T
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L
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M
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A
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ol
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15,
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20
17,
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1
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[
5]
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nanot
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h
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h c
en
t
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[
6]
.
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pos
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or
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he
m
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8]
.
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11
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.
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t
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agnet
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T
E
L
KO
M
NI
K
A
V
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l.
15
,
N
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.
2,
J
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017
:
7
71
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i
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[
16
-
17]
.
2.
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oj
ec
t
des
i
gn (
a)
Mi
c
r
op
um
p s
et
up (
b)
Mi
c
r
o
c
hanne
l
d
es
i
g
n dr
a
w
i
n
g i
n
m
i
l
l
i
m
et
er
A
s
depi
c
t
ed i
n
F
i
gur
e 1
(
a)
,
t
he m
i
c
r
opum
p c
ons
i
s
t
s
of
t
w
o s
epar
at
e m
odul
e
s
:
an ac
t
uat
i
o
n
m
odul
e and a m
i
c
r
oc
hannel
(
di
f
f
us
er
)
m
odul
e.
A
m
i
c
r
oc
hanne
l
w
as
des
i
g
ned
and dr
a
w
n b
y
us
i
ng
S
o
l
i
d
W
or
k
s
®
3D
C
A
D
s
of
t
w
ar
e
(
D
as
s
a
u
l
t
S
y
s
t
èm
es
S
ol
i
d
W
or
k
s
C
or
p
)
as
s
ho
w
n
F
i
gur
e
1
(b
).
S
i
z
e
of
t
he m
oul
d i
s
4
0
m
m
i
n
w
i
d
t
h
a
nd
63
m
m
i
n
l
en
gt
h
w
it
h
t
he m
i
c
r
oc
hanne
l
w
i
dt
h of
30
m
m
and 5
3
m
m
i
n l
eng
t
h.
T
he
m
i
c
r
oc
hanne
l
i
n
l
et
a
nd out
l
et
di
am
et
er
ar
e 2.
2
m
m
,
t
o be us
ed
w
i
t
h
a 1
m
m
i
nner
di
am
et
er
of
a s
i
l
i
c
o
n t
u
be.
H
ei
gh
t
of
t
he c
han
ne
l
i
s
1
mm
.
T
he ac
t
uat
i
on
m
odul
e c
ons
i
s
t
s
of
t
w
o
po
w
er
i
n
duc
t
or
s
(
C
o
i
l
c
r
af
t
I
nc
,
I
l
l
i
n
oi
s
,
U
S
A
)
,
t
w
o N
dF
eB
m
a
gnet
s
and
a
pr
i
nt
e
d c
i
r
c
ui
t
b
oar
d.
E
ac
h
po
w
er
i
n
duc
t
or
c
om
m
ands
i
t
s
o
w
n f
l
ui
d
di
r
ec
t
i
o
n e
i
t
her
t
o f
l
o
w
i
n
f
or
w
ar
d
or
i
n r
e
v
er
s
ed
di
r
ec
t
i
on
.
M
i
c
r
oc
han
ne
l
m
odul
e
c
ons
i
s
t
s
of
a
di
f
f
us
er
el
em
ent
a
nd
i
s
enc
l
os
e
d
b
y
a
t
h
i
n
s
h
eet
m
e
m
b
r
ane,
m
ade
of
P
D
M
S
pr
e
po
l
y
m
er
m
at
er
i
al
.
F
i
g
ur
e
2
(
a)
a
nd
(
b)
i
l
l
us
t
r
at
es
t
he
ac
t
uat
i
on
op
e
r
at
i
on
i
n
m
agnet
i
z
e
d an
d r
e
pel
l
ed
c
ond
i
t
i
ons
.
(
a)
(
b)
F
i
gur
e
2
.
E
l
ec
t
r
om
agnet
i
c
a
c
t
uat
i
on o
per
at
i
o
n,
(
a)
A
c
t
u
at
i
o
n r
es
po
ns
e t
o
w
ar
ds
v
ol
t
age
and
m
e
m
b
r
ane pos
i
t
i
o
n (
b)
s
c
h
em
at
i
c
i
l
l
us
t
r
at
i
o
n of
ac
t
ua
t
i
on d
ur
i
n
g m
agnet
i
z
e
d an
d r
epe
l
l
e
d
c
ondi
t
i
o
n
Evaluation Warning : The document was created with Spire.PDF for Python.
T
E
L
KO
M
NI
K
A
I
S
S
N
:
1
693
-
6
930
C
har
ac
t
er
i
z
a
t
i
o
n of
E
l
ec
t
r
o
magn
et
i
c
V
a
l
v
el
es
s
M
i
c
r
op
ump
(
M.
Q
.
A
R
us
l
i
)
773
F
i
gur
e 2
(
a)
and (
b)
s
ho
w
t
he os
c
i
l
l
at
i
on of
a N
dF
eB
m
agne
t
i
s
i
nf
l
ue
nc
ed b
y
t
he p
ol
ar
i
t
y
of
t
he
s
up
pl
i
ed
v
ol
t
ag
e
t
o
po
w
er
i
n
duc
t
or
,
ei
t
her
t
o
at
t
r
ac
t
(
goi
ng
do
w
n)
or
r
e
pe
l
(
goi
ng
up)
t
he
m
agnet
.
