
ar
g
es,
Q
in
d
u
ce
d
o
n
elec
tr
o
d
es
ca
n
b
e
o
b
tain
ed
f
r
o
m
th
e
elec
tr
ic
d
is
p
lace
m
e
n
t a
n
d
e
f
f
ec
t
iv
e
elec
tr
o
d
e
ar
ea
,
(
3
)
C
o
n
s
eq
u
en
tl
y
,
t
h
e
in
d
u
ce
d
v
o
l
tag
e
is
g
i
v
en
b
y
(
4
)
R
ef
er
to
eq
u
atio
n
4
,
it
s
h
o
wn
th
at
t
h
e
i
n
d
u
ce
d
v
o
lta
g
e
is
p
r
o
p
o
r
tio
n
al
to
th
e
g
ap
b
etw
ee
n
t
w
o
elec
tr
o
d
es,
G.
T
h
en
,
th
er
ec
ei
v
in
g
s
e
n
s
i
tiv
it
y
w
ill
b
e
r
ef
er
r
e
d
to
th
e
h
i
g
h
e
s
t
v
o
lta
g
e
p
r
o
d
u
ce
d
at
a
p
ar
tic
u
lar
f
r
eq
u
en
c
y
.
3.
DE
S
I
G
N
d3
3
M
O
DE
P
I
E
Z
O
E
L
E
CT
RIC AC
O
U
ST
I
C
T
RANS
DUC
E
R
ARRA
Y
T
h
e
d
esig
n
o
f
d
33
m
o
d
e
P
AT
ar
r
ay
i
s
s
h
o
w
n
in
Fi
g
u
r
e
2
.
T
h
e
s
en
s
i
n
g
ele
m
e
n
t
i
s
p
i
ez
o
elec
tr
ic
m
ater
ial,
P
Z
T
-
5
H
is
ad
h
er
ed
o
n
to
p
o
f
p
r
in
ted
cir
c
u
it
b
o
ar
d
(
P
C
B
)
as
s
h
o
w
n
in
Fi
g
2
(
b
)
.
P
C
B
cir
cu
it
co
n
s
is
t
s
o
f
p
o
s
itiv
e
a
n
d
g
r
o
u
n
d
/n
e
g
at
iv
e
elec
tr
o
d
es
ar
e
ar
r
an
g
ed
in
-
p
lan
e
s
tr
u
ct
u
r
e
o
n
to
p
o
f
FR
-
4
b
o
ar
d
.
T
h
e
elec
tr
ical
p
ad
o
n
to
p
o
f
P
C
B
w
il
l
p
u
ll
o
u
t
t
h
e
elec
tr
ical
v
o
l
tag
e
f
r
o
m
p
o
s
iti
v
e
elec
tr
o
d
e
to
o
s
cillo
s
co
p
e.
T
h
e
p
o
ly
d
i
m
et
h
y
l
s
ilo
x
an
e
(
P
DM
S)
is
p
lace
d
o
n
to
p
o
f
P
Z
T
-
5
H
an
d
it
w
ill
co
v
er
t
h
e
elec
tr
ic
al
cir
cu
it
p
ar
t
f
r
o
m
co
n
d
u
cted
w
i
th
w
ater
an
d
f
u
n
ctio
n
i
n
g
as
m
atc
h
i
n
g
la
y
er
as
w
el
l.
T
h
e
p
ar
am
eter
o
f
p
iez
o
elec
tr
ic
ac
o
u
s
tic
tr
an
s
d
u
ce
r
s
ar
r
ay
i
s
s
h
o
w
n
i
n
T
ab
le
1
.
Fig
u
r
e
2
.
Sch
e
m
atic
d
esi
g
n
o
f
d
33
m
o
d
e
P
MU
T
,
a)
to
p
v
ie
w
,
b
)
s
id
e
v
ie
w
T
ab
le
1
.
Ma
ter
ial
P
ar
am
eter
f
o
r
P
A
T
A
r
r
ay
M
a
t
e
r
i
a
l
P
a
r
a
me
t
e
r
W
i
d
t
h
(
mm
)
L
e
n
g
t
h
(
mm
)
T
h
i
c
k
n
e
ss (m
m)
C
o
p
p
e
r
0
.
5
0
.
5
0
.
0
3
3
P
ZT
5
H
1
.
5
3
.
5
0
.
2
P
D
M
S
7
7
.
5
0
.
1
FR
-
4
B
o
a
r
d
10
10
1
.
