In
te
r
n
ation
a
l Jou
rn
al
o
f Po
we
r
Elec
tron
ic
s an
d
D
r
ive S
y
stem
(IJ
PED
S
)
V
o
l.
10, N
o.
3, S
ep 2019,
pp.
1
1
4
1
~1
1
4
7
ISSN: 2088-
8694,
DOI
:
10.11591
/ijpeds.
v10.
i
3.pp1141-1147
1
1
41
Jou
rn
a
l
h
o
me
pa
ge
:
ht
tp:
//i
a
e
score
.
com
/
j
o
u
r
na
l
s
/
i
n
d
e
x
.
p
hp/IJ
PED
S
Thermal oxidation im
provement in sem
iconductor w
a
fer
fabrication
C
h
ristop
h
e
r
Ju
li
an
M
ah
an
d
r
an
, A
bd
u
l
Y
asser
A
b
d
Fatah
, N
u
r
u
l
A
in
i Ba
n
i
,
Ha
zila
h
Ma
d
K
a
id
i
,
Mo
hd
N
a
b
il B
i
n
M
u
h
t
azaru
d
d
i
n,
Moh
d
Ef
fen
d
i
A
m
r
an
Dep
a
rtm
e
nt o
f En
gin
n
eri
n
g
,
Razak F
acu
lt
y of Tech
no
log
y
an
d
I
nf
o
m
a
tics,
Un
i
v
e
rsiti Tekn
o
l
o
g
i
Mal
aysi
a, M
al
ays
i
a
Art
i
cl
e In
fo
ABSTRACT
A
r
tic
le hist
o
r
y
:
R
e
c
e
i
v
e
d
Au
g
1
6
,
2
018
Re
vise
d Jan
1
2
, 2019
Ac
ce
p
t
ed
M
ar 3
, 2
0
19
T
h
e
r
m
a
l
o
x
i
d
a
t
i
o
n
i
s
a
p
r
o
c
e
s
s
d
o
n
e
t
o
g
r
o
w
a
l
a
y
e
r
o
f
o
x
i
d
e
o
n
t
he
s
urf
ace
of
a
s
ili
con wa
f
e
r
at
e
lev
a
ted
tem
p
era
t
ures
t
o
f
o
rm sili
c
on di
o
xi
d
e
.
Us
uall
y
,
i
t
en-
co
unt
ers
i
n
s
t
abi
l
i
t
y
in
o
xi
de
g
rowt
h
an
d
resu
lts
i
n
vari
ati
on
in
t
he
o
xid
e
th
ick
n
ess
f
o
rm
e
d
.
T
h
is
l
e
a
d
s
t
o
dow
ntim
e
o
f
f
urn
ace
and
w
a
f
e
r
s
crap
.
Th
is
st
ud
y
f
o
cuses
o
n
t
h
e
f
acto
r
s
l
e
adin
g
t
o
t
his
phen
o
m
e
no
n
an
d
fi
n
ding
t
h
e
op
tim
u
m
s
etti
ng
s
of
t
h
e
se
f
acto
r
s.
T
he
f
acto
r
s
t
h
at
cau
se
i
n
s
t
a
bi
lity
t
o
ox
id
e
th
ick
n
ess
were
n
arrowed
do
wn
t
o
l
o
cat
ion
o
f
w
af
er
i
n
f
u
rnac
e,
o
xi
dati
on
tim
e,
g
as
f
l
o
w
rat
e
a
nd
t
em
peratu
re.
Characteri
z
atio
n
an
d
op
ti
m
izati
o
n
were
do
ne
u
s
i
n
g
D
esig
n
of
E
x
p
erimen
ts.
F
u
l
l
f
actori
a
l
des
i
g
n
w
as
i
mp
le
me
nt
e
d
us
in
g
4
f
acto
r
s
and
2
l
e
v
e
ls,
resulti
ng
i
n
1
6
runs
.
D
a
ta
a
nal
y
s
is
w
as
d
on
e
using
Mul
tiple
R
egre
ss
i
o
n Analysis i
n
J
M
P software. Act
u
al
vers
u
s
pred
i
cted
pl
ot
i
s
ex
amin
ed
t
o
de
t
e
rmi
n
e
wheth
e
r
the
m
o
del
fi
t
is
s
ignifi
c
ant
.
A
djusted
R
2
v
a
l
u
e
w
as
o
b
t
ain
e
d
at
9
9
.
8%
or
0
.
9
9
8
i
ndicat
in
g
t
h
at th
e
re
i
s
ve
r
y
m
in
im
a
l
vari
ati
on
o
f
t
h
e
d
ata
not
e
x
p
l
a
in
e
d
b
y
t
h
e
m
odel
an
d
th
us
c
o
n
f
i
rm
i
ng
th
at
t
he
m
o
d
e
l
is
g
o
od.
F
r
o
m
the
ef
f
ect
t
est
,
t
he
f
act
ors
w
e
re
n
arrow
e
d
do
wn
f
rom
4
f
acto
r
s
to
3
f
acto
r
s.
L
o
catio
n
f
acto
r
w
as
f
o
u
n
d
t
o
h
a
v
e
no
im
p
a
ct.
S
i
g
n
ificant
f
acto
r
s
t
h
at
h
a
v
e
im
pact
a
re
g
as
f
l
o
w
rate,
oxid
a
ti
on
ti
m
e
a
nd
t
e
m
p
eratu
r
e.
An
aly
z
ing
t
h
e
leverag
e
p
l
o
t
s
a
n
d
l
east
s
q
u
a
re
m
ean
p
lo
ts,
t
e
mpe
rature
w
as
f
o
u
n
d
t
o
h
a
v
e
the
hi
ghes
t
i
mp
act
o
n
ox
id
e
t
h
i
c
knes
s
.
T
h
e
m
o
d
e
l
w
a
s
f
u
rt
h
e
r
anal
yzed
u
s
i
n
g
p
redi
cti
on
profiler
in
J
MP
t
o
find
t
he
o
ptim
um
s
et
ti
ngs
f
o
r
th
erm
a
l
oxidatio
n
p
ro
cess
t
o
m
eet
t
h
e
t
arget
o
x
i
d
e
th
ickn
ess
of
8
00
0A.
Opt
i
mu
m
setting
f
o
r
t
e
mperat
ure
was
f
o
und
to
b
e
at
9
58
C
,
gas
f
low
rate
a
t
lo
w
flow
r
at
e
(H
2
:6
.5
s
l
m
a
n
d
O
2
:
4
.
5
s
lm
),
o
x
i
d
a
tio
n
ti
m
e
a
t
2
8
0
min
and
locati
o
n
o
f
wa
f
e
r
s at b
oth
zo
ne 1
and
zon
e 2.
K
eyw
ord
s
:
Design of expe
riment
s
Silic
o
n
w
a
f
er
Therm
a
l
ox
ida
tio
n
Wa
fer
fa
br
i
cat
i
o
n
Co
pyri
gh
t © 2
019 In
stit
u
t
e
of Advanced
En
gi
neeri
n
g
an
d
S
c
ien
ce.
All
rights
res
e
rv
ed.
Corres
pon
d
i
n
g
Au
th
or:
Ab
du
l
Yasser Ab
d
Fat
a
h
,
Ra
za
k F
a
cult
y of
T
ec
hn
ol
o
gy
a
nd Infor
m
a
t
i
c
s,
Un
iv
e
r
sit
i
Tekn
o
lo
gi
M
al
ay
sia
,
Jala
n
S
u
lta
n Y
a
hya P
etra
,
541
0
0
K
uala
L
u
m
pur
, Ma
l
a
y
si
a
.
