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u
d
y
i
s
f
o
cu
se
d
on
ex
pl
or
i
ng
t
he
P
C
B
b
as
ed
c
o
i
l
des
i
gn
a
nd
geom
et
r
y
t
hat
i
s
a
b
l
e
t
o
g
ener
a
t
e
uni
f
or
m
and
opt
i
m
um
m
ag
net
i
c
f
l
ux
dens
i
t
y
t
o
pr
od
uc
e
opt
i
m
u
m
m
e
m
b
r
ane
di
s
pl
ac
em
ent
.
T
he
f
abr
i
c
at
i
o
n t
ec
h
no
l
og
y
of
t
he ac
t
u
at
or
s
y
s
t
em
and t
he
f
unc
t
i
o
na
l
i
t
y
t
es
t
of
t
he
f
abr
i
c
at
ed s
t
r
uc
t
ur
e
ar
e al
s
o
pr
es
en
t
ed.
2.
B
a
si
c
P
r
i
n
c
i
p
l
e
o
f
E
l
e
c
tr
o
m
a
g
n
e
ti
c
M
i
c
r
o
-
act
u
at
o
r
T
he bas
i
c
s
t
r
uc
t
ur
e of
el
ec
t
r
om
agnet
i
c
m
i
c
r
o
-
ac
t
uat
or
c
ons
i
s
t
s
of
t
hr
ee
m
ai
n par
t
s
nam
el
y
a
n e
l
ec
t
r
om
agnet
i
c
m
i
c
r
o
-
c
oi
l
,
a p
er
m
anent
m
agnet
and
a m
ec
hani
c
a
l
m
e
m
b
r
ane,
as
s
c
he
m
at
i
c
al
l
y
s
h
o
w
n
i
n
F
i
g
ur
e
1.
B
as
i
c
a
l
l
y
,
t
he
w
or
k
i
ng
pr
i
nc
i
pl
e
of
el
ec
t
r
om
agne
t
i
c
ac
t
uat
or
i
s
depe
nd
i
ng
o
n
m
agnet
i
c
f
or
c
e
ac
t
i
ng
on
a
f
l
ex
i
b
l
e
m
e
m
br
ane
t
hat
i
s
pr
oduc
ed
b
y
t
he
i
nt
er
ac
t
i
on
bet
w
e
en m
agnet
i
c
f
i
el
ds
ge
ner
at
e
d b
y
c
ur
r
ent
c
ar
r
y
i
ng
m
i
c
r
o
-
co
i
l
w
i
t
h
p
er
m
anent
m
agnet
.
F
i
gur
e
1.
S
c
hem
at
i
c
S
t
r
uc
t
ur
e of
t
he
ME
MS
E
M
A
c
tu
a
to
r
T
he anal
y
t
i
c
al
eq
uat
i
on
f
or
t
he m
agnet
i
c
f
i
el
d
ge
ner
at
e
d b
y
a
c
i
r
c
ul
ar
c
o
i
l
i
s
g
i
v
en
b
y
t
he
B
io
t
-
S
a
v
ar
t
l
a
w
.
F
or
a
s
i
n
g
l
e
t
ur
n
c
i
r
c
ul
ar
c
o
i
l
,
w
i
t
h
r
a
di
us
r
,
t
h
e
m
agnet
i
c
f
i
el
d
a
t
a
di
s
t
a
nc
e
z
al
o
ng
i
t
s
c
ent
r
a
l
ax
i
s
,
i
s
g
i
v
en b
y
E
q
u
at
i
on
(1
):
(
)
=
2
2
(
2
+
2
)
3
2
(
1)
W
h
er
e I
i
s
t
he c
ur
r
ent
,
r
i
s
t
he m
ean r
adi
us
of
t
he t
ur
n
and
z
i
s
t
h
e d
i
s
t
anc
e
al
o
ng
t
he
z
-
ax
i
s
.
T
o
obt
a
i
n
t
he
m
agnet
i
c
f
i
e
l
d
of
a
c
o
i
l
w
i
t
h
N
t
ur
ns
,
t
he
t
o
t
al
gen
er
at
e
d
m
agnet
i
c
f
i
el
d
i
s
t
h
e
s
um
of
al
l
m
agnet
i
c
f
i
e
l
ds
g
ener
a
t
ed b
y
eac
h t
ur
n.
Mea
n
w
h
i
l
e,
t
he m
agnet
i
c
f
or
c
e pr
o
duc
ed f
or
t
h
e
s
y
s
t
e
m
in
F
ig
ur
e
1 i
s
des
c
r
i
bed i
n E
q
uat
i
on
(2
):
F
z
=
B
r
A
g
∫
∂
H
z
∂
z
d
z
z
+
h
g
z
(
2)
W
h
er
e
F
z
i
s
t
he
m
agnet
i
c
f
or
c
e,
B
r
i
s
t
he
r
em
anenc
e
of
t
he
m
agnet
i
c
m
at
er
i
al
,
A
g
a
nd
hg
ar
e
t
he
s
ur
f
ac
e
ar
ea
and
t
h
i
c
k
nes
s
of
t
he
m
agnet
,
r
es
pe
c
t
i
v
e
l
y
.
T
he
c
or
r
el
at
i
o
n
bet
w
een
m
agnet
i
c
f
or
c
e appl
i
e
d on t
he m
e
m
br
ane an
d t
he r
es
u
l
t
i
ng m
em
br
ane di
s
pl
ac
em
ent
d
z
c
an be
der
i
v
e
d
f
r
om
E
q
uat
i
o
n
(3
):
=
2
(
3)
W
h
er
e F
z
i
s
t
he f
or
c
e
l
m
i
s
t
h
e
l
en
gt
h
of
t
he
m
e
m
br
ane.