I
n r
es
t
m
ode (
no
v
o
l
t
ag
e s
upp
l
i
e
d m
ode)
,
t
her
e no i
s
m
ov
em
ent
.
W
he
n t
he pos
i
t
i
v
e
pol
ar
i
t
y
v
o
l
t
a
ge
i
s
i
n
duc
ed,
t
h
e
m
agnet
i
s
at
t
r
ac
t
ed
t
o
w
ar
ds
t
he
po
w
er
i
nduc
t
or
.
T
he
m
e
m
br
ane
i
s
def
l
ec
t
ed
t
o
ex
pel
f
l
ui
d
t
hr
oug
h
t
h
e
c
h
ann
el
.
O
n
t
h
e
ot
her
han
d,
a
t
n
ega
t
i
v
e
p
ol
ar
i
t
y
v
ol
t
age
,
t
he
m
agnet
i
s
r
epe
l
l
ed,
r
es
ul
t
i
ng
t
o
t
h
e
i
nf
l
at
i
on
of
t
h
e
m
e
m
br
ane
and
t
h
us
s
uc
k
s
t
he
f
l
ui
d
i
nt
o
t
he c
ham
ber
.
T
he c
ont
i
nu
ous
c
y
c
l
e of
c
hang
i
ng
v
ol
t
age p
ol
ar
i
t
i
es
t
o at
t
r
ac
t
and r
ep
el
t
h
e
m
agnet
c
r
eat
e a
net
f
l
ui
d
f
l
ow
.
D
i
f
f
er
ent
f
r
equenc
y
g
i
v
es
di
f
f
er
ent
f
l
o
w
r
at
e.
S
i
m
i
l
ar
pum
pi
ng
m
et
hod
ha
v
e
bee
n
d
one
b
y
S
he
n
M.
et
.
al
[
14]
, Z
h
i
C
. e
t.a
l
[
18]
an
d
P
an
T
.
et
.
a
l
[
1
5]
,
but
t
he
di
f
f
er
enc
e i
s
t
he
ac
t
uat
i
n
g
el
em
ent
b
y
us
i
n
g a
r
ot
a
t
i
n
g
m
agnet
,
m
es
h t
y
p
e c
o
i
l
s
a
nd a
D
C
m
i
c
r
o
-
m
ot
or
t
o dr
i
v
e
t
he
f
l
ui
d i
ns
i
d
e a m
i
c
r
oc
hanne
l
.
T
he
num
er
i
c
al
s
i
m
ul
at
i
o
n
s
t
udi
es
t
he
def
l
ec
t
i
on
pr
oper
t
i
es
of
t
he
m
e
m
br
an
e.
T
he
m
e
m
b
r
ane
di
s
p
l
ac
em
ent
,
d
m
i
s
i
nf
l
uenc
e
d
b
y
t
he
s
ur
f
ac
e
c
ont
ac
t
r
at
i
o
bet
w
ee
n
t
h
e
m
agnet
an
d
t
he m
e
m
br
ane,
a
nd t
he
t
hi
c
k
nes
s
of
t
he m
e
m
br
a
ne,
t
.
T
he m
ax
i
m
u
m
def
l
ec
t
i
on
of
t
he
m
e
m
b
r
ane i
s
s
t
udi
e
d us
i
n
g t
he f
i
ni
t
e el
em
ent
ana
l
y
s
i
s
(
F
E
A
)
us
i
ng C
O
M
S
O
L
Mul
t
i
ph
y
s
i
c
s
®
(
C
O
MS
O
L I
nc
,
B
ur
l
i
ngt
o
n,
U
S
A
)
.
T
he dens
i
t
y
,
Y
oun
g’
s
m
odul
us
and P
o
i
s
s
on’
s
r
at
i
o of
t
h
e
P
D
M
S
m
at
er
i
al
c
ur
i
ng at
r
o
om
t
e
m
per
at
ur
e ar
e 965
k
gm
-
3
[
19]
,
1.
32 ×
1
0
6
Pa
[
2
0]
and 0.
4
99
[
2
0]
.
T
he N
dF
e
B
m
agnet
par
am
et
er
s
ar
e
75
00 k
gm
-
3
,
1.
6 ×
10
1
1
P
a a
nd
0.
2
4 r
es
pec
t
i
v
el
y
.
T
he f
or
c
e
w
as
appl
i
e
d
at
1
N
on
t
o
p
of
t
he
m
agnet
i
n
-
z
d
i
r
ec
t
i
on
.
F
i
gur
e
3
i
l
l
us
t
r
a
t
es
one
of
t
he
s
i
m
ul
at
ed
r
es
ul
t
s
ac
qu
i
r
ed f
or
t
h
e m
em
br
ane di
s
pl
a
c
em
ent
at
0.
4 s
ur
f
ac
e c
ont
ac
t
r
at
i
os
.