Em
ail:
yasser.
kl@
u
tm
.m
y
1.
I
N
TR
OD
U
C
TI
O
N
S
e
m
i
cond
uc
t
o
r chi
p
s or inte
g
r
a
te
d circuits
(IC
) ar
e
extrem
e
l
y m
in
i
a
tu
ri
z
e
d c
h
ip
s
co
nt
ai
nin
g
mul
t
i
p
l
e
com
p
o
n
e
n
t
s
e
m
b
edde
d
w
i
t
h
i
n
[
1-
6].
S
e
m
i
con
d
u
ct
or
m
a
nufac
tur
i
ng
p
r
o
cess
s
t
ar
t
s
w
ith
r
aw
w
a
f
er
,
pred
om
ina
n
tly m
ade
us
i
n
g
s
ili
con
w
a
fers
[
1, 6-9].
T
h
e
se
s
il
i
c
on
w
af
ers
are
p
r
o
c
e
ssed
i
n
t
h
e
w
a
f
er
f
a
b
ri
cat
i
on
line
t
h
ro
u
gh
the
proc
ess
of
o
x
i
dat
i
on,
p
ho
to
lit
h
ogra
p
h
y
,
etch,
d
i
ffu
s
i
o
n,
d
epos
i
tio
n,
i
on
impla
n
tat
i
o
n
an
d
pla
n
ar
i
z
a
t
i
o
n
[2,
6-1
5
].
F
igur
e
1
s
h
ow
s
the
ge
nera
l
se
mic
o
nd
uc
t
or
w
a
f
er
f
abric
a
t
ion
pro
c
ess
flow
[
16].
A
f
ter
w
a
fer
fa
brica
t
i
on
proc
es
s,
t
h
e
w
afe
r
s
a
r
e
sent
f
or
p
ro
be
t
e
s
t
t
o
c
h
ec
k
the
e
l
ec
tric
a
l
d
is
tribu
t
io
ns
a
nd
yie
l
d,
pri
o
r to
s
e
n
din
g
t
o assem
b
ly
a
nd
fi
nal tes
t
[
7,
10-1
3
, 17-
2
0
].
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN:
2
0
8
8
-
8
694
Int J
Pow
El
ec &
D
ri
S
yst
,
Vol
.
10,
N
o.
3
, Se
p
2
019 : 1141 –
1
1
47
1
142
F
i
gur
e 1.
S
e
m
icon
d
u
ct
or w
afe
r
fabrica
tio
n
pr
ocess
fl
ow
O
n
e
o
f
t
he
c
r
i
t
i
c
a
l
p
roc
e
ss
i
n
se
mic
ond
uc
t
o
r
w
a
fer
fabrica
t
i
o
n
is
t
he
t
he
rm
al
o
x
i
dat
i
o
n
proc
ess
[
6
,
8,
9,
1
1,
1
2].
The
r
m
a
l
ox
ida
t
i
o
n
is
a
p
roc
e
ss
d
one
t
o
grow
a
l
a
y
er
o
f
ox
ide
on
t
he
s
ur
fac
e
of
a
w
afer.
Th
erm
a
l
ox
ida
t
ion
l
a
ye
r
ac
t
s
a
s
a
pa
ssi
v
a
t
i
o
n
a
n
d
m
a
ski
n
g
la
ye
r
for
s
i
l
i
c
o
n
d
e
v
i
c
e
s
.
T
h
i
s
p
r
o
c
e
s
s
i
s
d
o
n
e
u
s
i
n
g
ox
ida
t
ion
fur
n
a
ces
a
t
ele
v
a
t
e
d
t
em
per
a
t
u
res
betw
ee
n
6
0
0
°
C
t
o
1
2
50
°
C
t
o
form
s
il
ico
n
d
i
o
x
i
de
l
a
y
er
[
6,
7
,
13,
21].
Ther
e a
r
e
2 m
e
tho
d
s o
f
o
xida
tio
n,
dry
a
nd w
e
t o
x
i
d
a
t
ion,
a
n
d
t
he
y a
r
e
repr
esented
in
(
1)
a
nd (
2
) [6].
Dr
y
Ox
i
d
at
ion
:
Si
+
O
2
→
SiO
2
(
usi
n
g
ox
yge
n,
O
2
) (1)
(1)
Wet O
x
ida
t
i
o
n
:
Si
+ 2
H
2
O
→
SiO
2
+
2
H
2
(
usi
n
g
ste
a
m
,
H
2
O
)
(2)
I
n
s
em
icon
d
u
c
t
or
w
afer
f
abr
i
c
a
ti
o
n
,
the
r
m
a
l
ox
ida
t
io
n
pro
c
ess
i
s
d
one
i
n
o
x
i
d
a
t
i
o
n
fu
r
n
ace
s.
T
hi
s
ox
ida
t
ion furn
a
ce
is
a
n
i
n
te
gr
al
p
art
o
f
w
afe
r
f
abr
i
c
a
t
i
on in
t
he
s
em
ico
n
d
u
c
tor
in
dus
try
[2,
6,
8
,
11,
12,
21].
It
is
a
t
herm
a
l
p
r
o
ce
ssin
g
e
qu
i
p
me
nt
t
ha
t
p
r
o
c
ess
sem
i
c
o
nd
uc
tor
w
a
f
e
rs
a
t
el
ev
at
ed
t
emp
e
ra
t
u
res
to
p
e
rfo
rm
t
h
e
ox
ida
t
ion
proc
ess.
U
sua
l
l
y
,
the
r
m
a
l
o
x
i
d
a
tion
pr
ocess
e
n
c
o
u
n
t
e
r
s
i
n
sta
b
ili
ty
i
n
ox
i
d
e
gr
ow
th.
Thi
s
r
esul
ts
i
n
varia
t
i
o
n
in
t
h
e
o
xi
de
t
hic
k
n
e
ss
f
orm
e
d.
T
w
o
m
ain
impa
cts
of
o
x
i
d
e
thi
c
kn
e
s
s
in
st
ab
il
ity
a
re
d
o
w
n
t
ime
a
n
d
scra
p.
A
s
ther
ma
l
ox
ida
t
ion
has
l
o
ng
pr
oce
ssi
ng
time
,
a
n
y
i
m
p
ac
t
on
t
he
t
ool
c
an
cause
a
l
in
e
do
wn
i
ssu
e
w
h
ic
h
leads
t
o
d
o
w
n
t
im
e.
T
h
i
s
w
i
ll
af
fec
t
t
he
c
ycle
t
i
m
e
a
n
d
on
-
tim
e-de
live
r
y
o
f
p
r
o
d
u
c
ts.
The
c
o
mm
itme
n
t
of
p
ro
d
u
ct de
l
i
v
ery
o
n
time
is
vita
l i
n
a
n
y
in
dustry
[1
2].
Ma
in
ta
in
i
ng
t
h
e
t
o
ol
u
p
tim
e
ha
s
a
l
w
a
y
s
b
ee
n
a
t
e
st
i
n
the
sem
i
c
o
n
d
u
c
t
or
m
anufa
c
t
uri
n
g
i
n
dus
try
as
in
dus
try
ge
ts
m
ore
c
o
mpe
t
i
t
i
v
e
b
y
t
he
d
a
y
[
1
7
,
20,
22-
25]
.
T
o
ol
u
p
time
is
a
n
im
por
tan
t
e
lem
e
n
t
t
ow
ar
ds
t
he
ma
nufac
t
u
r
i
ng
p
ro
duc
t
i
o
n
o
u
t
p
u
t
[2
2].