T
he c
ons
t
ant
c
d
epen
ds
on
t
h
e
boun
dar
y
c
ond
i
t
i
ons
a
t
t
h
e
out
er
e
dges
and
t
he s
h
ape
of
t
he m
e
m
br
ane.
D
i
s
t
h
e f
l
ex
ur
a
l
r
i
g
i
d
i
t
y
of
t
he m
e
m
br
ane m
at
er
i
al
w
hi
c
h
i
s
def
i
n
ed b
y
:
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN
:
1
6
9
3
-
6
930
T
E
L
KO
M
NI
K
A
V
o
l.
1
4
,
N
o
.
3
,
S
ept
em
ber
201
6
:
8
56
–
86
6
858
=
ℎ
2
1
2
(
1
−
2
)
(
4)
W
h
er
e
E
i
s
t
he
Y
ou
ng’
s
m
odu
l
us
of
t
he
m
at
er
i
al
,
v
i
s
P
oi
s
s
on
’
s
r
at
i
o
an
d
h
m
i
s
t
h
e
t
hi
c
k
nes
s
o
f
t
he m
e
m
br
ane.
3.
D
e
s
i
g
n
o
f E
l
e
c
tr
o
m
a
g
n
e
ti
c
M
i
c
r
o
-
a
c
tu
a
to
r
3.
1.
P
e
r
m
an
en
t
M
ag
n
et
B
ul
k
per
m
anent
m
agnet
us
ed
f
or
t
h
i
s
pr
o
pos
ed
de
v
i
c
e
i
s
m
ade
of
N
dF
e
B
m
at
er
i
a
l
w
i
t
h
di
am
et
er
and t
hi
c
k
nes
s
of
3
m
m
and 1.
5 m
m
,
r
es
pec
t
i
v
el
y
.
T
he
m
agnet
i
s
at
t
ac
he
d t
o t
he s
i
l
i
c
on
m
e
m
b
r
ane
us
i
ng
e
pox
y
m
at
er
i
al
.
T
he
m
agnet
i
c
f
or
c
e
i
s
depen
dent
on
t
h
e
m
agnet
i
c
f
ie
ld
s
t
r
engt
h,
m
agnet
i
c
m
at
er
i
al
v
o
l
um
e
and
t
he
d
i
s
t
anc
e
bet
w
ee
n
t
he
m
agnet
an
d
t
he
el
ec
t
r
om
agnet
i
c
c
oi
l
a
l
on
g t
he
z
-
a
xi
s.
3.
2.
M
ech
an
i
cal
M
em
b
r
an
e
I
n t
hi
s
s
t
u
d
y
,
s
i
l
i
c
o
n m
at
er
i
al
i
s
us
e
d as
t
he m
e
m
br
ane due t
o t
he
bes
t
m
at
er
i
al
s
t
r
engt
h
and s
i
m
pl
es
t
f
a
br
i
c
at
i
o
n
pr
oc
es
s
c
o
m
par
ed t
o ot
her
m
at
er
i
al
s
s
uc
h as
pol
y
i
m
i
de an
d
pol
y
d
i
m
et
h
y
l
s
i
l
ox
a
ne (
P
D
M
S
)
.
F
ur
t
her
m
or
e,
s
i
l
i
c
on m
at
er
i
a
l
has
h
i
gh t
her
m
al
c
onduc
t
i
v
i
t
y
t
hat
pr
ev
e
nt
s
t
h
e
r
el
eas
e
of
per
m
anent
m
agnet
at
t
ac
h
ed
o
n
t
h
e
m
e
m
br
ane
du
e
t
o
t
he
h
eat
c
onc
ent
r
at
i
o
n
.
H
o
w
ev
er
,
s
i
l
i
c
on
m
at
er
i
al
i
s
m
or
e
r
i
gi
d
t
han
p
ol
y
i
m
i
de
or
P
D
M
S
,
d
ue
t
o
i
t
s
hi
gh
m
odul
us
el
as
t
i
c
i
t
y
of
ap
pr
o
x
i
m
at
el
y
1
69 G
P
a [
1
5]
.
F
ig
ur
e
2.
T
he
S
c
h
em
at
i
c
of
Mem
br
ane G
eom
et
r
y
w
i
t
h A
t
t
ac
h
ed P
er
m
anent
M
agn
et
(
a)
(
b)
F
i
gur
e
3.
T
y
pes
O
f
S
t
u
di
ed
Mi
c
r
o C
o
i
l
S
t
r
uc
t
ur
e:
(
a)
P
l
a
nar
P
ar
al
l
e
l
C
i
r
c
u
l
ar
M
i
c
r
o
-
C
oi
l
.
(
b)
P
la
n
a
r
S
p
ir
a
l m
ic
r
o
-
c
o
il
T
abl
e 1
.
T
he
G
e
om
et
r
y
c
al
P
ar
am
et
er
o
f
P
la
n
a
r
M
ic
r
o
-
C
oi
l
us
ed
i
n
t
he
S
t
ud
y
S
a
m
pl
e t
y
pe
C
o
il 1
C
o
il 2
C
o
il 3
C
o
il 4
W
i
dt
h
(
µ
m
)
100
200
150
100
S
pac
e (
µ
m
)
150
100
100
100
T
hi
c
k
nes
s
(
µ
m
)
30
30
30
30
I
nner
di
a
m
et
er
(
m
m
)
2.
5
2.
5
2.
5
2.
5
N
um
ber
o
f
T
ur
n
5
5
5
5
Evaluation Warning : The document was created with Spire.PDF for Python.
T
E
L
KO
M
NI
K
A
I
S
S
N
:
1
693
-
6
930
D
es
i
gn
an
d
F
abr
i
c
at
i
on of
C
omp
ac
t
ME
MS
E
l
ec
t
r
o
ma
gnet
i
c
…
(
R
o
er
E
k
a
P
aw
i
n
a
nt
o
)
859
T
he geom
et
r
y
of
t
he m
e
m
br
ane a
nd s
i
l
i
c
o
n c
ham
ber
us
ed i
n t
hi
s
w
or
k
i
s
s
how
n i
n
F
i
gur
e
2.
