I
nte
rna
t
io
na
l J
o
urna
l o
f
E
lect
rica
l a
nd
Co
m
p
ute
r
E
ng
in
ee
ring
(
I
J
E
CE
)
Vo
l.
10
,
No
.
1
,
Feb
r
u
ar
y
2020
,
p
p
.
494
~
4
99
I
SS
N:
2088
-
8708
,
DOI
: 1
0
.
1
1
5
9
1
/
i
j
ec
e
.
v
10
i
1
.
pp
4
9
4
-
499
494
J
o
ur
na
l
ho
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ep
a
g
e
:
h
ttp
:
//ij
ec
e.
ia
esco
r
e.
co
m/in
d
ex
.
p
h
p
/I
JE
C
E
Reducing
the
hy
g
ro
sco
pic sw
elling
in ME
M
S sens
o
r
usi
ng
diff
er
ent
m
o
ld
ma
terials
P
in
k
y
,
K
uld
ee
p Si
ng
h
,
Anuj
Sin
g
a
l
De
p
a
rt
m
e
n
t
El
e
c
tro
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ics
a
n
d
Co
m
m
u
n
ica
ti
o
n
En
g
i
n
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rin
g
,
G
u
ru
Ja
m
b
h
e
sh
w
a
r
Un
iv
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rsit
y
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S
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In
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ia
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icle
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nfo
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ST
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T
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ticle
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to
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R
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o
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y
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ro
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s
w
e
ll
in
g
is
o
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e
o
f
th
e
b
ig
g
e
st
c
h
a
ll
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n
g
in
g
p
ro
b
lem
o
f
Ep
o
x
y
m
o
ld
c
o
m
p
o
u
n
d
(
EM
C)
in
p
a
c
k
a
g
in
g
w
it
h
M
icro
e
lec
tro
m
e
c
h
a
n
ica
l
s
y
ste
m
(M
EM
S
)
d
e
v
ice
s.
T
o
o
v
e
r
c
o
m
e
th
is
h
y
g
ro
sc
o
p
ic
s
w
e
ll
in
g
p
ro
b
lem
o
f
EM
C
a
n
d
g
u
a
rd
t
h
e
d
e
v
ice
s,
M
EM
S
d
e
v
ice
s
a
re
m
o
ld
e
d
in
th
is
p
a
p
e
r
w
it
h
d
if
fe
re
n
t
M
o
ld
Co
m
p
o
u
n
d
(M
C)
i.
e
.
ti
tan
iu
m
a
n
d
c
e
r
a
m
ic
e
tc.
d
u
rin
g
th
e
ir
in
terc
o
n
n
e
c
ti
o
n
w
it
h
th
e
b
o
a
rd
.
A
lso
,
a
c
o
m
p
a
ra
ti
v
e
l
y
p
e
rf
o
r
m
a
n
c
e
a
n
a
l
y
sis
o
f
th
is
v
a
rio
u
s
m
o
ld
c
o
m
p
o
u
n
d
with
M
EM
S
p
re
ss
u
re
se
n
s
o
r
h
a
s
b
e
e
n
stu
d
ied
in
th
is
p
a
p
e
r
a
t
6
0
%
h
u
m
id
it
y
,
1
4
0
m
o
l/
m
3
sa
tu
ra
ti
o
n
c
o
n
c
e
n
t
ra
ti
o
n
a
n
d
25
o
C.
It
w
a
s
o
b
se
rv
e
d
th
a
t
h
y
g
ro
sc
o
p
ic
sw
e
ll
in
g
d
o
e
s
n
o
t
tak
e
p
lac
e
in
th
e
ti
tan
i
u
m
m
o
ld
c
o
m
p
o
u
n
d
.
B
u
t,
ti
ta
n
iu
m
is
v
e
r
y
c
o
stl
y
so
we
h
a
v
e
to
c
o
n
sid
e
r
s
o
m
e
th
in
g
c
h
e
a
p
e
r
m
a
teri
a
l
i.
e
.
c
e
ra
m
ic
in
th
is
p
a
p
e
r.
T
h
e
H
y
g
ro
sc
o
p
ic
sw
e
ll
in
g
in
Ce
ra
m
ic
M
o
ld
C
o
m
p
o
u
n
d
a
f
ter
1
y
e
a
r
is
n
e
a
rly
0
.
0
5
m
m
,
w
h
ich
is
v
e
r
y
les
s th
a
n
e
p
o
x
y
.
K
ey
w
o
r
d
s
:
EMC
H
y
g
r
o
s
co
p
ic
s
w
el
lin
g
MC
MEMS
Co
p
y
rig
h
t
©
2
0
2
0
In
stit
u
te o
f
A
d
v
a
n
c
e
d
E
n
g
i
n
e
e
rin
g
a
n
d
S
c
ien
c
e
.
All
rig
h
ts
re
se
rv
e
d
.
C
o
r
r
e
s
p
o
nd
ing
A
uth
o
r
:
An
u
j
Sin
g
a
l,
Dep
ar
te
m
en
t o
f
E
lectr
o
n
ics a
n
d
C
o
m
m
u
n
icatio
n
E
n
g
in
ee
r
i
n
g
,
Gu
r
u
J
a
m
b
h
es
h
w
ar
Un
iv
er
s
it
y
o
f
Scien
ce
a
n
d
T
ec
h
n
o
lo
g
y
,
His
ar
,
Har
a
y
an
a
-
125001
.
E
m
ail:
a
n
u
j
.
s
i
n
g
al0
8
@
g
m
ail.
c
o
m
1.