The
to
ol
s
hou
l
d
b
e
re
li
a
b
l
e
t
o
c
o
pe
w
it
h
the
pr
od
uc
ti
o
n
o
u
t
pu
t
ra
t
e
.
A
n
o
t
her
i
m
pac
t
i
s pro
d
u
ct
s
c
r
ap d
ue
t
o
i
n
s
t
a
b
i
l
ity
i
n
o
x
i
de
th
i
c
kne
ss. S
c
r
a
p
ha
p
pen
s
w
he
n the
ox
i
d
e t
h
i
c
kne
ss
is
out
o
f
the
s
p
eci
fica
t
i
on
li
mits.
This
r
is
k
is
s
c
r
app
i
n
g
a
l
o
t
of
w
a
f
e
r
s;
a
n
o
b
serva
t
i
on
m
a
de
i
n
a
w
a
fe
r
fa
brica
t
i
on
c
o
mpa
n
y
s
h
ow
s
t
h
a
t
a
s
in
g
l
e
run
c
a
n
p
r
o
ce
s
s
up
to
2
88
w
a
fe
rs,
w
h
ich
c
o
u
l
d
resu
lt
in
a
l
ot
o
f
wafers
b
eing wasted.
I
t
i
s
crit
i
c
al
f
or
a
s
emic
on
d
u
c
t
or
p
lan
t
t
o
b
e
p
rod
u
ct
ive
and
e
ffi
c
i
e
nt
.
Th
e
pl
ant
n
e
ed
s
t
o
r
e
d
u
c
e
or
e
l
i
m
in
at
e
a
l
l
fac
t
o
r
s
th
at
d
i
s
ru
pt
i
t
s
out
put
p
erf
o
rma
n
ce
.
On
e
of
t
he
m
a
i
n
foc
u
ses
i
s
t
o
reduce
d
o
w
n
time
o
f
crit
ica
l
t
o
o
l
s
a
nd
impro
v
e
th
e
t
o
ol
s
ava
i
l
a
b
i
l
i
t
y
[
1
7
,
23].
Th
i
s
is
a
v
e
r
y
com
p
l
e
x
are
a
a
s
dow
nt
im
e
re
duc
t
i
o
n
o
f
c
riti
cal
t
oo
l
s
n
e
e
ds
i
nt
en
se
stu
dy
t
h
a
t
an
yth
i
ng
do
n
e
d
o
e
s n
ot
aff
e
c
t
th
e
af
t
e
r p
r
o
d
u
c
t
. Equ
ip
ment
down
t
i
m
e
i
s
i
ne
vit
a
bl
e
in
a
w
a
f
e
r
f
ab
ri
cat
ion
p
l
ant
a
n
d
a
si
ng
l
e
m
a
c
hi
n
e
dow
n
c
o
u
l
d
af
fec
t
t
he
d
o
w
nstre
a
m
pr
o
duc
t
i
on
proce
s
s
[2
6].
In
g
e
n
era
l
,
e
q
u
i
pm
ent
dow
nt
i
m
e
due
t
o
the
r
m
a
l
ox
i
dat
i
on
furna
c
e
s
a
re
l
ong
beca
u
s
e
o
n
c
e
the
t
r
ou
bl
esh
o
o
t
i
ng
i
s
d
o
n
e
,
t
h
e
to
ol
n
eed
s
to
b
e
t
e
ste
d
a
n
d
e
ac
h
t
est
ru
n
i
s
l
on
g
due
t
o
l
ong
o
xid
a
ti
on
proce
s
s
t
i
m
e
s.
In
t
h
e
o
p
e
ra
tion
o
f
t
h
e
rma
l
o
x
i
d
a
t
i
on
f
u
r
n
aces
,
mu
lt
ip
l
e
i
np
ut
var
i
ab
le
s
a
r
e
pre
s
ent
i
.
e.
t
e
m
pe
rature
,
gas,
p
r
e
ssure,
proce
s
s
dur
at
ion
a
nd
z
ona
l
l
o
cat
i
on
of
t
he
f
ur
na
ce
.
The
s
e
in
p
u
t
va
r
i
ab
l
e
s
ca
n
ha
ve
c
ontro
l
i
s
su
es
t
h
a
t
can
a
f
f
e
c
t
t
h
e
p
e
rforma
n
ce
o
f
t
h
e
fu
rn
a
c
e
.
On
e
d
o
mi
nan
t
pro
b
l
e
m
i
n
th
e
t
h
erm
a
l ox
ida
t
i
o
n
pr
ocess
i
s
t
h
e
i
n
s
t
a
b
ilit
y
in
t
h
e
t
h
e
rmal
o
x
i
d
a
t
i
o
n
p
r
o
c
e
ss
w
h
i
c
h
c
a
u
s
e
s
v
a
ri
atio
n
in
o
xi
d
e
t
hi
ckness.
T
his
leads
to
dow
nt
i
m
e
of
f
urnace
s
a
nd
w
a
fe
r
sc
rap
[2
2,
1
].
T
hi
s
s
t
u
d
y
f
ocu
s
e
s
on
i
d
e
nt
i
f
yi
ng
t
h
e
f
a
c
to
rs
i
n
th
erma
l
ox
ida
t
ion
proc
ess
t
h
a
t
a
ffe
c
t
the
var
i
a
t
i
on
of
o
x
i
de
t
h
i
c
k
ness.
T
h
e
n
,
t
h
e
s
e
f
a
c
t
o
r
s
a
r
e
b
e
i
n
g
a
n
a
l
y
z
e
d
a
n
d
cha
r
ac
t
e
rize
d
b
y
u
sin
g
d
es
i
gn
of
e
x
p
e
r
ime
n
t
(D
O
E
)
fo
llow
i
ng
t
he
s
t
u
dy
m
a
d
e
by
Y
o
u
e
t
a
l
i
n
2
0
0
6
,
al
b
e
it
o
n
di
ffe
re
nt
p
r
o
ce
ss
an
d
so
f
t
w
a
re
u
se
d
[11].
The
resul
t
s
w
i
l
l
t
hen
b
e
use
d
t
o
deve
l
op
p
r
oces
s
op
tim
iza
t
i
o
n
of
t
he
therm
a
l o
x
i
d
a
t
i
on pr
oc
ess.
Evaluation Warning : The document was created with Spire.PDF for Python.
Int J
P
o
w
E
l
e
c
&
D
ri S
yst
IS
S
N
:
2088-
86
94
T
h
erm
a
l ox
ida
t
io
n im
p
r
ovem
e
n
t i
n
sem
i
c
o
n
d
u
c
t
or
wa
fer
fa
br
ica
t
i
o
n
(Chri
s
t
o
p
h
er J
u
li
a
n
M
aha
n
d
ra
n)
1
143
2.
RESEARCH
M
ETH
O
D
I
n
o
rder
t
o
ide
n
ti
fy
p
oss
i
b
l
e
fa
ct
ors
tha
t
a
ffec
t
s
t
h
e
var
i
at
i
o
n
of
o
xid
e
t
hic
k
n
e
ss,
a
c
a
u
se
a
nd
e
ffect
(Ishikaw
a
d
ia
g
r
a
m
)
w
a
s
de
velo
pe
d.
T
hi
s
i
s
d
o
n
e
b
y
b
ra
i
n
s
t
orm
i
ng
s
essions
with
t
he
t
ea
m
members
(Figur
e
2).
Throu
g
h
t
h
e
d
ia
gram
,
eve
r
y
si
ng
le
pos
si
bl
e
r
o
o
t
c
a
u
se
i
s
l
i
s
t
e
d
o
ut.