I
n
t
er
m
s
of
s
pac
e r
equ
i
r
em
ent
s
,
t
he
m
em
br
ane ar
ea s
h
ou
l
d
be
l
ar
ge
eno
ugh
t
o
ac
c
o
m
m
odat
e t
h
e s
ur
f
ac
e ar
ea of
t
h
e m
agnet
.
T
her
e
f
or
e I
n t
h
i
s
w
or
k
,
t
he m
e
m
br
ane s
ur
f
ac
e
ar
ea
w
as
s
et
t
o
6x
6
m
m
2
w
i
t
h
t
ot
a
l
c
ham
ber
v
o
l
um
e
i
nc
l
u
di
ng
s
pac
er
of
6x
6x
2
m
m
3
t
o
pr
ov
i
de
enou
gh s
p
ac
e f
or
a f
r
ee m
o
v
em
ent
,
m
eanw
hi
l
e t
he
gl
a
s
s
m
at
er
i
al
w
as
us
ed f
or
t
h
e s
pac
er
.
3.
3.
P
l
an
ar
m
i
cr
o
-
co
i
l
T
w
o t
y
p
es
of
pl
an
ar
m
i
c
r
o
-
c
oi
l
ar
e
i
n
v
es
t
i
gat
ed i
n t
h
i
s
s
t
ud
y
i
nc
l
ud
i
n
g pl
anar
p
ar
al
l
el
c
ir
c
u
la
r
m
ic
r
o
-
c
oi
l
an
d p
l
an
ar
s
pi
r
al
m
i
c
r
o
-
c
oi
l
,
as
s
ho
w
n i
n F
i
g
ur
e
3.
T
he g
eom
et
r
y
of
t
he
pl
anar
m
i
cr
o
-
c
oi
l
i
s
v
ar
i
e
d
as
l
i
s
t
e
d i
n T
abl
e
1.
T
he m
i
c
r
o
-
c
oi
l
par
am
et
er
s
t
ha
t
ar
e
k
ept
c
ons
t
an
t
ar
e
i
nn
er
di
am
et
er
,
t
hi
c
k
nes
s
and t
h
e n
um
ber
of
c
oi
l
t
ur
ns
of
2.
5 m
m
,
30 µ
m
and 5,
r
e
s
pec
t
i
v
el
y
.
E
l
ec
t
r
om
agnet
i
c
f
or
c
e gen
er
at
ed
i
s
s
t
r
ongl
y
af
f
ec
t
ed b
y
t
h
e
di
m
ens
i
on
of
pl
an
ar
m
i
c
r
o
c
oi
l
.
T
her
ef
or
e,
pl
a
nar
m
i
c
r
o c
oi
l
s
i
m
ul
at
i
o
n
w
i
t
h v
ar
i
ous
di
m
ens
i
ons
w
as
nec
e
s
s
ar
y
.
I
n t
hi
s
s
i
m
ul
at
i
on,
c
o
ns
t
ant
el
ec
t
r
i
c
al
c
ur
r
ent
of
500 m
A
w
as
app
l
i
e
d.
T
he
s
i
m
ul
at
i
o
n r
e
s
ul
t
s
ho
w
n i
n
F
i
gur
e
4 r
e
v
e
al
s
t
h
a
t
t
he o
pt
i
m
u
m
m
agnet
i
c
f
or
c
e w
a
s
gener
at
e
d at
t
h
e c
oi
l
w
i
d
t
h and s
pac
e
w
i
t
h t
he r
an
ge b
et
w
e
en 8
0
80 µ
m
t
o 100 µ
m
.
T
hi
s
opt
i
m
u
m
gener
at
e
d el
ec
t
r
o
m
agnet
i
c
f
or
c
e
w
as
un
i
f
or
m
l
y
di
s
t
r
i
but
ed
o
n t
he
s
ur
f
ac
e of
p
l
an
ar
m
i
c
r
o c
oi
l
as
s
ho
w
i
n
F
i
g
ur
e
5.
F
ig
ur
e
4.
T
he
S
i
m
ul
at
i
on R
es
ul
t
o
f
E
l
ec
t
r
om
agnet
i
c
F
or
c
e
F
ig
ur
e
5.
D
i
s
t
r
i
b
ut
i
on
o
f
Ma
gnet
i
c
F
l
ux
F
ro
m
E
q
u
at
i
on
(
1)
,
i
t
c
an
be
es
t
i
m
at
ed t
h
at
t
he
s
m
al
l
er
t
he
ar
ea
r
ad
i
us
of
t
he
pl
a
nar
m
i
cr
o
-
c
oi
l
,
t
he
hi
gher
m
agnet
i
c
f
i
e
l
d c
an b
e ge
ner
at
e
d.
T
her
ef
or
e,
t
he des
i
gn s
hou
l
d
c
ons
i
der
t
he v
ar
i
at
i
on bet
w
een
s
p
ac
e
an
d w
i
dt
h of
t
he
c
o
i
l
i
n or
der
t
o obt
a
i
n
ed opt
i
m
al
geo
m
et
r
y
.
4
.
A
c
tu
a
to
r
F
a
b
r
i
c
a
ti
o
n
T
he i
m
por
t
ant
c
om
ponent
s
of
el
ec
t
r
om
agnet
i
c
m
i
c
r
o
-
ac
t
uat
or
ar
e t
he m
e
m
br
ane,
c
ham
ber
and t
he
e
l
ec
t
r
o
m
agnet
i
c
c
oi
l
.
