Int
ern
at
i
onal
Journ
al of Ele
ctrical
an
d
Co
mput
er
En
gin
eeri
ng
(IJ
E
C
E)
Vo
l.
10
,
No.
4
,
A
ugus
t
2020
,
pp.
4043
~
40
52
IS
S
N: 20
88
-
8708
,
DOI: 10
.11
591/
ijece
.
v10
i
4
.
pp
4043
-
40
52
4043
Journ
al h
om
e
page
:
http:
//
ij
ece.i
aesc
or
e.c
om/i
nd
ex
.ph
p/IJ
ECE
DC perform
ance
analysis
of a 20n
m gate le
ngth n
-
t
ype Silic
on
GAA ju
nctionle
s
s (Si JL
-
GAA) t
ransist
or
Faiz
a
Mer
ad
1
,
Ah
l
am Guen
-
Boua
z
z
a
2
Un
it
of Rese
ar
ch
Ma
te
rial
s a
nd Rene
wa
ble
Energies,
D
e
pa
rtm
ent o
f
Ele
ct
ronics,
Fac
ulty
of Tec
hnology
,
Un
i
ver
sit
y
A
bou
-
Ba
kr
-
Be
l
ka
id,
Alge
ria
Art
ic
le
In
f
o
ABSTR
A
CT
Art
ic
le
history:
Re
cei
ved
Dec
1
9
, 201
9
Re
vised
Feb
2
5
,
2020
Accepte
d
Ma
r
3
, 2
020
W
it
h
int
egr
ated
ci
rcu
it
sc
al
es
in
the
22
-
nm
reg
ime,
conve
nt
i
onal
pl
ana
r
MO
S
FETs
hav
e
appr
o
ac
h
ed
t
he
l
imit
of
th
ei
r
po
te
nt
ia
l
p
erf
orm
anc
e
.
To
over
come
s
hort
cha
nn
el
eff
ec
ts
'
SC
Es'
that
appe
ars
for
d
e
eply
sca
le
d
MO
S
FETs
be
y
o
nd
10nm
te
chnol
og
y
node
m
an
y
new
devi
ce
str
uct
ure
s
and
cha
nne
l
m
at
eria
ls
have
bee
n
proposed.
Am
o
ng
the
se
devi
c
es
such
as
Gate
-
a
ll
-
a
round
FET.
Recent
ely
,
jun
ct
ion
le
ss
GA
A
MOSF
ET
s
JL
-
GAA
MO
S
FETs
have
at
tr
ac
t
ed
m
uch
a
tt
ention
sin
ce
th
e
jun
ct
ion
le
ss
MO
SF
ET
has
bee
n
pre
sent
ed.
In
thi
s
p
ape
r,
DC
cha
rac
te
r
isti
cs
of
an
n
-
t
y
pe
JL
-
GAA
MO
S
FET
are
p
rese
nte
d
usin
g
a
3
-
D
quant
um
tra
nsport
m
odel
.
Thi
s
new
gene
ra
ti
o
n
dev
i
ce
is
con
ce
iv
ed
with
the
sam
e
doping
concen
tra
ti
on
le
v
el
in
it
s
ch
annel
source
/drain
all
owing
to
red
uc
e
fab
ricat
io
n
c
om
ple
xity
.
The
per
fo
rm
ance
of
our
3D
JL
-
GA
A
struct
ure
with
a
20nm
gate
le
ng
th
and
a
recta
ngul
ar
cro
ss
sec
ti
on
have
bee
n
obt
ai
ned
us
ing
SILVA
CO
T
CAD
tool
s
al
lowing
al
so
to
stud
y
short
ch
a
nnel
ef
fects.
Ou
r
devi
c
e
r
eveal
s
a
fav
or
abl
e
on/off
cur
r
ent
r
a
ti
o
and
b
et
t
er
S
CE
cha
r
acte
rist
i
cs
compare
d
to
an
inve
rsion
-
m
ode
GA
A
tra
nsistor.
Our
devi
ce
r
eve
a
ls
a
t
hre
shold
volt
ag
e
of
0.
55
V
,
a
sub
-
thre
shold
slope
of
63m
V
/
decade
wh
ic
h
appr
oac
h
es
the
i
dea
l
v
al
u
e
,
an
Ion/
Ioff
r
at
i
o
of
10e
+
10
val
ue
and
a
dra
in
induced
bar
r
i
er
lowring
(DIBL)
val
u
e
of
98m
V/
V.
Ke
yw
or
d
s
:
Gate
-
al
l
-
ar
ound
Ju
nc
ti
on
le
ss
MOSFET
s
SCEs
SI
L
VA
C
O
Copyright
©
202
0
Instit
ut
e
o
f Ad
vanc
ed
Engi
n
ee
r
ing
and
S
cienc
e
.
Al
l
rights re
serv
ed
.
Corres
pond
in
g
Aut
h
or
:
Faiz
a Me
rad
, Gue
n A
hlam
,
Un
it
of Rese
ar
ch
Ma
te
rial
s a
nd Rene
wa
ble
Energies
,
Dep
a
rtm
ent o
f El
ect
ro
nics
,
Fa
culty
o
f
Tec
hnology
,
Un
i
ver
sit
y A
bou
-
Ba
kr
-
Be
l
ka
id,
Tlem
cen,
Al
ge
ria BP3
30 Tle
m
cen
.
Em
a
il
:
m
erad
f
ai
za13@gm
ai
l.
com
,
gu
e
nah
la
m
@yaho
o.
f
r
1.
INTROD
U
CTION
To
day,
a
la
rg
e
pa
rt
of
t
he
w
orl
d
ec
onom
y
is
owne
d
by
t
he
el
ect
ronics
in
du
st
ry.
In
19
58,
i
nteg
rated
ci
rcu
it
co
ncep
t
was
intr
oduce
d
by
J
.
Kilby.
A
fe
w
ye
ars
la
te
r,
in
1965
[1]
Go
r
don
M
O
ORE
en
unci
at
ed
hi
s
la
w
ex
plaini
ng
that
the
num
ber
of
tra
ns
ist
or
s
on
a
ch
i
p
will
double
e
ver
y
18
m
on
ths.