(
a)
(
b)
F
i
gur
e
3
.
M
em
br
ane def
l
ec
t
i
on c
a
us
e b
y
b
od
y
l
oa
d at
0
.
4 c
ont
ac
t
r
at
i
o (
a)
V
i
e
w
i
n
2D
ax
i
s
-
s
y
m
m
e
t
r
ic
(
b
)
V
ie
w
in
3
D
A
s
depi
c
t
ed f
r
o
m
F
i
gur
e 3
(
a)
,
t
he m
e
m
br
ane def
l
ec
t
i
on f
or
m
s
a t
r
apez
oi
dal
s
hape,
w
her
e t
he m
ax
i
m
u
m
def
l
ec
t
i
on of
t
he m
em
br
ane i
s
c
onc
ent
r
at
ed i
n t
h
e p
i
nc
h r
egi
on
[
12]
.
F
ur
t
her
an
al
y
s
es
f
r
om
t
he s
ur
f
ac
e c
ont
ac
t
s
r
at
i
o
of
0.
1
t
o 0.
9 ar
e
pl
o
t
t
ed
on
t
he
F
i
g
ur
e 4
.
F
i
gur
e
4
.
Se
m
i
-
l
ogar
i
t
hm
gr
aph
w
i
t
h
t
he
f
i
t
t
ed
l
i
ne
of
t
he m
e
m
br
ane di
s
pl
ac
em
ent
w
i
t
h
v
ar
i
at
i
on
of
s
ur
f
ac
e c
ont
ac
t
r
at
i
o f
or
di
f
f
er
ent
m
e
m
br
ane t
hi
c
k
nes
s
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN
:
1
6
9
3
-
6
930
T
E
L
KO
M
NI
K
A
V
o
l.
15
,
N
o
.
2,
J
un
e 2
017
:
7
71
–
7
77
774
F
i
gur
e
4
s
ho
w
s
a
G
aus
s
i
a
n c
har
ac
t
er
i
s
t
i
c
f
or
al
l
m
em
br
ane t
hi
c
k
nes
s
f
r
o
m
0.
1
mm t
o
1
m
m
w
i
t
h t
he
c
ont
ac
t
r
at
i
o f
r
o
m
0.
1 t
o 0.
9.
T
he opt
i
m
al
def
l
ec
t
i
on i
s
obs
er
v
e
d
at
0.
4 c
ont
ac
t
s
ur
f
ac
e r
at
i
o at
al
l
m
e
m
br
a
ne t
hi
c
k
nes
s
.
T
hus
,
f
or
t
hi
s
ex
per
i
m
ent
,
t
he m
i
c
r
oc
hannel
c
ham
ber
i
s
s
et
t
o 1
0
m
m
i
n di
am
et
er
a
nd t
h
e m
agnet
d
i
am
et
er
of
4
m
m
(
1:
0.
4)
.
3.
M
i
c
r
o
p
u
m
p
D
e
s
i
g
n
a
n
d
F
a
b
r
i
c
a
ti
o
n
T
he des
i
gne
d m
i
c
r
oc
hannel
c
ons
i
s
t
s
of
t
w
o e
l
em
ent
s
:
di
f
f
us
er
and
m
e
m
br
ane.
T
he
f
abr
i
c
at
i
o
n
of
a
m
as
t
er
t
em
pl
at
e
f
or
t
he
m
i
c
r
oc
hannel
w
as
us
i
n
g
a
r
ap
i
d
pr
ot
ot
y
p
i
ng
t
ec
hno
l
og
y
t
ec
hni
que
and
t
he
m
e
m
br
ane
w
as
f
abr
i
c
at
e
d
us
i
n
g
a
s
pi
n
c
oat
ed
m
et
hod.
F
i
gur
e
5
s
ho
w
s
t
he
f
abr
i
c
at
i
o
n pr
oc
es
s
of
t
he
m
i
c
r
oc
hannel
m
odul
e.
T
he c
us
t
om
m
as
t
er
t
e
m
pl
at
e
(
m
oul
d
)
wa
s
des
i
g
ned
us
i
ng
c
om
put
er
a
i
de
d
des
i
gn
s
of
t
w
ar
e.
T
he
des
i
g
n
det
ai
l
s
c
an
be
r
ef
er
r
ed
in
F
i
g
ur
e
1
(
b)
.
D
i
gi
t
al
l
i
g
ht
pr
oc
es
s
i
ng (
D
LP
)
m
et
hod w
as
us
ed t
o f
abr
i
c
at
e t
he des
i
gn
ed m
oul
d.
P
hot
opo
l
y
m
er
r
es
i
n
w
as
us
ed f
or
t
h
e m
oul
d m
at
er
i
al
.
T
he f
i
ni
s
h
ed
m
oul
d t
h
en
w
as
be
i
n
g
ex
pos
ed u
nder
a U
V
l
i
ght
f
or
1 hour
t
o m
a
k
e i
t
har
de
n
.
