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Subs
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v
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v
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c
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t
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rd
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re
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p
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a
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s.
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d
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li
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ted
with
h
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ti
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n
d
su
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ircu
it
s.
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tu
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tt
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rd
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ter
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n
d
o
p
to
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lec
tro
n
ic c
o
o
rd
in
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ted
c
ircu
it
s.
K
ey
w
o
r
d
s
:
C
o
o
r
d
in
ated
Delin
ea
ted
Hy
p
o
th
etica
l
I
m
p
lem
en
tatio
n
I
n
co
r
p
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r
ated
T
h
is i
s
a
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e
n
a
c
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rticle
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d
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CC B
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li
c
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se
.
C
o
r
r
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s
p
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nd
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A
uth
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r
:
P.
Mo
u
n
ik
a,
Dep
ar
tm
en
t o
f
E
lectr
o
n
ics an
d
C
o
m
m
u
n
icatio
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n
g
in
ee
r
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n
g
,
Sav
ee
th
a
I
n
s
titu
te
o
f
Me
d
ical
an
d
T
ec
h
n
ical
Scien
ce
s
,
No
.
1
6
2
,
Po
o
n
am
allee
Hig
h
R
d
,
Vela
p
p
an
c
h
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0
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@
g
m
ail.
co
m
1.
I
NT
RO
D
UCT
I
O
N
L
o
w
-
co
s
t,
m
ass
-
p
r
o
d
u
ci
b
le,
elite
an
d
h
ig
h
r
etu
r
n
m
icr
o
wa
v
e
an
d
m
illi
m
eter
-
wav
e
in
n
o
v
atio
n
s
ar
e
b
asic
f
o
r
cr
ea
tin
g
ef
f
ec
tiv
e
ad
v
er
tis
em
en
t
R
F
b
r
o
ad
b
a
n
d
f
r
am
ewo
r
k
s
.
At
m
illi
m
eter
-
wav
e
f
r
e
q
u
en
cies,
s
p
ec
if
ically
,
cir
cu
it
b
u
ild
in
g
s
q
u
ar
es
in
clu
d
in
g
r
ad
io
wir
e
c
o
m
p
o
n
en
ts
ar
e
f
ir
m
ly
id
en
tifi
ed
with
o
n
e
a
n
o
th
er
b
y
m
ea
n
s
o
f
el
ec
tr
o
m
a
g
n
etic
co
u
p
lin
g
s
a
n
d
in
ter
co
n
n
ec
t.
F
o
r
th
is
s
itu
atio
n
,
th
e
cir
cu
it
c
o
n
f
ig
u
r
atio
n
s
h
o
u
l
d
h
e
m
ad
e
with
a
wo
r
ld
wid
e
c
o
n
s
id
er
atio
n
.
T
h
e
o
l
d
s
ty
le
wav
eg
u
id
e
in
n
o
v
atio
n
is
as
y
et
th
e
s
tan
d
ar
d
f
o
r
s
tr
u
ctu
r
in
g
s
u
p
e
r
io
r
m
illi
m
eter
-
wav
e
s
y
s
tem
s
.
B
e
th
at
as
it
m
ay
,
th
is
d
ev
el
o
p
ed
p
lan
is
n
'
t
r
ea
s
o
n
ab
le
f
o
r
ea
s
e
lar
g
e
s
ca
le
m
an
u
f
ac
tu
r
in
g
.
R
e
p
etitiv
e
an
d
co
s
tly
p
o
s
t
-
cr
ea
tio
n
tu
n
in
g
an
d
co
llectin
g
b
ec
o
m
e
a
g
en
u
i
n
e
is
s
u
e
f
o
r
m
an
u
f
ac
tu
r
er
s
.
Als
o
,
th
e
wav
eg
u
id
e
s
y
s
tem
wo
u
ld
h
e
b
e
ab
le
to
u
s
ed
to
d
im
in
is
h
th
e
weig
h
t
an
d
v
o
lu
m
e.
T
h
en
ag
ain
,
test
in
g
is
s
u
es
ar
e
r
eg
u
lar
ly
en
co
u
n
te
r
ed
in
th
e
p
lan
o
f
lo
w
-
m
is
f
o
r
t
u
n
e
I
C
s
.
e.
g
.
,
h
ig
h
-
Q
b
a
n
d
p
ass
ch
an
n
el
a
n
d
d
ip
lex
e
r
s
,
to
wh
ic
h
th
e
p
lan
ar
s
tr
ateg
y
is
g
en
e
r
a
lly
r
estricte
d
in
ex
ec
u
tio
n
.
All
th
in
g
s
c
o
n
s
id
er
ed
,
non
-
p
lan
ar
s
tr
u
ctu
r
es,
f
o
r
ex
a
m
p
le,
th
e
o
ld
s
ty
le
m
etallic
wav
eg
u
id
e
ar
e
n
o
r
m
ally
r
eq
u
ir
ed
,
in
th
is
m
an
n
er
h
y
b
r
id
p
la
n
s
o
f
p
lan
ar
an
d
,
n
o
n
-
p
lan
ar
s
tr
u
ctu
r
es
b
ec
o
m
e
at
-
tr
ac
tiv
e.
T
r
u
th
b
e
to
ld
,
a
s
im
p
l
e
to
d
ea
l
with
ea
s
e
h
alf
an
d
h
alf
s
tr
u
ctu
r
e
m
eth
o
d
o
lo
g
y
is
o
f
b
asic
s
ig
n
if
ican
ce
f
o
r
th
e
ad
v
an
ce
m
en
t
o
f
h
ig
h
-
v
o
lu
m
e
m
illi
m
eter
-
wav
e
I
C
s
an
d
f
r
am
ewo
r
k
s
.
Dielec
tr
ic
wav
eg
u
id
e
h
as g
o
tt
en
litt
le
co
n
s
id
er
atio
n
f
o
r
m
icr
o
wav
e
an
d
m
illi
m
eter
wav
e
ci
r
cu
it p
lan
s
d
esp
ite
th
e
f
ac
t
th
at
it
h
as
b
e
en
co
n
tem
p
late
d
s
in
ce
n
u
m
e
r
o
u
s
y
ea
r
s
.
T
h
is
is
o
n
th
e
g
r
o
u
n
d
s
th
at
it
h
as
two
ce
n
tr
al
is
s
u
es,
s
p
ec
if
ically
,
r
a
d
iatio
n
m
is
f
o
r
t
u
n
e
d
u
e
t
o
d
is
co
n
tin
u
ity
,
an
d
tr
o
u
b
leso
m
e
m
o
d
u
lar
p
r
o
g
r
ess
to
p
lan
ar
cir
cu
its
.
