I
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ia
n J
o
urna
l o
f
E
lect
rica
l En
g
ineering
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Co
m
pu
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er
Science
Vo
l.
24
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No
.
2
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N
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v
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r
20
21
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p
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SS
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2
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.i
2
.
pp
736
-
7
4
3
736
J
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ttp
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Ana
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3
%
e
x
ti
n
c
ti
o
n
ra
te
.
K
ey
w
o
r
d
s
:
GaN
Mic
r
o
r
in
g
r
eso
n
ato
r
PMM
A
Sem
ico
n
d
u
cto
r
d
esig
n
T
h
is
is
an
o
p
e
n
a
c
c
e
ss
a
rticle
u
n
d
e
r
th
e
CC
BY
-
SA
li
c
e
n
se
.
C
o
r
r
e
s
p
o
nd
ing
A
uth
o
r
:
Haz
u
r
a
Har
o
o
n
Fak
u
lti Ke
ju
r
u
ter
aa
n
E
lek
t
r
o
n
i
k
Dan
Keju
r
u
ter
aa
n
Ko
m
p
u
ter
C
en
tr
e
f
o
r
T
elec
o
m
m
u
n
icatio
n
s
R
esear
ch
&
I
n
n
o
v
atio
n
(
C
eT
R
I
)
Un
iv
er
s
iti T
ek
n
ik
al
Ma
lay
s
ia
Me
lak
a
,
Han
g
T
u
ah
J
ay
a
7
6
1
0
0
Du
r
ian
T
u
n
g
g
al,
Me
lak
a,
Ma
lay
s
ia
E
m
ail: h
az
u
r
a@
u
tem
.
ed
u
.
m
y
1.
I
NT
RO
D
UCT
I
O
N
T
h
e
o
p
tical
m
icr
o
r
i
n
g
r
eso
n
ato
r
(
OM
R
)
is
o
n
e
o
f
th
e
o
p
tical
telec
o
m
m
u
n
icatio
n
c
o
m
p
o
n
en
ts
co
m
m
o
n
l
y
ap
p
lied
as
a
wav
elen
g
th
f
ilter
in
g
f
u
n
ctio
n
[1
]
,
[
2]
.
Galliu
m
n
itrid
e
(
GaN
)
is
a
s
em
ico
n
d
u
cto
r
m
ater
ial
with
a
lar
g
e
b
an
d
g
a
p
an
d
is
th
e
m
o
s
t
wid
ely
u
s
ed
m
ater
ial
in
th
e
s
em
ico
n
d
u
cto
r
in
d
u
s
tr
y
af
te
r
s
ilico
n
.
I
n
th
is
p
a
p
er
,
th
e
d
esig
n
o
f
a
g
alliu
m
n
itrid
e
-
b
ased
OM
R
f
i
lter
d
o
p
e
d
with
p
o
ly
m
er
g
r
af
tin
g
m
ater
ial
(
PMM
A)
is
r
ep
o
r
ted
.
T
h
e
d
esi
g
n
em
p
lo
y
ed
th
e
r
esear
ch
s
tu
d
ies
o
n
th
e
GaN
an
d
Sap
p
h
i
r
e
(
Al₂O₃
)
as
th
e
ad
d
-
d
r
o
p
f
ilter
o
f
a
n
OM
R
th
r
o
u
g
h
th
e
c
o
n
ce
p
t
o
f
co
u
p
lin
g
b
etwe
en
a
s
tr
aig
h
t
b
u
s
wav
eg
u
id
e
a
n
d
a
r
i
n
g
wav
eg
u
id
e.
T
h
e
wav
eg
u
id
e
is
th
en
d
o
p
e
d
with
th
e
p
o
ly
(
m
et
h
y
l)
m
eth
ac
r
y
late
PMM
A
o
n
to
p
o
f
th
e
d
esig
n
to
en
h
an
ce
th
e
d
ev
ice
p
er
f
o
r
m
an
ce
[3
]
-
[
5]
.
T
h
e
m
ater
ial
PMM
A
h
as
b
ee
n
ap
p
lied
as
a
p
o
ly
m
er
g
r
af
ti
n
g
m
ater
ial
in
th
e
d
esig
n
o
f
an
OM
R
b
y
m
an
y
r
esear
ch
er
s
in
clu
d
i
n
g
i
n
th
e
s
tu
d
y
o
f
s
y
n
th
esized
a
n
d
ch
ar
ac
ter
iz
ed
Sm
3+
-
d
o
p
e
d
p
o
ly
m
er
o
p
tical
wav
eg
u
id
e
am
p
lifie
r
s
[
6
]
-
[
9
]
,
th
e
s
tu
d
y
o
f
th
e
e
f
f
ec
t
o
f
n
eu
tr
o
n
ir
r
a
d
iatio
n
o
n
t
h
e
o
p
tical
p
r
o
p
er
ties
o
f
PMM
A/R
h
B
u
s
ed
in
o
p
tical
f
ib
er
am
p
lific
atio
n
an
d
th
e
s
tu
d
y
o
f
th
e
e
f
f
ec
t
o
f
r
ar
e
ea
r
th
elem
en
ts
o
n
t
h
e
s
tr
u
ctu
r
al
an
d
o
p
tical
p
r
o
p
er
ti
es o
f
PMM
A
f
o
r
p
o
s
s
ib
le
u
s
es
in
p
o
ly
m
er
o
p
tical
co
m
m
u
n
ic
atio
n
s
[
10
]
-
[
12
]
.
I
t
is
k
n
o
wn
th
at
Galliu
m
n
itrid
e
ex
ce
ls
b
etter
as
co
m
p
ar
ed
to
s
ilico
n
d
io
x
id
e
(
SiO
2
)
d
u
e
to
its
v
ast
f
ea
tu
r
es
o
f
s
tu
n
n
in
g
war
m
p
r
o
p
er
ties
,
a
m
o
d
e
r
ately
lar
g
e
b
an
d
g
a
p
,
m
ec
h
a
n
ical
h
ar
d
n
ess
,
h
ig
h
-
tem
p
e
r
atu
r
e
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
A
n
a
lysi
s
o
f
g
a
lliu
m
n
itr
id
e
-
b
a
s
ed
o
p
tica
l m
icro
r
in
g
r
eso
n
a
t
o
r
w
ith
d
o
p
ed
p
o
lyme
r
…
(
Ha
z
u
r
a
Ha
r
o
o
n
)
737
d
ep
en
d
a
b
ilit
y
,
an
d
f
a
n
tast
ic
co
m
m
u
n
icatin
g
r
an
g
e
l
u
cid
ity
.
GaN
also
h
as
a
lo
wer
en
er
g
y
b
an
d
g
a
p
o
f
3
.
4
eV,
as
co
m
p
ar
ed
to
SiO
2
o
f
o
n
ly
1
.
1
eV
.
It
will
p
o
ten
tially
s
er
v
e
as
th
e
k
ey
m
ater
ial
f
o
r
th
e
n
ex
t
g
en
er
a
tio
n
n
etwo
r
k
o
f
h
i
g
h
-
f
r
eq
u
e
n
cy
a
n
d
h
ig
h
-
p
o
wer
tr
an
s
is
to
r
s
wh
ich
b
e
a
b
le
to
wo
r
k
at
h
ig
h
tem
p
er
atu
r
es,
in
clu
d
in
g
in
th
e
f
o
r
m
o
f
lig
h
t
-
em
itti
n
g
d
io
d
es (
L
E
Ds)
an
d
laser
d
i
o
d
es
[
13
]
-
[
20
]
.
T
h
er
ef
o
r
e,
t
h
is
s
tu
d
y
aim
s
to
p
r
o
p
o
s
e
t
h
e
d
esig
n
o
f
a
Gal
liu
m
n
itrid
e
-
b
ased
OM
R
to
e
v
alu
ate
its
p
er
f
o
r
m
an
ce
as
a
wav
elen
g
th
f
ilter
in
g
d
ev
ice
in
ter
m
s
o
f
in
s
er
tio
n
lo
s
s
(IL)
an
d
ex
tin
ctio
n
r
ate.