Thi
s
h
e
l
ps
t
o
c
o
ver
al
l
p
o
ss
ibi
l
i
t
i
es
befor
e
t
he
s
c
o
pe
i
s
nar
r
ow
ed
dow
n
int
o
a
s
peci
fic
a
r
ea
.
The
fa
c
to
rs
i
d
e
nt
ifi
e
d
to
b
e
c
o
nt
ri
b
u
ti
ng
t
o
i
n
st
a
b
il
i
t
y
in
t
he
t
herm
al
o
x
i
dat
i
o
n
proc
e
s
s
w
a
s
fur
t
he
r
stu
d
i
e
d
usin
g
sta
t
is
tica
l
a
na
l
y
s
i
s
to
ol
s
t
o
f
i
nd
o
u
t
t
h
e
s
o
u
r
ce
o
f
v
a
ri
a
t
ion
.
T
hi
s
i
s
don
e
by
a
do
pt
i
ng
d
e
sig
n
o
f
exp
e
ri
me
nt
s
(DOE)
,
w
h
ere
i
t
i
s
sh
ow
n
i
n
F
i
gur
e
3,
t
he
l
eft
par
t
of
t
he
f
ig
ur
e
show
s
desi
g
n
p
l
a
n
n
in
g
a
n
d
l
e
ft
p
art
sh
ow
s
the
fu
l
l
fa
c
t
or
i
a
l
des
i
gn
for
4
fac
t
or
(
F
i
gu
re
3
)
.
Tab
l
e
1 show
s
the
4 fac
t
ors w
i
t
h
2
l
e
v
e
l
s be
ing
imp
l
em
en
te
d
for
D
O
E
purpos
e
.
Fi
g
u
re
2
.
Is
h
i
ka
wa
d
i
a
g
r
a
m
Tab
l
e 1.
D
O
E
fa
c
t
o
rs w
it
h lo
w
and hi
gh le
v
e
ls
Fa
ct
o
r
s
Le
ve
ls
Lo
w
Hig
h
T
e
m
p
er
atu
r
e
(
C)
920
980
G
a
s
Flow
i
n Ra
tio of
H
2
:
O
2
,
(sta
n
d
a
rd
lit
e
r
p
e
r
min
u
t
e
, slm
)
6.
5:4.
5
7.
5:5.
0
O
x
ida
tion
T
i
m
e
(
m
i
n)
260
300
L
o
c
a
ti
on i
n
F
urna
ce
Z
one
1
Z
one
2
T
h
e
e
x
p
e
r
i
m
e
n
t
w
a
s
d
e
v
e
l
o
p
e
d
b
a
s
e
d
o
n
D
O
E
m
e
t
h
o
d
.
T
h
i
s
m
e
t
h
o
d
w
as
u
se
d
t
o
a
na
l
y
z
e
t
he
e
ffec
t
s
of
i
n
d
i
v
i
dua
l
v
a
riab
les
an
d
to
f
i
nd
t
h
e
o
p
ti
m
u
m
com
b
i
n
a
tio
n
of
val
u
es
f
or
t
he
p
roce
ss
v
a
r
ia
bles
i
n
or
der
t
o
impro
v
e
t
h
e
p
r
oc
ess.
T
he
e
x
p
e
r
ime
n
t
a
l
de
sig
n
f
or
t
he
D
O
E
o
f
t
h
i
s
pro
j
ect
w
as
d
one
u
sin
g
a
f
u
ll
fa
ctor
ia
l
des
i
g
n
w
i
t
h
4
f
act
ors
an
d
2
l
e
vel
s
,
i
n
w
hic
h
2
4
o
r
1
6
c
o
m
bina
t
i
o
n
s
a
r
e
re
quire
d
resu
l
t
i
n
g
i
n
1
6
run
s
.
Th
e
expe
r
i
me
n
t
a
l
d
esi
gn m
a
tri
x
wa
s
gene
r
ate
d
b
y us
in
g JMP
(Fig
ure
3
)
[1,
27].
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN:
2
0
8
8
-
8
694
Int J
Pow
El
ec &
D
ri
S
yst
,
Vol
.
10,
N
o.
3
, Se
p
2
019 : 1141 –
1
1
47
1
144
F
i
gure
3. D
O
E
ful
l fact
oria
l
d
e
sign
p
l
a
n
n
i
n
g
u
s
i
n
g
J
M
P
(le
ft),
the 4
fac
t
or
s desi
gn (
r
ight)
3.
RESULT
S
A
N
D
ANALY
S
IS
I
n
t
h
i
s
s
e
c
t
i
o
n
,
t
h
e
r
e
s
u
l
t
s
o
f
r
e
s
e
a
r
c
h
a
r
e
s
h
o
w
n
a
n
d
d
i
s
c
u
s
s
e
d.
T
he
re
a
re
t
hre
e
d
iffer
e
n
t
s
u
b
-
sect
io
ns
f
or
r
es
ults in deter
m
i
n
i
n
g
the
fac
t
or
s
t
h
at
a
ffect
i
n
g
t
h
e
o
x
i
da
t
i
on of the
w
a
f
er
.
These
s
u
b-sect
io
ns
a
r
e
the
fac
t
ors
tha
t
a
ffec
t
i
n
g
t
he
p
roc
e
ss,
t
he
r
esu
l
t
o
f
D
O
E
a
nd
t
he
o
p
tim
u
m
s
etting
s
a
s
fou
n
d
f
rom
the
D
O
E
stud
y.
3.1.
Fact
ors af
fec
t
in
g th
e p
r
oce
s
s
Thr
o
u
g
h
t
h
e
I
s
h
i
ka
w
a
d
ia
gra
m
(
F
i
gure
4),
eve
r
y
si
n
g
le
poss
i
b
l
e
r
o
ot
c
a
u
se
u
n
d
er
c
ategor
ies
M
a
n,
Mac
h
i
n
e,
M
a
t
e
r
ial,
M
e
t
ho
d
a
nd
En
v
i
ro
nme
n
t
w
e
re
liste
d ou
t
s
o
t
h
a
t
a
ny
p
o
s
si
bi
l
i
ti
es
a
re
n
o
t
m
i
sse
d
ou
t
.
T
hi
s
is
h
e
l
pf
u
l
t
o
c
ove
r
al
l
possi
b
ili
ti
es
b
e
f
or
e
t
h
e
sco
p
e
is
n
a
r
r
o
w
e
d
dow
n
i
n
to
a
s
pe
ci
fic
a
r
ea
.
Based
o
n
t
he
Ish
i
k
a
wa
d
i
a
g
r
am,
t
h
e
f
act
o
r
s
i
d
ent
i
f
i
e
d
to
h
av
e
cont
ri
bu
tio
n
o
n
t
h
e
pr
ocess
w
a
s
fou
n
d
t
o
be
from
th
e
ma
chine
c
a
t
e
g
ory,
c
ons
i
s
t
i
n
g
o
f
furnac
e
te
m
p
era
t
ur
e,
g
a
s
f
l
o
w
s
,
o
x
i
da
ti
on
t
i
m
e
a
nd
lo
c
a
tio
n
o
f
w
a
f
e
r
s
in
t
he
f
u
rnace
[6].
Evaluation Warning : The document was created with Spire.PDF for Python.
Int J
P
o
w
E
l
e
c
&
D
ri S
yst
IS
S
N
:
2088-
86
94
T
h
erm
a
l ox
ida
t
io
n im
p
r
ovem
e
n
t i
n
sem
i
c
o
n
d
u
c
t
or
wa
fer
fa
br
ica
t
i
o
n
(Chri
s
t
o
p
h
er J
u
li
a
n
M
aha
n
d
ra
n)
1
145
F
i
gure
4.