5
8
7
5
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4752
I
n
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lec
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10
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1
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A
p
r
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–
65
62
4.
F
AB
RICAT
I
O
N
O
F
d3
3
M
O
DE
P
AT
AR
RAY
Firstl
y
,
th
e
elec
tr
o
d
es a
n
d
elec
tr
ical
p
ad
o
n
P
C
B
w
as
f
ab
r
icat
ed
u
s
in
g
P
C
B
w
e
t e
tch
i
n
g
p
r
o
ce
s
s
.
T
h
e
P
C
B
af
ter
w
et
etc
h
ed
is
s
h
o
wn
in
Fig
u
r
e
3.
Fig
u
r
e
3
.
Fa
b
r
icatio
n
E
lectr
o
d
es a
n
d
E
lectr
ical
P
ad
o
n
th
e
P
r
in
ted
C
ir
c
u
it B
o
ar
d
(
P
C
B
)
T
h
en
,
tak
e
a
s
m
al
l
s
p
o
o
n
o
f
P
DM
S
an
d
p
lace
d
it
o
n
to
p
o
f
e
lectr
o
d
es
an
d
elec
tr
ical
p
ad
,
n
ex
t
p
lace
d
th
e
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C
B
o
n
s
p
in
co
ater
.
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d
,
r
u
n
t
h
e
s
p
i
n
co
ater
at
2
0
0
0
r
p
m
f
o
r
6
0
s
an
d
7
0
0
r
p
m
f
o
r
1
2
0
s
.
T
h
is
p
r
o
ce
s
s
w
ill
o
b
tain
ed
th
e
t
h
ick
n
e
s
s
o
f
P
DM
S
o
n
P
C
B
b
o
ar
d
at
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0
u
m
.
T
h
en
,
u
s
ed
t
h
is
th
ic
k
n
es
s
o
f
P
DM
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ad
h
er
e
th
e
P
Z
T
-
5
H
w
it
h
to
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o
f
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C
B
.
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t,
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ak
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th
e
P
C
B
o
n
h
o
t p
late
w
it
h
te
m
p
er
atu
r
e
1
2
0
°C
as s
h
o
w
n
in
F
ig
u
r
e
4
(
b
)
.
T
h
is
p
r
o
ce
s
s
w
ill
ta
k
e
ab
o
u
t
1
m
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u
te.
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h
en
,
m
ak
e
it
co
ld
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o
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t1
0
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i
n
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tes.
A
f
ter
t
h
at
to
o
k
ag
ain
a
s
p
o
o
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f
P
DM
S
an
d
p
lace
d
o
n
to
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o
f
P
Z
T
-
5
H,
an
d
th
en
,
p
l
ac
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it
o
n
s
p
in
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ater
.
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h
e
s
p
i
n
co
ater
w
as
s
et
at
1
5
0
0
r
p
m
f
o
r
6
0
s
an
d
5
0
0
r
p
m
f
o
r
3
0
0
s
.
T
h
e
th
ick
n
es
s
o
f
P
DM
S
o
n
to
p
o
f
P
ZT
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H
will
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m
e
1
0
0
u
m
.
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h
en
,
th
e
tr
an
s
d
u
ce
r
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p
lace
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o
n
h
o
t
p
late.
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h
e
tem
p
er
atu
r
e
o
f
h
o
t
p
late
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et
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p
at
1
2
0
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an
d
p
lace
d
it
ab
o
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t
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0
m
i
n
u
te.
T
h
e
f
ab
r
icate
d
tr
an
s
d
u
ce
r
is
s
h
o
w
s
i
n
Fi
g
u
r
e
4
(
c)
.
(
a)
(
b
)
(
c)
Fig
u
r
e
4
.
a)
Sp
in
co
ater
,
b
)
Ho
t P
late,
c)
d
33
M
o
d
e
P
iezo
elec
t
r
ic
A
co
u
s
tic
T
r
an
s
d
u
ce
r
s
5.
E
XP
E
R
I
M
E
NT
A
L
SE
T
UP
P
A
T
ar
r
ay
is
m
ea
s
u
r
ed
b
y
p
u
ls
e
-
ec
h
o
ex
p
er
i
m
e
n
tal
m
et
h
o
d
.
P
u
ls
e
-
ec
h
o
ex
p
er
i
m
e
n
tal
m
et
h
o
d
is
u
s
ed
to
ch
ar
ac
ter
ize
th
e
p
er
f
o
r
m
an
ce
o
f
u
l
tr
aso
n
ic
d
ev
ice
i
n
u
n
d
er
w
ate
r
.