T
h
e
n
o
n
-
em
a
n
atin
g
d
ielec
tr
ic
(
NR
D)
wav
eg
u
id
e
[
1
]
was
p
r
o
p
o
s
ed
to
d
e
ter
m
in
e
th
e
g
r
ea
ter
p
ar
t
o
f
th
e
d
o
wn
s
i
d
es
o
f
d
ielec
tr
ic
wav
eg
u
id
e
in
co
n
-
n
ec
tio
n
with
th
e
r
ad
iatio
n
m
is
f
o
r
tu
n
e.
T
o
tak
e
ca
r
e
o
f
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J Reco
n
f
ig
u
r
a
b
le
&
E
m
b
ed
d
ed
Sy
s
t
I
SS
N:
2089
-
4
8
6
4
S
u
b
s
tr
a
te
in
teg
r
a
ted
circu
its
fo
r
h
ig
h
fr
eq
u
en
c
y
o
f o
p
to
elec
tr
o
n
ics (
P
.
Mo
u
n
ika
)
225
th
e
is
s
u
e
o
f
m
ix
t
u
r
e
p
la
n
ar
a
n
d
n
o
n
-
p
lan
a
r
in
co
r
p
o
r
atio
n
s
,
we
h
av
e
p
r
o
p
o
s
ed
an
d
cr
ea
te
d
d
if
f
e
r
en
t
h
alf
an
d
h
alf
s
tr
u
ctu
r
e
s
tag
es
th
at
v
ia
b
ly
co
n
s
o
lid
ate
th
e
p
lan
ar
ci
r
cu
its
an
d
th
e
n
o
n
-
tr
an
s
m
itti
n
g
d
ielec
tr
ic
(
NR
D)
wav
eg
u
id
e
[
2
,
3
]
.
Hen
ce
,
we
h
av
e
b
u
ilt
u
p
th
e
id
ea
o
f
an
o
th
e
r
g
e
n
er
atio
n
o
f
h
ig
h
-
r
ec
u
r
r
en
ce
co
o
r
d
in
at
ed
cir
cu
its
ca
lled
"su
b
s
tr
ate
in
co
r
p
o
r
ated
cir
cu
its
-
SICs
".
T
h
is
n
ew
id
ea
h
as
b
o
u
n
d
to
g
et
h
er
th
e
cr
o
s
s
b
r
ee
d
an
d
s
o
lid
r
ec
o
n
ciliatio
n
s
o
f
d
if
f
er
en
t
p
la
n
ar
an
d
n
o
n
-
p
lan
ar
cir
cu
its
th
at
ar
e
m
a
d
e
in
s
in
g
le
s
u
b
s
tr
ate
an
d
lo
r
m
u
lti
-
lay
er
s
tag
es.
I
n
th
is
p
ap
er
,
we
will
s
h
o
w
th
at
th
e
p
r
o
p
o
s
ed
s
u
b
s
tr
ate
co
o
r
d
in
ated
cir
c
u
its
(
SICs
)
[
4
,
5
]
e
n
g
in
ee
r
i
n
g
ca
n
f
ill
in
as
th
e
s
tr
u
ctu
r
e
b
as
e
f
o
r
a
wid
e
s
co
p
e
o
f
h
alf
b
r
e
ed
p
lan
a
r
/n
o
n
-
p
lan
ar
cir
cu
its
f
o
r
m
illi
m
eter
-
wav
e
ap
p
licatio
n
s
.
I
n
ac
tu
ality
,
th
e
SIC
in
n
o
v
atio
n
ca
n
e
x
tr
ao
r
d
in
ar
ily
en
c
o
u
r
a
g
e
b
etwe
en
as
s
o
ciate
s
an
d
m
ix
es
am
o
n
g
p
lan
ar
an
d
n
o
n
-
p
lan
ar
cir
cu
its
,
wh
ich
ca
n
b
e
m
a
d
e
i
n
s
id
e
a
f
ix
cr
ea
tio
n
p
r
o
ce
s
s
.
S
im
u
ltan
eo
u
s
ly
,
th
is
p
lan
ca
n
b
e
u
tili
ze
d
to
c
o
n
f
ig
u
r
atio
n
m
in
im
al
e
f
f
o
r
t
elite
(
h
ig
h
-
Q)
in
ac
tiv
e
cir
c
u
its
,
f
o
r
e
x
am
p
le,
r
eso
n
ato
r
s
[
6
]
,
ch
an
n
els [
7
]
,
co
u
p
ler
s
[
8]
,
p
o
wer
d
i
v
id
er
s
[
9
]
,
cir
cu
lato
r
s
an
d
r
ec
iev
in
g
wir
es [
1
0
]
.
2.
SUB
S
T
RA
T
E
I
N
T
E
G
RA
T
E
D
CIRCU
I
T
S
T
h
e
k
ey
o
f
th
e
SICs
id
ea
is
to
co
m
b
in
e
n
o
n
-
p
la
n
ar
s
tr
u
ctu
r
e
with
a
d
ielec
tr
ic
s
u
b
s
tr
ate
an
d
m
ak
e
it in
p
lan
ar
s
tr
u
ctu
r
e
,
wh
ich
is
to
tal
ly
g
o
o
d
with
o
th
e
r
p
lan
ar
s
tr
u
ctu
r
es
as sh
o
wn
in
Fig
u
r
e
1
.
T
h
is
ca
n
n
o
r
m
ally
b
e
ac
co
m
p
lis
h
ed
b
y
m
a
k
in
g
c
o
u
n
ter
f
eit
wav
eg
u
id
in
g
ch
an
n
els.
Fo
r
th
is
s
itu
atio
n
,
s
u
b
s
titu
ted
d
ielec
tr
ic
co
n
-
in
clin
e
p
r
o
f
iles
o
f
s
u
b
s
tr
ate
u
tili
zin
g
air
o
p
en
in
g
s
o
r
c
o
m
p
o
s
ite
d
ielec
tr
ic
m
ed
ia
a
n
d
a
d
d
itio
n
ally
in
teg
r
ated
m
etallic
d
iv
id
er
s
u
tili
zin
g
m
etallize
d
v
ias ar
e
b
y
an
d
lar
g
e
s
en
t.
T
h
e
s
u
b
s
eq
u
e
n
t stru
ctu
r
e
o
n
th
e
s
u
b
s
tr
ate
will
b
e
a
p
lan
ar
wav
eg
u
id
e,
wh
ic
h
h
as
m
u
ch
p
r
e
f
er
r
ed
m
is
f
o
r
tu
n
e
q
u
alities
o
v
er
p
lan
a
r
p
a
r
tn
er
s
,
tak
in
g
in
t
o
co
n
s
id
er
atio
n
th
e
s
tr
u
ctu
r
e
o
f
m
illi
m
eter
wav
e
h
ig
h
-
Q
ch
a
n
n
els,
d
ip
lex
er
s
,
r
eso
n
ato
r
s
a
n
d
d
if
f
er
en
t
cir
c
u
its
u
tili
zin
g
an
ea
s
e
cr
ea
tio
n
p
r
o
c
ed
u
r
e.