I
NT
RO
D
UCT
I
O
N
No
w
d
a
y
s
,
m
icr
o
elec
tr
o
m
ec
h
an
ica
l
s
y
s
te
m
s
(
ME
MS)
s
en
s
o
r
d
ev
ice
s
ar
e
b
ei
n
g
v
e
r
y
p
o
p
u
lar
an
d
w
o
r
t
h
w
h
ile
f
o
r
in
d
u
s
tr
y
,
in
s
tr
u
m
e
n
tat
io
n
,
m
ed
ical,
n
av
ig
a
tio
n
,
d
ef
e
n
s
e
a
n
d
v
eh
ic
le
s
ec
u
r
it
y
s
y
s
te
m
s
etc.
[
1
,
2
]
.
Hig
h
-
p
r
ec
is
io
n
s
en
s
o
r
is
r
eq
u
ir
ed
in
m
a
n
y
o
f
th
e
s
e
ap
p
licat
io
n
s
d
u
r
in
g
s
e
m
ico
n
d
u
cto
r
p
ac
k
a
g
i
n
g
.
I
n
ad
d
itio
n
,
t
h
e
d
is
to
r
tio
n
s
ta
b
ilit
y
a
n
d
a
h
ig
h
le
v
el
o
f
m
e
asu
r
e
m
en
t
is
n
ee
d
ed
in
ME
MS
s
e
n
s
o
r
s
d
ev
ices
ir
r
esp
ec
tiv
e
o
f
ex
ter
n
al
ec
o
lo
g
ical
cir
cu
m
s
tan
ce
s
[
3
,
4
]
.
I
n
ME
MS
s
en
s
o
r
d
ev
ices,
E
p
o
x
y
Mo
ld
C
o
m
p
o
u
n
d
(
E
MC)
ar
e
b
ei
n
g
u
s
ed
as
a
m
aj
o
r
p
ac
k
ag
in
g
m
ater
ial
d
u
e
t
o
its
h
i
g
h
p
r
o
d
u
cti
v
it
y
,
lo
w
er
m
ater
ial
as
w
e
ll
as
m
an
u
f
ac
t
u
r
in
g
co
s
t
a
n
d
g
r
ea
t
ef
f
ec
tiv
e
n
e
s
s
[
5
,
6
]
.
B
u
t,
it
ab
s
o
r
b
s
m
o
is
t
u
r
e
w
h
e
n
it
is
o
p
e
r
ated
in
th
e
h
u
m
id
en
v
ir
o
n
m
e
n
t.
T
h
is
m
o
is
t
u
r
e
ab
s
o
r
p
tio
n
w
h
ich
i
s
k
n
o
wn
as
h
y
g
r
o
s
co
p
ic
s
w
elli
n
g
af
f
ec
ts
t
h
e
m
a
ter
ial
ch
ar
ac
ter
s
tics
w
h
ic
h
ca
n
n
o
t
b
e
n
eg
lecte
d
.
Du
e
to
th
is
m
o
i
s
tu
r
e
ab
s
o
r
p
tio
n
,
a
v
is
co
elasti
cit
y
tr
an
s
f
o
r
m
atio
n
an
d
s
w
elli
n
g
is
o
b
s
er
v
ed
in
m
ater
ial
p
ac
k
ag
i
n
g
.
T
h
er
ef
o
r
e,
h
y
g
r
o
s
co
p
ic
s
w
elli
n
g
in
Mo
ld
C
o
m
p
o
u
n
d
(
MC)
is
o
n
e
o
f
th
e
cr
itical
i
s
s
u
es i
n
d
es
ig
n
in
g
o
f
elec
tr
o
n
ics p
ar
ts
o
f
ME
MS
s
en
s
o
r
d
ev
ices [
7
-
1
0
]
.
T
h
e
p
ac
k
ag
i
n
g
in
ME
MS
s
e
n
s
o
r
d
ev
ice
s
ar
e
h
ig
h
l
y
s
e
n
s
itiv
e
to
t
h
e
e
n
v
ir
o
n
m
en
tal
c
o
n
d
itio
n
s
.
Mo
r
eo
v
er
,
a
c
o
m
p
o
s
ite
m
at
er
ials
h
av
e
d
i
f
f
er
e
n
t
th
er
m
o
-
m
ec
h
a
n
ical
an
d
h
y
g
r
o
p
r
o
p
er
ties
.
Du
e
to
th
is
m
ater
ials
p
r
o
p
er
ty
m
i
s
m
atch
i
n
g
,
it
i
n
d
u
ce
s
h
y
g
r
o
s
co
p
ic
s
tr
ess
es
th
a
t
ca
n
b
e
m
ea
s
u
r
e
in
s
a
m
e
w
a
y
a
s
t
h
er
m
al
s
tr
ess
in
to
t
h
e
elec
tr
o
n
ic
m
ate
r
ial
p
ac
k
ag
i
n
g
.
I
n
ad
d
itio
n
,
th
i
s
in
d
u
ce
d
h
y
g
r
o
s
co
p
ic
s
tr
ess
e
s
ca
n
f
u
r
t
h
er
ca
u
s
es
th
e
cr
a
ck
s
,
d
ela
m
i
n
atio
n
an
d
d
ef
o
r
m
atio
n
in
t
h
e
m
ater
ial
p
ac
k
ag
e
[
1
1
-
1
4
]
.