With
MO
SFETs
m
iniat
ur
iz
at
ion
the
inte
gr
at
io
n
den
s
it
y
inc
r
eased
al
lo
wing
to
re
du
ce
s
ign
ific
a
ntely
m
anu
fact
ur
i
ng
costs.
Hen
ce
,
red
uction
of
c
onve
ntion
al
M
OS
F
ET
s
dim
ension
s
ha
s
reac
hed
it
s
lim
i
ts
becau
se
of
t
he
a
ppeara
nce
of
unpleasa
nt
ef
fe
ct
s
cal
le
d
"s
hort
-
cha
nnel
ef
fe
ct
"
[2
-
8]
t
hat
be
ca
m
e
ver
y
prono
un
ce
d.
I
n
orde
r
to
re
duce
these
issues
a
new
MOSFET
arc
hi
te
ct
ur
es
ha
ve
bee
n
de
velo
pe
d.
T
hese
ne
w
m
ult
iple
gate
de
vices
al
so
cal
le
d
MUGFET
ha
ve
bee
n
e
xtensi
vely
stu
died.
T
his
m
ulti
ple
ga
te
de
vices
that
rep
la
ce
t
he
c
onve
ntio
nal
MO
SFET
are
:
Dou
ble
-
gate
,
Tri
ple
-
ga
t
e
,
Pi
-
gate
,
Om
ega
-
gate
,
Su
r
r
oundin
g
ga
te
(
square
a
nd
cy
li
ndrical
gate
-
al
l
-
arou
nd
),
a
nd
finall
y
j
unct
io
nl
ess
FET
[9
-
11]
al
so
re
ferre
d
to
as
ju
nctionl
ess
gated
resi
stor
t
hat
ha
s
si
m
pler
and less
nu
m
ber
of
fa
br
ic
at
io
n
ste
ps
tha
n
t
he
conv
e
ntio
nal
MOSFET
s
.
Ju
nc
ti
on
le
ss
tr
ansisto
rs
are
var
ia
ble
resist
or
s
that
are
c
on
t
ro
ll
ed
by
the
de
vice
gate
el
ect
ro
de
.
The
sil
ic
on
c
ha
nn
el
is
a
hea
vi
ly
do
pe
d
na
no
wire
that
can
be
fu
ll
y
dep
le
te
d
to
tu
rn
t
he
de
vice
off.
T
he
dev
ic
e
Evaluation Warning : The document was created with Spire.PDF for Python.
IS
S
N
:
2088
-
8708
In
t J
Elec
&
C
om
p
En
g,
V
ol.
10
, No
.
4
,
A
ugus
t
2020
:
4043
-
4052
4044
el
ect
rical
char
act
erist
ic
s
are
t
he
sam
e
to
nor
m
al
M
OS
FETs
on
es
,
but
the
ph
ysi
cs
is
dissi
m
il
ar.
The
very
first
Ju
nc
ti
on
le
ss
t
r
ansisto
r
has
be
en
propose
d
by
Lil
ie
nf
el
d
in
1925,
but
was
rem
ai
ned
as
an
i
dea
a
nd
was
regrett
ably
ne
ver
fabrica
te
d.
In
2010,
the
first
JLT
was
eff
ect
ive
ly
fa
br
ic
at
ed
by
J.
P.
Coli
nge.
In
2011
,
Cho
i
et
al
.
ha
ve
co
nceiv
ed
a
50
nm
gate
le
ng
th
gate
G
AA
J
LT
arc
hi
te
ct
ur
e
fa
br
ic
a
te
d
on
sil
ic
on.
Lat
er,
an
N
-
cha
nnel
JLT
G
AA
with
hea
vily
dope
d
poly
-
sil
ic
on
nano
wire
cha
nnel
has
bee
n
r
eported
by
Su
et
al
.
Zha
o
et
al
stu
died
i
n
20
11
a
P
-
ty
pe
J
LT
de
vice
on
Ger
m
anium
-
on
-
ins
ul
at
or
.
D
r.
A
Kranti
,
J
P
C
olin
ge
a
nd
their r
e
searc
h gro
up h
a
ve det
ai
le
d
the
desig
n gu
i
delines
of su
c
h
a
str
ucture
, s
ee
Fig
ur
e
1
[12]
.
The
jun
ct
io
nle
ss
tra
ns
ist
or
is
a
ve
ry
prom
i
sing
Me
ta
l
-
O
xi
de
-
sem
ic
on
du
ct
or
fiel
d
e
ff
e
ct
transisto
r
arch
it
ect
ure
ba
sed
on
a
sing
l
e
ty
pe
(N
+N+
N+
or
P+P+
P
+)
doping
of
so
urce,
dr
ai
n
and
c
hannel
[
13
-
15
]
.
Ju
nc
ti
on
le
ss
F
ET
represe
nts
an
inno
vative
cl
ass
of
fiel
d
e
ff
ect
s
de
vices
h
avi
ng
no
a
brup
t
do
ping
ju
nc
ti
on
s.
As
ci
te
d
befo
r
e,
the
basic
str
uctu
re
of
a
junc
ti
on
le
ss
tra
ns
i
stor
c
onsist
s
of
a
unif
or
m
ly
hig
hly
do
ped
c
ha
nn
el
that
is
con
t
ro
l
le
d
by
the
de
vice
gate
el
ec
tro
de.
T
his
no
-
ju
nction
de
vice
is
basical
ly
a
resist
or
in
wh
ic
h
the
m
ob
il
e
carrier
de
ns
it
y
can
be
m
odulate
d
by
the
dev
ic
e
gate.
U
nlike
it
s
co
nv
e
ntio
nal
M
OS
FE
T
counter
par
t,
th
e
JLT
of
fe
rs
div
e
rses
ad
va
ntages
s
uch
a
s
:
a
s
i
m
pler
m
anu
factu
rin
g
process
,
a
red
uce
d
pro
pag
at
io
n
de
la
y,
a
low
el
ect
ric
fiel
d
at
ON
sta
te
[16]
,
volum
e
con
duct
ion
(i
n
bulk
),
im
pr
ov
e
d
m
ob
il
it
y
and
insensiti
ve
t
o
gate
/
cha
nn
el
interface
e
ff
e
ct
s
[15]
,
dy
na
m
ic
po
we
r
dis
sipati
on,
an
d
f
ast
er
switc
hi
ng.