Hid
e
th
er
m
o
r
e,
th
e
b
le
n
d
o
f
a
n
o
n
-
p
la
n
ar
wav
eg
u
id
e
in
s
u
b
s
tr
ate
allo
ws
th
e
ac
k
n
o
wled
g
m
en
t
o
f
p
r
o
d
u
ctiv
e
wid
eb
a
n
d
c
h
an
g
es
o
r
b
alu
n
s
b
etwe
en
th
e
in
co
r
p
o
r
ated
n
o
n
-
p
lan
ar
wav
eg
u
id
e
an
d
p
lan
a
r
cir
cu
its
,
f
o
r
ex
a
m
p
le,
m
icr
o
s
tr
ip
an
d
co
p
lan
ar
wav
e
g
u
id
e
(
C
PW
)
co
o
r
d
in
ate
d
cir
cu
its
.
W
ith
th
ese
b
alu
n
s
as
wel
l
as
t
r
an
s
itio
n
s
,
th
e
in
tr
icac
y
an
d
c
o
s
t
o
f
in
ter
co
n
n
ec
tio
n
b
etwe
e
n
n
o
n
-
p
lan
ar
h
ig
h
-
Q
cir
cu
its
an
d
p
lan
ar
cir
c
u
its
ar
e
d
im
in
is
h
ed
to
a
b
ase.
I
n
t
h
is
m
an
n
er
,
a
to
tal
m
illi
m
eter
wa
v
e
f
r
o
n
t
-
en
d
cir
c
u
it
f
o
r
r
a
d
io
a
n
d
r
ad
ar
ap
p
licat
io
n
s
co
u
ld
b
e
s
tr
u
ctu
r
ed
an
d
b
ased
o
n
o
n
e
d
ielec
tr
ic
s
u
b
s
tr
ate
with
ju
s
t
s
tr
aig
h
tf
o
r
war
d
m
a
n
u
f
ac
tu
r
e
p
r
o
ce
s
s
.
T
h
is
m
ak
es
r
ea
d
y
f
o
r
g
r
o
win
g
h
ig
h
-
r
ec
u
r
r
en
ce
(
m
illi
m
eter
-
wav
e)
f
r
am
ewo
r
k
o
n
-
c
h
ip
id
ea
if
n
o
n
-
d
ir
ec
t
cir
cu
its
ar
e
ad
d
itio
n
ally
in
co
r
p
o
r
ated
in
to
a
s
im
ilar
s
u
b
s
tr
ate.
T
h
is
ca
n
d
ef
in
itely
less
en
co
n
s
id
er
a
b
ly
b
u
n
d
lin
g
,
in
ter
co
n
n
ec
t
a
n
d
g
et
to
g
et
h
er
is
s
u
es
th
at
ar
e
f
o
u
n
d
in
cu
r
r
en
t
m
illi
m
eter
wav
e
r
ad
io
s
u
p
p
lie
s
.
Fig
u
r
e
1
.
T
o
p
o
lo
g
y
o
f
an
SIW g
u
id
e
r
ea
lized
o
n
a
d
ielec
tr
ic
s
u
b
s
tr
ate
with
its
p
h
y
s
ical
d
im
en
s
io
n
s
Ad
v
an
ce
s
b
etwe
en
th
e
SIW
an
d
p
lan
ar
cir
c
u
its
,
f
o
r
ex
am
p
l
e,
m
icr
o
s
tr
ip
,
C
PW
o
r
s
lo
t
li
n
e
cir
cu
its
ca
n
b
e
b
ased
o
n
a
s
im
ilar
s
u
b
s
tr
ate,
as we
h
av
e
ex
am
in
ed
.
Fo
r
th
is
s
itu
atio
n
,
m
icr
o
s
tr
ip
an
d
C
P
W
ch
an
g
es a
r
e
u
tili
ze
d
to
en
er
g
ize
th
e
T
E
lo
wav
eg
u
id
e
m
o
d
e
f
o
r
t
h
e
SI
W
wh
ile
th
e
s
lo
tlin
e
p
r
o
g
r
ess
m
ay
ef
f
ec
tiv
ely
en
er
g
ize
th
e
T
G,
wav
eg
u
i
d
e
m
o
d
e.
Similar
s
itu
atio
n
s
ca
n
l
ik
ewise
b
e
ap
-
h
an
d
le
d
to
th
e
SISW
an
d
SII
NDG.
Fo
r
th
e
SIN
R
D
g
u
id
e,
SIlDG
an
d
SII
G,
th
e
p
lan
ar
cir
cu
its
a
r
e
n
o
r
m
ally
c
r
ea
ted
with
a
c
o
n
-
v
en
tio
n
al
m
et
h
o
d
o
n
a
d
i
f
f
er
en
t
s
u
b
s
tr
ate
th
at
w
o
u
ld
th
e
n
b
e
a
b
le
to
b
e
co
v
e
r
ed
o
n
to
th
e
SICs
.
T
h
e
ex
p
lan
atio
n
is
th
at
th
e
air
o
p
en
in
g
s
,
wh
ich
m
ay
m
an
ag
e
ev
ac
u
atin
g
a
g
r
ea
t
p
ar
t
o
f
th
e
m
etal
p
ar
t
o
n
th
e
SIC
s
u
b
s
tr
ate,
wo
u
ld
f
o
r
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
20
89
-
4
8
6
4
I
n
t J Reco
n
f
ig
u
r
a
b
le
&
E
m
b
ed
d
ed
Sy
s
t
,
Vo
l.
9
,
No
.
3
,
No
v
e
m
b
er
2
0
2
0
:
22
4
–
22
8
226
th
e
m
o
s
t
p
ar
t
p
r
ec
lu
d
e
th
e
cr
e
atio
n
o
f
p
la
n
ar
ci
r
cu
its
o
n
a
s
im
ilar
s
u
b
s
tr
ate
ex
ce
p
t
if
s
o
m
e
co
m
p
le
x
p
r
o
ce
s
s
is
in
clu
d
ed
.
Fo
r
th
is
s
itu
atio
n
,
c
h
an
g
es
f
r
o
m
t
h
e
SIW
to
SIN
R
D
o
r
SII
DG,
wh
ich
h
av
e
ju
s
t
b
ee
n
p
r
o
d
u
ce
d
f
o
r
th
e
o
r
d
in
ar
y
s
tr
u
ctu
r
es
[
1
1
,
1
2
]
,
ca
n
b
e
s
en
t
in
a
s
tr
aig
h
t
-
f
o
r
war
d
wa
y
.