I
shik
aw
a
diagra
m
for
pote
n
t
i
al
c
a
u
ses
of
t
he
rma
l
oxi
d
a
tio
n
thic
kne
ss
i
nsta
b
i
l
i
ty
3.2.
Res
u
l
t
s o
f
D
O
E
O
n
c
e
t
he
f
a
c
t
o
rs
t
ha
t
a
f
fe
c
t
i
ng
t
h
e
pe
rform
anc
e
o
f
the
proc
ess
h
a
d
been
d
ete
r
mine
d,
t
h
e
e
xper
i
m
e
nt
w
ill
the
n
b
e
ca
r
r
ied
o
u
t
a
ccor
d
in
g
to
t
he
r
un
o
r
d
er
w
here
b
y
t
he
1
6
run
s
w
er
e
r
a
ndom
ly
a
rr
anged.
F
or
e
a
c
h
run,
t
he
v
ar
i
a
b
l
e
s
a
re
v
a
r
ie
d
a
c
c
o
rd
in
g
t
o
t
he
t
a
b
l
e
a
nd
t
he
c
o
rrespo
n
d
i
n
g
ox
i
d
e
th
ic
k
n
es
s
on
t
h
e
test
w
afe
r
i
s
the
n
m
ea
sured.
The
d
ata
for
the
D
O
E
i
s
sho
w
n in Ta
b
l
e
2.
Ta
b
l
e
2.
DOE data
for
2
4
= 1
6
runs
R
un
Tem
p
G
a
s
Ox
T
im
e
(m
i
n
s
)
L
o
c
a
t
i
on
5
Avg
Th
i
c
k
Ran
g
e
St
d
De
v
(
a
ngstrom
,
A)
1
9
8
0
L
o
w
300
Z
one
1
9527
9613
9432
9444
9642
9532
210
95.
4
2
9
8
0
L
o
w
300
Z
one
2
9629
9525
9401
9624
9538
9543
228
92.
8
3
9
2
0
H
i
300
Z
one
1
6712
6592
6610
6517
6409
6568
303
112.
9
4
9
2
0
L
o
w
260
Z
one
1
5865
5720
5666
5811
5711
5755
199
81.
1
5
9
2
0
L
o
w
300
Z
one
1
6414
6300
6317
6298
6210
6308
204
72.
6
6
9
2
0
L
o
w
260
Z
one
2
5747
5822
5917
5738
5922
5829
184
88.
7
7
9
8
0
H
i
260
Z
one
2
9116
9189
9037
9201
9024
9113
177
82.
5
8
9
8
0
H
i
260
Z
one
1
9044
9121
9218
9017
8888
9058
330
122.
8
9
9
2
0
H
i
260
Z
one
2
6021
5977
6149
6221
5930
6060
291
121.
6
1
0
9
80
L
ow
260
Z
one
1
8780
8921
8817
8700
8699
8783
222
92.
4
1
1
9
80
L
ow
260
Z
one
2
8822
8900
8798
8901
8807
8846
103
50.
8
1
2
9
80
H
i
300
Z
one
2
9812
9745
9903
9875
9888
9845
158
65.
6
1
3
9
20
L
ow
300
Z
one
2
6377
6410
6504
6226
6301
6364
278
105.
9
1
4
9
80
H
i
300
Z
one
1
9911
9774
9837
9710
9801
9807
201
74.
6
1
5
9
20
H
i
300
Z
one
2
6690
6521
6480
6555
6583
6566
210
79.
4
1
6
9
20
H
i
260
Z
one
1
5999
6057
6101
6044
6166
6073
167
63.
3
A
f
ter
the
da
ta
c
ol
lec
tio
n
fro
m
D
O
E
i
s
don
e,
t
he
m
odel
i
s
c
onstr
uc
t
e
d
fr
om
t
he
d
a
t
a
o
f
t
he
D
O
E
,
the
su
i
t
a
b
il
i
t
y
o
f
t
h
e
m
ulti
p
l
e regr
e
s
si
on
mode
l
a
s
a
w
hole
w
a
s che
cked by
refer
r
ing
to
t
he
s
umm
a
r
y
o
f
fit
s
e
ction
(F
i
gur
e
5).
Th
e
coe
fficie
n
t
o
f
d
e
t
erm
i
na
t
i
on
(
R
s
q
uar
e
A
d
j
o
r
R
2
a
dj)
w
a
s
ins
p
ec
te
d
t
o
c
hec
k
i
f
the
mode
l
i
s
g
ood
i
n
t
e
rms
o
f
p
redi
c
t
i
on
abi
l
it
y
.
R
2
ad
j
a
l
wa
y
s
l
i
e
s
b
e
t
w
e
e
n
0
a
n
d
1
.
The
c
l
ose
r
R
2
a
d
j
is
t
o
1,
t
he
pred
ic
ti
on i
s
more
ac
cura
te.
A
c
tua
l
v
er
su
s
pred
icte
d
p
l
ot
i
s
e
x
am
i
n
e
d
t
o
de
t
e
rm
i
n
e
w
h
ethe
r
t
he
m
ode
l
fit
is
s
ig
ni
fic
a
n
t
.
R
2
a
d
j
val
u
e
is
o
b
t
a
i
n
e
d
a
t
99.
8%
o
r
0.
998.
T
h
i
s
i
n
dica
tes
t
h
a
t
99.
8%
of
Y
i
s
pre
d
i
c
t
e
d
b
y
t
he
X
s.
T
his
te
l
l
s
us
t
hat
there
is
v
ery
m
i
nima
l
varia
t
io
n
of
t
he
d
a
t
a
no
t
e
xpla
i
ne
d
by
t
h
e
m
ode
l,
c
on
firm
i
n
g
th
a
t
t
h
i
s
m
ode
l
i
s
g
o
o
d
.
F
r
om
t
he
E
ffe
ct
T
e
s
t,
t
he
e
ffec
t
o
f
L
oc
at
i
on
i
s
f
o
u
nd
n
o
t
t
o
b
e
s
i
g
n
i
f
i
c
a
n
t
,
s
i
n
c
e
p
-
v
a
l
u
e
i
s
m
o
r
e
t
h
a
n
0
.
0
5
.
H
e
nc
e,
onl
y ga
s
flow
,
t
e
mpe
r
ature
an
d
ox
id
a
t
i
o
n
t
i
m
e
f
ac
tor
s
a
r
e
fou
n
d
t
o
h
ave
ef
fec
t
o
n the
o
x
i
de
t
h
i
ckne
ss
3.3.
Optimu
m Setting
T
h
e
t
a
rg
et
o
f
o
x
id
a
t
i
o
n
thi
c
kn
e
s
s
f
o
r
th
i
s
p
a
r
t
i
cu
l
a
r
p
r
o
c
es
s
i
s
8
0
00A
.
T
o
a
c
h
ie
ve
t
h
i
s,
a
f
unc
t
i
on
ca
l
l
e
d
t
he
P
redic
t
i
on
profi
l
er
i
n
J
M
P
w
a
s
used
(
F
i
gure
6).
To
o
pt
im
i
z
e
th
e
com
b
i
n
at
ion
of
t
he
f
ac
t
o
rs,
i
n
t
h
e
Pr
edict
i
on
P
r
o
f
i
l
er
f
u
n
ct
ion,
O
ptim
iza
t
i
o
n
a
n
d
D
e
sira
b
i
l
ity
i
s
se
lec
t
e
d
,
fol
l
ow
ed
b
y
D
e
sira
bil
i
t
y
F
u
n
c
ti
ons
Evaluation Warning : The document was created with Spire.PDF for Python.