It
has
been
s
how
n
t
hat
the
ideal
MOSFET
s
thr
esh
old
slo
pe
ob
ta
ine
d
is
eq
ual
to
60
m
V
/
decad
e
act
ually
;
m
anu
fact
ur
e
d
dev
ic
es
ca
n
not
achieve
this
va
lue
due
f
or
ex
e
m
pleto
the
inf
luence
of
i
nterfac
e
traps.
H
oweve
r
,
the
cond
uctio
n
m
echan
ism
in
the
j
unct
io
nless
transisto
r
is
base
d
on
volu
m
e
con
duct
io
n
le
ading
it
s
thr
esh
old
slop
e
to
a
ppr
oa
ch
the
ideal t
hresh
old
sl
op
e
val
ue
[
9]
.
Diff
e
re
nt
works
hav
e
bee
n
pr
esented
stu
dying
JLT
dev
ic
e
s
su
ch
as
bulk
plana
r
JLTFE
T
[16]
,
sing
le
gate
sil
ic
on
-
on
-
ins
ulator
(
SOI
)
JL
FET
[
15
]
,
m
ul
ti
-
gate
na
nowi
re
j
unct
io
nl
ess
tra
ns
ist
ors
[
17
]
,
gate
-
al
l
-
ar
ound
nano
wire
ju
nctionless
tra
ns
ist
or
s
[18]
,
as
we
ll
as
j
un
ct
io
nless
tunnel
FET
[19]
.
O
ur
stu
dy
al
lows
us
to
des
i
gn
a
3D
GAA
ju
nctionless
tra
nsi
stor
with
rec
ta
ngular
c
r
os
s
sect
ion
us
i
ng
ATLAS
SIL
VA
C
O
softwa
re.
3
-
D
bohm
qu
ant
um
po
te
ntial
(BQ
P)
tra
nsport
de
vice
sim
ulatio
n
ha
s
bee
n
us
e
d
to
e
valuate
t
he
co
ncei
ved
dev
ic
e
perform
ance
al
lowing
c
onsid
erin
g
qua
ntu
m
eff
et
s.
I
n
this
work,
SCEs
of
our
c
oncei
ve
d
JLT
G
A
A
are
al
so
inv
et
igate
d.
Figure
1. TEM
cr
os
s secti
on
of a J
LT
nano
wire tra
ns
ist
or
[
12]
2.
DEVICE
DES
CR
I
PTIO
N
MUGFET
tra
ns
ist
ors
are
f
urt
her
c
ha
racter
iz
ed
base
d
on
the
do
ping
of
their
s
ource
,
dr
ai
n
an
d
channel
re
gi
ons.
T
he
pe
rfo
r
m
ance
var
ia
ti
ons
of
J
L
-
GAA
FETs
st
ron
gly
dep
e
nds
on
doping
c
oncen
trat
io
n
wh
e
re
the
ultr
at
hin
act
ive
sil
ic
on
film
do
pi
ng
m
us
t
be
as
m
uch
as
necessary
high
in
order
to
ac
hieve
an
appr
opriat
e
source/
dr
ai
n
se
ries
resist
ance
a
s
reali
zi
ng
ef
fi
ci
ent
volum
e
dep
le
ti
on.
Us
ua
ll
y,
there
a
re
three
m
ai
n
condu
ct
i
on
m
echan
is
m
s
in
m
ulti
g
at
e
FETs
fro
m
the
do
pi
ng
prospect
ive.
That
are
in
ver
si
on,
accum
ulati
on
and
pa
rtia
l
dep
l
et
ion
m
od
e,
w
her
e
t
he
s
ource
,
drai
n
a
nd
c
ha
nn
el
reg
i
ons
ar
e
dope
d
as
N+
P
N+,
N+N
N+
an
d
N+N
+
N+
res
pe
ct
ively
.
The
inv
e
rsion
a
nd
a
ccum
ul
at
ion
m
od
e
tra
ns
ist
ors
[14],
[20]
–
[22]
are
the
sta
ndar
d
MOSFET
s
bas
ed
on
t
he
for
m
at
ion
of
P
N
or
Sc
ho
tt
ky
jun
ct
io
ns
w
here
the
dr
ai
n
is
init
ia
lly
rev
e
rse
biase
d
to
restrict
an
y
cur
re
nt
flo
w
in
the
cha
nn
e
l
reg
io
n
unle
s
s
a
su
f
fici
ent
gate
volt
age
is
bein
g
app
li
ed
to
crea
te
an
i
nv
e
rsion
la
ye
r
to
pro
vi
de
a
way
for
t
he
ca
rr
ie
r
s
to
f
low
betwee
n
the
s
ource
an
d
dr
ai
n
reg
i
on
s
.
He
nce
these
tran
sist
ors
a
re
norm
al
l
y
off
an
d
a
fter
the
i
nv
e
rsion
la
ye
r
bei
ng
creat
ed,
the
c
urre
nt
flo
ws
and the t
ran
sist
or turne
d on.
Figure
2
s
how
s
the
e
nergy
ba
nd
dia
gr
am
fo
r
a
n
n
-
cha
nn
el
j
unct
io
nles
s
transist
or
,
he
r
e
we
as
su
m
e
a
P+
po
ly
sil
ic
on
gate
el
ect
r
od
e
.
Flat
-
ba
nd
conditi
on
is
achieve
d
w
hile
a
po
sit
ive
gate
bias
eq
ua
l
to
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orma
nc
e ana
ly
sis
of
a 20n
m ga
te
le
ng
t
h n
-
ty
pe Sil
ic
on GAA j
unct
ion
le
ss
…
(
Fai
za
Mer
ad
)
4045
the
w
ork
functi
on
dif
fer
e
nce bet
ween
t
he
nanow
i
re
an
d
t
he
gate
m
at
erial
is
ap
p
li
ed
to
t
he
gate
of
the
de
vi
ce
as
sh
ow
n
in
Fig
ure
2
(a
)
.