R
eg
u
lar
l
y
,
s
lo
t
li
n
e
to
SW
ad
v
an
ce
s
wo
u
ld
b
e
u
tili
ze
d
to
f
in
is
h
s
u
c
h
in
ter
co
n
n
ec
t w
ith
p
lan
a
r
cir
c
u
its
.
3.
SUB
S
T
RA
T
E
I
N
T
E
G
RA
T
E
D
WAVEGU
I
D
E
(
SI
W)
I
t
is
k
n
o
wn
th
at
tlie
p
r
o
p
o
s
ed
jo
in
in
g
s
ch
ei
n
es
o
f
th
e
c
o
n
v
en
tio
n
al
r
ec
tan
g
u
la
r
wav
eg
u
id
e
with
p
lan
ar
s
tr
u
ctu
r
es
b
en
d
h
u
lk
y
an
d
as
a
r
u
le
r
eq
u
ir
e
an
a
cc
u
r
ac
y
m
ac
h
in
in
g
p
r
o
ce
s
s
.
wh
ich
is
h
ar
d
t
o
ac
co
m
p
lis
h
at
m
illi
m
eter
-
wav
e
f
r
e
q
u
en
cies
f
o
r
in
ass
g
e
n
er
atio
n
.
A
clea
r
ar
r
a
n
g
em
e
n
t
is
to
i
n
co
r
p
o
r
ate
th
e
r
ec
tan
g
u
lar
wa
v
eg
u
id
e
in
t
o
m
icr
o
s
tr
ip
cir
cu
it
s
u
b
s
tr
ate
as
we
h
av
e
q
u
ick
l
y
talk
ed
ab
o
u
t
in
t
h
e
ab
o
v
e
ar
ea
as
s
h
o
wn
in
Fig
u
r
e
2
.
T
h
is
will
d
ef
in
itely
d
im
in
is
h
t
h
e
Q
-
f
ac
to
r
o
f
wav
e
g
u
id
e
co
n
tr
asted
an
d
th
e
em
p
ty
r
ec
tan
g
u
lar
wav
e
g
u
id
e
d
u
e
to
th
e
d
ielec
tr
ic
f
illi
n
g
an
d
v
o
l
u
m
e
d
ec
r
ea
s
e.
T
h
e
e
n
tire
cir
c
u
it
in
clu
d
in
g
p
la
n
ar
cir
cu
itry
,
c
h
a
n
g
es
an
d
wa
v
eg
u
id
es
ca
n
h
e,
in
a
n
y
ca
s
e,
co
n
-
s
tr
u
cted
u
tili
zin
g
s
tan
d
a
r
d
PC
B
o
r
o
th
er
p
la
n
ar
h
an
d
lin
g
tec
h
n
iq
u
es.
Als
o
,
th
e
tr
an
s
m
is
s
io
n
lo
s
s
o
f
th
e
o
n
-
s
u
b
s
tr
ate
ch
an
g
es
m
ig
h
t
b
e
a
lo
t
o
f
lo
wer
th
a
n
th
at
if
th
e
ad
v
a
n
ce
s
o
r
c
o
u
p
lin
g
ar
ea
s
m
ad
e
b
etwe
en
th
e
o
r
d
in
a
r
y
wav
eg
u
i
d
e
an
d
p
lan
ar
cir
cu
its
.
I
n
th
is
m
an
n
er
.
th
e
p
o
s
t
wid
t
h
m
a
y
s
ig
n
if
ican
tly
in
f
lu
e
n
ce
th
e
ar
r
iv
al
lo
s
s
o
f
th
e
wav
eg
u
id
e
a
r
ea
in
p
e
r
s
p
ec
tiv
e
o
n
its
in
f
o
p
o
r
t.
T
wo
s
tr
u
ct
u
r
e
r
u
les
id
en
tifie
d
with
th
e
p
o
s
t
b
r
ea
d
th
an
d
p
itch
th
at
ar
e
u
tili
ze
d
to
d
is
r
eg
ar
d
th
e
r
ad
iatio
n
m
is
f
o
r
tu
n
e
ar
e
f
o
r
m
u
lated
in
[
1
3
,
1
4
]
.
T
h
ese
p
r
in
cip
les
h
av
e
b
ee
n
d
ed
u
cted
f
r
o
m
r
e
cr
ea
tio
n
r
c
-
s
u
lts
o
f
v
ar
io
u
s
SIW g
eo
m
etr
ies.
Fig
u
r
e
2
.
I
n
teg
r
ated
tr
an
s
itio
n
s
f
r
o
m
p
lan
a
r
cir
cu
its
to
SIW g
u
id
e:
(
a)
Mic
r
o
s
tr
ip
tr
an
s
itio
n
(
b
)
C
o
p
lan
ar
wav
eg
u
id
e
(
C
PW
)
tr
an
s
itio
n
4.
SUB
S
T
RA
T
E
I
N
T
E
G
RA
T
E
D
SL
A
B
WAV
E
G
UID
E
(
SI
SW)
T
h
e
s
ec
tio
n
wav
eg
u
id
e
h
as
b
ee
n
k
n
o
wn
f
o
r
its
wid
e
b
an
d
wid
th
wh
e
n
p
lan
n
e
d
w
ith
a
h
ig
h
p
er
m
itti
v
ity
d
ielec
tr
ic
p
iece
.
Utilizin
g
2
1
d
ielec
tr
ic
p
er
m
itt
iv
ity
o
f
5
f
o
r
th
e
s
ec
tio
n
two
r
eg
u
lar
r
ec
tan
g
u
lar
wav
eg
u
id
e
h
a
n
d
s
ca
n
at
th
e
s
am
e
tim
e
h
e
s
ec
u
r
ed
with
o
n
e
s
in
g
le
p
iece
wav
eg
u
id
e.
T
h
i
s
all
-
en
co
m
p
ass
in
g
b
an
d
wid
th
ca
n
h
e
v
alu
ab
le
to
p
lan
r
ec
u
r
r
en
ce
d
o
u
b
ler
s
o
r
b
len
d
er
wh
ic
h
m
ay
r
eq
u
ir
e
wid
e
tr
an
s
f
er
s
p
ee
d
tr
an
s
m
is
s
io
n
lin
e.
Usu
ally
im
p
o
r
tan
t
to
ac
h
iev
e
a
d
ec
en
t
m
atch
in
g
.
T
h
ese
p
r
o
ce
d
u
r
es
w
o
u
ld
ex
p
a
n
d
th
e
c
o
s
t
o
f
th
e
u
v
eid
t
f
r
a
m
ewo
r
k
p
lan
.
W
ith
th
e
SlS
W
s
tr
ateg
y
th
e
p
iece
m
an
ag
e
is
b
len
d
ed
o
n
a
s
u
b
s
t
r
ate
b
y
in
cl
u
d
in
g
air
h
o
le
in
to
a
SIW.