T
h
e
h
y
g
r
o
s
co
p
ic
an
d
th
er
m
al
s
tr
ess
ar
e
m
o
s
t
l
y
i
g
n
o
r
ed
d
u
r
in
g
t
h
e
p
er
f
o
r
m
a
n
ce
an
al
y
s
i
s
o
f
ME
MS
s
e
n
o
r
d
ev
ice
is
j
u
s
t
b
ec
au
s
e
o
f
lack
o
f
ch
ar
ac
ter
izatio
n
tech
n
iq
u
e
li
k
e
u
n
f
a
m
i
liar
it
y
w
it
h
h
y
g
r
o
s
c
o
p
ic
m
o
d
elin
g
a
n
d
m
o
is
t
u
r
e
d
if
f
u
s
io
n
,
lack
o
f
m
ater
ial
h
y
g
r
o
s
co
p
ic
s
w
el
lin
g
ch
ar
ac
ter
is
t
ics
an
d
u
n
d
er
o
r
o
v
er
ev
alu
atio
n
o
f
t
h
e
h
y
g
r
o
s
co
p
ic
s
tr
es
s
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J
E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2088
-
8708
R
ed
u
cin
g
t
h
e
h
yg
r
o
s
co
p
ic
s
w
ellin
g
in
MEMS
s
en
s
o
r
u
s
in
g
d
i
ffer
en
t m
o
ld
ma
teri
a
ls
(
P
in
ky
)
495
m
ag
n
it
u
d
e.
T
h
er
ef
o
r
e,
it
i
s
i
m
p
o
r
ta
n
t
to
id
e
n
ti
f
y
an
d
e
v
a
lu
ate
t
h
e
h
y
g
r
o
s
co
p
ic
s
w
e
lli
n
g
d
u
r
in
g
m
ater
ial
pa
ck
ag
i
n
g
i
n
o
r
d
er
to
o
p
ti
m
ize
th
e
p
er
f
o
r
m
a
n
ce
o
f
ME
MS
s
e
n
s
o
r
d
e
v
ic
e
a
n
d
it
s
r
eliab
ilit
y
[
1
5
,
1
6
]
.
I
n
th
e
p
ast,
a
lo
t
o
f
r
esear
ch
w
as
also
ca
r
r
ied
o
u
t
to
u
n
d
er
s
tan
d
th
e
i
m
p
ac
t
o
f
h
y
g
r
o
-
th
er
m
o
-
m
ec
h
a
n
ical
s
tr
ess
e
s
in
d
u
ce
d
in
ME
MS
s
en
s
o
r
d
ev
ice
p
ac
k
ag
e
s
[
1
7
-
22]
.
A
ls
o
,
in
t
h
is
p
ap
er
,
w
e
an
a
l
y
ze
th
e
i
m
p
ac
t
o
f
h
y
g
r
o
s
co
p
ic
s
w
ell
in
g
a
n
d
s
tr
ess
o
n
ME
MS
s
e
n
s
o
r
d
ev
ice
a
n
d
u
s
ed
d
if
f
er
en
t
m
a
ter
ials
to
m
iti
g
ate
th
is
p
r
o
b
le
m
.
P
r
o
b
lem
State
m
en
t:
T
h
e
m
ai
n
co
n
tr
ib
u
tio
n
o
f
t
h
i
s
p
ap
er
is
s
u
m
m
ar
ized
b
elo
w
:
a.
ME
MS
d
ev
ices
ar
e
m
o
ld
ed
w
it
h
d
i
f
f
er
en
t
Mo
ld
C
o
m
p
o
u
n
d
(
MC)
i.e
.
tita
n
i
u
m
a
n
d
c
er
a
m
ic
etc.
to
o
v
er
co
m
e
th
e
h
y
g
r
o
s
co
p
ic
s
wellin
g
p
r
o
b
lem
o
f
E
MC.
b.
A
co
m
p
ar
ati
v
el
y
p
er
f
o
r
m
a
n
ce
an
al
y
s
is
o
f
th
e
v
ar
io
u
s
m
o
ld
co
m
p
o
u
n
d
i.e
.
ep
o
x
y
,
tita
n
i
u
m
a
n
d
ce
r
a
m
ic
w
it
h
ME
MS
p
r
ess
u
r
e
s
e
n
s
o
r
h
as
b
ee
n
s
t
u
d
ied
at
6
0
%
h
u
m
id
it
y
,
1
4
0
m
o
l/
m
3
s
at
u
r
atio
n
co
n
ce
n
tr
atio
n
an
d
2
5
o
C.
T
h
e
r
e
m
ain
d
er
o
f
t
h
i
s
r
esear
c
h
p
ap
er
h
a
s
b
ee
n
o
r
g
a
n
ized
a
s
f
o
llo
w
s
.
Sectio
n
2
p
r
o
v
id
es
a
n
o
v
er
v
ie
w
o
f
ME
MS
Se
n
s
o
r
Mo
d
el.
T
h
e
s
i
m
u
latio
n
r
esu
lts
ar
e
d
is
c
u
s
s
ed
i
n
t
h
e
S
ec
tio
n
3
an
d
f
i
n
all
y
co
n
clu
s
io
n
s
ar
e
d
r
a
w
n
i
n
S
ec
tio
n
4
.
2.
M
E
M
S SE
NSO
R
M
O
DE
L
I
n
t
h
is
s
ec
tio
n
,
w
e
co
n
s
id
er
a
b
asic
ME
MS
s
e
n
s
o
r
m
o
d
el
w
i
th
M
C
,
w
h
ic
h
i
s
p
r
ese
n
ted
as
s
h
o
w
n
i
n
Fig
u
r
e
1
.
I
n
teg
r
atio
n
i
n
m
icr
o
elec
tr
o
n
ic
cir
cu
it
s
,
ME
MS
an
d
o
th
er
elec
tr
o
n
ic
d
ev
ices
ar
e
o
f
ten
m
o
ld
ed
w
it
h
d
if
f
er
e
n
t
Mo
ld
C
o
m
p
o
u
n
d
(
MC)
to
g
u
ar
d
t
h
e
d
ev
ices
a
n
d
th
eir
i
n
ter
co
n
n
ec
tio
n
w
i
th
t
h
e
b
o
ar
d
.