I
S
S
N:
2
0
8
8
-
8
694
I
n
t
J Po
w
Elec
&
Dr
i
Sy
st,
Vo
l. 1
0
,
No
. 3
,
S
e
p
2
019
:
1
141
–
1
1
47
1
146
22
2
2
a
nd
t
h
en
s
e
t
t
o
Ma
x
i
mize
D
esir
ab
il
it
y.
T
he
p
r
e
dic
t
io
n
pr
of
i
l
er
fu
nc
ti
on
w
ill
t
h
en
f
i
n
d
t
h
e
opt
im
um
f
a
c
t
o
r
se
tti
n
g
s
to
m
ee
t
Y
(
t
he
oxi
de
t
hic
k
ne
ss
t
ar
ge
t
)
.
F
r
om
t
he
p
r
e
di
cti
o
n
pr
o
f
iler
,
t
he
opt
im
um
s
e
t
t
i
n
g
s
t
o
me
et
t
he
t
a
r
g
et
oxid
e
t
hi
c
k
n
e
ss
o
f
80
00
A
fo
r
tem
p
er
at
ur
e
is
a
bo
ut
9
58
°C.
A
s
f
or
t
he
g
as
f
low
,
o
nl
y
low
e
r
H
a
nd
O
g
a
s
f
l
o
w
(
H
:
6.
5
slm
an
d
O
:
4
.
5
s
lm
)
a
r
e
r
e
q
u
i
r
e
d
.
T
h
i
s
s
a
v
e
s
t
h
e
u
s
a
g
e
o
f
g
a
s
a
n
d
h
e
l
p
s
w
i
t
h
c
o
s
t
s
av
in
gs
i
n
d
i
r
e
c
t
l
y
.
O
x
i
d
a
t
i
on
t
i
m
e
r
e
q
u
i
r
e
d
i
s
a
t
28
0
m
i
n.
L
oc
a
t
i
on
has
no
i
m
p
a
c
t,
a
nd
t
her
e
for
e
b
o
t
h
Z
o
n
e
1
a
n
d
Z
o
n
e
2
c
a
n
b
e
u
t
i
l
i
z
e
d
t
o
r
e
n
d
e
r
t
h
e
s
a
m
e
r
e
sults
(
F
i
gur
e
7)
.
F
i
gur
e
6.
P
r
e
dic
tio
n
pr
of
i
l
er
p
l
o
t
f
o
r
o
p
t
i
m
u
m
pr
oce
s
s
set
tin
gs
F
i
gur
e
7.
O
pt
i
m
um
p
r
o
ce
ss
s
ett
i
ng
s
for
t
h
e
r
m
a
l
oxi
da
t
i
o
n
F
i
g
u
r
e
5
.
M
u
l
t
i
ple
r
e
gr
essi
o
n
a
na
lys
i
s
f
it
m
o
del
4.
CONCLUSION
The
c
h
a
r
ac
ter
i
za
t
i
o
n
a
nd
o
p
t
i
m
i
za
tio
n
w
e
r
e
d
o
n
e
by
usi
ng
D
e
sig
n
o
f
Expe
ri
me
n
t
s
as
m
od
ifi
e
d
f
r
o
m
the
stu
dy
of Y
ou
e
t
a
l,
20
0
6
[
11]
.
F
r
om
t
he
d
e
s
ig
n
of
e
xpe
r
i
m
e
n
t, i
t
is sh
o
wn tha
t th
e
fa
ctors th
a
t
have
im
pa
c
t
on
o
x
ide
t
h
ic
k
n
ess
w
e
r
e
i
de
nti
f
ied
a
n
d
ar
e
f
u
r
t
her
nar
r
ow
ed
d
ow
n
fro
m
4
f
a
c
t
o
r
s
(te
m
p
e
ratu
re
o
f
fu
r
n
ace,
ox
i
d
at
i
o
n
ti
m
e
,
l
o
ca
ti
o
n
i
n
t
h
e
f
u
rnac
e
a
nd
gas
fl
ow
r
ate)
i
n
t
o
3
f
ac
tor
s
o
n
l
y,
w
her
e
t
h
e
l
oc
a
tio
n
fa
c
t
or
w
as
f
o
und
t
o
h
a
v
e
no
i
m
p
ac
t.
S
i
g
ni
f
i
ca
n
t
f
a
c
t
o
r
s
t
ha
t
ha
ve
i
m
p
act
o
n
t
h
e
pr
oc
ess
a
r
e
gas
fl
o
w
r
ate,
oxida
ti
on
tim
e
a
n
d
tem
p
er
a
t
u
r
e.
O
ut
o
f
t
h
e
thr
ee
fa
c
t
ors,
t
em
pera
t
u
re
w
as
f
o
u
n
d
t
o
h
a
v
e
th
e
hi
g
h
est
i
m
p
act
o
n
ox
id
e
th
ic
kne
ss
pr
oc
ess.
ACKNOWLEDGE
ME
N
T
S
The
a
u
t
h
or
s
w
o
u
l
d
like
t
o
e
xpr
e
s
s
t
h
eir
a
p
p
r
ec
ia
ti
on
s
and
gr
at
i
tu
de
s
towa
rds
th
e
Unive
r
si
t
i
Te
k
n
o
l
og
i
Ma
lay
s
i
a
a
nd
M
a
lays
i
a
n
Min
i
s
t
r
y
o
f
E
duc
a
t
ion
f
o
r
f
u
nd
ing
t
h
is
s
tud
y
v
ia
g
ra
nts
R.
K
1
3
0
0
0
0
.
7
7
40.
4J
315
a
nd
Q
.
K
1300
0
0
.
2
5
40.
16H
95
Evaluation Warning : The document was created with Spire.PDF for Python.
Int J
P
o
w
E
l
e
c
&
D
ri S
yst
IS
S
N
:
2088-
86
94
T
h
erm
a
l ox
ida
t
io
n im
p
r
ovem
e
n
t i
n
sem
i
c
o
n
d
u
c
t
or
wa
fer
fa
br
ica
t
i
o
n
(Chri
s
t
o
p
h
er J
u
li
a
n
M
aha
n
d
ra
n)
1
147
REFE
RENCES
[1]
M.
A
.
Ch
ik,
K.
I
b
r
ahim,
M
.
H
.
Saidin
,
F
.
M
.
Y
u
sof,
G
.
De
van
d
r
an
,
and
U.
H
as
him,
“
Dev
e
lopment
of
c
a
p
acit
y
in
di
ces
f
or
s
e
m
ico
n
d
u
cto
r
f
ab
ric
a
t
i
on
,”
201
2 10th
IE
EE In
t
e
rn
ation
a
l
Co
nf
eren
ce on
S
e
mico
n- du
ctor
Elect
ro
n
i
cs
,
ICSE
20
12 -
P
r
o
ceed
in
gs
,
p
p
.
6
4
9
–65
3,
2
0
12.
[2]
L.
Y
e,
M
.
P.
d
e
J
o
n
g
,
T.
K
u
d
erna
c,
W
.
G.
v
an
d
er
W
ie
l
,
a
n
d
J
.
H
u
s
k
e
ns,
“Do
p
i
ng
o
f
s
e
m
i
c
on
ductors
b
y
molecu
lar
mo
no
la
y
e
rs:
mo
no
la
y
e
r
for
m
a
t
i
o
n
,
d
op
a
n
t
d
i
ffu
sion
a
nd
a
pp
li
c
a
t
i
on
s,
”
M
a
teri
als S
c
ien
ce in Sem
i
co
ndu
cto
r
Pr
oces
s
i
ng
,
v
o
l
.