Wh
e
n
a
zero
gate
bias
is
app
li
ed,
t
he
cha
nnel
regi
on
is
f
ully
dep
le
te
d
as
sho
w
n
i
n
Figure
2
(b).
The
JL
-
G
AA
dev
ic
e
is
stu
died
us
i
ng
3
-
D
Sil
vaco
TC
AD
si
m
ulati
on
.SILVA
C
O
can
a
naly
ze
an
d
pr
e
dict
the
be
hav
i
or
o
f
ne
w
de
vices,
without
the
e
le
vated
c
os
t
require
d
to
m
anu
fact
ur
e
t
he
real
com
po
ne
nts
[
23]
.
I
n
orde
r
t
o
highli
gh
t
t
he
am
e
li
or
at
ions
in
perform
a
nce
m
ade
by
the
JL
G
AA
dev
ic
es
com
par
ed
to
GAA
ones
,
th
ese
two
str
uct
ur
es
a
re
stu
die
d.
Fi
gure
3
s
hows
t
he
3
-
D
n
-
cha
nnel
Junct
ion
le
ss
Gate
-
All
-
A
rou
nd
str
uctu
re
w
it
h
a
rectangul
ar
cross
-
sect
i
on
co
nceive
d
a
nd
st
ud
ie
d
in
this
work.
Th
e
gate
le
ng
th
L
g,
is
f
ixed
at
20
nm
accor
ding
to
ITRS
sp
eci
ficat
ion
s
f
or
the
t
echnolo
gy
no
de
us
ed
.
As
s
hown
i
n
Figure
3
(
b)
a
ref
ine
d
m
eshing
has
bee
n
us
e
d
in
our
de
vice
channel
reg
io
n
an
d
a
le
ss
ref
ined
m
eshing
is
use
d
in
the
oth
e
r
re
gions,
to
op
ti
m
iz
e
the
tim
e
of
dev
ic
e
cha
r
act
erist
ic
s
si
m
ulati
on
T
he
stud
ie
d
JLT
G
A
A
an
d
GAA
cr
os
s
-
sec
ti
on
s
a
re
s
how
n
in
Fig
ure
4.
Figure
4,
al
lows
to
spotl
igh
t
the
dif
fer
e
nce
be
tween
the
GAA
a
nd
GAA
JLT
w
her
e
for
ju
nct
ion
le
ss
tra
ns
is
tor
c
hannel,
s
ource
a
nd
drai
n
are
un
if
or
m
ly
hig
hly
do
pe
d.
All pa
ram
et
ers
d
et
ai
ls f
or our
si
m
ulate
d
JLT
GAA
a
re
giv
e
n i
n
Ta
ble
1.
(a)
(
b)
Figure
2. Ene
r
gy
-
band diaga
m
f
or
an n
-
c
ha
nn
el
Junct
io
nless tra
ns
ist
or in
(a)
flat
-
ba
nd c
onditi
on (
t
he d
evice
is t
urned o
n)
, (
b) in
off
sta
te
(
the ch
a
nnel
r
e
gi
on
is
full
y depl
et
ed)
(a)
(b)
Figure
3. (a
)
D
evice st
r
uctu
re
of n
-
ty
pe GA
A
and
GAA
-
JLT
, (b) m
eshing
s
tructu
re
of n
-
ty
pe
GAA
a
nd
GAA
-
JL
T
(a)
(b)
Figure
4.
C
ro
s
s
-
sect
ion o
f G
A
A
MO
SFET
wi
th dop
i
ng con
centrati
on
(a)
J
L GAA
, (b
) G
AA
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,
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ugus
t
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4043
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4052
4046
Table
1
. De
vice Param
et
ers
of JL
GAA
Dev
ice
Pa
ra
m
e
ters
JL GA
A (
N+N+N
+)
Gate leng
th
2
0
n
m
Ch
an
n
el width
1
0
n
m
Ch
an
n
el heig
h
t
1
0
n
m
Gate
o
x
id
e thick
n
ess
1
n
m
N
-
Ch
an
n
elco
n
cent
ration
level
1
.5e+1
9
Bu
ried o
x
id
e lay
er
thick
n
ess
2
0
n
m
3.
RESU
LT
S
AND DI
SCUS
S
ION
In
t
his
sect
ion, DC
pe
rfor
m
ance
par
am
et
ers
of
t
he
stu
died
J
un
ct
io
nless GAA
a
re p
rese
nt
ed,
al
lo
wing
to
en
um
erate
our
de
vice
c
ha
racteri
sti
cs
su
ch
a
s
it
s
on
-
sta
te
current,
it
s
threshold
vo
lt
age
,
the
DI
B
L
,
Sub
-
t
hr
es
hold
slop
e
(SS)
a
nd
I
on
/I
off
rati
o.
O
ur
res
ults
ha
ve
bee
n
ob
ta
ine
d
us
in
d
ATL
AS
SI
L
V
ACO
s
of
tware
wh
e
re
qua
ntum
eff
ect
s
hav
e
been
c
onsider
ed
to
de
scrib
e
accuratel
y
the
el
ect
rical
beh
a
viours
of
al
l
na
no
s
cal
e
dev
ic
es
and t
o assess t
hei
r per
form
ance lim
i
t
s.
The o
n
-
sta
te
c
urren
t
dri
ve of
the ju
nctio
nless
tran
sist
or is gi
ven
by
[14]
:
≈
ℎ
ℎ
(1)
=
−
−
(
ℎ
2
ℎ
+
ℎ
)
(2)
is
the
dopi
ng
densi
ty
,
h
and
h
a
r
e
the
cha
nnel
thickne
ss
an
d
width
res
pecti
vely
,
is
the
dr
ai
n
volt
age,
is
the
ga
te
le
ng
th,
h
is
the
relat
ive
per
m
it
t
ivit
y
of
the
c
ha
nn
el
m
at
erial
and
is
the
gate
oxide
capaci
ta
nce.
I
DS
-
V
DS
cha
racteri
sti
cs
of
the
st
ud
ie
d
n
-
ch
an
ne
l
JL
-
G
AA
un
der
diff
e
re
nt
su
pply
vo
lt
age
V
GS
le
vels are
r
e
po
rt
ed
in
Fig
ure
5.