T
o
f
u
lf
ill
th
e
d
esire
d
ap
p
licatio
n
cr
iter
ia,
a
th
o
r
o
u
g
h
s
tu
d
y
is
n
ee
d
ed
to
d
eter
m
in
e
th
e
in
f
lu
en
ce
o
f
th
o
s
e
p
ar
am
eter
s
.
T
h
is
s
tu
d
y
p
r
o
v
id
es
a
g
u
i
d
elin
e
f
o
r
d
eter
m
i
n
in
g
th
e
m
icr
o
r
in
g
g
eo
m
etr
y
to
s
atis
f
y
th
e
d
esire
d
f
ilter
in
g
r
eq
u
ir
em
e
n
ts
.
2.
RE
S
E
ARCH
M
E
T
H
O
D
Fig
u
r
e
1
s
h
o
ws
th
e
3
D
s
tr
u
ct
u
r
e
o
f
th
e
p
r
o
p
o
s
ed
o
p
tical
m
icr
o
r
in
g
r
eso
n
ato
r
,
wh
ich
c
o
n
s
is
ts
o
f
a
r
in
g
wav
e
g
u
id
e
tig
h
tly
c
o
u
p
le
d
to
two
s
tr
aig
h
t
b
u
s
wav
eg
u
i
d
es.
T
h
e
r
in
g
r
ad
iu
s
is
r
e
p
r
esen
ted
b
y
R
an
d
th
e
g
ap
s
ep
ar
atio
n
is
th
e
s
ep
ar
a
tio
n
d
is
tan
ce
b
etwe
en
th
e
s
tr
aig
h
t
an
d
r
i
n
g
wa
v
eg
u
id
es.
T
h
e
f
u
lly
etc
h
ed
wav
eg
u
id
e
s
tr
u
ctu
r
e
is
tak
en
i
n
to
ac
co
u
n
t
in
t
h
is
s
tu
d
y
.
T
h
e
o
u
tp
u
t
p
o
wer
ca
n
b
e
m
ea
s
u
r
e
d
u
s
in
g
th
e
th
r
o
u
g
h
an
d
d
r
o
p
p
o
r
ts
.
Fo
r
s
u
ch
a
d
e
s
ig
n
,
wh
en
th
e
in
p
u
t
lig
h
t
wa
v
e
r
ea
c
h
es
r
eso
n
a
n
ce
,
it
is
co
u
p
led
i
n
to
t
h
e
r
i
n
g
wav
eg
u
id
e
a
n
d
th
e
n
tr
an
s
f
er
r
e
d
to
th
e
d
r
o
p
p
o
r
t.
On
th
e
o
th
e
r
h
an
d
,
if
th
e
r
eso
n
an
ce
c
o
n
d
it
io
n
is
n
o
t
m
et,
t
h
e
lig
h
t
wav
e
is
d
eliv
er
ed
to
th
e
th
r
o
u
g
h
p
o
r
t
[2
1
]
.
T
wo
p
l
atf
o
r
m
s
wer
e
s
tu
d
ied
in
th
is
s
tu
d
y
;
o
n
e
is
th
e
co
n
v
en
tio
n
al
Si/
SiO
2
p
latf
o
r
m
,
wh
ile
th
e
o
th
er
o
n
e
is
th
e
Ga
N
/Sap
p
h
ir
e
p
latf
o
r
m
.
T
h
e
OM
R
p
er
f
o
r
m
an
ce
was
ev
alu
ated
u
s
in
g
a
3
D
elec
t
r
o
m
ag
n
etic
s
im
u
lato
r
o
f
th
e
C
OM
SO
L
s
o
f
twar
e
[
2
2
]
,
[
23
]
.
I
t
r
eq
u
ir
es
th
e
u
s
er
to
c
o
n
f
ig
u
r
e
th
e
p
ar
ticu
lar
d
esig
n
o
f
th
e
wav
e
g
u
id
e
b
y
s
ettin
g
its
len
g
th
,
wid
t
h
,
d
ep
th
,
an
d
r
a
d
iu
s
f
o
r
th
e
wa
v
eg
u
id
es.
T
h
en
,
an
o
t
h
er
b
lo
ck
was
ad
d
e
d
as
an
o
th
e
r
s
u
b
s
tr
ate,
wh
ich
r
eq
u
ir
es
d
etailed
atten
tio
n
to
war
d
s
its
p
o
s
itio
n
in
g
an
d
o
r
ien
tatio
n
,
th
r
o
u
g
h
v
ec
t
o
r
v
alu
e
s
.
Fig
u
r
e
2
d
ep
icts
th
e
g
r
ap
h
ic
u
s
er
in
ter
f
ac
e
f
o
r
th
e
co
m
p
o
n
en
t c
o
n
f
ig
u
r
atio
n
s
ettin
g
s
.
Fig
u
r
e
1
.
T
h
e
3
D
s
tr
u
ctu
r
e
o
f
t
h
e
p
r
o
p
o
s
ed
o
p
tical
m
icr
o
r
i
n
g
r
eso
n
ato
r
Fig
u
r
e
2
.
C
o
m
p
o
n
en
t
co
n
f
i
g
u
r
atio
n
R
Ga
p
se
p
a
ra
ti
o
n
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4
7
5
2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci,
Vo
l.
2
4
,
No
.
2
,
No
v
em
b
er
20
21
:
7
3
6
-
743
738
T
h
e
s
in
e
-
m
o
d
u
lated
g
au
s
s
ian
p
u
ls
e
was
u
tili
ze
d
f
o
r
th
e
wa
v
e
ex
citatio
n
in
th
e
i
n
p
u
t
p
la
n
e,
an
d
t
h
e
ex
citatio
n
will
o
cc
u
r
alo
n
g
th
e
Y
-
ax
is
th
r
o
u
g
h
a
co
m
p
lex
s
o
lv
er
o
n
t
h
e
m
o
d
e
o
f
f
u
ll
-
v
ec
to
r
(
ADI
-
Me
th
o
d
)
.
As
th
e
o
p
tical
p
u
ls
e
ex
citatio
n
alo
n
g
t
h
e
s
tr
aig
h
t
wav
e
g
u
id
e
was
r
ea
d
y
to
b
e
co
u
p
led
in
to
t
h
e
r
in
g
wav
eg
u
id
e,
th
e
Op
tiMo
d
e
s
o
lv
er
w
o
u
ld
co
n
f
ig
u
r
e
an
d
an
al
y
ze
th
em
.
T
h
e
s
im
u
lated
d
esig
n
was
th
en
ex
ec
u
ted
th
r
o
u
g
h
th
e
Op
tiF
DT
D
s
im
u
lato
r
[2
4
]
.
3.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
N
T
h
e
an
aly
s
is
h
a
d
b
ee
n
d
o
n
e
with
v
ar
y
i
n
g
s
ev
e
r
al
d
esig
n
p
ar
am
eter
s
to
s
ee
th
e
ef
f
ec
t
o
f
th
e
m
icr
o
r
i
n
g
r
eso
n
ato
r
p
er
f
o
r
m
a
n
ce
with
th
e
PMM
A
b
ein
g
ap
p
lied
o
n
to
p
o
f
th
e
GaN
/Sap
p
h
ir
e
(
Al₂O₃
)
.
T
h
ese
p
ar
am
eter
s
in
clu
d
e
th
e
g
ap
s
ep
ar
atio
n
b
et
wee
n
th
e
s
tr
aig
h
t b
u
s
an
d
th
e
r
in
g
,
PMM
A
th
ick
n
ess
,
an
d
wa
v
eg
u
id
e
wid
t
h
.
3
.
1
.