5
7
,
n
o
.
O
c
t
o
b
er 2
016
,
p
p.
166
–172
,
2
017
.
[3]
G.
B
an
ky
a
n
d
K
.
W
o
ng
,
“
T
rou
b
lesh
oo
tin
g
exerci
ses
u
s
i
ng
ci
rcu
i
t
simulat
o
r
sof
t
war
e
:
support
f
o
r
deep
l
earni
ng
i
n
th
e
stud
y
of
e
l
e
ct
ron
i
c
c
i
rcui
ts
,”
Int
e
rn
ati
o
n
a
l
Co
n
f
er
ence on
E
n
g
i
neer
in
g
E
duca
t
ion
, 20
0
7
.
[4]
T.
O
g
unf
unmi
a
n
d
M
.
R
ahm
a
n,
“
A
con
cept
in
ve
n
t
ory
f
o
r
a
n
e
lec
t
ri
c
ci
rcuits
c
o
u
rse:
R
a
tio
nal
e
a
nd
f
un
dam
e
nt
al
topi
cs
,”
ISCAS
2
0
1
0
-
201
0
IEEE
Intern
a
t
io
nal S
y
mpo
s
i
u
m
on Ci
rcu
i
ts
a
nd
Sys
t
ems
:
Nan
o
-Bio Cir
c
u
i
t
F
a
b
r
i
c
s
an
d Syst
ems
,
pp.
2
80
4–
280
7,
2
0
1
0
.
[5]
A.
R
.
S
t
reveler,
M
.
Gei
s
t
,
R
.
R.
A
mm
erman
,
C
.
S
u
lzb
ach,
R.
M
ill
er,
B.
O
ld
s
,
M
.
N
e
l-
s
o
n
,
R.
S
trevel
er,
M.
G
eis
t
,
and
R.
R
.
Ammerm
an,
“
I
dentif
yin
g
a
nd
I
nvestigati
n
g
D
i
ff
icult
Co
n
cepts
i
n
E
n
gi
neeri
n
g
M
echani
c
s
an
d
Elect
ric
Circui
t
s
,”
Pro
ceedi
ngs
of
t
h
e 2
0
0
6
A
m
er- ican
Societ
y
for Eng
i
neeri
ng
Edu
c
a
t
ion Co
nf
e
r
ence
,
p.
227
55
8,
200
6
.
[6]
C
.
B
a
r
k
e
r
,
A
.
B
a
d
o
w
s
k
i
,
B
.
W
hi
t
e
f
i
el
d,
K
.
L
.
L
e
v
i
e
n
,
a
n
d
M
.
D
.
Kores
t
ky
,
“F
act
ors aff
ectin
g th
i
c
k
n
ess
vari
ati
on o
f
S
i
O
2
t
hin
films
gro
w
n
by
w
e
t
o
x
i
datio
n,
”
I
EEE Tra
n
sac
t
io
ns
on
S
e
mic
o
n
d
u
c
t
or Ma
nu
fa
c
t
u
r
in
g
,
vol
.
24,
n
o
.
2
,
p
p
.
34
8–
35
7,
2
01
1.
[7]
N.
W
il
ke,
A
.
M
ulcah
y,
S
.
R.
Y
e
,
a
n
d
A
.
Mo
rrissey
,
“
Process
o
p
ti
mi
zation
an
d
character
i
zatio
n
o
f
s
il
icon
m
i
cro
n
eedl
e
s fa
b
r
icat
ed b
y w
e
t et
ch t
echn
o
lo
gy
,”
M
i
cro
e
lect
ronics
Jou
r
n
a
l
,
vol.
36
,
n
o.
7
,
p
p
.
650–6
56
,
2
005
.
[8]
C.
L
i,
Y
.
Zhang,
a
nd
H
.
Dai,
“
De
s
i
g
n
a
n
d
i
m
p
l
e
m
e
ntatio
n
o
f
t
he
con
t
rol
s
y
ste
m
t
o
v
acuu
m
d
iff
u
sio
n
f
u
r
nace,”
Pr
oceed
ing
s
o
f
th
e 32
nd
Chi
n
ese
Co
ntro
l Co
nf
erence
,
p
p
. 6
42
8–
64
32
, 20
1
3
.
[9]
J.
O
ju
r
D
e
nnis
,
F
.
Ah
m
a
d
,
M
.
Haris
Md
K
hir,
a
nd
N
or
H
is
ham
B
H
a
mid
,
“
An
a
l
y
s
is
o
f
bo
nd
in
g
fa
ilure
in
C
MOS
MEM
S
ch
i
ps,”
201
3 IEEE Sen
s
ors Ap
p
l
i
c
atio
ns
Sym
pos
iu
m,
S
A
S 2
013
-
P
r
o
cee
d
i
n
g
s
, pp
. 13
7
–
1
4
1
, 2
01
3.
[10]
Y
.
J
.
P
a
r
k
a
n
d
H
.
R
.
H
w
a
n
g
,
“
M
i
n
i
m
i
z
a
t
i
o
n
o
f
T
o
t
a
l
P
r
o
c
e
s
s
i
n
g
T
im
e
i
n
S
em
i
c
on
duct
o
r
Ph
ot
olith
o
g
-
r
aph
y
P
r
oces
s,”
A
ppli
e
d M
echan
ics and
M
a
t
e
ri
als
,
v
o
l.
3
25
-326
,
p
p
.
8
8
–
93
,
2
013
.
[11]
H.
Y
ou
,
X.
J
ia,
an
d
S
.
W
an
g,
“
T
h
e
charact
e
r
i
z
a
t
i
on
an
d
op
timiza
t
i
on
o
f
th
e
th
ermal
oxidatio
n
p
r
ocess
equi
pm
ent
us
in
g
ex
perim
e
n
t
al
d
esi
g
n
and
d
a
ta
t
ran
s
f
o
rmatio
n,
”
2
0
0
6
2
5
th
Int
e
rnati
o
n
a
l Conf
eren
ce on
M
i
cro
e
lectro
nic
s
,
M
I
E
L
20
06 -
Proceed
in
gs
,
pp
.
387
–39
0,
2
0
06.
[12]
A.
S
o
n
ar,
S.
S
h
i
nde,
an
d
S
.
T
eh,
“
A
u
t
om
a
t
i
on:
K
ey
t
o
cycl
e
time
i
mp
rov
e
me
n
t
i
n
se
m
i
c
o
nd
uc
tor
ma
n
u
fa
c
t
ur
in
g,
”
ASM
C
(
A
dva
n
ce
d
Semi
con
duct
o
r
M
a
nufa
c
tu
r
i
n
g
Co
nf
erence)
Proceedi
n
g
s
,
p
p.
93–98
,
2
01
3.
[13]
R.
P
.
Ch
auhan
an
d
C.
N
arula,
“
En
han
ced
c
o
n
d
u
ct
ion
i
n
C
d
S
e
n
a
no
w
i
r
es
o
n
20
0keV
p
h
o
s
p
horo
u
s
n
e
gati
ve
i
on
im
plan
ta
t
i
on,
”
Ma
te
r
i
a
l
s
R
e
se
a
r
c
h
Bu
ll
e
t
in
,
vol.
108
,
n
o
.
J
un
e,
pp.
242
–2
49
,
20
1
8
.
[14]
S
.
L
ee,
J
.
W
o
n
,
J
.
Ch
o
i
,
J
.
P
ark
,
Y
.
Jee,
H
.
Lee,
a
n
d
D
.