Fig
u
r
e
3
d
elin
ea
tes
th
e
to
p
o
lo
g
y
if
th
e
SISW
m
an
ag
e.
Utilizin
g
th
is
s
tr
ateg
y
a
SlS
W
co
v
er
in
g
b
o
th
X
an
d
K
u
h
an
d
s
h
as b
ee
n
p
la
n
n
ed
,
ac
k
n
o
wled
g
ed
an
d
esti
m
ated
[
1
5
-
2
0
]
.
5.
SURS
T
RA
T
E
I
NT
E
G
K
AT
E
D
NK
D
(
SI
N
RD)
G
UID
E
T
h
e
NR
D
-
d
ir
ec
t
is
a
n
o
n
-
p
lan
ar
s
tr
u
ctu
r
e.
wh
at'
s
m
o
r
e,
its
f
u
n
d
am
e
n
tal
g
eo
m
etr
y
c
o
m
p
r
is
es
o
f
th
r
ee
r
ec
tan
g
u
lar
d
ielec
tr
ic
s
tr
ip
s
:
t
wo
en
o
r
m
o
u
s
in
d
is
tin
g
u
is
h
ab
le
o
n
es
with
lo
w
d
ielec
tr
ic
es
teem
is
o
lated
b
y
a
litt
le
o
n
e
with
a
h
ig
h
d
ielec
tr
ic
esteem
.
T
h
e
th
r
ee
s
tr
ip
s
ar
e
s
an
d
wich
ed
b
etwe
en
two
m
etallic
p
lates
with
d
iv
id
in
g
litt
ler
th
an
a
p
o
r
tio
n
o
f
g
u
id
e
d
wav
elen
g
th
in
th
e
l
o
w
d
ielec
tr
ic
lo
ca
le.
I
t
was
p
r
o
p
o
s
ed
to
s
m
o
th
er
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J Reco
n
f
ig
u
r
a
b
le
&
E
m
b
ed
d
ed
Sy
s
t
I
SS
N:
2089
-
4
8
6
4
S
u
b
s
tr
a
te
in
teg
r
a
ted
circu
its
fo
r
h
ig
h
fr
eq
u
en
c
y
o
f o
p
to
elec
tr
o
n
ics (
P
.
Mo
u
n
ika
)
227
th
e
r
ad
iatio
n
m
is
f
o
r
tu
n
e
in
ali
en
ab
le
to
a
d
ielec
tr
ic
wav
e
g
u
id
e
at
its
d
is
co
n
tin
u
ities
.
I
n
th
e
SlNR
D
d
ir
ec
t
an
o
cc
asio
n
al
air
o
p
en
i
n
g
ex
am
p
le
is
u
tili
ze
d
to
s
u
cc
ess
f
u
lly
b
r
in
g
d
o
wn
th
e
d
ielec
tr
ic
co
n
s
is
ten
t
o
f
ex
p
licit
d
is
tr
icts
o
f
a
d
ielec
tr
ic
s
u
b
s
tr
a
te,
in
th
is
m
an
n
er
m
a
k
in
g
a
w
av
e
-
co
n
tr
o
llin
g
d
ielec
tr
ic
d
iv
e
r
t
in
th
e
s
u
b
s
tr
ate.
Su
ch
an
in
co
r
p
o
r
ated
ch
a
n
n
el
b
ec
o
m
es
if
s
u
b
s
tr
ate
co
o
r
d
in
at
ed
NR
D
g
u
id
e
o
r
SIN
R
D
wh
en
th
e
to
p
a
n
d
b
ase
o
f
th
e
s
u
b
s
tr
ate
ar
e
s
h
u
t
with
m
etallic
p
lan
es
as
s
h
o
wn
in
Fig
u
r
e
3
.
Utilizin
g
th
is
m
eth
o
d
,
co
m
p
lex
NR
D
cir
cu
its
ca
n
h
e
wo
r
k
ed
in
o
n
e
cr
ea
tio
n
s
tep
with
n
o
m
an
u
al
d
ea
lin
g
with
.
Mo
r
e
o
v
er
,
th
e
d
i
elec
tr
ic
s
u
b
s
tr
ate
is
ad
eq
u
ately
s
tr
o
n
g
to
p
er
m
it
it
s
o
v
er
lay
with
o
th
er
p
lan
ar
s
u
b
s
tr
ate.
Alo
n
g
th
ese
lin
es,
th
e
h
alf
b
r
ee
d
p
la
n
ar
NR
D
co
n
tr
o
l sy
s
tem
s
ca
n
b
e
n
iad
e
tiio
r
e
co
s
t
-
v
iab
ly
an
d
e
f
f
e
ctiv
ely
.
(
a)
(
b
)
Fig
u
r
e
3
.
Su
r
s
tr
ate
I
n
teg
k
ated
,
(
a)
A
m
ac
h
i
n
ed
C
u
f
lo
n
S
I
NR
D
cir
cu
it a
t 3
6
GHz
wh
ich
is
la
m
in
ated
to
a
R
T
6
0
0
2
0
.
2
5
4
m
m
th
ick
s
u
b
s
tr
ate
o
n
wh
ic
h
th
e
m
icr
o
s
tr
ip
-
to
-
SIN
KD
tr
an
s
itio
n
s
ar
e
et
ch
ed
,
(
b
)
S
I
NR
D
cir
cu
it o
n
C
u
f
lo
n
wo
r
k
in
g
at
8
0
GHz
with
W
R
I
O
tr
an
s
itio
n
s
.
6.
SUB
S
T
RA
T
E
I
N
T
E
G
RA
T
E
D
I
M
AG
E
DI
E
L
E
C
T
RIC G
UIDE
(
S
I
I
DG
)
T
h
e
SIC
p
r
o
c
ed
u
r
e
was
lik
ewise
u
tili
ze
d
in
th
e
tr
ial
p
r
o
to
-
k
in
d
o
f
a
d
ielec
tr
ic
r
eso
n
ato
r
r
ad
io
wir
e
ex
h
ib
it
[
1
0
]
,
ev
er
y
r
ec
eiv
in
g
wir
e
b
ein
g
in
r
ea
lity
a
SII
DG
r
eso
n
ato
r
.
T
h
e
SIC
p
o
in
ts
o
f
in
ter
est
in
th
is
m
illi
m
eter
-
wav
e
r
ec
eiv
in
g
w
ir
e
ar
e
p
r
ec
is
ely
v
ig
o
r
o
u
s
in
lig
h
t
o
f
th
e
f
ac
t
th
at
th
e
e
n
tire
ty
o
f
th
e
litt
le
r
eso
n
ato
r
c
o
m
p
o
n
en
ts
a
r
e
m
a
d
e
o
f
an
d
f
i
x
ed
o
n
th
e
d
ielec
tr
ic
s
u
b
s
tr
ate,
co
n
s
eq
u
en
tly
less
en
in
g
im
p
r
ess
iv
ely
th
e
ad
ju
s
tm
en
t
is
s
u
e
o
f
th
e
r
es
o
n
ato
r
s
.