I
nitia
l desig
n pa
ra
m
et
e
rs v
a
lue
T
ab
le
1
s
h
o
ws
th
e
in
itial
d
esig
n
p
ar
am
eter
v
al
u
e
s
f
o
r
th
e
m
icr
o
r
in
g
r
eso
n
ato
r
.
T
h
e
d
ev
ice
was
d
esig
n
ed
to
b
e
wo
r
k
in
g
at
th
e
C
-
b
an
d
telec
o
m
m
u
n
icatio
n
wav
elen
g
th
o
r
ar
o
u
n
d
1
5
5
0
μ
m
.
Oth
er
im
p
o
r
tan
t
p
ar
am
eter
s
tak
en
in
to
ac
co
u
n
t
ar
e
th
e
wid
th
o
f
th
e
s
tr
aig
h
t
(
w_
r
in
g
)
an
d
r
in
g
(
w_
r
in
g
)
wav
eg
u
id
e
s
.
Fig
u
r
e
3
d
ep
icts
th
e
s
id
e
v
ie
w
o
f
t
h
e
p
r
o
p
o
s
ed
d
esig
n
s
,
i
n
wh
ich
t
h
e
in
itial
wav
eg
u
i
d
e
s
ep
ar
ati
o
n
is
1
2
5
μ
m
.
T
h
e
p
r
o
p
o
s
ed
d
esig
n
f
ea
t
u
r
es
ar
e
as
s
h
o
wn
in
:
a
r
in
g
s
ize
o
f
1
0
μ
m
,
r
in
g
wav
eg
u
id
e
wid
t
h
o
f
8
0
0
n
m
,
s
tr
aig
h
t
wav
eg
u
id
e
wid
th
o
f
4
0
0
n
m
,
a
n
d
g
ap
s
ep
ar
atio
n
o
f
1
2
5
μ
m
.
T
ab
le
1
.
Desig
n
s
p
ec
if
icatio
n
s
P
a
r
a
me
t
e
r
V
a
l
u
e
D
e
scri
p
t
i
o
n
f0
1
9
3
.
4
1
4
TH
z
F
r
e
q
u
e
n
c
y
w
l
0
1
5
5
0
(
μm)
I
n
p
u
t
λ
G
a
N
2
.
2
7
9
G
a
N
R
.
I
S
a
p
p
h
i
r
e
1
.
7
6
A
l
₂O
₃ R
.
I
t
i
m
e
_
s
t
e
p
s
10
5
Ti
me
st
e
p
s
t
i
m
e
_
s
i
z
e
8
.
3
3
9
1
0
2
−
17
Ti
me
si
z
e
r0
1
0
(
μm)
R
a
d
i
u
s
o
f
r
i
n
g
w
_
c
o
r
e
4
0
0
(
n
m)
S
t
r
a
i
g
h
t
w
i
d
t
h
w
_
r
i
n
g
8
0
0
(
n
m)
R
i
n
g
w
i
d
t
h
dx
1
2
5
(
μ
m)
G
a
p
s
e
p
a
r
a
t
i
o
n
(
a)
(
b
)
Fig
u
r
e
3
.
Sch
em
atic
c
r
o
s
s
-
s
ec
tio
n
o
f
t
h
e
r
ib
wa
v
eg
u
id
e
s
tr
u
ctu
r
es o
f
th
e
m
icr
o
r
in
g
d
esig
n
b
ased
o
n
th
e
;
(
a)
co
n
v
en
tio
n
al
Si/
SiO
2
p
latf
o
r
m
,
(
b
)
GaN
/Al
2
O
3
p
latf
o
r
m
Fig
u
r
e
4
p
o
r
t
r
ay
s
th
e
in
itial
m
o
d
elin
g
o
f
th
e
b
asic
s
tr
u
ctu
r
e
u
s
in
g
th
e
GaN
/Sap
p
h
ir
e
as
th
e
co
r
e
o
f
th
e
ad
d
-
d
r
o
p
f
ilter
o
f
th
e
OM
R
.
T
h
e
s
im
u
latio
n
was
ca
r
r
ied
o
u
t
to
o
b
s
er
v
e
w
h
eth
er
th
e
wav
e
o
r
o
p
tical
p
u
ls
es
co
u
ld
b
e
c
o
u
p
le
d
f
r
o
m
th
e
s
tr
aig
h
t
wav
e
g
u
id
e
o
n
t
o
th
e
r
in
g
wav
eg
u
i
d
e
d
u
e
to
its
r
eso
n
an
ce
ab
ilit
y
.
I
t
ca
n
b
e
s
ee
n
th
at,
with
t
h
e
in
p
u
t
f
r
eq
u
en
cy
ca
p
p
e
d
ar
o
u
n
d
1
5
5
0
n
m
,
a
clea
r
co
m
p
ar
is
o
n
ca
n
b
e
m
ad
e
d
u
e
to
t
h
e
d
esig
n
’
s
ab
ilit
y
to
tr
an
s
m
it
th
e
d
ata
f
o
r
its
r
o
u
n
d
tr
ip
lo
s
s
es
an
d
co
u
p
lin
g
co
ef
f
icien
t
with
in
th
e
s
am
e
s
h
ap
e
co
n
f
ig
u
r
atio
n
o
f
r
i
n
g
s
ize
(
10
μ
m
)
,
r
in
g
wav
e
g
u
id
e
wid
th
(
8
0
0
n
m
)
,
s
tr
aig
h
t
wav
eg
u
id
e
w
id
th
(
4
0
0
n
m
)
,
an
d
g
ap
s
ep
ar
atio
n
(
1
2
5
μ
m
)
.
T
h
e
lig
h
t
will
b
e
ab
le
to
be
co
u
p
le
d
th
r
o
u
g
h
th
e
p
o
r
t
to
th
e
r
in
g
a
n
d
f
in
ally
tr
an
s
m
itted
to
th
e
d
r
o
p
p
o
r
t.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
A
n
a
lysi
s
o
f
g
a
lliu
m
n
itr
id
e
-
b
a
s
ed
o
p
tica
l m
icro
r
in
g
r
eso
n
a
t
o
r
w
ith
d
o
p
ed
p
o
lyme
r
…
(
Ha
z
u
r
a
Ha
r
o
o
n
)
739
Fig
u
r
e
4
.
Op
tical
p
u
ls
es p
lo
t o
f
GaN
/Al
2
O
3
o
p
tical
m
icr
o
r
in
g
r
eso
n
ato
r
3
.
2
.
E
f
f
ec
t
o
f
t
he
diff
er
ent
m
icro
ring
re
s
o
na
t
o
r
pla
t
f
o
r
m
Fig
u
r
e
5
d
e
p
icts
th
e
p
o
wer
s
p
ec
tr
u
m
f
o
r
two
d
if
f
er
en
t
d
esig
n
p
latf
o
r
m
s
.
On
e
em
p
lo
y
s
th
e
SiO
2
/Si
lico
n
(
Si)
p
latf
o
r
m
wh
i
le
th
e
o
th
er
one
us
es
GaN
/Sap
p
h
ir
e
m
ea
s
u
r
e
d
at
th
e
d
r
o
p
p
o
r
t.
I
t
was
o
b
s
er
v
e
d
th
at
th
e
GaN
/Sap
p
h
ir
e
d
esig
n
h
as
a
v
er
y
lo
w
IL
o
f
0
.
0
9
9
7
2
8
3
5
3
d
B
at
b
o
th
1
.
5
3
9
3
8
9
μ
m
an
d
1
.
5
5
4
2
2
0
μ
m
wav
elen
g
th
s
,
wh
ile
th
e
Si/
SiO2
p
latf
o
r
m
h
as
a
0
.
1
9
2
4
5
4
d
B
lo
s
s
.
T
h
e
o
u
tp
u
t
is
s
u
p
p
o
s
ed
ly
in
th
e
ON
-
R
eso
n
an
ce
s
tate
wh
er
e
th
e
p
ea
k
o
f
th
e
s
p
ec
tr
u
m
ca
n
b
e
o
b
s
er
v
ed
.