T
he
m
oul
d
w
as
t
h
en b
ei
n
g pour
e
d
w
i
t
h a
P
D
M
S
s
o
l
ut
i
on
w
i
t
h
m
i
x
i
ng
r
at
i
o
1:
1
0
of
c
ur
i
n
g
a
gen
t
and
r
es
i
n
m
onom
er
.
T
he
m
oul
d
w
as
t
hen
c
ur
ed i
ns
i
de
an o
v
e
n at
7
0º
C
f
or
30
m
i
nut
es
[
2
0]
.
F
i
nal
l
y
,
t
he
P
D
MS
s
u
bs
t
r
at
e
w
as
r
em
ov
e
d
f
r
o
m
t
he
m
as
t
er
t
em
pl
at
e.
F
i
gur
e
5
.
F
a
br
i
c
at
i
on
pr
oc
e
dur
e of
a m
i
c
r
oc
hanne
l
m
odul
e
A
m
ec
hani
c
al
m
i
c
r
opum
p
needs
an
ac
t
uat
i
o
n m
e
m
b
r
ane t
o dr
i
v
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e f
l
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ns
i
de t
h
e
c
hanne
l
.
T
hi
s
w
or
k
us
es
t
he
s
am
e
m
at
er
i
al
an
d
s
am
e
m
i
x
i
ng
r
at
i
o
as
t
he
m
i
c
r
oc
hann
el
c
hi
p
f
or
t
he m
e
m
br
ane f
abr
i
c
at
i
on.
A
di
g
i
t
a
l
s
pi
n c
oat
er
m
ac
hi
n
e
w
i
t
h a s
pi
n
ner
w
as
u
s
ed t
o
y
i
e
l
d a
Evaluation Warning : The document was created with Spire.PDF for Python.
T
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C
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e
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T
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o
f
a c
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ed m
e
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s
depend
ed on t
he
pr
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gh
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pee
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s
o t
he v
i
s
c
os
i
t
y
of
t
he pr
ep
ol
y
m
er
m
at
er
i
al
.
F
or
t
hi
s
s
et
u
p,
t
h
e s
pi
n c
oat
er
s
pee
d,
s
pi
n t
i
m
e and pr
epo
l
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w
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g
h
t
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f
i
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ed at
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r
pm
,
120
s
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g t
o
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i
el
d 3
25.
9
µ
m
of
m
e
m
br
ane t
hi
c
k
nes
s
.
F
i
r
s
t
l
y
,
P
D
M
S
s
ol
ut
i
on
w
as
bei
ng
p
our
ed
i
n
a
p
l
as
t
i
c
p
et
r
i
d
i
s
h.
T
hen,
i
t
w
as
p
l
ac
ed
i
n
t
h
e
s
pi
n
c
oat
er
m
ac
hi
ne
f
or
s
pi
nn
i
n
g
pr
oc
es
s
.
A
f
t
er
t
hat
,
i
t
w
as
pl
ac
ed
i
n a
n o
v
en f
or
c
ur
i
ng pr
oc
es
s
.
F
i
na
l
l
y
,
t
h
e m
em
br
ane w
as
s
l
o
w
l
y
p
ee
l
ed
of
f
f
r
o
m
t
he pet
r
i
d
i
s
h.
T
he
f
abr
i
c
at
ed m
e
m
br
ane and m
i
c
r
oc
hannel
ha
v
e t
he s
am
e
s
ur
f
ac
e pr
oper
t
i
es
;
t
her
ef
or
e,
t
h
e bo
ndi
ng b
et
w
een t
he t
w
o i
t
em
s
c
an be m
ade b
y
us
i
ng t
he s
a
m
e
m
at
er
i
al
.
A
pr
epo
l
y
m
er
m
i
x
t
ur
e w
as
r
u
bb
ed
on t
h
e s
ur
f
ac
e bet
w
e
en t
he b
on
ded ar
e
as
.
T
he m
e
m
b
r
ane w
as
al
i
gne
d an
d pl
ac
ed on t
op
of
t
he
m
i
c
r
oc
hannel
.
T
he ai
r
bub
bl
es
,
c
r
eat
ed d
ur
i
n
g
t
he bond
i
n
g
pr
oc
es
s
w
er
e
r
em
ov
ed
us
i
ng
a
des
i
c
c
at
or
m
ac
hi
ne
(
F
4202
5,
B
e
l
A
r
t
,
N
e
w
J
er
s
ey
,
U
S
A
)
bef
or
e
c
ur
i
ng at
70
º
C
f
or
30
m
i
nut
es
[
2
0]
.
F
i
g
ur
e
6
s
ho
w
s
t
he ex
per
i
m
ent
al
s
et
u
p f
or
dr
i
v
i
ng t
h
e
m
i
c
r
opum
p t
o i
n
v
es
t
i
gat
e
t
h
e dr
i
v
i
ng
per
f
or
m
anc
e of
t
he de
v
i
c
e
.
F
i
gur
e
6
.