Mo
r
e
o
v
er
,
th
e
r
ec
eiv
i
n
g
wir
e
ex
h
ib
it
ex
h
ib
itio
n
s
wer
e
d
em
o
n
s
tr
ated
to
b
e
eq
u
iv
ale
n
t
o
r
s
u
p
er
io
r
to
th
o
s
e
o
f
th
e
r
eg
u
la
r
ac
k
n
o
wled
g
m
en
t
s
tr
ateg
y
.
So
m
e
elec
tr
ical
f
ea
tu
r
es,
f
o
r
ex
am
p
le,
g
ai
n
co
n
tr
o
l c
o
u
l
d
u
n
d
o
u
b
ted
ly
b
e
ac
co
m
p
lis
h
ed
b
y
ch
an
g
in
g
th
e
air
g
ap
d
esig
n
m
ea
s
u
r
em
en
ts
.
7.
CO
NCLU
SI
O
N
T
h
is
p
ap
er
ex
h
ib
its
a
d
ia
g
r
am
o
f
th
e
p
r
esen
t
s
u
b
s
tr
ate
in
teg
r
ated
cir
cu
its
(
SICS
)
im
p
r
o
v
e
m
en
t
with
v
ar
io
u
s
p
r
ac
tical
m
o
d
els.
Sp
ec
ialized
h
ig
h
lig
h
ts
o
f
th
is
n
ew
ag
e
o
f
m
icr
o
wav
e
in
c
o
r
p
o
r
ated
ci
r
cu
its
ar
e
s
h
o
wn
with
co
n
f
ig
u
r
atio
n
r
u
les
an
d
cir
cu
it
e
x
ec
u
tio
n
.
Me
ch
an
ical
an
d
elec
tr
ical
p
r
o
p
e
r
ties
ar
e
talk
ed
a
b
o
u
t
in
d
etail
co
n
ce
r
n
in
g
d
if
f
e
r
en
t
SI
C
p
latf
o
r
m
s
.
Fu
tu
r
e
p
atter
n
s
ar
e
ad
d
itio
n
ally
s
h
o
w
n
with
ac
ce
n
tu
atio
n
o
n
th
e
ad
v
an
ce
m
e
n
t
o
f
f
u
tu
r
e
m
in
im
al
ef
f
o
r
t
an
d
s
u
p
er
io
r
m
illi
m
e
tr
e
wav
e,
s
u
b
m
illi
m
eter
-
wav
e
an
d
o
p
to
elec
tr
o
n
ic
ap
p
licatio
n
s
.
I
t
is
ac
ce
p
ted
th
is
n
ew
id
ea
will
in
a
g
en
e
r
al
s
en
s
e
ch
an
g
e
th
e
s
ce
n
e
o
f
o
u
r
h
ig
h
-
r
ec
u
r
r
en
c
e
r
esear
ch
an
d
d
e
v
elo
p
m
e
n
t.
A
f
f
ir
m
atio
n
T
h
e
c
r
ea
to
r
s
m
i
g
h
t
wan
t
to
o
f
f
er
th
eir
th
an
k
s
to
th
e
NSERC
o
f
C
an
ad
a
an
d
NQRNT
o
f
Qu
e
b
ec
f
o
r
t
h
ei
r
m
o
n
ey
r
elate
d
b
ac
k
in
g
s
th
at
h
a
v
e
m
ad
e
th
is
wo
r
k
co
n
ce
iv
ab
le.
T
h
e
cr
ea
to
r
s
wo
u
ld
lik
ewise
s
ay
th
an
k
s
to
Stev
e
D
u
b
6
f
o
r
h
i
s
ass
i
s
tan
ce
in
th
e
m
an
u
f
ac
t
u
r
e
o
f
th
e
m
o
d
els.
ACK
NO
WL
E
DG
E
M
E
NT
S
T
h
e
au
th
o
r
s
wo
u
ld
lik
e
to
th
a
n
k
to
th
e
NSERC
o
f
C
an
ad
a
an
d
NQRNT
o
f
Qu
eb
ec
f
o
r
th
eir
m
o
n
e
y
r
elate
d
b
ac
k
in
g
s
th
at
h
a
v
e
m
a
d
e
th
is
wo
r
k
co
n
ce
iv
a
b
le.
T
h
e
cr
ea
to
r
s
wo
u
ld
lik
ewise
ex
p
r
e
s
s
g
r
atitu
d
e
to
war
d
Stev
e
Du
b
6
f
o
r
h
is
ass
is
tan
ce
in
th
e
m
an
u
f
ac
tu
r
e
o
f
th
e
m
o
d
els.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
20
89
-
4
8
6
4
I
n
t J Reco
n
f
ig
u
r
a
b
le
&
E
m
b
ed
d
ed
Sy
s
t
,
Vo
l.
9
,
No
.
3
,
No
v
e
m
b
er
2
0
2
0
:
22
4
–
22
8
228
RE
F
E
R
E
NC
E
S
[1
]
T.
Yo
n
e
y
a
m
a
a
n
d
S
.
Nish
i
d
a
,
"
No
n
ra
d
iati
v
e
d
iele
c
tri
c
wa
v
e
g
u
i
d
e
fo
r
m
il
l
ime
ter
wa
v
e
in
te
g
ra
ted
c
ircu
it
s
,
"
IEE
E
T
ra
n
s.
M
icr
o
w
a
v
e
T
h
e
o
ry
T
e
c
.
,
v
o
l
.
2
9
,
p
p
.
1
1
8
8
-
1
1
9
2
.
No
v
.
1
9
8
1
.
[2
]
K.
Wu
.
L.
Ha
n
,
"
Hy
b
rid
in
te
g
ra
ti
o
n
tec
h
n
o
lo
g
y
o
f
p
lan
a
r
c
irc
u
it
s
a
n
d
NRD
-
g
u
i
d
e
fo
r
c
o
st
-
e
ffe
c
ti
v
e
m
icro
wa
v
e
a
n
d
m
il
li
m
e
-
ter
-
wa
v
e
a
p
p
li
c
a
ti
o
n
s
,
"
I
EE
E
T
ra
n
s.
M
icr
o
wa
v
e
T
h
e
o
ry
a
n
d
T
e
c
h
.
,
v
o
l
.
4
5
,
n
o
.
6
,
p
p
.
9
4
6
-
9
5
4
,
Ju
n
1
9
9
7
.
[3
]
K.
Wu
,
Y.