I
n
t
hi
s
w
or
k
,
t
he
m
i
c
r
o
-
ac
t
uat
or
m
em
br
ane and t
h
e
c
ham
ber
i
s
m
ade
of
s
i
l
i
c
on
m
at
er
i
al
t
ha
t
i
s
f
abr
i
c
at
ed
us
i
ng
s
t
an
dar
d
s
i
l
i
c
on
pr
oc
es
s
.
H
er
e,
t
he
s
i
l
i
c
o
n
m
e
m
br
ane
w
as
f
abr
i
c
at
ed
b
y
a
ni
s
ot
r
o
pi
c
et
c
h
o
f
375
µ
m
t
hi
c
k
s
i
l
i
c
on
w
af
e
r
<
1
00
>
us
i
ng
K
O
H
s
o
l
ut
i
on
at
75
o
C
w
i
t
h
c
ont
r
o
l
l
ab
l
e
s
l
o
w
et
c
h
r
at
e
of
78
nm
/
m
i
n.
A
not
her
e
t
c
hant
s
ol
u
t
i
o
n
s
uc
h as
H
N
A
i
s
abl
e t
o c
r
e
at
e t
h
e c
h
am
ber
ho
w
e
v
er
l
ar
ge un
der
et
c
h
an
d un
pr
e
di
c
t
ed
et
c
h r
at
e
w
as
obs
er
v
ed
[
16]
.
A
ni
s
t
r
o
pi
c
et
c
hi
ng
t
ec
hn
i
q
u
e
i
s
us
ed
du
e
t
o
t
h
e
c
os
t
e
f
f
ec
t
i
v
en
es
s
an
d
s
i
m
pl
i
c
i
t
y
of
t
he
pr
oc
es
s
c
o
m
par
ed t
o t
he
deep r
eac
t
i
v
e i
on
et
c
hi
n
g (
D
R
I
E
)
or
ot
her
s
i
s
t
r
op
i
c
et
c
hi
ng.
T
he
ad
v
ant
age of
m
i
c
r
oc
oi
l
f
abr
i
c
at
ed on t
he P
C
B
i
s
s
i
m
pl
er
t
ha
n f
abr
i
c
at
ed m
i
c
r
oc
oi
l
on s
i
l
i
c
o
n
s
ubs
t
r
at
e,
b
ec
aus
e
i
t
d
o
es
not
n
eed m
et
al
dep
o
s
i
t
i
o
n pr
oc
es
s
.
N
e
v
er
t
h
el
e
s
s
,
t
he s
pac
e
geom
et
r
y
of
f
abr
i
c
at
e
d
m
i
c
r
oc
oi
l
be
l
l
o
w
t
han
1
00 µ
m
i
s
har
d
t
o
ac
h
i
e
v
e
due
t
o
t
he f
abr
i
c
at
i
o
n
l
i
m
i
t
at
i
o
n s
uc
h
as
l
o
w
ph
ot
o
l
i
t
hogr
a
ph
y
m
as
k
r
es
ol
ut
i
on
.
T
he pr
oc
es
s
s
t
ep of
s
i
l
i
c
o
n m
e
m
br
ane f
abr
i
c
at
i
o
n i
s
v
er
y
s
i
m
pl
e r
eq
ui
r
i
ng
onl
y
o
ne
m
a
s
k
i
ng
pr
oc
es
s
(
s
ee
F
i
g
u
re
5)
.
F
i
r
s
t
l
y
,
ph
ot
or
es
i
s
t
A
Z
462
0
w
as
s
p
i
n
c
o
at
e
d
o
n
pl
a
nar
s
i
l
i
c
o
n
w
af
er
(a
),
U
V
-
ex
pos
ur
e
f
o
r
80
s
ec
onds
t
o
op
en
t
he
ox
i
de
w
i
n
do
w
and
P
R
de
v
el
o
pm
ent
us
i
ng
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I
SSN
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6
9
3
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o
l.
1
4
,
N
o
.
3
,
S
ept
em
ber
201
6
:
8
56
–
86
6
860
1:
2 A
Z
4
00 K
d
i
l
ut
i
on
w
i
t
h D
I
w
at
er
(
b)
,
O
pen
i
ng t
he ox
i
d
e l
a
y
er
us
i
ng 10
%
B
O
E
f
or
100
m
i
nut
es
(
c
)
and
f
ol
l
o
w
w
i
t
h
phot
or
es
i
s
t
r
em
ov
al
us
i
n
g
ac
et
on
e.
T
he
s
i
l
i
c
on
s
ubs
t
r
at
e
w
as
t
hen
ani
s
ot
r
o
pi
c
a
l
l
y
et
c
hed
us
i
n
g K
O
H
et
c
han
t
t
o
pr
od
uc
es
s
i
l
i
c
o
n c
ham
ber
and m
em
b
r
ane (
d)
.
F
ig
ur
e
5.
M
em
br
ane F
abr
i
c
at
i
o
n S
t
ep
,
(
a)
P
hot
or
es
i
s
t
C
oat
i
ng.
(
b)
Mem
br
ane
P
at
t
e
r
ni
n
g,
(
c)
O
xi
d
e
E
t
ch
i
ng,
(
d
)
S
il
ic
o
n
E
t
c
h
in
g
(
a)
(
b)
F
ig
ur
e
6.
T
he r
es
ul
t
of
f
abr
i
c
at
ed s
i
l
i
c
o
n m
e
m
br
ane an
d c
ham
ber
,
(
a)
S
E
M
i
m
age of
s
i
l
i
c
on
t
r
enc
h f
or
t
he ac
t
u
at
or
c
h
am
ber
af
t
er
ani
s
ot
r
o
pi
c
et
c
hi
ng,
(b
)
S
E
M i
m
age of
f
abr
i
c
at
e
d m
em
br
ane hav
i
n
g t
h
e t
h
i
c
k
nes
s
of
20 µ
m
F
ig
ur
e
7.