Ho
wev
e
r
,
b
y
u
tili
zin
g
th
e
SiO2
d
esig
n
,
th
e
lig
h
t
was
n
o
t
co
u
p
led
f
r
o
m
th
e
s
t
r
aig
h
t
wav
eg
u
id
e
to
th
e
r
in
g
wav
eg
u
id
e
as
co
m
p
a
r
ed
to
t
h
e
u
tili
za
tio
n
o
f
th
e
GaN
p
latf
o
r
m
.
Fo
r
th
e
SiO
2
/Si
d
esig
n
,
th
e
s
ig
n
al
will
b
y
p
ass
th
e
r
in
g
an
d
ex
it
at
th
e
th
r
o
u
g
h
p
o
r
t
-
ch
an
n
el,
h
en
ce
,
n
o
s
ig
n
al
ar
r
i
v
e
s
at
th
e
d
r
o
p
p
o
r
t.
Fig
u
r
e
5
.
Po
wer
s
p
ec
tr
u
m
o
f
t
h
e
o
p
tical
r
eso
n
at
o
r
b
ased
o
n
SiO
2
/Si
an
d
GaN
p
latf
o
r
m
s
3
.
3
.
E
f
f
ec
t
o
f
t
he
v
a
ria
t
io
n
o
f
P
M
M
A
t
hick
nes
s
Fig
u
r
e
6
s
h
o
ws
th
e
e
f
f
ec
t
o
f
d
o
p
ed
PMM
A
th
ick
n
ess
o
n
t
o
p
o
f
th
e
GaN
/
Al₂O₃
.
I
t
ca
n
b
e
s
ee
n
th
at
th
e
s
m
allest
I
L
o
f
0
.
0
6
7
5
d
B
was
o
b
tain
ed
with
th
e
PMM
A
th
ick
n
ess
o
f
0
.
0
5
5
μ
m
.
T
h
is
i
s
d
u
e
to
its
a
b
ilit
y
t
o
co
u
p
le
m
u
ch
h
i
g
h
er
p
o
wer
f
r
o
m
th
e
in
p
u
t
p
o
r
t
th
r
o
u
g
h
t
h
e
p
o
r
t.
T
h
e
IL
in
cr
ea
s
es
as
th
e
th
ick
n
ess
o
f
PMM
A
was
in
cr
ea
s
e
d
.
At
0
.
0
5
μ
m
,
d
u
e
to
th
e
lack
o
f
s
tab
ilit
y
,
a
h
ig
h
IL
was
o
b
s
er
v
ed
.
T
h
e
r
esu
lt
s
u
g
g
ests
th
at
th
e
lo
s
s
y
n
atu
r
e
o
f
th
e
p
o
ly
m
er
f
i
lm
d
eter
m
in
es
th
e
o
p
tim
u
m
IL
o
f
th
e
d
esig
n
a
n
d
s
h
o
u
l
d
b
e
tak
en
in
to
ac
co
u
n
t
wh
en
d
esig
n
i
n
g
a
n
ef
f
icien
t
m
icr
o
r
in
g
r
eso
n
ato
r
.
T
h
e
r
esu
lts
ca
n
b
e
v
alid
ate
d
b
y
[
2
1
]
,
wh
e
r
e
it
s
h
o
ws
th
at
t
h
e
th
ick
PMM
A
g
u
id
in
g
la
y
er
wi
ll in
d
u
ce
lar
g
e
atte
n
u
atio
n
o
f
t
h
e
d
esig
n
d
e
v
ices.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4
7
5
2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci,
Vo
l.
2
4
,
No
.
2
,
No
v
em
b
er
20
21
:
7
3
6
-
743
740
3
.
4
.
E
f
f
ec
t
o
f
t
he
v
a
ria
t
io
ns
o
f
g
a
p sepa
ra
t
i
o
n
Usi
n
g
th
e
s
am
e
in
itial
d
es
ig
n
co
n
f
ig
u
r
atio
n
o
f
10
μ
m
r
in
g
s
ize
an
d
0
.
0
5
5
μ
m
PMM
A
p
o
ly
m
er
th
ick
n
ess
,
v
ar
y
i
n
g
th
e
g
a
p
s
ep
ar
atio
n
to
1
2
5
μ
m
,
1
5
5
μ
m
a
n
d
2
0
5
μ
m
will
p
r
o
d
u
ce
d
if
f
e
r
e
n
t
IL
p
er
f
o
r
m
a
n
ce
s
.
T
h
e
g
ap
s
ep
ar
atio
n
was
ch
o
s
en
b
ased
o
n
th
e
n
ea
r
est
co
n
s
ec
u
tiv
e
p
ea
k
s
at
ON
r
eso
n
an
ce
co
n
d
itio
n
ar
o
u
n
d
1
5
5
0
n
m
wav
elen
g
th
.
Fro
m
Fi
g
u
r
e
7
,
it wa
s
s
h
o
wn
th
at
th
e
b
est co
n
f
ig
u
r
at
io
n
it c
o
u
ld
o
f
f
er
is
at
th
e
th
ick
n
ess
o
f
2
0
5
μ
m
with
an
IL
o
f
0
.
0
9
9
7
2
8
3
5
2
d
B
.
T
h
e
h
ig
h
est
IL
o
cc
u
r
s
at
5
5
μ
m
s
in
ce
its
co
u
p
lin
g
a
b
ilit
y
will
d
eg
r
ad
e
at
v
er
y
s
m
all
g
ap
s
ep
ar
atio
n
d
u
e
to
th
e
h
ig
h
p
r
o
p
ag
atio
n
lo
s
s
as d
escr
ib
ed
in
[
4
]
.
I
n
ter
m
s
o
f
th
e
E
x
tin
ctio
n
R
a
te,
th
e
E
x
tin
ctio
n
R
atio
p
er
ce
n
tag
e
is
ca
lcu
lated
an
d
an
al
y
ze
d
b
y
th
e
r
atio
o
f
a
v
er
ag
e
th
r
ee
o
r
two
-
p
o
in
t
lo
west
p
ea
k
s
o
v
er
th
e
av
er
ag
e
o
f
th
e
h
ig
h
est
p
ea
k
s
to
th
e
p
er
ce
n
ta
g
e
ca
lcu
latio
n
[2
5
]
.
I
n
c
r
ea
s
in
g
th
e
g
ap
b
etwe
en
th
e
b
u
s
an
d
th
e
r
in
g
wav
eg
u
id
e
h
as
a
lim
ited
ef
f
ec
t
in
r
e
d
u
c
in
g
th
e
co
u
p
lin
g
ef
f
icien
c
y
,
th
u
s
r
ed
u
c
in
g
th
e
ex
tin
ctio
n
r
ate
(
%)
[2
6
]
.
Ho
we
v
er
,
alig
n
i
n
g
t
h
e
s
tr
aig
h
t
an
d
r
in
g
wav
eg
u
id
e
s
to
o
clo
s
e
will
ca
u
s
e
th
e
co
u
p
lin
g
f
ac
t
o
r
to
b
e
s
m
all
er
th
an
th
e
s
ca
tter
in
g
lo
s
s
p
er
r
o
u
n
d
tr
i
p
,
h
en
ce
h
i
g
h
lo
s
s
an
d
lo
w
E
R
ca
n
b
e
p
r
e
d
icted
.
T
h
e
r
ef
o
r
e
,
th
er
e
m
u
s
t
b
e
an
o
p
tim
ized
d
is
tan
ce
b
etwe
en
b
o
t
h
.
Fro
m
Fig
u
r
e
8
,
it
ca
n
b
e
s
ee
n
th
at
th
e
E
R
v
alu
e
ca
n
b
e
o
p
ti
m
ized
wh
en
th
e
g
ap
s
ep
ar
atio
n
was
f
ix
ed
to
2
5
5
μ
m
with
an
E
R
o
f
7
4
.
1
%.