Ca
ss
iv
i
,
"
Re
c
e
n
t
a
d
v
a
n
c
e
s
o
f
h
y
b
rid
p
lan
a
rINRD
-
g
u
id
e
tec
h
n
o
lo
g
y
fo
r
m
il
li
m
e
ter
-
wa
v
e
in
teg
ra
ted
c
ircu
it
d
e
si
g
n
,
"
5
th
In
ter
n
a
ti
o
n
a
l
Co
n
fer
e
n
c
e
o
n
T
e
lec
o
mm
u
n
ica
t
io
n
s
in
M
o
d
e
rn
S
a
telli
te,
Ca
b
le
a
n
d
Bro
a
d
c
a
stin
g
S
e
rv
ice
.
T
EL
S
IK
S
2
0
0
1
.
Pr
o
c
e
e
d
i
n
g
s
o
f
P
a
p
e
rs
(Ca
t
.
No
.
0
1
EX
5
1
7
)
,
v
o
l.
1
,
p
p
.
1
8
7
-
1
9
3
,
2
0
0
1
.
[4
]
K.
Wu
,
"
I
n
teg
ra
ti
o
n
a
n
d
in
t
e
rc
o
n
n
e
c
t
tec
h
n
i
q
u
e
s
o
f
p
la
n
a
r
a
n
d
n
o
n
-
p
lan
a
r
stru
c
tu
re
s
f
a
r
m
icro
wa
v
e
a
n
d
m
il
li
m
e
ter
-
wa
v
e
c
ircu
it
s
-
c
u
rr
e
n
t
sta
tu
s
a
n
d
fu
t
u
re
tren
d
,
"
Pro
c
e
e
d
in
g
o
f
Asia
-
Pa
c
if
ic
M
icr
o
wa
v
e
Co
n
fer
e
n
c
e
,
p
p
.
4
1
1
-
4
1
6
,
2
0
0
1
.
[5
]
K.
Wu
a
n
d
F
.
Bo
o
n
e
,
"
G
u
id
e
d
-
wa
v
e
p
ro
p
e
rti
e
s
o
f
sy
n
th
e
siz
e
d
n
o
n
-
ra
d
iatin
g
d
iele
c
tri
c
wa
v
e
g
u
i
d
e
fo
r
su
b
stra
te
in
teg
ra
ted
c
ircu
it
s (S
ICS
)
,
"
2
0
0
1
IEE
E
M
lT
-
S
In
ter
.
M
icr
o
wa
v
e
S
y
mp
.
,
P
h
c
in
i
x
.
USA
,
p
p
.
7
2
3
.
7
2
6
,
2
0
0
1
.
[6
]
Y.
Ca
ss
iv
i,
L.
P
e
rre
g
ri
n
i,
K.
Wu
a
n
d
G
.
Co
n
c
iau
r
o
,
"
L
o
w
-
c
o
st
a
n
d
h
i
g
h
-
Q
m
il
li
m
e
ter
-
wa
v
e
re
so
n
a
t
o
r
u
sin
g
su
b
stra
te i
n
te
-
g
ra
ted
wa
v
e
g
u
id
e
t
e
c
h
n
iq
u
e
,
"
2
0
0
2
3
2
n
d
Eu
r
o
p
e
a
n
M
icr
o
wa
v
e
Co
n
fer
e
n
c
e
,
No
v
.
2
0
0
2
[7
]
D.
De
sla
n
d
e
s
a
n
d
K.
W
u
,
"
S
i
n
g
le
-
su
b
stra
te
in
teg
ra
ti
o
n
tec
h
-
n
i
q
u
e
s
fo
r
p
lan
a
r
c
ircu
i
ts
a
n
d
w
a
v
e
g
u
id
e
fil
ters
,
"
IEE
E
T
ra
n
s
-
a
c
ti
o
n
s o
n
M
icr
o
wa
v
e
T
h
e
o
ry
a
n
d
T
e
c
h
n
iq
u
e
s
,
v
o
l.
5
1
,
n
o
.
2
,
p
p
.
5
9
3
-
5
9
6
,
F
e
b
.
2
0
0
3
.
[8
]
Y.
Ca
ss
iv
i.
D.
De
sla
n
d
e
s
a
n
d
K.
Wu
,
"
S
u
b
stra
te
in
teg
ra
ted
w
a
v
e
g
u
i
d
e
d
irec
ti
o
n
a
l
c
o
u
p
lers
,
"
in
Asia
-
P
a
c
if
ic
mic
ro
wa
v
e
c
o
n
fer
e
n
c
e
,
Ky
o
to
,
Ja
p
a
n
,
p
p
.
1
4
0
9
-
1
4
1
2
,
N
o
v
2
0
0
2
.
[9
]
S
.
G
e
rm
a
in
,
D.
De
sla
n
d
e
s,
K.
Wu
,
"
De
v
e
lo
p
m
e
n
t
o
f
su
b
stra
te
in
te
g
ra
ted
wa
v
e
g
u
i
d
e
p
o
we
r
d
i
v
id
e
rs
,
"
CCECE
2
0
0
3
-
Ca
n
a
d
i
a
n
Co
n
fer
e
n
c
e
o
n
E
lec
trica
l
a
n
d
C
o
mp
u
ter
En
g
i
n
e
e
rin
g
.
T
o
wa
rd
a
Ca
ri
n
g
a
n
d
Hu
ma
n
e
T
e
c
h
n
o
lo
g
y
(Ca
t.
N
o
.
0
3
CH3
7
4
3
6
)
,
v
o
l.
3
,
p
p
.
1
9
2
1
-
1
9
2
4
,
M
a
y
2
0
0
3
.
[1
0
]
A.
P
e
to
sa
.
A.
lt
ti
p
i
b
o
o
n
a
n
d
S
.
Th
irak
o
u
n
e
,
"
P
e
rfo
ra
ted
d
iele
c
-
tri
c
re
so
n
a
to
r
a
n
te
n
n
a
s
,
"
E
lec
tro
n
ics
L
e
tt
e
rs
,
v
o
l.
3
8
,
No
.
2
4
,
p
p
.
1
4
9
3
-
1
4
9
5
,
2
0
0
2
.
[1
1
]
Y.
Ca
ss
iv
i
a
n
d
K.
Wu
,
"
Co
m
p
a
c
t
tran
siti
o
n
fr
o
m
n
o
n
-
ra
d
iatin
g
d
ie
lec
tri
c
(NRD
)
to
re
c
tan
g
u
lar
wa
v
e
g
u
id
e
s
,
"
IE
EE
M
icr
o
wa
v
e
a
n
d
W
ire
les
s Co
mp
o
n
e
n
t
L
e
tt
e
rs
,
su
b
m
it
ted
f
o
r
p
u
b
li
c
a
ti
o
n
,
2
0
0
3
.