F
a
b
r
i
c
at
i
on
P
r
oc
e
s
s
of
P
l
anar
C
o
i
l,
(
a
)
P
ho
t
o
r
es
i
s
t
C
oat
i
n
g.
(
b)
P
hot
or
es
i
s
t
P
a
t
t
er
n
i
ng
,
(
c
)
C
opper
E
t
c
hi
n
g
a
nd
P
h
ot
or
es
i
s
t
R
em
ov
i
ng
T
he
f
abr
i
c
at
i
on
r
es
ul
t
of
s
i
l
i
c
on
m
e
m
br
ane
i
s
s
ho
w
n
i
n
F
i
g
ur
e
6
a
a
nd
F
i
g
ur
e
6
b.
T
hes
e
r
es
ul
t
s
s
ho
w
t
hat
a s
i
l
i
c
on
t
hi
n
m
e
m
br
ane w
i
t
h t
he
t
hi
c
k
nes
s
of
appr
ox
i
m
at
el
y
of
20 µ
m
i
s
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D
es
i
gn
an
d
F
abr
i
c
at
i
on of
C
omp
ac
t
ME
MS
E
l
ec
t
r
o
ma
gnet
i
c
…
(
R
o
er
E
k
a
P
aw
i
n
a
nt
o
)
861
s
uc
c
es
s
f
ul
l
y
f
abr
i
c
at
ed
af
t
er
et
c
hi
n
g t
h
e s
i
l
i
c
on s
u
bs
t
r
a
t
e.
A
s
i
de s
l
op
e of
abo
ut
5
4
o
w
i
t
h
s
m
oot
h
and f
l
at
m
e
m
br
ane s
ur
f
ac
e
w
er
e a
l
s
o o
bs
er
v
e
d.
F
ig
ur
e
7 s
ho
w
s
t
h
e f
abr
i
c
at
i
on s
t
e
p of
pl
a
nar
e
l
ec
t
r
om
agne
t
i
c
m
i
c
r
o
-
c
oi
l
.
T
he pl
a
nar
c
o
il
i
s
m
ade of
30 µ
m
c
opper
m
at
er
i
al
el
ec
t
r
o
pl
at
ed
on
P
C
B
s
ubs
t
r
at
e.
T
he pr
oc
e
s
s
s
t
ep of
t
he
m
i
cr
o
-
c
oi
l
f
abr
i
c
at
i
on
i
s
s
i
m
pl
e r
e
qu
i
r
i
n
g o
nl
y
1
l
i
t
ho
gr
a
ph
y
pr
oc
es
s
.
I
ni
t
i
a
l
l
y
,
ph
ot
or
es
i
s
t
A
Z
462
0
w
as
s
pi
n
c
oat
e
d
ont
o
P
C
B
s
ur
f
ac
e
t
o
f
or
m
t
he
c
oi
l
pat
t
er
n
(
a)
.
U
V
l
i
ght
w
as
t
h
en
ex
p
os
ed
f
or
80
s
ec
o
nds
w
h
en
t
he
ex
pos
ur
e
ener
g
y
i
s
25
0
m
J
/
c
m
2
and
dev
el
ope
d i
n A
Z
40
0k
1:
2 f
or
50 s
ec
onds
(
b)
.
F
i
nal
l
y
,
t
he m
i
c
r
o
-
c
oi
l
s
t
r
uc
t
ur
e w
as
pr
oduc
ed
af
t
er
c
opper
et
c
hi
ng pr
oc
es
s
b
y
7
0 %
F
eC
l
3 f
or
1 hour
20
m
i
nut
es
w
i
t
h a
n e
tc
hi
ng
r
at
e of
about
0.
37
5
µ
m
/
m
i
n t
o et
c
h 3
0 µ
m
c
opper
(c
).
F
ig
ur
e
8 s
ho
w
s
t
he
r
es
ul
t
o
f
t
he c
oi
l
f
abr
i
c
at
i
on f
or
t
h
e
bot
h c
o
i
l
t
y
pes
,
nam
el
y
(
a)
pl
a
nar
par
al
l
e
l
c
i
r
c
ul
ar
m
i
c
r
o
-
c
oi
l
a
nd (
b)
p
l
an
ar
s
pi
r
a
l
m
i
c
r
o
-
c
oi
l
.
(
c
)
S
E
M of
m
i
c
r
o c
oi
l
t
h
i
c
k
nes
s
.
(
a)
(
b)
(c
)
F
ig
ur
e
8.
T
he
F
abr
i
c
at
i
on R
es
ul
t
o
f
M
ic
r
o
-
C
oi
l
.
(
a)
P
l
an
ar
P
ar
a
l
l
el
C
i
r
c
ul
ar
M
i
c
r
o
-
C
oi
l
.
(
b)
P
la
n
a
r
S
p
ir
a
l M
ic
r
o
-
C
o
il.
(
c
)
S
E
M
I
m
age o
f
Mi
c
r
o C
oi
l
T
hi
c
k
nes
s
T
he
nex
t
p
ar
t
of
t
h
e
m
i
c
r
o
-
ac
t
uat
or
f
abr
i
c
at
i
on
i
s
t
h
e
at
t
ac
hm
ent
of
per
m
anent
m
agnet
on
t
o
t
h
e
s
i
l
i
c
on
m
e
m
br
ane
us
i
ng
ep
ox
y
.
T
he
per
m
anent
m
agnet
i
s
c
y
l
i
nder
t
y
p
e
w
i
t
h
d
i
am
et
er
and t
hi
c
k
nes
s
of
3
m
m
and 1.
5 m
m
,
r
es
pec
t
i
v
e
l
y
.