T
h
e
ep
o
x
y
,
p
o
ly
m
er
s
etc.
ar
e
s
u
b
j
ec
t
to
m
o
is
t
u
r
e
ad
s
o
r
p
tio
n
an
d
h
y
g
r
o
s
co
p
ic
s
w
el
lin
g
,
w
h
ic
h
ca
n
ca
u
s
e
d
ela
m
i
n
atio
n
b
et
w
ee
n
t
h
e
MC
an
d
th
e
b
o
ar
d
o
r
to
in
co
r
r
ec
t
b
eh
a
v
io
r
o
f
ME
MS
co
m
p
o
n
e
n
t
s
.
I
t
i
s
s
u
f
f
icie
n
t
to
m
o
d
el
a
q
u
ar
ter
o
f
t
h
e
w
h
o
le
s
tr
u
ct
u
r
e
d
u
e
to
th
e
s
y
m
m
etr
y
.
T
h
e
g
eo
m
etr
y
o
f
ME
MS
s
en
s
o
r
m
o
d
el
is
co
m
b
in
a
tio
n
o
f
FR
4
b
o
ar
d
an
d
a
p
r
ess
u
r
e
s
en
s
o
r
d
ies [
2
3
]
as e
x
p
lain
ed
b
elo
w
:
T
h
e
lo
w
er
p
ar
t
o
f
th
e
ME
MS
m
o
d
el
i
s
tak
e
n
as
a
FR
4
b
o
ar
d
an
d
o
n
w
h
ic
h
th
e
p
r
ess
u
r
e
s
e
n
s
o
r
d
ie
is
g
lu
ed
.
Her
e,
th
e
p
r
ess
u
r
e
s
e
n
s
o
r
d
ie
is
b
asicall
y
m
ad
e
o
f
t
h
r
ee
p
ar
ts
as p
r
esen
ted
b
elo
w
:
a.
A
s
ilico
n
co
m
p
o
n
e
n
t
w
it
h
a
p
r
o
ce
s
s
ed
m
e
m
b
r
a
n
e.
T
h
is
m
e
m
b
r
a
n
e
i
s
m
o
d
eled
w
it
h
a
s
h
e
ll
in
ter
f
ac
e
a
n
d
s
tr
ain
o
n
t
h
e
m
e
m
b
r
a
n
e
s
u
r
f
ac
e
is
u
s
ed
to
m
ea
s
u
r
e
t
h
e
p
r
es
s
u
r
e.
b.
A
s
ilica
g
lass
ca
p
p
in
g
is
u
s
ed
t
o
p
r
o
tect
th
e
s
ilica
g
las
s
m
e
m
b
r
an
e.
c.
A
Mo
ld
C
o
m
p
o
u
n
d
t
h
at
co
v
e
r
s
th
e
d
ie
an
d
a
lar
g
e
p
ar
t
o
f
t
h
e
b
o
ar
d
.
W
h
en
e
x
ter
n
a
l
p
r
es
s
u
r
e
i
s
ap
p
lied
o
n
t
h
e
b
o
tto
m
f
ac
e
o
f
th
e
m
e
m
b
r
a
n
e,
t
h
e
m
e
m
b
r
an
e
d
e
f
o
r
m
s
an
d
th
e
s
tr
ai
n
i
s
m
ea
s
u
r
e
d
b
y
m
ea
n
s
o
f
a
W
h
ea
ts
to
n
e
b
r
id
g
e
m
ad
e
o
f
p
iezo
-
r
esis
to
r
s
.
Fig
u
r
e
1
.
ME
MS
s
en
s
o
r
m
o
d
el
[
2
3
]
I
n
th
e
ab
o
v
e
Fi
g
u
r
e
1
,
w
e
h
a
v
e
co
n
s
id
er
ed
v
ar
io
u
s
p
ar
a
m
eter
w
h
ich
ar
e
s
u
m
m
ar
ized
in
T
ab
le
1
.
T
h
e
in
itial
m
o
is
t
u
r
e
co
n
ce
n
tr
atio
n
af
ter
m
o
ld
in
g
is
s
et
to
4
0
m
o
l/
m
3
.
T
h
is
v
al
u
e
ca
n
b
e
also
tak
en
a
s
r
ef
er
en
ce
f
o
r
h
y
g
r
o
s
co
p
ic
s
w
e
llin
g
b
ec
au
s
e
all
t
h
e
s
tr
ess
e
s
ar
e
ass
u
m
ed
r
elax
ed
j
u
s
t
af
ter
m
o
ld
in
g
.
I
n
o
r
d
er
to
av
o
id
p
r
o
b
lem
s
t
h
at
ca
n
b
e
ca
u
s
ed
b
y
t
h
e
d
is
co
n
t
in
u
it
y
o
f
co
n
ce
n
tr
atio
n
a
t
in
i
tial
s
ta
te,
th
e
co
n
ce
n
tr
atio
n
b
o
u
n
d
ar
y
co
n
d
itio
n
is
ap
p
lie
d
s
m
o
o
th
l
y
a
n
d
a
b
o
u
n
d
ar
y
la
y
er
t
y
p
e
m
es
h
is
u
s
ed
n
ea
r
th
o
s
e
b
o
u
n
d
ar
ies.
T
h
e
r
esp
o
n
s
e
o
f
a
ME
MS
p
r
ess
u
r
e
s
e
n
s
o
r
is
co
m
p
u
ted
f
o
r
a
p
er
io
d
o
f
o
n
e
y
ea
r
[
2
4
,
2
5
]
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8708
I
n
t J
E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
10
,
No
.
1
,
Feb
r
u
ar
y
2
0
2
0
:
494
-
499
496
As
h
y
g
r
o
s
co
p
ic
s
w
elli
n
g
in
d
u
ce
s
a
o
n
e
-
w
a
y
co
u
p
li
n
g
b
et
w
ee
n
co
n
ce
n
tr
atio
n
a
n
d
m
ec
h
a
n
ic
s
.