I
DS
-
V
GS
c
har
ac
te
risti
c is report
ed
in
Fig
ur
e
6.
The
j
unct
io
nless
gate
al
l
around
tra
ns
ist
ors
are
pract
ic
al
ly
fu
ll
y
dep
le
te
d
by
re
gula
ti
ng
the
work
functi
on
of
gat
e
m
at
erial
at
O
FF
-
sta
te
.
T
his
dev
ic
e
needs
r
easo
nab
ly
hi
gh
doping
f
or
rel
at
ively
a
hig
h
dr
i
ve
current
at
O
N
-
sta
te
.
W
e
c
an
see
that
our
de
vice
s
how
a
n
excell
ent
el
ct
r
os
ta
ti
c
co
ntr
ol
with
relat
ivel
y
high
ON
-
sta
te
curre
nt and l
ow OF
F
-
sta
te
one lea
ding to
a
high
I
ON
/ I
OFF
rati
o.
Figure
5. O
utput cha
racteri
sti
cs
of
GAA
J
un
ct
ion
le
ss tra
ns
i
stor
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DC perf
orma
nc
e ana
ly
sis
of
a 20n
m ga
te
le
ng
t
h n
-
ty
pe Sil
ic
on GAA j
unct
ion
le
ss
…
(
Fai
za
Mer
ad
)
4047
Figure
6.
Tra
nsfer c
ha
racteri
sti
cs o
f
GA
A
J
unct
ion
le
ss
tra
nsi
stor
3.1
. Th
resh
old
volt
ag
e
(V
th
)
The
th
res
ho
l
d
vo
lt
age
is
t
he
gate
volt
age
at
wh
ic
h
the
m
agn
it
ude
of
dif
f
us
io
n
c
urren
t
e
qu
al
s
dr
i
fts
current a
nd tra
ns
ist
or tu
rns
on. T
he
expre
ssion o
f V
th
is
give
n by
[
24]
:
ℎ
=
∅
−
[
+
1
ℎ
(
2
+
)
2
]
+
2
ℏ
2
2
∗
[
1
2
+
1
2
]
(3)
w
he
re
is
the
m
et
al
-
se
m
i
cond
ucto
r
wor
k
functi
on,
D
is
the
ca
rr
ie
r
doping
co
nce
nt
rati
on
,
a
nd
are
the
cha
nnel
w
idth
a
nd
hei
ght
resp
ect
ively
,
h
is
the
rel
at
ive
per
m
it
ti
v
it
y
of
the
c
ha
nn
el
m
at
erial
,
is
the
gate
ox
i
de
capaci
ta
nce,
∗
is
the
eff
ect
iv
e
m
ass
and
h
is
the
Planck
’s
con
sta
nt.
The
G
AA
JL
tra
ns
ist
or
f
or
our
sim
ulati
on
turn
e
d
on
at
V
th
=0.5
5
V
as
sh
ow
n
in
F
ig
ur
e
5.
O
ur
res
ults
al
low
to
obser
ve
that
we
have
ob
ta
in
an ap
pr
opriat
e V
th
due
to
the
P++
do
ping
po
ly
sil
ic
on
gate use
d.
3.
2
. Dr
ain
-
in
d
uced
-
b
arrier
-
l
oweri
ng
(
DIB
L)
The
DI
BL
is
on
e
of
m
any
s
hort
cha
nnel
s
eff
ect
s.
It
is
at
tribu
te
d
to
the
el
ect
ro
sta
ti
c
infl
uen
ce
of
the
drai
n
on
t
he
barrier
heig
ht
of
in
j
ect
io
n
ba
rr
ie
r
.
By
incr
easi
ng
t
he
drai
n
volt
age
V
DS
,
there
is
e
xp
a
nsi
on
of
the
sp
ace
c
harge
area
at
the
dr
ai
n.
T
his
s
pace
cha
r
ge
ar
ea
can
re
duce
the
heig
ht
of
the
inj
ec
ti
on
barrier.
The DIBL
is
giv
en
b
y
[
25
]
:
D
IBL
=
∆
ℎ
∆
(4)
The
D
IBL
f
or
the
MOSFE
T
dev
ic
es
is
gen
e
rall
y
hig
he
r
than
100mV/
V
f
or
the
gate
le
ng
t
h
le
ss
th
a
n
50
nm
[25]
.
F
or
our
dev
ic
e
the
D
IBL
=
98.
3
m
V/V
as
sh
ow
n
in
Fi
gure
7
for
gate
l
eng
t
h
20
nm
.
Thi
s
relat
ively
low
value
is
due t
o t
he
ab
sence
of
j
unct
io
n
in
JL
GAA
T
ra
ns
ist
or
[
26]
.
3.3. Sub
-
t
hres
ho
ld sl
op
e
(
S
S
)
The
SS
is
a
no
ther
par
am
et
er
of
s
hort
c
hannel
ef
fects
to
est
i
m
at
e
the
su
b
-
th
res
ho
l
d
c
har
act
erist
ic
s
"SS"
of
n
an
os
c
al
e
sh
or
t
cha
nn
el
MOSFET
de
vices
[27]
.
SS
determ
ines
the
eff
ic
ie
ncy
of
a
transisto
r
to
sw
it
ch
from
it
s o
ff
-
sta
te
to
it
s on
-
sta
te
. I
t i
s
de
fine
d as
[14]
:
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p
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ol.
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, No
.
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,
A
ugus
t
2020
:
4043
-
4052
4048
=
(
)
(5)
As
s
hows
i
n
F
igure
8
t
he
S
S
of
our
G
AA
JL
transist
or
is
low
(<
80m
V/d
ec)
a
nd
is
e
qual
to
63
m
V/de
c
at
room
te
m
per
at
ur
e
.
Figure
7.
T
ra
nsfer c
ha
racteri
sti
cs log(I
DS
)
v
s
V
GS
of
GAA
J
un
ct
io
n Less t
r
ansisto
r
at
different
value
of
V
DS
Figure
8.