E
x
per
i
m
ent
s
et
u
p
und
er
a
z
er
o
bac
k
pr
es
s
ur
e
A
s
s
ho
w
n i
n
F
i
gur
e
6
,
t
h
e ac
t
uat
or
m
odul
e
w
as
c
ont
r
ol
l
e
d b
y
a c
on
t
r
ol
l
er
m
odul
e,
c
ons
i
s
t
of
an A
r
du
i
n
o U
no
m
i
c
r
oc
ont
r
ol
l
er
,
a m
ot
or
dr
i
v
er
s
hi
el
d,
buc
k
c
onv
er
t
e
r
s
and a pus
h
but
t
o
n m
odul
e.
A
r
du
i
n
o U
no c
ont
r
ol
s
t
h
e s
w
i
t
c
hi
n
g s
peed of
t
he po
w
er
i
nduc
t
o
r
f
r
o
m
1
H
z t
o
16
H
z
.
I
n ad
di
t
i
on
,
i
t
al
s
o
c
ont
r
ol
s
t
he d
i
r
ec
t
i
o
n of
l
i
q
ui
d f
l
o
w
i
ns
i
de
t
h
e m
i
c
r
oc
h
anne
l
ei
t
her
i
n
f
or
w
ar
d
and
r
ev
er
s
ed d
i
r
ec
t
i
on
b
y
t
ur
n
i
n
g o
n or
of
f
one of
t
he
po
w
er
i
n
duc
t
or
.
I
f
t
h
e f
l
ui
d
w
a
nt
t
o
f
lo
w
i
n
f
or
w
ar
d d
i
r
ec
t
i
on (
f
r
om
l
ef
t
t
o r
i
ght
)
,
t
he c
o
nt
r
o
l
l
er
o
nl
y
n
eeds
t
o
s
end
t
he
s
i
gna
l
t
o t
he
r
i
ght
i
nd
uc
t
or
w
hi
l
e
t
he
l
ef
t
i
nduc
t
or
i
s
of
f
and
v
i
c
e
v
e
r
s
a.
T
he
m
ot
or
dr
i
v
er
s
hi
e
l
d
w
as
us
ed
t
o
c
ont
r
ol
t
he
po
l
ar
i
t
y
of
t
he
s
upp
l
i
e
d
v
o
l
t
ag
e
m
ean
w
h
i
l
e
buc
k
c
onv
er
t
er
s
w
as
b
ei
ng
us
ed
t
o
s
t
ep
-
do
w
n
v
ol
t
age
f
r
o
m
12
V
d
c
t
o 1.
5
V
d
c
f
or
po
w
er
i
n
g t
he
p
o
w
er
i
nd
uc
t
or
s
.
T
he m
edi
u
m
us
ed f
or
t
he
ex
per
i
m
ent
w
as
w
a
t
er
.
T
he
i
nl
e
t
and
o
ut
l
et
t
u
bes
w
er
e
f
r
o
m
a
c
o
m
m
er
c
i
al
l
y
a
v
ai
l
abl
e
A
l
pha
S
i
l
®
s
i
l
i
c
o
n
t
ub
i
ng
w
i
t
h
an
i
nn
er
di
am
et
er
of
1
m
m
and
out
er
di
am
et
er
of
2
mm.
I
t
w
as
as
s
u
m
ed
t
he
f
l
ow
i
s
i
n no
n
-
s
l
i
p c
ond
i
t
i
on.
4.
R
e
s
u
l
t a
n
d
D
i
s
c
u
s
s
i
o
n
T
he f
i
r
s
t
ev
al
uat
i
o
n t
o
t
h
e
pr
opos
e
d e
l
ec
t
r
om
agnet
i
c
ac
t
uat
e
d s
y
s
t
em
w
as
s
t
ud
i
ed o
n
t
he v
el
oc
i
t
y
an
d f
l
o
w
r
at
e
per
f
or
m
anc
e under
a
z
er
o
bac
k
pr
es
s
ur
e c
ondi
t
i
o
n.
F
i
gur
e
7
d
e
p
i
ct
s
t
he m
i
c
r
opum
p per
f
or
m
anc
e pr
of
i
l
e
at
ac
t
uat
i
o
n f
r
eque
nc
i
es
f
r
o
m
1
-
16
H
z
wi
t
h
1
H
z
r
es
o
l
ut
i
on
.
In
F
i
gur
e
7
,
t
he gr
a
ph c
har
ac
t
er
i
s
t
i
c
w
as
i
n g
aus
s
i
an s
hape
w
her
e t
h
e f
l
ui
d f
l
o
w
f
r
om
t
he
ac
t
uat
i
on
f
r
equ
enc
y
f
r
om
1
-
8
H
z
i
nc
r
eas
es
a
nd
f
r
om
10
-
16
H
z
,
t
he
f
l
o
w
r
at
e
dec
r
eas
es
.
Max
i
m
u
m
f
l
ow
r
at
e i
s
ac
hi
ev
e
d a
t
9
H
z
.
T
h
e
f
lo
w
r
e
c
t
if
ic
at
i
on
w
as
ac
hi
e
v
a
bl
e at
a
m
i
ni
m
u
m
ac
t
uat
i
on f
r
eque
nc
y
of
1
H
z
,
g
i
v
i
ng t
he
f
l
o
w
r
at
e of
0.