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h
e
s
en
s
iti
v
it
y
,
r
e
s
o
n
an
ce
f
r
eq
u
e
n
c
y
an
d
b
an
d
w
id
t
h
ca
n
b
e
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al
y
s
e
d
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ased
o
n
th
is
m
e
th
o
d
.
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h
e
s
etu
p
o
f
p
u
ls
e
-
ec
h
o
ex
p
er
i
m
en
t
al
m
eth
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d
is
s
h
o
w
n
in
Fi
g
u
r
e
5.
T
est
tan
k
w
it
h
7
6
0
m
m
×
3
6
0
m
m
×
3
8
0
m
m
s
ize
is
a
p
lace
to
test
P
A
T
in
u
n
d
er
w
ate
r
.
Fu
n
ctio
n
g
en
er
a
to
r
(
Ha
m
e
g
HM
-
8
1
5
0
)
an
d
p
u
ls
e
f
o
r
m
in
g
n
et
w
o
r
k
(
P
FN)
w
er
e
w
o
r
k
ed
to
g
et
h
er
to
p
r
o
d
u
ce
a
p
u
ls
e
s
ig
n
al.
P
r
o
j
ec
to
r
(
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5
0
0
k
Hz,
T
ec
h
n
o
tr
o
n
ics
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n
d
u
s
tr
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i)
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as
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a
n
s
m
itted
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u
s
tic
p
u
l
s
e
s
ig
n
al
in
w
ater
.
P
A
T
w
a
s
t
h
e
n
co
n
v
er
ted
an
ac
o
u
s
t
ic
s
i
g
n
al
to
el
ec
tr
ical
s
i
g
n
al
f
o
r
m
.
T
h
e
d
ig
ital
o
s
cillo
s
co
p
e
(
P
ico
Sco
p
e
2
2
0
4
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1
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MH
z
o
f
P
ico
T
ec
h
n
o
lo
g
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I
n
c)
w
as c
o
llected
d
ata
an
d
s
av
e
it in
to
c
o
m
p
u
ter
.
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n
d
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ll t
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6.
RE
SU
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AND
DI
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h
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h
e
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ig
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h
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h
o
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h
e
p
r
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ce
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et
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Fig
u
r
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6
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m
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(
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d
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r
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ar
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e
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an
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iti
v
it
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r
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r
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en
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in
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et
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n
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in
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d
p
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as
s
h
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n
in
Fi
g
u
r
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4
(
c)
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r
e
w
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f
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p
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u
r
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7
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it r
ec
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i
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o
ltag
e
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o
r
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p
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n
2
an
d
p
in
3
Fig
u
r
e
8
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e
-
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c
h
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x
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er
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tal
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e
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h
e
r
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lt
s
h
o
w
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th
e
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T
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y
h
as
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g
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i
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d
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m
p
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to
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m
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y
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r
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h
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n
e.
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h
e
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e
is
s
h
o
w
n
t
h
e
r
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l
t
f
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r
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m
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er
cial
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y
d
r
o
p
h
o
n
e
th
at
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le
i
n
th
e
m
ar
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et.
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h
e
r
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n
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ce
f
o
r
P
A
T
a
r
r
ay
is
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h
iev
ed
at
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r
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u
en
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y
1
0
0
k
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4
7
5
k
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d
8
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0
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ar
r
ay
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r
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r
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en
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r
o
m
r
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n
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e
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3
0
0
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Hz.
T
h
e
r
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in
g
s
e
n
s
it
iv
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t
y
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o
r
P
A
T
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5
6
d
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r
e
1
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a
at
1
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0
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I
f
t
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RE
F
E
R
E
NC
E
S
[1
]
J.
S
o
n
g
,
e
t
a
l.
,
“
F
a
b
rica
ti
o
n
o
f
On
e
-
Dim
e
n
sio
n
a
l
L
in
e
a
r
Dia
g
n
o
stic
a
n
d
T
h
e
ra
p
e
u
ti
c
Hig
h
In
ten
sity
F
o
c
u
se
d
Ultras
o
u
n
d
(HIFU)
P
h
a
se
d
-
A
rr
a
y
s
u
sin
g
Late
ra
l
-
m
o
d
e
Co
u
p
li
n
g
M
e
th
o
d
,
”
IEE
E
In
ter
n
a
ti
o
n
a
l
Ultra
s
o
n
ics
S
y
mp
o
si
u
m
,
p
p
.