T
ra
nsfer c
ha
racteri
sti
cs log(I
DS
)
v
s
V
GS
of GA
A
J
unct
ion Less
tra
ns
ist
or
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DC perf
orma
nc
e ana
ly
sis
of
a 20n
m ga
te
le
ng
t
h n
-
ty
pe Sil
ic
on GAA j
unct
ion
le
ss
…
(
Fai
za
Mer
ad
)
4049
3.4
.
Ion
, I
off
and I
on
/I
off
ra
tio
The
on
-
sta
te
c
urren
t
(I
on
)
is
def
i
ned
as
the
value
of
the
dr
ai
n
curre
nt
(I
D
)
at
hig
h
value
of
V
GS
with
a
const
ant
V
DS
vo
lt
age
.T
he
of
f
-
sta
te
cu
rr
e
nt
(I
o
ff
)
is
def
i
ned
as
the
value
of
the
dr
ai
n
cu
rrent
(I
D
)
at
lo
w
value
of
V
GS
a
nd
c
onsta
nt
V
DS
[28]
.
Fo
r
JLT
de
vi
ces
and
in
the
on
-
sta
te
,
the
re
is
a
la
rg
e
body
cur
re
nt.
This
bod
y
current
is
due
to
the
dopi
ng
c
once
ntrati
on
i
n
the
c
ha
nn
el
t
hat
is
relat
ively
high,
to
w
hich
su
r
fac
e
accum
ulati
on
current
can
be
add
e
d.
I
n
an
oth
e
r
hand,
in
the
of
f
-
sta
te
the
de
vice
cha
nn
el
is
tur
ned
off
by
dep
le
ti
on
of
c
arr
ie
rs
an
d
t
his
is
in
fact
due
to
the
dif
f
eren
ce
in
w
orkf
unct
ion
bet
ween
the
m
ater
ia
l
of
the
dev
ic
e
gat
e
and
the
se
m
ic
on
duct
or.
Indeed,
in
JLT
dev
ic
es
,
the
dopi
ng
has
to
be
high
en
ou
gh
t
f
or
ob
ta
ini
ng
a
s
uitable
cu
rr
e
nt
dri
ve
a
nd
the
c
r
os
s
sect
io
n
of
JLT
de
vices
ha
s
to
be
s
uffici
ently
sm
al
l
to
be
able
to
tur
n
the
de
vice
off.
Mo
r
e
gate
con
tr
ol
le
ads
to
m
or
e
I
on
/I
off
r
at
io
wh
ic
h
re
pr
ese
nts
high
pe
rfo
rm
ance
(h
i
gh
I
on
)
an
d
low
le
aka
ge
current
(lo
w
I
off
)
f
or
the
CM
OS
tra
ns
ist
or,
Ty
pical
ly
it
is
ar
ound
10
6
~
10
10
.
An
y
decr
ea
se
in
I
on
/I
o
ff
rati
o
ca
n
cau
se
s
low
outp
ut
tr
ansiti
on
s
or
l
o
w
outp
ut
sw
ing
s
.
F
or
our
de
vice
the I
on
/I
o
ff
≈
10e
+10.
All
the
re
su
lt
s obtai
ne
d f
or our si
m
ulatio
n
are
g
i
ven in
T
able
2
.
Table
2.
Var
ia
t
ion
of the
d
e
vi
ce el
ect
rical
p
a
ram
et
ers
JLGAA
DIBL
(
m
V
/V
)
9
8
,3
I
on
(
A)
2
.13
E
-
6
I
off
(
A)
3
.8E
-
16
I
on
/
I
off
0
.55
E+10
SS (
m
V/d
ec)
63
Vth
(
V)
0
.55
3.5.
C
ompar
ati
ve
s
tu
d
y o
f
S
i
-
JLT G
A
A a
nd
Ge
-
JLT G
AA
In
or
der
to
s
tud
y
the
i
m
pact
of
channe
l
m
a
te
rial
on
the
dev
ic
e
char
act
erist
ic
s
Sil
ic
on
a
nd
Ger
m
anium
n
-
channel
JL
-
G
AA
a
re
presen
te
d.
The
outp
ut
char
act
erist
ic
s
of
these
de
vi
ces
under
di
fferent
su
pply
vo
lt
age
VGS levels
are
r
e
ported
i
n
Fi
gure
9. The
tra
ns
fe
r
c
har
act
e
r
ist
ic
is sh
ow
n
i
n
Fi
gure
10.
Figure
9. O
utput cha
racteri
sti
cs of Si a
nd
Ge
GAA Ju
nctio
nl
ess trans
ist
or
Evaluation Warning : The document was created with Spire.PDF for Python.
IS
S
N
:
2088
-
8708
In
t J
Elec
&
C
om
p
En
g,
V
ol.
10
, No
.
4
,
A
ugus
t
2020
:
4043
-
4052
4050
Figure
10. T
ra
ns
fe
r
c
har
act
e
r
ist
ic
s o
f Si
and
G
e
G
AA Junc
ti
on
le
ss tra
ns
is
tor
The
I
on
c
urre
nt
of
a
sil
ic
on
n
-
c
hannel
J
LT
-
GAA
is
a
bout
twic
e
uppe
r
tha
n
I
on
cur
re
nt
of
a
gr
m
anium
n
-
channel
JLT
-
GAA.
DC
perform
ances
of
our
tw
o
de
vices
are
giv
e
n
i
n
T
a
ble
.
3.
O
ur
res
ults
al
low
us
t
o
c
onfirm
that
sil
ic
on
JLT
-
G
A
A
hav
e
bette
r
D
C
perf
or
m
ance
com
par
d
to
G
erm
aniu
m
JLT
-
G
AA.
The
le
aka
ge
c
urre
nt
of
a
ger
m
anium
JLT
-
G
AA
is
le
sser
t
ha
n
a
le
aka
ge
c
urren
t
of
a
sil
ic
on
de
vice.
Thi
s
resu
lt
is
du
e
to
t
he
diff
e
re
nce
be
tween
the
ba
nd
ga
p
e
nergy
of
ger
m
aniu
m
and
ba
nd
gap
e
ne
rg
y
of
sil
ic
on
(E
gGe
<E
gSi
).