T
h
er
ef
o
r
e,
i
n
ac
h
iev
in
g
h
ig
h
E
R
,
th
e
g
ap
s
ep
a
r
atio
n
o
f
2
5
5
μ
m
is
r
ec
o
m
m
en
d
e
d
.
0
0.
02
0.
04
0.
06
0.
08
0.
1
0.
12
0.
14
0.
16
I
n
s
e
r
t
i
on
L
os
s
(
dB
)
G
a
p S
e
pa
r
a
t
i
on
(
μ
m)
55
125
155
205
Fig
u
r
e
6
.
I
n
s
er
tio
n
l
o
s
s
f
o
r
d
if
f
er
en
t PMM
A
th
ick
n
ess
es
Fig
u
r
e
7
.
Gap
s
ep
ar
atio
n
e
f
f
ec
t o
n
th
e
i
n
s
er
tio
n
l
o
s
s
o
f
OM
R
0
10
20
30
40
50
60
E
xt
i
nc
t
i
on Ra
t
e
(%)
G
a
p
S
e
pa
ra
t
i
on
(
μ
m)
55
125
155
205
Fig
u
r
e
8
.
Gap
s
ep
ar
atio
n
e
f
f
ec
t o
n
th
e
e
x
tin
ctio
n
r
ate
o
f
OM
R
3
.
5
.
E
f
f
ec
t
o
f
dis
s
im
ila
r
s
t
ra
ig
ht
-
ring
wa
v
eleng
t
h widt
h
T
h
e
ef
f
ec
t
o
f
th
e
s
tr
aig
h
t
a
n
d
r
in
g
wav
eg
u
id
e
s
ize
s
o
n
th
e
m
icr
o
r
in
g
p
er
f
o
r
m
an
ce
was
also
s
tu
d
ied
.
Fro
m
th
e
p
o
wer
s
p
ec
tr
u
m
d
e
p
ict
ed
in
Fig
u
r
e
9
,
it
is
s
h
o
wn
th
at
th
e
lo
west
I
L
is
o
b
s
er
v
ed
f
o
r
th
e
s
tr
aig
h
t
wav
eg
u
id
e
wid
t
h
o
f
6
0
0
μ
m
an
d
th
e
r
in
g
wav
eg
u
id
e
o
f
8
0
0
μ
m
.
T
h
e
IL
a
n
d
e
x
tin
ctio
n
r
ate
o
b
s
er
v
e
d
wer
e
s
u
m
m
ar
ized
as in
F
ig
u
r
e
s
1
0
a
n
d
1
1
,
r
esp
ec
tiv
ely
.
T
h
e
lo
west
IL
was
o
b
s
er
v
ed
f
o
r
th
e
6
0
0
/8
0
0
n
m
s
tr
aig
h
t/rin
g
wav
eg
u
id
e
co
m
b
i
n
atio
n
with
0
.
0
2
d
B
an
d
was sli
g
h
tly
in
cr
ea
s
ed
to
0
.
0
7
d
B
f
o
r
th
e
8
0
0
/
8
0
0
n
m
w
av
eg
u
id
e
c
o
m
b
in
atio
n
.
T
h
e
h
i
g
h
est
ex
tin
ctio
n
r
ate
y
ield
s
at
ar
o
u
n
d
8
7
.
3
2
0
3
%
f
o
r
th
e
d
is
s
im
ilar
co
m
b
in
atio
n
o
f
8
0
0
/
8
0
0
n
m
wav
eg
u
i
d
e
wid
th
co
m
b
in
atio
n
.
T
h
ese
r
esu
lts
ca
n
b
e
p
r
ed
ict
ed
s
in
ce
lar
g
er
wav
eg
u
i
d
e
wid
th
will
ca
u
s
e
b
etter
o
p
ti
ca
l
co
n
f
i
n
em
en
t
as
ex
p
lain
ed
th
eo
r
etica
lly
in
[
4
]
.
Fro
m
b
o
th
Fig
u
r
es
1
0
an
d
1
1
,
th
e
wav
eg
u
id
e
wid
th
o
f
8
0
0
n
m
was
s
u
g
g
ested
f
o
r
b
o
th
s
tr
aig
h
t a
n
d
r
in
g
wav
eg
u
id
es si
n
ce
lo
w
in
s
er
tio
n
a
n
d
ex
tin
ctio
n
wer
e
o
b
tain
e
d
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
A
n
a
lysi
s
o
f
g
a
lliu
m
n
itr
id
e
-
b
a
s
ed
o
p
tica
l m
icro
r
in
g
r
eso
n
a
t
o
r
w
ith
d
o
p
ed
p
o
lyme
r
…
(
Ha
z
u
r
a
Ha
r
o
o
n
)
741
Fig
u
r
e
9
.
Po
wer
s
p
ec
tr
u
m
o
f
d
if
f
er
en
t w
av
eg
u
id
e
wid
th
d
esig
n
s
Fig
u
r
e
1
0
.
I
n
s
er
tio
n
l
o
s
s
o
f
d
is
s
im
ilar
co
m
b
in
atio
n
o
f
s
tr
aig
h
t
-
r
in
g
wid
th
s
Fig
u
r
e
1
1
.
E
x
tin
ctio
n
R
ate
o
f
d
if
f
er
en
t w
av
e
g
u
id
e
wid
t
h
co
m
b
in
atio
n
4.
CO
NCLU
SI
O
N
T
h
e
d
esig
n
o
f
a
g
alliu
m
n
itri
d
e
-
b
ased
o
p
tical
m
icr
o
r
in
g
r
e
s
o
n
ato
r
was
s
tu
d
ied
.
I
t
ca
n
b
e
co
n
clu
d
ed
th
at
th
e
o
p
tim
ized
co
n
f
ig
u
r
at
io
n
f
o
r
th
e
GaN
o
p
tical
m
icr
o
r
in
g
with
PMM
A
m
ater
ial
co
atin
g
is
p
o
ly
m
er
g
r
af
tin
g
m
ater
ial
PMM
A
th
ick
n
ess
o
f
0
.
0
5
5
μ
m
,
g
a
p
s
ep
a
r
atio
n
o
f
1
2
5
μ
m
,
s
tr
aig
h
t
an
d
r
in
g
wav
eg
u
id
e
len
g
th
o
f
800
n
m
,
an
d
r
in
g
r
a
d
i
u
s
o
f
1
0
μ
m
.
T
h
is
s
tu
d
y
p
r
o
v
id
es
a
g
u
id
elin
e
f
o
r
d
eter
m
in
in
g
th
e
m
icr
o
r
in
g
g
eo
m
etr
y
t
o
s
atis
f
y
th
e
d
esire
d
f
ilter
in
g
r
eq
u
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em
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ts
.
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NO
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Min
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o
f
Hig
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d
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.
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p
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5
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0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
Ins
e
rt
i
on L
os
s
(dB)
S
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ra
i
g
ht
/
Ri
ng
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a
ve
g
ui
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W
i
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bi
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on
(
μ
m)
4
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Evaluation Warning : The document was created with Spire.PDF for Python.
I
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I
n
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&
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o
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Sci,
Vo
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2
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2
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er
20
21
:
7
3
6
-
743
742
RE
F
E
R
E
NC
E
S
[1
]
X.
Li
,
C.
S
h
e
n
,
X.
Yu
,
Y
.
Z
h
a
n
g
,
C.
C
h
e
n
,
a
n
d
X.
Z
h
a
n
g
,
“
Ba
n
d
wid
t
h
-
tu
n
a
b
le
o
p
ti
c
a
l
fil
ter
b
a
se
d
o
n
m
icro
rin
g
re
so
n
a
to
r
a
n
d
M
ZI
wit
h
F
a
n
o
re
so
n
a
n
c
e
,
”
J
o
u
rn
a
l
o
f
Op
ti
c
s
,
v
o
l
.
4
9
,
n
o
.
4
,
p
p
.