215
6 µ
Ls
-
1
at
t
h
e a
v
er
ag
e
t
i
m
e
i
n 16.
02
s
/
m
m
.
T
he opt
i
m
u
m
v
al
ue,
w
h
er
e t
he m
e
m
br
ane v
i
br
at
es
at
opt
i
m
u
m
a
m
pl
i
t
ude
w
as
at
9
H
z,
pr
oduc
i
ng
t
h
e
m
ax
i
m
u
m
f
l
o
w
r
at
e
at
0.
9
75
6
µ
Ls
-
1
at
t
h
e
av
er
age
t
i
m
e
i
n
3.
5
133
4
s
/
mm
.
B
ey
o
n
d
9
H
z
of
t
he
dr
i
v
i
ng
f
r
equen
c
y
,
t
he
m
e
m
br
ane
v
i
br
at
i
on
s
t
ar
t
s
t
o
dec
r
eas
e
r
es
ul
t
i
n
g
t
he
f
l
o
w
r
at
e
al
s
o
dec
r
eas
e
d as
t
he
s
y
s
t
em
r
eac
hed
i
t
s
ac
t
uat
or
r
es
ona
nc
e.
F
ur
t
her
m
or
e,
t
h
e
pum
p
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN
:
1
6
9
3
-
6
930
T
E
L
KO
M
NI
K
A
V
o
l.
15
,
N
o
.
2,
J
un
e 2
017
:
7
71
–
7
77
776
per
f
or
m
anc
e w
as
do
n
e
i
n
a
gi
v
en
b
ac
k
pr
es
s
ur
e
t
o
s
how
t
he
c
apa
bi
l
i
t
y
of
t
he
pr
op
os
ed
m
i
c
r
opum
p
s
y
s
t
em
.
F
i
gur
e
8
s
ho
w
s
t
he
r
es
ul
t
s
w
i
t
h
v
ar
i
at
i
o
n
of
ac
t
ua
t
i
o
n
f
r
eque
nc
y
a
nd
bac
k
pr
es
s
ur
e.
T
hi
s
ex
per
i
m
ent
w
as
bas
e
d o
n t
he
h
y
dr
os
t
at
i
c
t
he
or
y
w
h
i
c
h
i
s
i
nf
l
ue
nc
e
o
f
pr
es
s
ur
e i
ns
i
de t
he c
h
am
b
er
s
.
F
i
gur
e
7
.
F
l
o
w
r
at
e
v
s
.
ac
t
u
at
i
o
n f
r
eque
nc
y
F
i
gur
e
8
.
F
l
o
w
r
at
e
v
s
.
bac
k
pr
es
s
ur
e
F
i
gur
e
8
s
h
o
w
s
s
i
x
c
onf
i
gur
at
i
o
n he
i
g
ht
l
e
v
e
l
s
f
r
o
m
0
-
10 m
m
w
i
t
h
2 m
m
r
es
ol
ut
i
o
n.
F
r
o
m
t
he ex
per
i
m
ent
,
t
h
e ac
t
uat
i
o
n f
r
e
quenc
y
at
1 H
z
c
a
n op
er
at
e
up
t
o 2 m
m
H
2O
bac
k
pr
es
s
ur
e at
0.
1
587
µ
Ls
-
1
of
f
l
o
w
r
at
e.
T
he ac
t
uat
i
on f
r
equ
enc
y
of
2 H
z
i
s
c
ap
abl
e t
o
w
i
t
hs
t
a
nd pr
es
s
ur
e
up t
o
4 m
m
H
2O
at
0.
189
2 µ
Ls
-
1
.
T
he
f
r
equenc
i
es
f
r
om
4
-
9 H
z
w
er
e s
t
i
l
l
c
apab
l
e t
o f
l
o
w
t
he
l
i
q
ui
d u
p t
o
10
m
m
H
2O
but
3 H
z
w
as
up t
o 8 m
m
H
2O
onl
y
.
5
.
C
o
n
c
l
u
s
i
o
n
T
hi
s
paper
i
nt
r
oduc
es
t
h
e
pr
el
i
m
i
nar
y
s
t
ud
y
on t
he i
nt
egr
at
i
o
n of
po
w
er
i
nduc
t
or
i
nt
o
m
i
c
r
opum
p s
y
s
t
em
f
or
bi
di
r
ec
t
i
on
al
f
l
o
w
f
l
u
i
d.
I
n
t
he
pr
es
ent
s
t
u
d
y
,
a
n
el
ec
t
r
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Evaluation Warning : The document was created with Spire.PDF for Python.
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R
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[1
]
G
M
W
hi
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i
de
s
.
T
he or
i
gi
n
s
a
nd t
he
f
ut
ur
e of
m
i
c
r
of
l
ui
di
c
s
.
N
at
ur
e.
2
006;
4
42
:
3
68
-
37
3.
[2
]
M
J C
i
ma
.
M
i
c
r
os
y
s
t
em
T
ec
h
nol
og
i
e
s
f
or
M
edi
c
al
A
pp
l
i
c
at
i
ons
.