Byun,
“
C
om
parat
i
v
e
s
tudy
on
t
he
p
rop
e
rties
of
a
mo
rph
o
u
s
c
a
r
b
o
n
la
yers
d
epo
s
ite
d
from
1
-h
e
x
e
n
e
a
n
d
pro
p
y
le
ne
f
or
d
ry
e
tc
h
h
a
rd
m
ask
ap
pl
icati
o
n
i
n
s
emi
c
on
duct
o
r
dev
i
ce
m
a
nu
f
acturi
n
g
,
”
Thin
Solid
Fil
m
s
,
vol.
519
,
n
o
.
20,
p
p
.
6
68
3–6
68
7,
201
1.
[15]
H.
S
.
Kim,
S
.
K.
E
o
m
,
K.
S
.
Seo
,
H
.
Kim,
a
n
d
H
.
Y.
C
ha,
“T
i
m
e-d
ep
enden
t
d
i
e
lectri
c
b
r
eakdo
wn
o
f
recess
e
d
Al
GaN/GaN
-
on-
S
i MOS-
H
F
ET
s
w
i
t
h
P
E
C
VD S
i
O2
g
a
t
e o
x
id
e,”
Va
c
u
um
, v
ol
. 15
5
, no
.
J
u
n
e,
pp
.
4
2
8
–
4
3
3
, 2
01
8.
[16]
M
.
D
.
Gu
ang
hua
H
an
,
S
huy
u
S
u
n
,
“
Cap
acit
y
C
o
l
l
a
bo
rati
on
in
S
em
i
c
onduct
o
r
Su
ppl
y
C
hain
w
it
h
Failure
R
isk
and
Lo
ng
-term
P
r
ofit,
”
in
Su
pp
ly Ch
a
i
n M
ana
gem
e
nt
,
P
.
Li,
E
d.
I
n
T
ech,
201
1,
c
h.
8
,
pp.
1
8
5–2
00
,
2
011.
[17]
B.
L
i,
F
.
Y
a
ng
,
a
n
d
D
.
Z
ho
u
,
“
E
v
i
d
en
ce
f
o
r
s
e
lf
-o
rgan
ized criti
c
a
l
ity
i
n
un
sc
he
d
u
le
d
d
o
wnt
i
m
e
d
a
t
a
o
f
e
qu
ip
me
n
t
,”
Jou
r
n
a
l
o
f
System
s
E
n
g
i
neerin
g
a
n
d
El
ectr
o
n
i
cs
,
vo
l.
25,
n
o
.
6
,
pp.
1
02
0–
102
6,
2014
.
[18]
Y.
-C.
Ch
en
,
R.
S
.
C
h
en
,
C.
P
.
Ye,
an
d
H.
M
.
Su
n,
“
R
F
ID
A
p
p
l
icat
ion
on
M
an
uf
act
urin
g
P
r
oc
es
s
Co
ntro
l
i
n
S
e
m
i
co
ndu
cto
r
I
nd
us
try
,
”
Pr
ocee
d
i
ng
s
of
th
e
W
o
rld
Con
g
r
e
ss
on
En
gi
neer
ing
, vo
l
. 2
, p
p.
3–
5
,
2
0
1
3
.
[19]
S
.
G
r
u
b
i
c
,
J
.
R
e
s
t
r
e
p
o
,
J
.
M
.
A
l
l
e
r
,
B
.
L
u
,
a
n
d
T
.
G
.
H
a
b
e
t
l
e
r
,
“
A
New
Co
ncep
t
f
o
r
Onli
ne
S
urg
e
T
est
i
n
g
f
or
t
he
Det
ecti
on
of
W
in
din
g
I
nsul
ati
o
n
D
e
terio
r
ati
on
i
n
L
o
w
-V
oltag
e
I
n
duct
i
o
n
M
achi
n
es,
”
IE
EE T
r
ans
actio
ns
o
n
Industry App
l
ica
t
ion
s
,
v
o
l.
47,
n
o
.
5
,
p
p
.
20
51–
2058
,
2
0
1
1
.
[20]
X
.
Z
h
u
,
“
A
n
a
l
y
s
i
s
a
n
d
i
m
p
r
o
v
e
m
e
n
t
o
f
e
n
t
e
r
p
r
i
s
e
’
s
e
q
u
i
p
m
e
n
t
e
f
f
ecti
v
en
essb
ased
o
n
O
E
E
,
”
20
11
In
-
ter
nat
io
n
a
l
Con
f
er
ence o
n
Electr
onics
,
Commu
ni
cati
on
s
a
nd Con
t
r
o
l, ICECC 2
0
1
1
- Pro
ceeding
s
, pp
.
4
16
7
–
4
1
7
1
, 2
01
1.
[21]
L.
M
¨
o
n
c
h,
J
.
W.
F
ow
l
e
r,
S
.
Dauz`
e
re-P´
e
r`es,
S
.
J
.
M
as
on,
and
O.
R
o
s
e
,
“
A
su
r
v
e
y
o
f
p
r
ob
le
m
s
,
so
lu
tio
n
tech
ni
qu
es,
and
f
u
tu
re
c
hall
eng
e
s
in
s
ched
ulin
g
sem
i
co
nd
uct
o
r
m
anu
f
act
uri
n
g
operat
i
on
s,
”
Jo
urnal
o
f
S
c
hed
u
lin
g
,
vo
l.
1
4
,
n
o.
6
,
p
p
.
583
–5
99
,
2
011
.
[22]
M
.
C
zerniak
,
A
.
I
f
ould
,
M
.
M
o
o
n
ey
,
an
d
A.
M
aio
r
ana,
“
M
a
inten
a
nc
e
p
o
o
l
i
ng
t
o
m
aximi
ze
f
a
b
u
p
t
i
m
e
,”
ASMC
(
A
d
v
an
ced S
e
mico
nd
uct
o
r M
a
n
u
f
a
ct
uring
Conference)
P
r
oceed
ings
, p
p
. 21
6
–
2
2
0
, 2
01
2.
[23]
C.
P
.
Ahire
and
A.
S
.
Relka
r
,
“C
orrel
a
ti
ng
f
a
il
ure
mode
e
ff
ect
an
aly
s
i
s
(
F
M
E
A
)
&
ov
erall
equip
m
e
n
t
e
f
f
ectiv
enes
s
(OEE),”
Pro
cedia E
ngin
e
er
in
g
,
v
o
l.
38
, p
p.
3
48
2–
34
86
, 20
1
2
.
[24]
W.
Y
an
g
and
R.
C
o
u
rt,
“Ex
p
eri
m
en
tal
st
ud
y
o
n
t
he
o
ptim
u
m
t
im
e
f
o
r
c
on
duct
i
n
g
b
earing
m
a
in
ten
a
nce,
”
M
e
a
s
u
r
emen
t: Jo
ur
na
l o
f
t
h
e Inter
n
a
t
i
onal M
e
asur
ement
Confed
era
tio
n
,
vol.
4
6
,
no
.
8
,
pp
.
2
7
8
1–279
1,
2
0
13.
[25]
S
.
S
h
a
w
n
L
e
e
,
C
.
S
h
a
o
,
T
.
H
y
u
n
g
K
i
m
,
S
.
J
a
c
k
H
u
,
E
.
K
a
n
n
a
t
e
y
-
A
s
ib
u
,
W
.
W.
C
ai,
J
.
P
atri
ck
S
p
i
cer,
and
J
.
A
.
Ab
ell,
“
Charact
erizati
o
n
of
U
ltraso
n
ic
M
e
t
al
W
e
l
d
-
i
n
g
b
y
Co
rre
lati
ng
O
nl
i
n
e
Sensor
S
ignals
W
ith
W
eld
Attri
butes,
”
J
o
ur
na
l o
f
Man
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