T
h
e
co
n
ce
n
tr
atio
n
is
ca
lc
u
late
d
in
a
f
ir
s
t
ti
m
e
-
d
ep
en
d
en
t
s
tu
d
y
a
n
d
th
e
n
th
e
s
tr
u
ct
u
r
al
d
o
m
ai
n
s
ar
e
co
m
p
u
te
d
in
a
s
tat
io
n
ar
y
s
t
u
d
y
.
T
h
is
s
e
q
u
en
tial
ap
p
r
o
ac
h
r
ed
u
ce
s
t
h
e
co
m
p
u
tatio
n
ti
m
e
co
m
p
ar
ed
to
a
s
in
g
le
s
o
l
u
tio
n
in
cl
u
d
in
g
all
p
h
y
s
ica
l in
ter
f
ac
es.
T
ab
le
1
.
P
ar
am
eter
s
u
s
ed
in
d
e
s
ig
n
i
n
g
o
f
ME
MS
s
e
n
s
o
r
d
ev
i
ce
[
2
3
]
S
r
.
N
o
.
P
a
r
a
me
t
e
r
V
a
l
u
e
1.
L
e
n
g
t
h
o
f
t
h
e
d
e
v
i
c
e
(
L
)
2
0
[
mm
]
2
W
i
d
t
h
o
f
d
e
v
i
c
e
(
W
)
1
5
[
mm
]
3
L
e
n
g
t
h
o
f
M
o
l
d
c
o
mp
o
u
n
d
(
L
MC
)
1
5
[
mm
]
4
W
i
d
t
h
o
f
M
o
l
d
c
o
mp
o
u
n
d
(
W
MC
)
1
0
[
mm
]
5
T
h
i
c
k
n
e
ss o
f
M
o
l
d
c
o
m
p
o
u
n
d
(
T
MC
)
1
.
5
[
mm
]
6
S
i
d
e
l
e
n
g
t
h
o
f
se
n
so
r
(
L
D
i
e
)
1
.
2
[
mm
]
7
S
i
d
e
l
e
n
g
t
h
o
f
me
m
b
r
a
n
e
(
L
M
)
0
.
7
[
mm
]
8
S
i
d
e
l
e
n
g
t
h
o
f
h
o
l
e
i
n
F
R
4
(
L
H
)
0
.
8
[
mm
]
9
T
h
i
c
k
n
e
ss o
f
F
R
4
(
T
F
R
4
)
1
[
mm
]
10
T
h
i
c
k
n
e
ss o
f
si
l
i
c
o
n
(
T
Si
)
0
.
2
[
mm
]
11
T
h
i
c
k
n
e
ss o
f
me
mb
r
a
n
e
(
T
M
)
0
.
0
2
[
mm
]
12
T
h
i
c
k
n
e
ss o
f
g
l
a
ss w
a
f
e
r
(
T
G
)
0
.
2
[
mm
]
3.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
NS
I
n
th
is
s
ec
t
io
n
,
f
ir
s
tl
y
w
e
ex
a
m
i
n
ed
th
e
h
y
g
o
s
co
p
in
g
s
w
e
llin
g
,
r
elaitiv
e
m
ass
co
n
ce
n
tr
atio
n
an
d
d
is
p
alce
m
t
f
o
r
v
ar
io
u
s
ti
m
e
d
u
r
atio
n
i
n
E
M
C
co
n
tai
n
g
ME
MS
s
e
n
s
o
r
m
o
d
el
f
r
o
m
F
ig
u
r
e
2
to
F
ig
u
r
e
7
.
Fu
r
t
h
er
,
th
e
t
h
e
v
ar
io
u
s
M
C
i.e
.
tita
n
iu
m
a
n
d
ce
r
a
m
ic
etc.
is
u
s
ed
to
r
ed
u
ce
th
e
h
y
g
o
s
co
p
in
g
s
w
el
lin
g
p
r
esen
ts
in
E
MC
.
So
,
t
h
e
h
y
g
o
s
co
p
in
g
s
w
elli
n
g
r
ed
u
ct
io
n
p
er
f
o
r
m
a
n
ce
an
al
y
s
is
is
p
r
esen
ted
i
n
F
ig
u
r
e
s
8
-
9
f
o
r
tita
n
iu
m
MC
an
d
F
ig
u
r
e
1
0
an
d
1
1
f
o
r
ce
r
a
m
ic
MC.
He
r
e,
w
e
a
n
al
y
ze
d
t
h
e
r
es
u
lt
w
it
h
co
n
s
id
er
atio
n
o
f
6
0
% h
u
m
id
it
y
,
1
4
0
m
o
l/
m
3
s
at
u
r
atio
n
co
n
ce
n
tr
atio
n
a
n
d
2
5
o
C
te
m
p
er
at
u
r
e
co
n
d
itio
n
d
u
r
i
n
g
th
e
s
i
m
u
la
tio
n
.
3
.
1
.
E
po
x
y
m
o
ld co
m
po
un
d
(
E
M
C)
I
n
F
i
g
u
r
e
2
w
e
an
a
l
y
ze
t
h
e
m
o
is
tu
r
e
co
n
ce
n
tr
atio
n
i
n
t
h
e
E
MC
af
ter
2
d
ay
s
.
Her
e,
F
ig
u
r
e
2
d
ep
icts
th
at
t
h
e
m
o
is
t
u
r
e
d
if
f
u
s
es
p
r
o
g
r
ess
i
v
el
y
in
t
h
e
E
MC
a
n
d
it
h
as
r
ea
ch
ed
p
ar
tiall
y
t
h
e
to
p
f
ac
e
o
f
th
e
d
ie
af
ter
2
d
ay
s
.