A
nnua
l
R
ev
i
ew
of
C
hem
i
c
al
a
nd
B
i
om
o
l
e
c
ul
ar
E
ngi
neer
i
ng
.
201
1;
2
:
35
5
-
3
78.
[3
]
X
F
H
uang,
S
J
Li
,
G
Q
W
ang
,
D
Luo,
Y
Li
u,
N
Di
n
g
,
et
al
.
M
i
c
r
opum
p
A
ppl
i
c
at
i
on
f
or
M
i
c
r
o
P
ow
er
S
ys
t
e
m
s:
A
R
e
vi
e
w
.
1
-
4.
[4
]
J
W
e
st
,
M
B
e
cke
r
,
S
T
om
b
r
i
nk
,
A
M
anz
.
M
i
c
r
o T
ot
al
A
nal
y
s
i
s
S
y
s
t
em
s
:
Lat
es
t
A
c
hi
ev
em
ent
s
.
An
al
y
t
i
c
al
C
h
em
i
st
r
y.
20
08;
80
:
4403
-
441
9.
[5
]
A
M
a
n
z
,
N
G
ra
b
e
r,
H
M
W
i
d
m
e
r,
SC
T
e
rry
,
J
H
J
er
m
an,
J
B An
g
e
l
l
.
M
i
ni
at
ur
i
z
ed t
ot
al
c
hem
i
c
al
ana
l
y
s
i
s
s
y
s
t
em
s
:
a
nov
e
l
c
onc
ept
f
or
c
he
m
i
c
al
s
en
s
i
n
g.
I
EEE T
r
a
ns
a
c
t
i
o
ns
on
E
l
ec
t
r
on
D
ev
i
c
e
s
.
1979
;
26
:
244
-
24
8.
[6
]
CA
M
ir
k
in
.
T
he B
e
gi
n
ni
n
g
of
a S
m
al
l
R
ev
ol
ut
i
on.
S
m
a
ll.
2004
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1
:
14
-
16.
[7
]
AK
Da
s
h
,
G
C
C
udw
or
t
h.
T
he
r
apeut
i
c
app
l
i
c
at
i
ons
of
i
m
p
l
a
nt
abl
e
dr
ug
del
i
v
er
y
s
y
s
t
e
m
s
.
J
ou
r
n
a
l
of
phar
m
ac
o
l
og
i
c
a
l
a
nd t
o
x
i
c
ol
og
i
c
al
m
et
ho
ds
.
1998
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40
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1
-
1
2.
[8
]
P
F
or
out
a
n,
A
D
D
j
adi
d,
R
N
adaf
i
,
F
B
ar
az
andeh
,
A
M
M
ahdi
abad
i
.
P
r
oc
es
s
de
s
i
gn a
n
d
m
i
c
r
of
abr
i
c
at
i
o
n of
a
no
v
el
l
a
b
on
a
c
hi
p
.
2
011
S
y
m
po
s
i
u
m
on D
e
s
i
g
n,
T
es
t
,
I
nt
egr
at
i
on
&
P
ac
k
ag
i
n
g
o
f
M
E
M
S/
M
O
E
M
S (D
T
I
P)
.
2011:
372
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374
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[9
]
J
P
W
i
k
s
w
o,
F
E
B
l
oc
k
,
D
E
C
l
i
f
f
el
,
C
R
G
oodw
i
n,
C
C
M
ar
as
c
o,
D
A
M
ar
k
ov
,
et
al
.
E
ngi
ne
er
i
n
g
c
hal
l
en
ges
f
or
i
ns
t
r
um
e
nt
i
ng a
nd c
o
nt
r
o
l
l
i
ng i
n
t
egr
at
ed
or
ga
n
-
on
-
ch
i
p
sy
st
e
ms.
I
EEE T
ra
n
s
a
c
t
io
n
s
on
B
i
om
edi
c
al
E
ngi
n
eer
i
ng.
213;
60
:
6
82
-
69
0.
[1
0
]
LJ
T
hom
as
,
SP Be
s
s
m
a
n
.
P
r
ot
ot
y
pe f
or
a
n i
m
pl
ant
a
bl
e
i
n
s
ul
i
n d
el
i
v
er
y
p
um
p
.
P
r
oc
e
e
din
g
s
o
f
t
he
W
e
s
t
e
rn
P
har
m
a
c
ol
ogy
S
oc
i
et
y
.
1975;
18
:
39
3
-
39
8.
[1
1
]
P
S
C
hee,
R
A
bdul
R
a
hi
m
,
R
A
r
s
at
,
U
H
a
sh
i
m,
PL
Leo
w.
B
i
di
r
e
c
t
i
onal
f
l
ow
m
i
c
r
o
pum
p
b
a
s
ed
on
d
y
n
a
m
ic
r
ec
t
i
f
i
c
at
i
on
.
Se
n
s
or
s
and A
c
t
uat
or
s
A
:
P
hy
s
i
c
al
.
2
013
;
204
:
1
07
-
11
3.