T
he
I
o
ff
cu
rr
e
n
t i
s
giv
e
n by
[
29]
:
of
f
=
0
(
(
−
ℎ
)
)
⁄
(6)
is
a
coe
ff
ic
ie
nt
that
ex
presses
the
se
ns
it
ivit
y
of
the
tra
ns
ist
or
c
on
tr
ol
by
th
e
gate
a
nd
0
is
a
cu
rr
e
nt
val
ue
a
t
V
GS
=V
th
.
The
m
et
a
l
-
se
m
ic
on
duct
or
w
ork
f
un
ct
io
n
∅
(
∅
=
∅
−
(
+
(
2
⁄
)
+
∅
)
)
de
pends
on
the
ba
nd
ga
p
energy
Eg
.
Wh
e
n
E
g
inc
reases
∅
decr
eas
es,
thre
shold
vo
lt
age
ℎ
dec
rea
ses
an
d
I
o
ff
increases
.
in
T
able
4
we
s
um
m
arize
all
ou
r
sim
ulati
on
resu
lt
s
that
we
com
par
e
to
s
om
e
resu
lt
s
found
i
n
li
te
ratur
e
.
Our
res
ults
are
c
om
par
ed
to
s
om
e
resu
lt
s
f
ound
in
li
te
ratu
r
e.
W
e
can
see
that
the
resu
l
ts
we
ob
ta
ine
d
a
re
in
ag
reem
ent
with
ot
her
res
ults
ob
ta
i
ned
for
dif
fer
e
nt
J
LT
G
AA
dev
i
ces,
w
hich
in
dicat
es
the go
od app
roach
of our si
m
ulati
on
s
.
Ta
ble
3.
DC
re
su
lt
s obtai
ne
d f
or
Si a
nd G
e
GAA JLT
Si
-
JLGA
A
Ge
-
JLG
AA
DIBL
(
m
V
/V
)
9
8
,3
1
1
.2
I
on
(
A)
2
.13
E
-
6
1
.31
E
-
6
I
off
(
A)
3
.8E
-
16
6
.33
E
-
17
I
on
/
I
off
0
.55
E+10
2
.07
E+10
SS (
m
V/d
ec)
63
64
Vth
(
V)
0
.55
0
.72
Evaluation Warning : The document was created with Spire.PDF for Python.
In
t J
Elec
&
C
om
p
En
g
IS
S
N: 20
88
-
8708
DC perf
orma
nc
e ana
ly
sis
of
a 20n
m ga
te
le
ng
t
h n
-
ty
pe Sil
ic
on GAA j
unct
ion
le
ss
…
(
Fai
za
Mer
ad
)
4051
Table
4.
Dif
fere
nt r
es
ults
ob
ta
ined f
ot JLT G
AA f
ound i
n
li
te
ratur
e
.
Si
m
u
latio
n
r
esu
lts
ob
tain
ed
f
o
r
o
u
r
2
0
n
m
gate l
en
g
h
t JLT
GAA
[
1
4
]
[
2
6
]
[
3
0
]
[
3
1
]
Structu
re
Si
-
JL
-
GAA
Ge
-
JL
-
GAA
JL
-
Multig
ate
JL
-
NW
JL
-
NW
Si
-
JL
-
DG
Ge
-
JL
-
DG
Lg (n
m
)
20
20
1000
50
20
20
20
W
(n
m
)
10
10
30
10
10
10
DIBL
(
m
V
/V
)
9
8
,3
1
1
.2
-
7
78
47
22
I
on
(
A)
2
.13
E
-
6
1
.31
E
-
6
-
-
1
0
0
0
u
A/u
m
-
-
I
off
(
A)
3
.8E
-
16
6
.33
E
-
17
1E
-
15
-
-
-
-
I
on
/
I
off
0
.55
E+10
2
.07
E+10
>>1
E+6
-
5
E+6
-
-
SS (
m
V/d
ec)
63
64
64
60
92
6
9
.2
6
4
.7
Vth
(
V)
0
.55
0
.72
-
-
-
-
-
4.
CONCL
US
I
O
N
In
this
pap
e
r,
the
DC
de
vice
perform
ance
analy
sis
of
a
20nm
gate
l
enght
n
-
ty
pe
J
un
ct
io
nLes
s
transisto
r
G
A
A
with
a
recta
ngular
c
ro
s
s
se
ct
ion
has
bee
n
evaluate
d.
T
his
Ju
ncti
on
le
ss
transisto
r
is
a
var
ia
ble
resist
or
co
ntr
ol
le
d
by
a
gate
el
ect
rode.
For
t
hi
s
w
ork,
a
3
-
D
Boh
m
Qu
a
ntum
Po
te
ntial
(BQP
)
tra
nsport
dev
ic
e
si
m
ulati
on
ha
s
bee
n
us
e
d
t
o
evaluate
t
he
D
C
de
vice
perf
or
m
a
nce.
T
he
stud
ie
d
dev
ic
e
re
veals
a
lo
w
sub
-
thres
ho
l
d
slo
pe
SS=63
m
V/de
cade,
a
nd
a
good
c
urre
nt
de
ns
it
y
25
m
A/
m
m
.Th
eJun
ct
iu
nl
ess
de
vice
str
uctu
re
stud
ie
d
s
hows
i
m
pr
ove
d
O
N
to
O
F
F
c
urre
nt
rati
o
of
a
bout
10e+
10
t
hat
ca
n
be
obser
ved
f
ro
m
our
resu
lt
s
com
par
ed
to
G
AA
MO
SFET
because
of
reduced
SCE
s.
I
n
add
it
ion,
our
dev
ic
e
s
hows
lowe
r
SS
a
nd
DI
B
L
to
th
os
e
of
the
GAA
de
vi
ce
at
gate
le
ngth
L
g
of
20
nm
.
At
the
e
nd
of
this
stud
y,
we
ca
n
ob
s
er
ve
that
t
he
DC
beh
a
viou
r
ex
hi
b
it
ed
by
the
pro
posed
G
AA
JL
de
vice
is
ve
ry
prom
isi
ng
.
Indee
d,
the
ju
nctionless
im
p
rove
s
the contr
ol
of the
gate on t
he c
hannel al
lo
wi
ng u
si
ng this
de
vice in
dif
fer
e
nt appli
cat
ion
s
.