I
n
t
h
e
s
i
m
u
lat
io
n
s
r
es
u
lts
,
it
is
n
o
ticed
th
at
t
h
e
m
o
i
s
tu
r
e
co
n
ce
n
tr
atio
n
a
t
t
h
e
d
ie
lo
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u
r
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2
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ati
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t
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e
E
MC a
f
ter
2
d
ay
s
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I
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p
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SS
N:
2088
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8708
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ig
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r
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u
r
e
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.
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ay
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u
r
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t a
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u
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.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J
E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2088
-
8708
R
ed
u
cin
g
t
h
e
h
yg
r
o
s
co
p
ic
s
w
ellin
g
in
MEMS
s
en
s
o
r
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s
in
g
d
i
ffer
en
t m
o
ld
ma
teri
a
ls
(
P
in
ky
)
499
RE
F
E
R
E
NC
E
S
[1
]
M
.
K.
Na
ji
,
A
.
D.
F
a
rh
o
o
d
,
A
.
H.
A
li
,
"
No
v
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l
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sig
n
a
n
d
a
n
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m
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,
"
In
d
o
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sia
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J
o
u
rn
a
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o
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El
e
c
trica
l
En
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e
rin
g
a
n
d
C
o
mp
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ter
S
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(
IJ
EE
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)
,
v
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1
5
,
n
o
.
2
,
pp
.
9
7
1
-
9
7
8
,
A
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g
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2
0
1
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.
[2
]
M
.
J.
A
d
a
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so
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T
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In
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M
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1
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o
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7
,
p
p
.
1
7
3
6
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1
7
4
5
,
1
9
8
0
.
[3
]
I.
Kh
a
li
l
u
ll
a
h
,
T
.
Re
z
a
,
L
.
Ch
e
n
,
A
.
K.
M
.
M
o
n
a
y
e
m
,
H.
M
a
z
u
m
d
e
r,
J.
F
a
n
,
C.
Qia
n
,
G
.
Zh
a
n
g
a
n
d
X
.
F
a
n
,
"
In
-
S
it
u
Ch
a
ra
c
teriz
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ti
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o
f
M
o
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u
re
A
b
so
rp
ti
o
n
a
n
d
Hy
g
ro
sc
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p
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S
w
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ll
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n
g
o
f
S
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e
/
P
h
o
sp
h
o
r
C
o
m
p
o
site
F
il
m
a
n
d
Ep
o
x
y
M
o
ld
C
o
m
p
o
u
n
d
i
n
L
ED
P
a
c
k
a
g
in
g
,
"
IEE
E
In
tem
a
ti
o
n
a
l
Co
n
fer
e
n
c
e
o
n
T
h
e
rm
a
l,
M
e
c
h
a
n
ica
l
a
n
d
M
u
lt
i
-
Ph
y
sic
s S
imu
l
a
ti
o
n
a
n
d
Exp
e
rime
n
ts
in
M
icr
o
e
lec
tro
n
ics
a
n
d
M
icr
o
sy
ste
ms
,
p
p
.
1
-
9
,
A
p
r
.
2
0
1
7
.
[4
]
E.
H.
W
o
n
g
,
R.
Ra
jo
o
,
S
.
W
.
Ko
h
a
n
d
T
.
B.
L
i
m
,
"
T
h
e
M
e
c
h
a
n
ics
a
n
d
Im
p
a
c
t
o
f
H
y
g
ro
sc
o
p
ic
S
w
e
ll
in
g
o
f
P
o
ly
m
e
ric
M
a
teria
ls
in
El
e
c
tro
n
ic
P
a
c
k
a
g
in
g
,
"
T
ra
n
sa
c
ti
o
n
s
o
f
th
e
AS
M
E
J
o
u
rn
a
l
o
f
El
e
c
tro
n
ic
Pa
c
k
a
g
in
g
,
v
o
l.
1
2
4
,
p
p
.
1
2
2
-
1
2
6
,
2
0
0
2
.
[5
]
H.
A
rd
e
b
il
i,
E.
H.
W
o
n
g
,
a
n
d
M
.
P
e
c
h
t
,
"
H
y
g
ro
sc
o
p
ic
s
w
e
ll
in
g
a
n
d
a
b
so
r
p
ti
o
n
c
h
a
ra
c
teristics
o
f
e
p
o
x
y
m
o
ld
in
g
c
o
m
p
o
u
n
d
s
u
se
d
in
e
lec
tro
n
ic
p
a
c
k
a
g
in
g
,"
IEE
E
T
ra
n
sa
c
ti
o
n
o
n
Co
mp
o
n
e
n
ts,
Pa
c
k
a
g
i
n
g
a
n
d
M
a
n
u
fa
c
t
u
rin
g
T
e
c
h
n
o
l
ogy
,
v
o
l.
2
6
,
n
o
.
1
,
p
p
.
2
0
6
-
2
1
4
,
M
a
r.
2
0
0
3
.
[6
]
S
u
n
i
l
K.
Ka
ra
d
,
"
M
e
c
h
a
n
ism
s
o
f
m
o
istu
re
a
b
so
rp
ti
o
n
b
y
c
y
a
n
a
te es
ter
m
o
d
if
ied
e
p
o
x
y
re
sin
m
a
tri
c
e
s
:
th
e
c
lu
ste
rin
g
o
f
wa
ter
m
o
lec
u
les
,
"
In
ter
n
a
ti
o
n
a
l
J
o
u
rn
a
l
o
f
P
o
lym
e
r
, v
o
l.
46
,
p
p
.
2
7
3
2
-
2
7
3
8
,
2
0
0
5
.
[7
]
P
.