4
2
7
–
4
3
2
,
2
0
2
0
,
d
o
i:
1
0
.
1
0
0
7
/s
1
2
5
9
6
-
0
2
0
-
0
0
6
4
2
-
2
.
[2
]
A.
A.
Na
d
ia,
H.
Ha
z
u
ra
,
a
n
d
A.
R.
Ha
n
im,
“
Th
e
p
o
ten
ti
a
l
o
f
sili
c
o
n
p
h
o
t
o
n
ic
d
e
v
ice
s
b
a
se
d
o
n
m
icro
-
r
in
g
re
so
n
a
to
r,
”
J
o
u
rn
a
l
o
f
T
e
lec
o
mm
u
n
ica
ti
o
n
,
E
lec
tro
n
ic
a
n
d
Co
m
p
u
t
e
r E
n
g
i
n
e
e
rin
g
,
v
o
l.
7
,
n
o
.
1
,
p
p
.
1
7
–
2
0
,
2
0
1
5
.
[3
]
E.
S
tas
se
n
,
M
.
P
u
,
E.
S
e
m
e
n
o
v
a
,
E.
Za
v
a
rin
,
W.
Lu
n
d
i
n
a
n
d
K.
Yv
in
d
,
"
Hig
h
Q
g
a
ll
i
u
m
n
it
rid
e
m
icro
rin
g
re
so
n
a
to
rs,"
2
0
1
7
Co
n
fer
e
n
c
e
o
n
L
a
se
rs
a
n
d
El
e
c
tro
-
O
p
ti
c
s
Eu
r
o
p
e
&
Eu
ro
p
e
a
n
Q
u
a
n
tu
m
El
e
c
tro
n
ics
Co
n
fer
e
n
c
e
(CL
EO/E
u
ro
p
e
-
EQEC)
,
2
0
1
7
,
d
o
i:
1
0
.
1
1
0
9
/CL
EOE
-
EQEC.
2
0
1
7
.
8
0
8
6
6
1
9
.
[4
]
L.
Ha
sa
n
a
h
e
t
a
l
.
,
“
S
imu
latio
n
o
f
m
icro
-
rin
g
re
so
n
a
t
o
r
u
sin
g
fin
it
e
-
d
iffere
n
c
e
ti
m
e
-
d
o
m
a
in
tec
h
n
i
q
u
e
fo
r
se
n
so
rs,”
J
o
u
rn
a
l
o
f
E
n
g
i
n
e
e
rin
g
S
c
ien
c
e
a
n
d
T
e
c
h
n
o
lo
g
y
,
v
o
l.
1
5
,
n
o
.
2
,
p
p
.
1
2
6
7
–
1
2
7
6
,
2
0
2
0
.
[5
]
N.
Ira
wa
ti
e
t
a
l
.
,
"
Re
lati
v
e
Hu
m
id
it
y
S
e
n
si
n
g
Us
in
g
a
P
M
M
A
Do
p
e
d
Ag
a
r
o
se
G
e
l
M
icro
fib
e
r
,
"
i
n
J
o
u
rn
a
l
o
f
L
ig
h
twa
v
e
T
e
c
h
n
o
l
o
g
y
,
v
o
l
.
3
5
,
n
o
.
1
8
,
p
p
.
3
9
4
0
-
3
9
4
4
,
1
5
S
e
p
t
.
1
5
,
2
0
1
7
,
d
o
i:
1
0
.
1
1
0
9
/JL
T.
2
0
1
7
.
2
6
9
8
0
4
4
.
[6
]
W.
Bo
g
a
e
rts
e
t
a
l
.
,
“
S
il
ico
n
m
i
c
ro
rin
g
re
so
n
a
to
rs,”
L
a
se
r
Ph
o
t
o
n
ics
Rev
.
,
v
o
l.
6
,
n
o
.
1
,
p
p
.
4
7
-
7
3
,
2
0
1
2
,
d
o
i
:
10.
1
0
0
2
/
lp
o
r.
2
0
1
1
0
0
0
1
7
.
[7
]
T.
H.
AlAb
d
u
laa
l
a
n
d
I.
S
.
Ya
h
ia,
“
An
a
ly
sis
o
f
o
p
ti
c
a
l
li
n
e
a
rit
y
a
n
d
n
o
n
li
n
e
a
rit
y
o
f
F
e
3
+
-
d
o
p
e
d
P
M
M
A/F
TO
p
o
l
y
m
e
ric
fil
m
s:
Ne
w
tren
d
f
o
r
o
p
to
e
lec
tro
n
ic
p
o
l
y
m
e
ric
d
e
v
i
c
e
s,”
Ph
y
sic
a
B
C
o
n
d
e
n
se
d
M
a
tt
e
r
,
v
o
l.
6
0
1
,
p
.
4
1
2
6
2
8
,
2
0
2
1
,
d
o
i
:
1
0
.
1
0
1
6
/j
.
p
h
y
sb
.
2
0
2
0
.
4
1
2
6
2
8
.
[8
]
I.
Kra
sn
o
k
u
ts
k
a
,
J.
L.
J.
Tam
b
a
sc
o
,
a
n
d
A.
P
e
ru
z
z
o
,
“
Tu
n
a
b
le
la
rg
e
fre
e
sp
e
c
tral
ra
n
g
e
m
icro
rin
g
re
so
n
a
t
o
rs
i
n
li
th
i
u
m
n
i
o
b
a
te
o
n
i
n
su
lat
o
r,
”
S
c
i
e
n
ti
fi
c
Rep
o
rt,
v
o
l
.
9
,
n
o
.
1
,
p
.
1
1
0
8
6
,
2
0
1
9
,
d
o
i:
1
0
.
1
0
3
8
/s
4
1
5
9
8
-
0
1
9
-
4
7
2
3
1
-
3
.
[9
]
H
.
Ha
ro
o
n
,
H
.
A
.
Ra
z
a
k
,
M
.
Bi
d
i
n
,
S
.
S
h
a
a
ri
,
a
n
d
P
.
S
u
sh
it
a
M
e
n
o
n
,
"
F
re
e
c
a
rrier
a
b
s
o
rp
t
io
n
l
o
ss
o
f
p
-
i
-
n
sili
c
o
n
-
on
-
i
n
su
lat
o
r
(S
OI)
p
h
a
se
m
o
d
u
l
a
to
r,
"
2
0
1
0
In
ter
n
a
ti
o
n
a
l
C
o
n
fer
e
n
c
e
o
n
En
a
b
li
n
g
S
c
ien
c
e
a
n
d
Na
n
o
tec
h
n
o
lo
g
y
(ES
c
iNa
n
o
)
,
2
0
1
0
,
p
p
.
1
-
2
,
d
o
i
:
1
0
.
1
1
0
9
/E
S
CINA
NO
.
2
0
1
0
.
5
7
0
1
0
0
3
.
[1
0
]
Y.
Xu
,
J.
Li
,
a
n
d
M
.
Ko
n
g
,
“
Va
rio
u
s
re
so
n
a
n
c
e
li
n
e
sh
a
p
e
s
a
v
a
il
a
b
le
in
a
sin
g
le
m
icro
rin
g
re
so
n
a
t
o
r,
”
J
o
u
rn
a
l
o
f
Op
ti
c
s
,
v
o
l.
2
3
,
n
o
.
4
,
p
.
0
4
5
8
0
1
,
Ap
r.
2
0
2
1
,
d
o
i
:
1
0
.
1
0
8
8
/
2
0
4
0
-
8
9
8
6
/ab
d
f3
3
.
[1
1
]
H.
L
V
,
Y.
Li
a
n
g
,
Z
.
Wu
,
X.
Ha
n
,
G
.
M
o
rth
ier,
a
n
d
M
.