[1
2
]
T.
Ro
z
z
i
a
n
d
S
.
1
.
He
d
g
e
s.
"
Rig
o
r
o
u
s
a
n
a
l
y
sis
a
n
d
n
e
two
r
k
m
o
d
e
li
n
g
o
f
th
e
i
n
se
t
d
iele
c
tr
ic
g
u
i
d
e
,
"
IEE
E
T
ra
n
sa
c
ti
o
n
s
o
n
M
icr
o
w
a
v
e
T
h
e
o
ry
a
n
d
T
e
c
h
n
i
q
u
e
s
,
v
o
l.
3
5
,
n
o
.
9
,
p
p
.
8
2
3
-
8
3
4
,
S
e
p
t.
1
9
8
7
.
[1
3
]
H.
-
J.
J.
Ye
h
,
a
n
d
J.
S
.
S
m
it
h
,
"
F
lu
i
d
ic
se
lf
-
a
ss
e
m
b
ly
fo
r
t
h
e
i
n
teg
ra
ti
o
n
o
f
G
a
As
li
g
h
t
-
e
m
it
ti
n
g
d
i
o
d
e
s
o
n
S
i
su
b
stra
tes
,
"
IEE
E
P
h
o
t
o
n
.
T
e
c
h
n
o
l.
L
e
tt
.
,
v
o
l.
6
,
n
o
6
,
p
p
.
7
0
6
–
7
0
8
,
Ju
n
1
9
9
4
.
[1
4
]
J.
K.
Tu
,
J.
J.
Talg
h
a
d
e
r,
M
.
A.
Ha
d
ley
,
a
n
d
J.
S
.
S
m
it
h
,
"
F
l
u
id
ic
se
lf
-
a
ss
e
m
b
ly
o
f
I
n
G
a
As
v
e
rti
c
a
l
-
c
a
v
it
y
s
u
rfa
c
e
-
e
m
it
ti
n
g
las
e
rs o
n
to
S
il
ic
o
n
,
"
El
e
c
tro
n
.
L
e
tt
.
,
v
o
l
.
3
1
,
p
p
.
1
4
4
8
–
1
4
4
9
,
A
u
g
.
1
9
9
5
.
[1
5
]
D.
De
sla
n
d
e
s
a
n
d
K.
Wu
,
"
De
sig
n
Co
n
si
d
e
ra
ti
o
n
s
a
n
d
P
e
rfo
rm
-
a
n
c
e
An
a
ly
sis
o
f
S
u
b
stra
te
In
teg
ra
ted
Wav
e
g
u
id
e
Co
m
p
o
n
e
n
ts,"
M
i
la
n
o
,
Eu
ro
p
e
a
n
M
icr
o
wa
v
e
Co
n
fer
e
n
c
e
,
p
p
.
8
8
1
-
8
8
4
,
S
e
p
2
0
0
2
.
[1
6
]
D.
De
sla
n
d
e
s,
M
.
Bo
z
z
i.
P
.
Arc
io
n
i
a
n
d
K.
Wu
,
"
S
u
b
stra
te
In
te
-
g
ra
ted
S
lab
Wav
e
g
u
i
d
e
(S
IS
W)
fo
r
,
Wi
d
e
b
a
n
d
M
icro
wa
v
e
Ap
-
p
li
c
a
ti
o
n
s,"
IEE
E
In
t.
M
icr
o
w
a
v
e
S
y
mp
,
P
h
il
a
d
e
lp
h
ia,
P
A,
USA,
p
p
.
1
9
7
5
-
1
9
7
8
,
2
0
0
3
.
[1
7
]
H.
Wad
a
,
T.
Tak
a
m
o
ri,
a
n
d
T.
Ka
m
ij
o
h
,
"
Ro
o
m
tem
p
e
ra
tu
re
p
h
o
to
p
u
m
p
e
d
o
p
e
ra
ti
o
n
o
f
1
.
5
8
m
v
e
rti
c
a
l
-
c
a
v
it
y
las
e
rs fab
rica
ted
o
n
S
i
su
b
stra
tes
u
sin
g
wa
fe
r
b
o
n
d
i
n
g
,
"
IE
EE
P
h
o
t
o
n
.
T
e
c
h
n
o
l.
L
e
tt
.
,
v
o
l.
8
,
p
p
.
1
8
1
–
1
9
8
,
1
9
9
7
.
[1
8
]
N.
M
.
M
a
r
g
a
li
t,
D.
I.
Ba
b
ic,
K.
S
t
re
u
b
e
l,
R.
P
.
M
iri
n
,
R.
L.
Na
o
n
e
,
J.
E.
Bo
we
rs,
a
n
d
E
.
L.
Hu
,
"
S
u
b
m
il
li
a
m
p
l
o
n
g
-
wa
v
e
len
g
th
v
e
rti
c
a
l
c
a
v
it
y
las
e
rs,"
El
e
c
tro
n
.
L
e
tt
.
,
v
o
l.
3
2
,
p
p
.
1
6
7
5
–
1
6
7
7
,
A
u
g
.
1
9
9
6
.
[1
9
]
Z.
H.
Zh
u
,
F
.
E
.
E
jec
k
a
m
,
Y.
Qi
a
n
,
J.
Zh
a
n
g
,
G
.
L.
Ch
r
isten
so
n
,
a
n
d
Y.
H.
L
o
,
"
Wafe
r
-
b
o
n
d
in
g
t
e
c
h
n
o
l
o
g
y
a
n
d
it
s
a
p
p
li
c
a
ti
o
n
s
i
n
o
p
to
e
lec
tro
n
ic
d
e
v
ice
s
a
n
d
m
a
teria
ls,"
IEE
E
J
.
S
e
lec
t.
T
o
p
ics
Qu
a
n
tu
m
E
lec
tro
n
.
,
v
o
l.
3
,
n
o
.
3
,
p
p
.
9
2
7
–
9
3
6
,
1
9
9
7
.
[2
0
]
S
.
M
a
tsu
o
,
K.
Tate
n
o
,
T.
Na
k
a
h
a
ra
,
H.
Tsu
d
a
,
a
n
d
T.
K
u
ro
k
a
wa
,
"
Us
e
o
f
p
o
l
y
imid
e
b
o
n
d
in
g
f
o
r
h
y
b
ri
d
in
t
e
g
ra
ti
o
n
o
f
a
v
e
rti
c
a
l
c
a
v
it
y
s
u
rfa
c
e
e
m
it
ti
n
g
las
e
r
o
n
a
sili
c
o
n
su
b
stra
te,"
El
e
c
tro
n
ics
L
e
tt
e
rs
.
,
vol
.
3
3
,
n
o
.
3
,
p
p
.
1
1
4
8
–
1
1
4
9
,
1
9
9
7
.
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