1
1
0
4
–
1
1
0
7
,
2
0
1
0
.
[2
]
T
.
R.
S
h
ro
u
t
,
“
In
n
o
v
a
ti
o
n
s
in
P
iez
o
e
lec
tri
c
M
a
teria
ls
f
o
r
Ultr
a
so
u
n
d
T
ra
n
sd
u
c
e
rs
,
”
1
7
th
IEE
E
In
ter
n
a
ti
o
n
a
l
S
y
mp
o
si
u
m o
n
th
e
Ap
p
li
c
a
ti
o
n
s
o
f
Fer
ro
e
lec
trics
,
v
o
l.
3
,
p
p
.
1
–
4
,
2
0
0
8
.
[3
]
Y
.
F
.
W
a
n
g
,
e
t
a
l
.
,
“
Ultras
o
n
ic
T
r
a
n
sd
u
c
e
r
A
rra
y
De
si
g
n
f
o
r
M
e
d
ic
a
l
I
m
a
g
in
g
b
a
s
e
d
o
n
M
EM
S
T
e
c
h
n
o
l
o
g
ies
,
”
3
rd
In
ter
n
a
t
io
n
a
l
C
o
n
fer
e
n
c
e
o
n
B
io
me
d
ica
l
En
g
i
n
e
e
rin
g
a
n
d
I
n
fo
rm
a
ti
c
s
,
v
o
l.
2
,
p
p
.
6
6
6
–
6
6
9
,
2
0
1
0
.
[4
]
D.
F
u
,
e
t
a
l
.
,
“
A
No
v
e
l
M
e
th
o
d
f
o
r
F
a
b
r
ica
ti
n
g
2
-
D
A
rra
y
P
iez
o
e
l
e
c
tri
c
M
icro
m
a
c
h
in
e
d
Ultras
o
n
ic
T
ra
n
sd
u
c
e
rs
f
o
r
M
e
d
ica
l
Im
a
g
in
g
,
”
1
8
th
IEE
E
I
n
t
e
rn
a
ti
o
n
a
l
S
y
mp
o
siu
m
o
n
th
e
A
p
p
li
c
a
ti
o
n
s o
f
Fer
ro
e
lec
trics
,
pp.
1
–
4
,
2
0
0
9
.
[5
]
T
.
In
o
u
e
,
e
t
a
l.
,
“
T
o
n
p
il
z
P
iez
o
e
lec
tri
c
T
r
a
n
sd
u
c
e
rs
w
it
h
A
c
o
u
stic
M
a
tch
in
g
P
late
s
f
o
r
Un
d
e
rw
a
t
e
r
Co
lo
r
Im
a
g
e
T
ra
n
s
m
issio
n
,
”
IEE
E
T
ra
n
s.
Ultr
a
so
n
.
Fer
ro
e
lec
tr.
Fre
q
.
C
o
n
tr
o
l
,
v
ol
/i
ss
u
e
:
40
(
2
)
,
p
p
.
1
2
1
–
1
3
0
,
1
9
9
3
.
[6
]
C.
H.
Yu
n
,
e
t
a
l.
,
“
De
sig
n
a
n
d
Ex
p
e
rime
n
t
o
f
A
n
A
c
o
u
stic
T
ra
n
sd
u
c
e
r
f
o
r
Un
d
e
rw
a
ter
Na
v
i
g
a
t
io
n
,”
OCEANS
,
TA
IP
EI
,
p
p
.
1
–
5
,
2
0
1
4
.
[7
]
S
.
K.
Ja
in
,
e
t
a
l.
,
“
F
a
b
rica
ti
o
n
o
f
W
id
e
Ba
n
d
w
id
th
M
in
iatu
re
Un
d
e
rw
a
t
e
r
A
c
o
u
stic
T
ra
n
sd
u
c
e
rs
a
n
d
S
tu
d
y
o
f
T
h
e
ir
El
e
c
tro
-
a
c
o
u
stic
P
e
rf
o
rm
a
n
c
e
,
”
IJ
EM
S
,
v
o
l.
0
7
1
,
2
0
0
0
.
[8
]
J.
C.
L
iu
,
e
t
a
l.
,
“
F
a
b
rica
ti
o
n
a
n
d
Ch
a
ra
c
teriz
a
ti
o
n
o
f
Hig
h
-
S
e
n
siti
v
it
y
Un
d
e
rwa
ter
A
c
o
u
stic
M
u
lt
im
e
d
ia
Co
m
m
u
n
ica
ti
o
n
De
v
ice
s
w
it
h
T
h
ick
Co
m
p
o
site P
ZT
F
il
m
s
,
”
J
o
u
rn
a
l
o
f
S
e
n
so
rs
,
2
0
1
7
.