REFERE
NCE
S
[1]
G.
Moore,
“
Cra
m
m
ing
m
ore
components
onto
i
nte
gra
te
d
ci
r
cui
t
s,”
E
lectronic
s,
vol.
38
,
no
.
8
.
19
65.
[2]
A.
Litt
y
,
“
Conce
pt
ion,
f
abr
i
ca
t
ion,
ca
r
ac
t
éri
sat
ion
et
m
odél
isa
ti
on
de
tr
ansist
ors
MO
SF
ET
haut
e
te
nsion
e
n
te
chno
logi
e
av
an
cé
e
SO
I
(Sili
con
-
On
-
Insulat
or),”
PhD
Thesis,
Gr
e
noble
Al
pes
,
201
6.
[3]
P.
Razavi
,
“
Sim
ula
ti
on
of
m
ultig
at
e
SO
I
tra
nsisto
rs wit
h
sil
ic
on
,
g
ermani
um
and
II
I
-
V c
hann
el
s,”
2
0
13.
[4]
T.
Ngu
y
en,
“
Ca
rac
t
éri
sat
ion,
m
odél
isation
et
f
i
abi
lité
des
di
él
e
ct
riqu
es
de
gril
l
e
à
base
de
Hf
O2
pour
le
s
future
s
te
chno
logi
es
C
MO
S
,”
PhD
The
sis,
Thèse
d
e
Do
ct
or
at
,
2009.
[5]
H.
K.
Jung
and
S.
Dim
it
rijev,
“
The
Im
pa
ct
of
Tunne
li
ng
on
th
e
Subthreshold
Sw
ing
in
Sub
-
20
nm
As
y
m
m
et
ric
Double
Gate
MO
SF
ET
s,”
Inte
rnational
Journal
of
El
ectric
al
an
d
Computer
Engi
nee
ring
(
IJE
CE
)
,
vol.
6,
no.
6,
pp.
2730
–
2734,
201
6.
[6]
D.
Jim
éne
z,
B
.
Iñígue
z
,
J.
Suñé,
and
J.
J.
Sáenz
,
“
Analog
per
form
anc
e
of
the
nanosc
al
e
doubl
e
-
gat
e
m
et
a
l
-
oxide
-
sem
ic
onduct
or
f
ie
ld
-
eff
e
ct
-
tr
ansi
stor
nea
r
the
ul
t
imate
sca
l
ing
lim
it
s,”
Journal
of
Appl
i
ed
Phy
si
c
s
,
vol.
96,
no.
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,
pp.
5271
–
5276
,
2004.
[7]
D.
Jim
éne
z,
J.
J.
Sa
enz
,
B.
Inigu
ez
,
J.
Sune,
L.
F
.
Marsal
,
and
J.
Pall
ar
es,
“
Modeli
ng
of
nanosc
al
e
gat
e
-
a
ll
-
aro
und
MO
S
FETs,
”
I
E
EE
El
e
ct
ron De
v
ic
e
Letters
,
vol
.
25,
no
.
5
,
pp
.
31
4
–
316,
2004
.
[8]
J.
-
T.
Park
and
J.
-
P.
Coli
nge
,
“
Multi
ple
-
g
ate
SO
I
MOSF
ET
s:
devi
c
e
design
g
uide
li
n
es,
”
I
EEE
transacti
ons
on
el
e
ct
ron de
vice
s
,
vol. 49, no. 12,
pp.
2222
–
2229
,
2002.
[9]
M.
A.
Ri
y
ad
i,
I.
D.
Sukawati
,
T.
Prakoso,
and
D
.
Darj
at,
“
Influence
of
Gate
Mat
eri
a
l
and
Proce
ss
on
Juncti
onle
s
s
FET
Subthreshold
Perform
anc
e,”
Inte
rnationa
l
Journal
of
El
e
ctr
ic
al
and
Computer
Engi
ne
erin
g
(
IJE
CE)
,
vol.
6,
no.
2
,
pp
.
895
–
9
00,
2016
.
[10]
S.
-
H.
Oh,
D
.
M
onroe
,
and
J.
M
.
Herg
enr
othe
r
,
“
Anal
y
t
ic
d
esc
ri
pti
on
of
short
-
c
hanne
l
eff
ec
ts
i
n
fully
-
d
epl
e
te
d
double
-
ga
te
an
d
c
y
li
ndr
ical,
surrounding
-
gate
MO
SF
ET
s,”
IEE
E
elec
tron
dev
i
ce
le
t
te
rs
,
vol.
21
,
no.
9
,
pp.
445
–
447
,
20
00.
[11]
Y.
H.
Hashim
,
Y.
Atal
la,
A.
N.
A.
Ghafa
r,
and
W
.
A.
Jaba
r,
“
Te
m
per
at
ure
Ch
ar
ac
t
eri
z
at
ion
of
(
Si
-
FinF
ET
)
base
d
on
Channe
l
Oxi
de
Thickness,”
TEL
KOMNIKA
(
Tele
communic
ati
on
Computing
El
e
ct
ronics
and
Control)
,
vol.
1
7
,
no.
5
,
Oct
.
2019
.
[12]
A.
Krant
i
et
al.
,
“
Juncti
onle
ss
na
nowire
tr
ansistor
(JN
T):
Properties
and
design
gu
ide
li
n
es,
”
in
201
0
Proceedi
ngs
o
f
the
European
So
li
d
Sta
te Device
Re
search
Con
fe
r
enc
e
,
pp
.
357
–
3
60,
2010
.
[13]
M.
-
H.
Han,
C.
-
Y.
Chang,
H.
-
B.
Chen,
Y
.
-
C.
Ch
eng,
and
Y.
-
C
.
W
u,
“
Devic
e
an
d
ci
r
cui
t
p
erf
or
m
anc
e
est
imati
o
n
of
junc
ti
on
le
ss
bulk
FinF
ET
s,”
IE
E
E
Tr
ansacti
ons
on
Elec
tron
Dev
ic
es
,
vol
.
60
,
no
.
6,
pp.
1807
–
181
3,
2013
.
[14]
J.
-
P.
Coli
nge
et
a
l.
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