T
he el
ec
t
r
om
agnet
i
c
m
i
c
r
o
-
c
oi
l
,
s
i
l
i
c
o
n c
ham
ber
and
m
e
m
b
r
ane i
nc
l
ud
i
n
g p
er
m
anent
m
agnet
ar
e t
hen f
i
nal
l
y
i
nt
egr
at
e
d b
y
b
ond
i
ng a
l
l
m
i
c
r
o
-
ac
t
uat
or
par
t
s
us
i
n
g ep
ox
y
c
om
pl
et
i
ng
t
he s
t
r
uc
t
ur
e
as
s
ho
w
n
i
n
F
i
g
ur
e
9.
F
ig
ur
e
9.
T
he M
i
c
r
o
-
A
c
t
ua
t
or
a
f
t
er
I
nt
e
gr
at
i
on
o
f
A
ll
P
a
r
t
s
5.
R
e
su
l
t
s an
d
D
i
scu
s
si
o
n
s
5.
1.
M
easu
r
em
en
t
R
esu
l
t
s
F
ig
ur
e
10
i
l
l
us
t
r
at
es
t
he
s
et
up f
or
t
h
e m
eas
ur
em
ent
of
ac
t
uat
or
per
f
or
m
anc
es
.
T
he
m
eas
ur
e
m
ent
s
y
s
t
em
c
ons
i
s
t
s
of
K
e
y
e
nc
e LC
-
24
00 d
i
s
pl
ac
em
ent
m
et
er
w
i
t
h t
he
l
as
er
pr
ob
e,
m
eas
ur
e
m
ent
s
t
age an
d p
o
w
er
s
upp
l
y
.
F
ig
ur
e
11 a
nd
F
i
g
ur
e
1
2
s
ho
w
t
h
e
d
i
s
pl
ac
em
ent
of
t
he
m
e
m
br
ane at
t
he
c
e
nt
e
r
w
h
en
D
C
c
ur
r
ent
s
ar
e appl
i
ed t
o t
he bot
h m
i
c
r
o
-
c
oi
l
t
y
p
e
s
.
I
t
i
s
c
l
ear
l
y
s
h
o
w
n t
h
at
t
he 20 µ
m
t
hi
n
s
i
l
i
c
o
n m
e
m
br
ane c
an r
eac
h i
t
s
m
ax
i
m
u
m
def
l
ec
t
i
on
af
t
er
40 s
ec
onds
.
T
hi
s
i
s
bec
au
s
e of
t
he
Evaluation Warning : The document was created with Spire.PDF for Python.
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T
E
L
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M
NI
K
A
V
o
l.
1
4
,
N
o
.
3
,
S
ept
em
ber
201
6
:
8
56
–
86
6
862
r
el
ax
at
i
on
t
i
m
e
c
har
ac
t
er
i
s
t
i
c
of
s
i
l
i
c
on
m
e
m
br
ane
t
o
a
dj
us
t
t
he
p
l
as
t
i
c
d
ef
or
m
at
i
o
n
c
apab
i
l
i
t
y
of
t
he m
at
er
i
al
f
or
bend
i
n
g.
I
t
i
s
a
l
s
o
obs
er
v
ed
t
hat
af
t
er
40 s
ec
,
t
he
m
e
m
br
ane di
s
pl
ac
em
ent
dec
r
eas
es
s
l
i
ght
l
y
w
hi
c
h
i
s
du
e
t
o
t
he
he
at
ef
f
ec
t
of
t
h
e
c
o
i
l
s
r
ed
uc
i
n
g
t
h
e
ge
ner
at
i
on
of
el
ec
t
r
om
ag
net
i
c
f
i
e
l
d
and
t
he
ef
f
i
c
i
enc
y
of
t
he ener
g
y
t
r
ans
f
er
.
(
a)
(
b)
F
ig
ur
e
10.
(
a)
T
he
S
c
hem
at
i
c
o
f
t
he
S
et
U
p f
or
t
he
Mea
s
ur
em
ent
o
f
Me
m
br
ane D
i
s
pl
ac
em
ent
,
(
B
)
P
hot
ogr
a
ph
y
o
f
t
he
Me
as
ur
em
ent
S
y
s
t
em
(
a)
(
b)
(c
)
(
d)
F
i
gur
e
11.
R
el
at
i
ons
h
i
p
bet
w
een
def
or
m
at
i
on t
i
m
e and
m
eas
ur
ed
m
i
c
r
o
-
ac
t
uat
or
di
s
pl
ac
em
ent
of
pl
an
ar
par
al
l
el
c
i
r
c
ul
ar
m
i
c
r
o c
oi
l
at
v
a
r
i
ous
ap
pl
i
e
d i
nput
c
ur
r
ent
.
(
a)
c
oi
l
1
w
i
t
h
w
=
10
0 µ
m
,
s
=
150 µ
m
.
(
b)
c
oi
l
2
w
i
t
h
w
=
20
0 µ
m
,
s
=
10
0 µ
m
.
(
c
)
c
oi
l
3
w
i
t
h
w
=
1
50
µ
m
,
s
=
100 µ
m
.
(
d)
c
oi
l
4
w
i
t
h
w
=
10
0 µ
m
,
s
=
100 µ
m
Evaluation Warning : The document was created with Spire.PDF for Python.
T
E
L
KO
M
NI
K
A
I
S
S
N
:
1
693
-
6
930
D
es
i
gn
an
d
F
abr
i
c
at
i
on of
C
omp
ac
t
ME
MS
E
l
ec
t
r
o
ma
gnet
i
c
…
(
R
o
er
E
k
a
P
aw
i
n
a
nt
o
)
863
(
a)
(
b)
(c
)
(
d)
F
i
gur
e
12.
R
el
at
i
ons
h
i
p
bet
w
een
D
ef
or
m
at
i
on T
i
m
e a
n
d Me
as
ur
ed
Mi
c
r
o
-
A
c
t
u
at
or
D
i
s
pl
ac
em
ent
of
P
l
an
ar
S
pi
r
al
M
i
c
r
o
-
C
o
i
l a
t
V
ar
i
o
us
A
p
pl
i
ed I
npu
t
C
ur
r
en
t
.