[9
]
S
.
Ch
o
i,
e
t
a
l.
,
“
A
M
icro
-
m
a
c
h
in
e
d
P
iez
o
e
lec
tri
c
H
y
d
ro
p
h
o
n
e
w
it
h
Hy
d
ro
sta
ti
c
a
ll
y
B
a
lan
c
e
d
A
ir
Ba
c
k
in
g
,
”
S
e
n
s.
Actu
a
t
o
rs
Ph
y
s
.
,
v
ol
/i
ss
u
e
:
1
5
8
(
1
)
,
p
p
.
6
0
–
7
1
,
2
0
1
0
.
[1
0
]
X
.
Z
h
a
n
g
a
n
d
B.
L
ian
g
,
“
P
iez
o
e
lec
tri
c
Ultras
o
n
ic
T
ra
n
sd
u
c
e
r
f
o
r
L
o
n
g
it
u
d
i
n
a
l
-
f
lex
u
ra
l
V
ib
ra
ti
o
n
a
l
M
o
d
e
-
c
o
n
v
e
rsio
n
,
”
A
p
p
l
.
Aco
u
st
.
,
v
o
l.
1
2
9
,
p
p
.
2
8
4
–
2
9
0
,
2
0
1
8
.
[1
1
]
J.
L
.
S
u
tt
o
n
,
“
Un
d
e
rw
a
ter
A
c
o
u
stic Im
a
g
in
g
,
”
Pro
c
.
IEE
E
,
v
ol
/i
ss
u
e
:
67
(
4
)
,
p
p
.
5
5
4
–
5
6
6
,
1
9
7
9
.
[1
2
]
M
.
S
.
M
a
rti
n
s
,
e
t
a
l
.
,
“
Hig
h
F
re
q
u
e
n
c
y
W
id
e
B
e
a
m
P
V
DF
Ultras
o
n
ic
P
r
o
jec
to
r
f
o
r
Un
d
e
rw
a
ter
Co
m
m
u
n
ica
ti
o
n
s
,”
OCEANS
,
A
b
e
rd
e
e
n
,
p
p
.
1
–
5
,
2
0
1
7
.
[1
3
]
H.
S
h
in
tak
u
,
e
t
a
l.
,
“
De
v
e
lo
p
m
e
n
t
o
f
P
iez
o
e
lec
tri
c
A
c
o
u
stic
S
e
n
so
r
w
it
h
F
re
q
u
e
n
c
y
S
e
le
c
ti
v
it
y
f
o
r
A
rti
f
i
c
ial
Co
c
h
lea
,
”
S
e
n
s.
Actu
a
to
rs
P
h
y
s
.,
v
ol
/i
ss
u
e
:
1
5
8
(
2
)
,
p
p
.
1
8
3
–
1
9
2
,
2
0
1
0
.
[1
4
]
A
.
S
.
S
a
v
o
ia,
e
t
a
l.
,
“
A
L
o
w
F
re
q
u
e
n
c
y
Bro
a
d
b
a
n
d
F
lex
ten
sio
n
a
l
Ultras
o
n
ic
T
ra
n
sd
u
c
e
r
A
rra
y
,
”
IEE
E
T
r
a
n
s.
Ultra
so
n
.
Fer
ro
e
lec
tr.
Fre
q
.
C
o
n
t
ro
l
, v
o
l
/i
ss
u
e
:
63
(
1
)
,
p
p
.
1
2
8
–
1
3
8
,
2
0
1
6
.
[1
5
]
T
.
Za
wa
d
a
,
e
t
a
l
.
,
“
Ch
a
ra
c
teriz
a
t
io
n
o
f
L
in
e
a
r
A
rr
a
y
b
a
s
e
d
o
n
P
Z
T
T
h
ick
F
il
m
,”
IEE
E
In
ter
n
a
ti
o
n
a
l
Ultra
so
n
ics
S
y
mp
o
si
u
m (
IUS
)
,
p
p
.
1
–
4
,
2
0
1
6
.
[1
6
]
T
.
W
a
n
g
,
e
t
a
l
.