No
g
u
e
ira,
"
Eff
e
c
t
o
f
W
a
ter
S
o
rp
ti
o
n
o
n
t
h
e
S
tru
c
t
u
re
a
n
d
M
e
c
h
a
n
ica
l
P
r
o
p
e
rti
e
s
o
f
a
n
Ep
o
x
y
Re
sin
S
y
st
e
m
,
"
J
o
u
rn
a
l
o
f
A
p
p
li
e
d
Po
lym
e
r S
c
ien
c
e
,
v
o
l.
8
0
,
p
p
.
7
1
-
8
0
,
2
0
0
1
.
[8
]
R.
L
iu
,
H.
W
a
n
g
,
J.
W
a
n
g
,
H.
H.
L
e
e
,
a
n
d
S
.
B
.
P
a
rk
,
"
M
o
istu
re
Dif
f
u
sio
n
a
n
d
Hy
g
ro
sc
o
p
ic
S
w
e
ll
in
g
o
f
A
d
h
e
siv
e
s
in
El
e
c
tro
n
ics
P
a
c
k
a
g
i
n
g
,"
IEE
E
In
tem
a
ti
o
n
a
l
Co
n
fer
e
n
c
e
o
n
El
e
c
tro
n
ic
Co
mp
o
n
e
n
ts
a
n
d
T
e
c
h
n
o
l
o
g
y
,
p
p
.
2
2
0
3
-
2
2
0
9
,
M
a
y
2
0
1
6
.
[9
]
N.
A
.
M
.
Ja
m
a
il
,
M
.
A
.
M
.
P
i
a
h
,
N.
A
.
M
u
h
a
m
m
a
d
,
a
n
d
Q.
E.
Ka
m
a
ru
d
in
,
"
P
DC
A
n
a
l
y
sis
o
f
LL
DP
E
-
NR
Na
n
o
c
o
m
p
o
site
f
o
r
Ef
f
e
c
t
o
f
M
o
i
stu
re
A
b
so
rp
ti
o
n,
"
I
n
ter
n
a
ti
o
n
a
l
J
o
u
rn
a
l
o
f
El
e
c
trica
l
a
n
d
C
o
mp
u
ter
En
g
in
e
e
rin
g
(
IJ
ECE
),
v
o
l.
7
,
n
o
.
6
,
p
p
.
3
1
3
3
-
3
1
3
9
,
De
c
.
2
0
1
7
.
[1
0
]
X
.
M
a
,
K.
M
.
B.
Ja
n
se
n
,
G
.
Q.
Zh
a
n
g
,
L
.
J.
Ern
st
,
"
H
y
g
ro
sc
o
p
ic
Eff
e
c
ts
o
n
S
w
e
ll
in
g
a
n
d
V
i
sc
o
e
las
ti
c
it
y
o
f
El
e
c
tro
n
ic
P
a
c
k
a
g
in
g
Ep
o
x
y
,"
IE
EE
In
te
ma
t
io
n
a
l
Co
n
fer
e
n
c
e
o
n
E
lec
tro
n
ics
Pa
c
k
a
g
in
g
T
e
c
h
n
o
l
o
g
y
,
p
p
.
1
-
5
,
2
0
0
6
.
[1
1
]
H.
C.
Hs
u
,
Y.
T
.
Hs
u
,
W
.
L
.
Hs
ich
,
M
.
C.
W
e
n
g
,
S
.
T
.
Zh
a
n
g
Jia
n
,
F
.
J.
Hs
u
,
Y
.
F
.
C
h
e
n
,
S
.
L
.
F
u
,
"
H
y
g
ro
sc
o
p
ic
S
w
e
ll
in
g
Eff
e
c
t
o
n
P
o
ly
m
e
ric
M
a
teria
ls
a
n
d
T
h
e
rm
o
-
h
y
g
ro
-
m
e
c
h
a
n
ica
l
De
sig
n
o
n
F
in
g
e
r
P
ri
n
ter
P
a
c
k
a
g
e
,
"
In
ter
n
a
t
io
n
a
l
C
o
n
fer
e
n
c
e
o
n
M
icr
o
sy
ste
ms
,
Pa
c
k
a
g
i
n
g
,
Asse
mb
ly
&
Circ
u
it
s T
e
c
h
n
o
l
o
g
y
,
p
p
.
2
9
1
-
2
9
4
,
Oc
t.
2
0
0
8
.
[1
2
]
W
.
Zh
u
,
P
.
L
a
i,
S
.
Ya
n
g
,
"
Eff
e
c
t
o
f
H
y
g
ro
-
th
e
r
m
o
-
M
e
c
h
a
n
ica
l
S
tres
s
o
n
Re
li
a
b
il
it
y
o
f
S
tac
k
e
d
Die
P
a
c
k
a
g
e
,
"
IEE
E
In
ter
n
a
ti
o
n
a
l
S
y
mp
o
si
u
m o
n
Ad
v
a
n
c
e
d
P
a
c
k
a
g
in
g
M
a
ter
ia
ls
,
p
p
.
2
0
4
-
2
0
8
,
Oc
t.
2
0
1
1
.
[1
3
]
S
.
Yo
o
n
,
C.
Ja
n
g
,
a
n
d
B.
Ha
n
,
"
No
n
li
n
e
a
r
stre
ss
m
o
d
e
li
n
g
s
c
h
e
m
e
to
a
n
a
l
y
z
e
se
m
i
c
o
n
d
u
c
t
o
r
p
a
c
k
a
g
e
s
su
b
jec
ted
t
o
c
o
m
b
in
e
th
e
rm
a
l
a
n
d
h
y
g
ro
sc
o
p
ic
lo
a
d
i
n
g
,
"
In
ter
n
a
ti
o
n
a
l
J
o
u
r
n
a
l
o
n
El
e
c
tro
n
ic P
a
c
k
a
g
in
g
,
v
o
l
.