(
a)
c
oi
l
1 w
i
t
h
w
=
1
00 µ
m
,
s
=
150 µ
m
.
(
b)
c
oi
l
2
w
i
t
h
w
=
200 µ
m
,
s
=
10
0
µ
m
,
(
c
)
c
o
il 3
w
i
t
h w
=
150
µ
m
,
s
=
100
µ
m
,
(
d)
c
oi
l
4
w
i
t
h
w
=
1
00 µ
m
,
s
=
100 µ
m
(
a)
(
b)
F
ig
ur
e
13.
T
he G
e
om
et
r
i
c
La
y
o
ut
D
es
i
gn
Mo
de
l
,
(
a)
2D
A
x
i
s
y
m
m
et
r
i
c
,
(
b)
3D
M
ode
l
I
n
F
i
g
ur
e
1
2d
i
t
i
s
s
ho
w
n
t
hat
m
i
c
r
o
-
ac
t
uat
or
w
i
t
h
pl
a
nar
s
pi
r
a
l
m
i
c
r
o
-
c
oi
l
4
(
w
i
dt
h=
100
µ
m
and
s
pac
e=
10
0
µ
m
)
p
r
oduc
es
a
m
ax
i
m
u
m
m
e
m
b
r
ane
di
s
p
l
ac
em
ent
of
appr
ox
i
m
at
el
y
10.
1
µ
m
f
or
an i
npu
t
c
ur
r
ent
of
500 m
A
,
w
hi
c
h
i
s
t
h
e h
i
gh
es
t
def
l
ec
t
i
on am
ong a
l
l
t
y
p
e
s
.
T
hi
s
i
s
due t
o
t
he bet
t
er
c
ur
r
ent
di
s
t
r
i
but
i
o
n al
o
ng t
he m
i
c
r
o
-
c
oi
l
and
m
or
e e
f
f
i
c
i
ent
m
agnet
i
c
f
i
el
d gener
at
i
on at
t
he c
o
i
l
c
e
nt
er
.
O
n
t
he
ot
her
ha
nd
t
h
e
m
i
c
r
o
-
ac
t
uat
or
w
i
t
h
pl
anar
par
al
l
e
l
c
oi
l
ac
hi
ev
ed
m
ax
i
m
u
m
m
e
m
b
r
ane di
s
p
l
ac
em
ent
of
appr
ox
i
m
at
el
y
2.
7
5 µ
m
,
w
hi
c
h i
s
a
l
m
os
t
3 t
i
m
es
l
ow
e
r
t
hat
of
pl
an
ar
s
pi
r
al
c
o
i
l
t
y
p
e (
s
ee F
i
g
ur
e
11d)
.
I
t
i
s
al
s
o
s
ho
w
n
i
n
F
i
g
ur
e
1
2
t
hat
t
h
e
f
abr
i
c
at
ed
m
i
c
r
o
-
ac
t
uat
or
w
i
t
h
p
l
an
ar
s
pi
r
al
m
i
c
r
o
-
c
oi
l
t
y
pes
c
an
ac
hi
ev
e di
s
pl
ac
em
ent
he
i
gh
t
w
i
t
hi
n
t
h
e r
ange
of
4 t
o 13 µ
m
f
or
i
npu
t
c
ur
r
ent
bet
w
e
en
200 m
A
t
o
1A
.
T
o v
al
i
dat
e t
h
e an
al
y
s
i
s
,
t
he m
eas
ur
e
m
ent
r
es
ul
t
s
a
r
e c
om
par
ed w
i
t
h t
he s
i
m
ul
at
i
o
n.
T
w
o di
m
ens
i
on m
odel
of
C
O
MS
O
L (
2D
ax
i
s
y
m
m
et
r
i
c
)
s
i
m
ul
at
i
on
w
as
us
ed
.
Mean
w
h
i
l
e
,
3D
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN
:
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9
3
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T
E
L
KO
M
NI
K
A
V
o
l.
1
4
,
N
o
.
3
,
S
ept
em
ber
201
6
:
8
56
–
86
6
864
m
odel
us
ed
f
or
di
s
pl
ac
em
e
nt
s
i
m
ul
at
i
on
as
s
ho
w
i
n
F
i
g
ur
e
13
an
d
t
he
s
ol
i
d
m
ec
han
i
c
s
m
odul
e
w
as
al
s
o
ap
pl
i
ed
.
T
he
m
i
c
r
o
-
c
oi
l
geom
et
r
y
a
nd
ot
h
er
s
m
i
c
r
o
ac
t
uat
or
par
am
et
er
w
er
e
v
ar
i
ed
as
s
ho
w
n
T
abl
e 2.
F
ur
t
ehr
m
or
e,
a
i
r
m
edi
um
par
a
m
et
er
i
s
us
ed f
or
t
he
bou
ndar
y
c
on
d
i
t
i
on.
T
abl
e 2.
Mi
c
r
o
A
c
t
uat
or
P
ar
am
et
er
s
S
a
m
pl
e t
y
pe
Mi
c
r
o
-
c
o
il 1
Mi
c
r
o
-
c
o
il
2
Mi
c
r
o
-
c
o
il 3
Mi
c
r
o
-
c
o
il 4
M
i
c
r
o c
oi
l
W
i
dt
h
(
µ
m
)
100
200
150
100
S
pac
e (
µ
m
)
150
100
100
100
T
hi
c
k
nes
s
(
µ
m
)
30
30
30
30
I
nner
di
a
m
et
er
(
m
m
)
2.
5
2.
5
2.
5
2.
5
T
u
rn
5
5
5
5
M
at
er
i
al
C
opper
C
opper
C
opper
C
opper
M
em
br
ane
M
at
er
i
al
S
ili
c
o
n
W
i
dt
h
6 m
m
T
hi
c
k
nes
s
20 µ
m
F
o
rm
S
quar
e
P
er
m
anent
m
agne
t
D
i
am
e
t
er
1.