,
“
Hig
h
ly
S
e
n
siti
v
e
P
iez
o
e
lec
tri
c
M
icro
m
a
c
h
in
e
d
Ultras
o
n
ic
T
ra
n
sd
u
c
e
r
(p
M
UT
)
Op
e
ra
ted
in
A
ir
,
”
IET
M
icr
o
&
Na
n
o
L
e
tt
e
rs
,
v
ol
/i
s
su
e
:
11
(
10
)
,
p
p
.
2
9
4
–
2
9
9
,
2
0
1
6
.
[1
7
]
Z.
W
u
,
e
t
a
l.
,
“
T
h
e
o
re
ti
c
a
l
a
n
d
Ex
p
e
rim
e
n
tal
In
v
e
stig
a
ti
o
n
o
f
Ultras
o
n
ic
T
ra
n
sd
u
c
e
rs
w
it
h
Du
a
l
Op
p
o
sitely
P
o
lariz
e
d
P
M
N
-
P
T
L
a
y
e
rs i
n
W
id
e
F
re
q
u
e
n
c
y
Ra
n
g
e
,
”
IEE
E
T
ra
n
s.
In
d
.
El
e
c
tro
n
,
v
ol
/
issu
e
:
63
(
4
)
,
2
0
1
6
.
[1
8
]
Q.
Zh
u
,
e
t
a
l
.
,
“
A
n
A
lN
-
b
a
se
d
P
iez
o
e
lec
tri
c
M
icr
o
-
m
a
c
h
in
e
d
Ultr
a
so
n
ic
T
ra
n
sd
u
c
e
r
(p
M
UT
)
A
rra
y
,
”
IEE
E
1
6
t
h
In
ter
n
a
t
io
n
a
l
C
o
n
fer
e
n
c
e
o
n
N
a
n
o
tec
h
n
o
lo
g
y
(
IEE
E
-
NANO)
,
p
p
.
7
3
1
–
7
3
4
,
2
0
1
6
.
[1
9
]
Q.
W
a
n
g
,
e
t
a
l.
,
“
De
sig
n
,
F
a
b
rica
ti
o
n
,
a
n
d
Ch
a
ra
c
teriz
a
ti
o
n
o
f
S
c
a
n
d
iu
m
A
lu
m
in
u
m
Nitri
d
e
-
Ba
se
d
P
iez
o
e
lec
tri
c
M
icro
m
a
c
h
in
e
d
Ultras
o
n
ic T
ra
n
sd
u
c
e
rs
,
”
J
.
M
icr
o
e
lec
tro
me
c
h
a
n
ic
a
l
S
y
st
.
, v
ol
/i
ss
u
e
:
26
(
5
)
,
p
p
.
1
-
8
,
2
0
1
7
.
[2
0
]
A
.
S
.
S
a
v
o
ia,
e
t
a
l.
,
“
A
L
o
w
F
re
q
u
e
n
c
y
Bro
a
d
b
a
n
d
F
lex
u
ra
l
M
o
d
e
Ultras
o
n
ic
T
ra
n
sd
u
c
e
r
f
o
r
I
m
m
e
rsio
n
A
p
p
li
c
a
ti
o
n
s
,”
2
0
1
4
IE
EE
In
ter
n
a
ti
o
n
a
l
Ultra
so
n
ics
S
y
mp
o
siu
m
,
p
p
.
2
5
9
1
–
2
5
9
4
,
2
0
1
4
.
[2
1
]
Z.
S
h
e
n
,
e
t
a
l
.
,
“
D3
3
M
o
d
e
P
ie
z
o
e
lec
tri
c
Dia
p
h
ra
g
m
b
a
s
e
d
A
c
o
u
stic
T
ra
n
sd
u
c
e
r
w
it
h
Hig
h
S
e
n
siti
v
it
y
,”
S
e
n
s.
Actu
a
t
o
rs
Ph
y
s
.
,
v
o
l.
1
8
9
,
p
p
.
9
3
–
9
9
,
2
0
1
3
.
[2
2
]
Y.
W
a
n
g
,
e
t
a
l.
,
“
De
p
e
n
d
e
n
c
e
o
f
Ca
p
a
c
it
a
n
c
e
o
n
El
e
c
tro
d
e
Co
n
f
ig
u
ra
ti
o
n
f
o
r
F
e
rro
e
lec
tri
c
F
il
m
s
w
it
h
In
terd
ig
it
a
l
El
e
c
tro
d
e
s
,
”
M
icr
o
e
lec
tro
n
.
E
n
g
.
,
v
ol
/i
ss
u
e
:
66
(
1
)
,
p
p
.
8
8
0
–
8
8
6
,
2
0
0
3
.
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