Z
h
a
o
,
“
P
o
ly
m
e
r
-
b
a
se
d
m
icro
rin
g
re
so
n
a
to
r
wit
h
t
h
e
m
u
lt
imo
d
e
i
n
terfe
re
n
c
e
c
o
u
p
ler
o
p
e
ra
ti
n
g
a
t
v
e
r
y
-
n
e
a
r
-
in
fra
re
d
wa
v
e
len
g
th
s,”
A
p
p
li
e
d
S
c
ien
c
e
s
,
v
o
l
.
9
,
n
o
.
1
3
,
p
.
2
7
1
5
,
2
0
1
9
,
d
o
i:
1
0
.
3
3
9
0
/ap
p
9
1
3
2
7
1
5
.
[1
2
]
P
.
Do
n
g
,
Y.
K.
C
h
e
n
,
G
.
H.
Du
a
n
,
a
n
d
D.
T
.
Ne
il
so
n
,
“
S
il
i
c
o
n
p
h
o
t
o
n
ic
d
e
v
ice
s
a
n
d
in
teg
ra
ted
c
ircu
it
s,”
Na
n
o
p
h
o
t
o
n
ics
,
v
o
l
.
3
,
n
o
.
4
-
5
,
p
p
.
2
1
5
-
2
2
8
,
2
0
1
4
,
1
0
.
1
5
1
5
/
n
a
n
o
p
h
-
2
0
1
3
-
0
0
2
3
.
[1
3
]
K.
Ku
m
a
r,
M
.
B
h
a
tt
a
c
h
a
ry
a
,
S
.
G
a
rlap
a
ti
,
a
n
d
S
.
Ba
n
e
rjee
,
"
Im
p
a
c
t
o
f
G
a
ll
iu
m
Nitri
d
e
S
e
m
ico
n
d
u
c
to
r
De
v
ice
s
in
Tri
-
sta
te
Bo
o
st
C
o
n
v
e
rter,"
2
0
1
9
IEE
E
In
ter
n
a
ti
o
n
a
l
C
o
n
fer
e
n
c
e
o
n
S
u
sta
i
n
a
b
le
E
n
e
rg
y
T
e
c
h
n
o
l
o
g
i
e
s
a
n
d
S
y
ste
ms
(ICS
ET
S
)
,
2
0
1
9
,
p
p
.
2
9
2
-
2
9
6
,
d
o
i
:
1
0
.
1
1
0
9
/ICS
ET
S
.
2
0
1
9
.
8
7
4
4
7
9
1
.
[1
4
]
M.
H.
Ch
e
n
,
W.
N.
Ch
o
u
,
V.
C.
S
u
,
C.
H.
Ku
a
n
,
a
n
d
H.
Y.
Li
n
,
“
Hig
h
-
p
e
rfo
rm
a
n
c
e
g
a
ll
iu
m
n
i
tri
d
e
d
iele
c
tri
c
m
e
tale
n
se
s
fo
r
ima
g
in
g
in
th
e
v
i
sib
le,”
S
c
ien
ti
fi
c
Rep
o
rt
,
v
o
l.
1
1
,
n
o
.
1
,
p
p
.
1
-
8
,
2
0
2
1
,
d
o
i:
1
0
.
1
0
3
8
/s4
1
5
9
8
-
0
2
1
-
8
6
0
5
7
-
w
.
[1
5
]
A.
R.
Isro
i,
“
Ch
a
ra
c
teristics
a
n
d
F
a
b
rica
ti
o
n
o
f
G
a
ll
iu
m
Nitri
d
e
,
"
i
n
C
o
n
fer
e
n
c
e
,
2
0
1
5
,
d
o
i
:
1
0
.
1
3
1
4
0
/RG
.
2
.
1
.
2
8
3
7
.
9
6
0
2
.
[1
6
]
E.
S
tas
se
n
,
M
.
P
u
,
E.
S
e
m
e
n
o
v
a
,
E.
Zav
a
rin
,
W.
Lu
n
d
i
n
,
a
n
d
K.
Yv
in
d
,
“
Hig
h
Q
g
a
ll
iu
m
n
it
rid
e
m
icro
rin
g
re
so
n
a
to
rs,”
T
h
e
E
u
ro
p
e
a
n
Co
n
fer
e
n
c
e
o
n
L
a
se
rs
a
n
d
El
e
c
tro
-
Op
ti
c
s
,
2
0
1
7
,
d
o
i:
1
0
.
1
1
0
9
/CL
EOE
-
EQEC.
2
0
1
7
.
8
0
8
6
6
1
9
.
[1
7
]
R.
W.
P
u
rn
a
m
a
n
in
g
sih
,
N.
R.
P
o
e
sp
a
wa
ti
,
a
n
d
E
.
Do
g
h
e
c
h
e
,
“
De
sig
n
o
f
a
F
o
u
r
-
Bra
n
c
h
Op
ti
c
a
l
P
o
we
r
S
p
li
tt
e
r
Ba
se
d
o
n
G
a
ll
iu
m
-
Nitri
d
e
Us
in
g
Re
c
tan
g
u
lar
Wa
v
e
g
u
id
e
C
o
u
p
li
n
g
fo
r
Tele
c
o
m
m
u
n
ica
ti
o
n
Li
n
k
s,”
J
o
u
rn
a
l
o
f
En
g
i
n
e
e
rin
g
,
v
o
l.
2
0
1
9
,
p
p
.
1
-
9
,
2
0
1
9
,
d
o
i:
1
0
.
1
1
5
5
/2
0
1
9
/
7
2
8
5
3
0
5
.
[1
8
]
H.
Ha
ro
o
n
,
S
.
S
h
a
a
ri,
P
.
S
.
M
e
n
o
n
,
N.
Ars
a
d
,
a
n
d
A.
R.
Ha
n
im,
“
De
sig
n
M
o
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e
li
n
g
a
n
d
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a
ra
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teri
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RA)
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,
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o
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ica
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n
,
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tro
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p
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5
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0
1
5
.
[1
9
]
Y.
C.
Li
n
e
t
a
l
.
,
“
G
a
ll
iu
m
Nitri
d
e
(G
a
N)
Hig
h
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tro
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sist
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r
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.
2
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d
Ap
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n
s,”
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in
e
s
,
v
o
l.
1
1
,
n
o
.
2
,
p
.
2
2
2
,
2
0
2
0
,
d
o
i:
1
0
.
3
3
9
0
/mi1
1
0
2
0
2
2
2
.
[
20
]
C.
Va
rn
a
v
a
,
“
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a
te
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iele
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tri
c
s
imp
ro
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ll
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tu
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l
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8
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0
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3
7
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-
6
.
[2
1
]
H.
Ha
ro
o
n
,
M
.
Bid
i
n
,
H.
A.
Ra
z
a
k
,
P
.
S
.
M
e
n
o
n
,
N.
Ars
a
d
a
n
d
Z.
F
.
M
.
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p
ia
h
,
"
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p
a
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p
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wa
v
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len
g
th
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ter
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h
a
ra
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teristics
,
"
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0
1
1
IE
EE
Reg
i
o
n
a
l
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mp
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m
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ics
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0
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1
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p
p
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3
8
0
-
382
,
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o
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9
/RS
M
.
2
0
1
1
.
6
0
8
8
3
6
5
.
[2
2
]
R.
W.
P
ry
o
r,
"
M
u
lt
i
p
h
y
sic
s
m
o
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e
li
n
g
u
sin
g
COMS
OL®:
a
first
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ri
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c
ip
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a
p
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r
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s
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rtlett
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.
[2
3
]
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BV an
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.
OY
,
“
COMS
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s Us
e
r’s G
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9
9
8
--
2
0
1
0
COMS
OL
AB.
,
”
1
9
9
8
.
[2
4
]
H.
C.
Li
m
,
"
Op
ti
c
s
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o
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li
n
g
a
n
d
Visu
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By
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ra
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.
[2
5
]
B.
Ry
u
,
J.
T.
Kim
,
a
n
d
Y.
W.
S
o
n
g
,
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ra
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c
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rb
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0
5
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.
Evaluation Warning : The document was created with Spire.PDF for Python.