[1
2
]
P
S
C
hee,
R
A
r
s
at
,
T
A
da
m
,
U
H
as
hi
m
,
R
A
R
ahi
m
,
P
L
L
eow
.
M
odul
ar
ar
c
hi
t
ec
t
ur
e of
a n
on
-
c
on
t
ac
t
pi
nc
h a
c
t
ua
t
i
on
m
i
c
r
o
pum
p.
S
ens
or
s
.
2
012;
12
:
125
72
-
1
258
7.
[1
3
]
Y
Luo,
M
Lu,
T C
u
i
.
A
pol
y
m
er
-
bas
e
d
bi
di
r
e
c
t
i
onal
m
i
c
r
op
um
p
dr
i
v
en
by
a
P
Z
T
bi
m
or
p
h.
M
i
cr
o
s
yst
e
m
T
ec
h
nol
o
gi
e
s
.
2
011;
17
:
403
-
4
09.
[1
4
]
M
S
hen,
L
D
o
v
a
t,
MA
M
G
ijs
.
M
agnet
i
c
a
c
t
i
v
e
-
v
al
v
e
m
i
c
r
o
pum
p
ac
t
uat
ed b
y
a r
ot
at
i
ng
m
ag
net
i
c
a
s
se
m
b
l
y.
Se
n
s
or
s
and
A
c
t
u
at
or
s
B
:
C
h
em
i
c
a
l
.
2
011;
154
:
52
-
58.
[1
5
]
T
Pa
n
,
E Ka
i
,
M
St
a
y
,
V
B
ar
oc
a
s
,
B
Z
i
ai
e.
A
m
agn
et
i
c
al
l
y
dr
i
v
e
n P
D
M
S
per
i
s
t
a
l
t
i
c
m
i
c
r
opum
p
.
C
onf
er
en
c
e pr
oc
eed
i
ng
s
:
A
nnu
a
l
I
nt
er
n
at
i
o
nal
C
onf
er
enc
e o
f
t
he I
E
E
E
E
ngi
neer
i
ng
i
n M
edi
c
i
ne a
n
d
B
i
ol
ogy
S
o
c
i
et
y
.
I
E
E
E
E
ng
i
nee
r
i
ng
i
n M
edi
c
i
n
e an
d B
i
o
l
ogy
S
oc
i
e
t
y
C
onf
er
e
nc
e
.
20
04;
4
:
26
39
-
264
2.
[1
6
]
M
W
A
s
hr
af
,
S
T
ay
y
aba,
A
N
i
sa
r
,
N
A
f
z
ul
pur
k
ar
.
ME
MS
bas
ed s
y
s
t
e
m
f
or
dr
u
g de
l
i
v
er
y
.
82
-
87.
[1
7
]
C
Li
guo,
Y
Li
u,
L S
un,
Q
D
ongs
he
ng,
M
J
ijia
n
g
.
I
nt
el
l
i
g
ent
C
ont
r
ol
of
P
i
ez
oel
e
c
t
r
i
c
M
i
c
r
o
p
u
m
p
B
as
ed
on M
E
M
S
F
l
ow
S
ens
or
.
3055
-
3060.
[1
8
]
C
Z
hi
,
T
S
hi
n
s
hi
,
M
S
a
i
to
,
K Ka
t
o
.
P
l
anar
-
t
y
pe m
i
c
r
o
-
e
l
e
c
t
r
om
ag
net
i
c
a
c
t
u
at
or
s
us
i
ng pat
t
er
ned t
h
i
n
f
i
l
m
per
m
ane
nt
m
agn
et
s
and
m
es
h
t
y
pe
c
oi
l
s
.
S
en
s
or
s
a
nd
A
c
t
uat
or
s
,
A
:
P
hy
s
i
c
al
.
201
4;
220
:
36
5
-
372
.
[1
9
]
H
S
el
v
ar
aj
,
B
T
an,
K
V
enk
at
a
k
r
i
s
hnan
.
M
a
skl
e
s
s
d
i
r
e
ct
mi
c
r
o
-
s
t
r
u
c
t
ur
i
ng of
P
D
M
S
by
f
e
m
t
os
ec
o
n
d
l
as
er
l
o
c
al
i
z
ed r
ap
i
d
c
ur
i
ng.
J
o
ur
nal
of
M
i
c
r
om
ec
h
ani
c
s
and M
i
c
r
oengi
ne
er
i
n
g.
2
011;
21
:
0
75018
.
[2
0
]
I
D
J
ohn
s
t
o
n,
D
K
M
c
C
l
us
k
ey
,
C
K
L
T
an,
M
C
T
r
ac
ey
.
M
ec
hani
c
a
l
c
har
a
c
t
er
i
z
at
i
on
of
bu
l
k
S
y
l
gar
d
1
8
4
f
o
r
m
ic
r
of
l
ui
d
i
c
s
and
m
i
c
r
o
eng
i
neer
i
ng.
J
our
n
al
of
M
i
c
r
om
ec
hani
c
s
an
d
M
i
c
r
oengi
neer
i
ng.
2014;
24
:
03501
7.
Evaluation Warning : The document was created with Spire.PDF for Python.