13
,
n
o
.
2
,
2
0
0
8
.
[1
4
]
M
.
D.
P
lac
e
tt
e
,
X
.
J.
F
a
n
,
J.
-
H
.
Z
h
a
o
a
n
d
D.
E
d
w
a
rd
s,
"
Du
a
l
sta
g
e
m
o
d
e
li
n
g
o
f
m
o
istu
re
a
b
so
rp
ti
o
n
a
n
d
d
e
so
rp
ti
o
n
in
e
p
o
x
y
m
o
ld
c
o
m
p
o
u
n
d
s,"
M
icr
o
e
lec
tro
n
ics
Relia
b
il
i
ty
,
v
o
l.
5
2
,
p
p
.
1
4
0
1
-
1
4
0
8
,
2
0
1
2
.
[1
5
]
R.
H.
Kro
n
d
o
rf
e
r
a
n
d
Y.
K.
Kim
,
"
P
a
c
k
a
g
in
g
e
ffe
c
t
o
n
M
EM
S
p
re
ss
u
re
se
n
so
r
p
e
rf
o
rm
a
n
c
e
,
"
IEE
E
T
ra
n
sa
c
ti
o
n
o
n
Co
mp
o
n
e
n
t
Pa
c
k
a
g
in
g
T
e
c
h
n
o
ly
,
v
o
l.
3
0
,
n
o
.
2
,
p
p
.
2
8
5
–
2
9
3
,
Ju
n
.
2
0
0
7
.
[1
6
]
J.
Ke
ll
e
r,
"
E
ff
e
c
t
o
f
m
o
istu
re
s
w
e
ll
in
g
o
n
M
EM
S
p
a
c
k
a
g
in
g
a
n
d
in
teg
ra
ted
se
n
so
rs,"
In
ter
n
a
ti
o
n
a
l
J
o
u
rn
a
l
o
n
M
icr
o
e
lec
tro
n
.
Rel.
,
v
o
l
.
5
3
,
p
p
.
1
6
4
8
–
1
6
5
4
,
2
0
1
3
.
[1
7
]
E.
S
tellrec
h
t,
H.
Bo
n
g
tae
a
n
d
M
.
G
.
P
e
c
h
t,
"
Ch
a
ra
c
teriz
a
ti
o
n
o
f
h
y
g
ro
sc
o
p
ic
s
we
ll
in
g
b
e
h
a
v
io
r
o
f
m
o
ld
c
o
m
p
o
u
n
d
s
a
n
d
p
las
ti
c
p
a
c
k
a
g
e
s,"
IEE
E
T
ra
n
sa
c
ti
o
n
s
o
n
Co
m
p
o
n
e
n
ts
a
n
d
Pa
c
k
a
g
in
g
T
e
c
h
n
o
l
o
g
ies
,
v
o
l.
2
7
,
p
p
.
4
9
9
-
5
0
6
,
2
0
0
4
.
[1
8
]
D.
L
iu
a
n
d
S
.
P
a
rk
,
"
A
n
o
te
o
n
th
e
n
o
rm
a
li
z
e
d
a
p
p
ro
a
c
h
to
sim
u
latin
g
m
o
istu
re
d
iff
u
sio
n
in
a
m
u
lt
ima
teria
l
s
y
ste
m
u
n
d
e
r
tran
sie
n
t
t
h
e
rm
a
l
c
o
n
d
it
i
o
n
s u
sin
g
A
NSYS
1
4
a
n
d
1
4
.
5
,
"
J
o
u
r
n
a
l
o
n
El
e
c
tro
n
ic
P
a
c
k
a
g
in
g
.
,
v
o
l
.
1
3
6
,
n
o
.
3
,
2
0
1
4
.
[1
9
]
D.
G
Ya
n
g
,
Ja
n
se
n
,
L
.
G
.
Wan
g
,
L
.
J.
Ern
st,
G
.
Q.
Zh
a
n
g
,
H.
J.
L
.
Bre
ss
e
rs,
X
.
J.
F
a
n
,
"
M
icro
m
e
c
h
a
n
ica
l
m
o
d
e
li
n
g
o
f
stre
ss
e
v
o
lu
ti
o
n
in
d
u
c
e
d
d
u
ri
n
g
c
u
re
in
a
p
a
rti
c
le
-
f
iIl
e
d
e
lec
tro
n
ic
p
a
c
k
a
g
in
g
p
o
ly
m
e
r,
"
IEE
E
T
ra
n
sa
c
ti
o
n
s
o
n
Co
mp
o
n
e
n
ts
a
n
d
P
a
c
k
a
g
i
n
g
T
e
c
h
n
o
l
o
g
ies
,
v
o
l
.
2
7
,
n
o
.
4
,
p
p
.
6
7
6
-
6
8
3
,
2
0
0
4
.
[2
0
]
S
.
Yo
o
n
,
B
.
Ha
n
,
S
.
Ch
o
,
a
n
d
C.
-
S
.
Ja
n
g
,
"
No
n
-
li
n
e
a
r
f
in
it
e
e
le
m
e
n
t
a
n
a
ly
sis
f
o
r
e
lec
tro
n
ic
p
a
c
k
a
g
e
s
su
b
jec
ted
to
c
o
m
b
in
e
d
h
y
g
ro
sc
o
p
ic
a
n
d
t
h
e
rm
o
-
m
e
c
h
a
n
ica
l
stre
ss
e
s,
"
Pro
c
e
d
in
g
o
n
El
e
c
tro
n
.
P
a
c
k
a
g
.
T
e
c
h
n
o
l.
Co
n
f.
(
EP
T
C)
,
v
o
l.
2
,
p
p
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