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d
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lec
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lyme
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(
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n
)
743
[2
6
]
H.
Ha
ro
o
n
,
F
.
Alima
n
,
S
.
K.
Id
ris
,
a
n
d
H.
A.
Ra
z
a
k
,
“
Co
m
p
a
ra
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v
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ly
sis
o
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sig
n
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t
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p
ti
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a
l
fil
ter
p
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rfo
rm
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n
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e
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o
u
rn
a
l
o
f
P
h
y
sic
s:
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fer
e
n
c
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e
rie
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l.
1
1
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1
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o
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p
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2
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B
I
O
G
RAP
H
I
E
S
OF
AUTH
O
RS
H
a
z
u
r
a
H
a
r
o
o
n
re
c
e
iv
e
d
B.
En
g
a
n
d
M
.
En
g
d
e
g
re
e
s in
El
e
c
tri
c
a
l
En
g
i
n
e
e
rin
g
fr
o
m
Un
iv
e
rsit
i
Tek
n
o
lo
g
i
M
a
lay
sia
(UTM
),
M
a
lay
sia
in
th
e
y
e
a
r
2
0
0
1
a
n
d
2
0
0
4
,
re
sp
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ti
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ly
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r
d
o
c
t
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ra
l
d
e
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re
e
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fro
m
Un
i
v
e
rsiti
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b
a
n
g
sa
a
n
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a
lay
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(UK
M
),
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a
lay
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a
.
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h
e
h
a
s
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e
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n
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tea
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2
0
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r
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c
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lt
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f
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e
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tro
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ics
a
n
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m
p
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g
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g
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i
v
e
rsiti
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n
i
k
a
l
M
a
lay
sia
M
e
lak
a
(UTe
M
).
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icr
o
e
n
g
in
e
e
rin
g
,
P
h
o
to
n
ics
a
n
d
Op
ti
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a
l
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m
m
u
n
ica
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o
n
s a
re
t
h
e
a
re
a
s o
f
h
e
r
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tere
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Mu
h
a
m
m
a
d
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y
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fiq
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a
m
l
i
re
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e
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e
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th
e
b
a
c
h
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lo
r'
s
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e
g
re
e
in
e
lec
tro
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ic
e
n
g
i
n
e
e
rin
g
fro
m
Un
iv
e
rsiti
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k
n
i
k
a
l
M
a
lay
sia
M
e
lak
a
(UTe
M
),
M
a
lay
sia
,
i
n
2
0
2
0
.
S
iti
K
h
a
d
ij
a
h
Idris
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Oth
m
a
n
re
c
e
iv
e
d
h
e
r
P
h
D.
i
n
El
e
c
tri
c
a
l
a
n
d
El
e
c
tro
n
ic
En
g
in
e
e
rin
g
fr
o
m
Un
iv
e
rsity
o
f
S
trat
h
c
ly
d
e
,
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las
g
o
w
S
c
o
t
lan
d
in
2
0
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a
n
d
M
S
c
a
n
d
BEE
E
(Ho
n
s.)
fro
m
Un
iv
e
rsiti
Ke
b
a
n
g
sa
a
n
M
a
lay
sia
in
t
h
e
y
e
a
r
1
9
9
9
a
n
d
2
0
0
2
re
sp
e
c
ti
v
e
ly
.
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h
e
is
c
u
rre
n
tl
y
a
S
e
n
io
r
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tu
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r
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n
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a
c
u
lt
y
o
f
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c
tro
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a
n
d
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o
m
p
u
ter
En
g
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n
e
e
rin
g
,
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n
iv
e
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Te
k
n
i
k
a
l
M
a
lay
sia
M
e
lak
a
(UTe
M
).
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r
re
se
a
r
c
h
in
tere
sts
in
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lu
d
e
OCD
M
A,
Op
ti
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a
l
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m
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a
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ted
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p
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rio
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s
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re
n
c
e
s.
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s
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h
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il
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re
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d
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c
h
e
l
o
r
En
g
i
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g
(El
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c
tri
c
,
El
e
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tro
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i
c
s
&
S
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ste
m
)
a
n
d
M
a
ste
r
(M
icro
e
lec
tro
n
ics
)
d
e
g
re
e
s
fro
m
Na
ti
o
n
a
l
Un
iv
e
rsity
o
f
M
a
lay
sia
(UK
M
)
in
2
0
0
0
a
n
d
2
0
0
1
re
sp
e
c
ti
v
e
ly
.
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n
2
0
1
3
,
sh
e
g
o
t
P
h
D
d
e
g
re
e
i
n
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e
c
tro
n
ics
a
n
d
El
e
c
tri
c
a
l
En
g
i
n
e
e
rin
g
fr
o
m
Un
iv
e
rsity
o
f
G
las
g
o
w,
U.K.
He
r
re
se
a
rc
h
in
tere
st
in
c
lu
d
e
s
n
a
n
o
sc
a
le
d
e
v
ice
s,
v
a
riab
il
it
y
a
n
d
re
li
a
b
il
it
y
,
m
o
d
e
ll
in
g
a
n
d
sim
u
lati
o
n
s,
IC
d
e
sig
n
fo
r
b
i
o
m
e
d
ica
l
a
p
p
li
c
a
ti
o
n
s.
H
a
n
im
Abd
u
l
Ra
z
a
k
re
c
e
iv
e
d
Ba
c
h
e
lo
r
o
f
Co
m
p
u
ter
a
n
d
In
f
o
rm
a
ti
o
n
E
n
g
i
n
e
e
rin
g
fr
o
m
In
tern
a
ti
o
n
a
l
Isla
m
ic
Un
iv
e
rsity
M
a
lay
sia
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)
in
2
0
0
3
.
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h
e
n
,
sh
e
jo
in
e
d
KU
TKM
(
n
o
w
k
n
o
w
n
a
s
UTe
M
)
a
s
a
tu
to
r
a
n
d
p
u
rsu
e
d
h
e
r
M
S
c
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n
M
ic
ro
e
lec
tro
n
ics
in
Un
i
v
e
rsiti
Ke
b
a
n
g
sa
a
n
M
a
lay
sia
(UK
M
)
i
n
wh
ich
s
h
e
c
o
m
p
lete
d
i
n
2
0
0
6
.
Afte
r
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rv
in
g
UTe
M
a
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re
r
fo
r
se
v
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y
e
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a
wa
rd
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d
a
sc
h
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ip
t
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rth
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to
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g
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b
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sa
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a
n
d
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in
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.
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is cu
rre
n
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ter
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e
rin
g
,
Un
i
v
e
rsiti
Tek
n
ik
a
l
M
a
lay
sia
M
e
lak
a
(
UTe
M
).
M
icro
e
n
g
in
e
e
rin
g
,
P
h
o
t
o
n
ics
a
n
d
M
icro
e
lec
tro
n
ics
a
re
th
e
a
re
a
s o
f
h
e
r
i
n
tere
st.
Th
a
n
i
g
a
i
A
n
b
a
la
g
a
n
re
c
e
iv
e
d
th
e
b
a
c
h
e
lo
r'
s
d
e
g
re
e
in
e
lec
tro
n
ic
e
n
g
in
e
e
rin
g
fr
o
m
Un
iv
e
rsit
y
Tec
h
n
ica
l
M
a
lay
sia
M
e
lak
a
(UTe
M
),
M
a
lay
sia
,
in
2
0
2
1
.
A
n
d
sh
e
i
s
c
u
rre
n
tl
y
wo
r
k
in
g
to
wa
r
d
s
th
e
M
sc
d
e
g
re
e
a
t
UTe
M
sin
c
e
a
p
ril
2
0
2
1
.
He
r
c
u
rre
n
t
re
se
a
rc
h
fo
c
u
ss
e
s
in
tap
e
re
d
fi
b
e
r
o
n
b
io
m
e
d
ica
l
a
p
p
li
c
a
ti
o
n
s.
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