5875 m
m
T
hi
c
k
nes
s
0.
3429 m
m
F
o
rm
Di
s
c
T
he
m
eas
ur
em
ent
r
es
ul
t
s
ar
e s
um
m
ar
i
z
e
d i
n
T
abl
e
3.
I
t
i
s
s
ho
w
n t
h
at
t
he s
i
m
ul
at
ed
m
e
m
b
r
ane
def
l
ec
t
i
on
i
s
h
i
g
her
t
h
an
t
hat
of
m
eas
ur
e
m
ent
f
or
al
l
c
o
i
l
c
onf
i
gur
a
t
i
o
n
s
w
h
i
c
h
i
s
du
e
t
o t
he
i
de
al
s
i
m
ul
at
i
on c
o
ndi
t
i
o
n.
O
n t
he
ot
her
h
an
d,
t
her
e ar
e s
ev
er
al
l
os
t
i
n m
eas
ur
e
m
ent
pr
oc
es
s
s
uc
h as
r
es
i
s
t
anc
es
of
t
he
w
i
r
es
,
G
aus
s
m
et
er
a
nd
po
w
er
s
up
pl
y
t
ha
t
af
f
ec
t
t
o t
h
e
po
w
er
e
f
f
i
c
i
enc
y
de
l
i
v
er
e
d
t
o
t
he
c
oi
l
s
.
H
o
w
e
v
er
i
t
c
an
be
s
een
t
ha
t
r
eas
ona
bl
e
m
at
c
h
bet
w
e
en
s
i
m
ul
at
i
on
and
m
eas
ur
e
m
ent
of
abo
ut
m
ax
i
m
u
m
82.
5
%
w
as
obt
ai
ned
.
T
abl
e 3.
C
om
par
i
s
on be
t
w
e
en
M
eas
ur
em
ent
an
d S
i
m
ul
at
i
o
n R
es
u
l
t
s
o
f
Mem
br
ane
D
ef
l
ec
t
i
o
n
f
or
0.
5 A
I
npu
t
C
ur
r
en
t
S
a
m
pl
e
T
yp
e
T
y
pe
of
m
i
c
r
o
-
c
oi
l
P
l
anar
par
al
l
el
m
i
c
ro
-
c
oi
l
P
l
anar
s
p
i
r
al
m
i
c
ro
-
c
oi
l
M
eas
ur
ed
D
i
s
pl
ac
e
m
ent
(
µ
m
)
S
i
m
ul
a
t
ed
D
i
s
pl
ac
e
m
ent
(
µ
m
)
M
eas
ur
ed D
i
s
pl
ac
e
m
ent
(
µm
)
S
i
m
ul
a
t
ed
D
i
s
pl
ac
e
m
ent
(
µ
m
)
C
o
il 1
1.
37
1.
66
9.
55
9.
63
C
o
il 2
0.
35
0.
358
8.
82
8.
91
C
o
il 3
1.
3
1.
39
9.
39
9.
46
C
o
il 4
2.
78
3.
46
9.
978
10.
13
5.
2.
D
yn
am
i
c
R
e
sp
o
n
se T
est
F
ig
ur
e
1
4 s
ho
w
s
t
h
e d
y
n
a
m
i
c
r
es
pons
e of
t
he m
i
c
r
o
-
ac
t
uat
or
f
or
t
he f
unc
t
i
on
al
i
t
y
t
es
t
pur
pos
e.
A
n a
ppl
i
e
d c
ur
r
en
t
of
500
m
A
at
p
l
an
ar
par
al
l
el
c
i
r
c
u
l
ar
m
i
c
r
o
-
c
oi
l
(
1)
w
a
s
i
nt
er
m
i
t
t
ent
l
y
t
ur
ned
O
N
a
nd O
F
F
w
i
t
h
i
n
a per
i
od
of
abo
ut
50 s
ec
o
n
ds
.
F
or
t
h
e O
N
s
t
a
t
e c
o
ndi
t
i
on,
i
t
i
s
s
ho
w
n
t
hat
t
h
e
m
e
m
br
ane
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R
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en
ces
[1
]
X
Lv
,
W
W
e
i
,
X
M
ao,
Y
C
hen,
J
Y
ang,
F
Y
ang
.
A
n
ov
el
M
E
M
S
el
ec
t
r
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a
gnet
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c
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l
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c
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ent
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ens
or
s
A
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t
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or
A
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P
h
y
s
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al
.
20
15
;
221
:
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-
28.
[2
]
J
S
ut
ant
o,
P
J
H
es
k
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Y
H
B
e
r
t
hel
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t
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S
t
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200
6
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132
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13.
[3
]
H
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Y
C
H
uang,
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J
H
s
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A:
Ph
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s
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.
2
007
;
139
:
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94
–
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2.
[4
]
J
N
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C
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Li
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onic
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7:
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5
-
40.
[5
]
J
J
oha
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i
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Y
unas
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A
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H
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z
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h,
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Y
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s
.
S
a
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ns
M
al
ay
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i
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011
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40(
3)
:
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-
281.
[6
]
A N
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f
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ul
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ahai
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.
20
08
;
130
:
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942.
[7
]
J
G
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s
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as
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s
,
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o
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s
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2nd I
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s
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et
hods
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E
M
S
D
es
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,
2006
,
ME
MS
T
E
C
H
.
2006
:
11
-
14.
[8
]
J
Y
unas
,
B
Y
M
a
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.
C
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par
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i
t
h
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c
.
M
i
c
r
oel
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r
oni
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s
J
our
nal
.
200
8
;
39
:
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564
–
156
7.
Evaluation Warning : The document was created with Spire.PDF for Python.