Inter
national
J
our
nal
of
Electrical
and
Computer
Engineering
(IJECE)
V
ol.
8,
No.
2,
April
2018,
pp.
946
–
953
ISSN:
2088-8708
946
I
ns
t
it
u
t
e
o
f
A
d
v
a
nce
d
Eng
ine
e
r
i
ng
a
nd
S
cie
nce
w
w
w
.
i
a
e
s
j
o
u
r
n
a
l
.
c
o
m
CMOS
T
emperatur
e
Sensor
with
Pr
ogrammable
T
emperatur
e
Range
f
or
Biomedical
A
pplications
Agung
Setiab
udi
1
,
Hir
oki
T
amura
2
,
and
K
oichi
T
anno
3
1
Department
of
Materials
and
Informatics,
Uni
v
ersity
of
Miyazaki,
Japan
2
Department
of
En
vironmental
Robotics,
Uni
v
ersity
of
Miyazaki,
Japan
3
Department
of
Electrical
and
System
Engineering,
Uni
v
ersity
of
Miyazaki,
Japan
Article
Inf
o
Article
history:
Recei
v
ed
Dec
11,
2017
Re
vised
Jan
20,
2018
Accepted:
Feb
19,
2018
K
eyw
ord:
Biomedical
Application
Programmable
T
emperature
Sensor
Digital
CMOS
Lo
w-po
wer
Lo
w-v
oltage.
Abstract
A
CMOS
temperature
sensor
circuit
with
programmabl
e
temperature
range
is
proposed
for
biomedical
applications.
The
proposed
circuit
consists
of
temperature
sensor
core
circuit
and
programmable
temperature
range
digital
interf
ace
circuit.
Both
circuits
are
able
to
be
operated
at
1.0
V
.
The
proposed
temperature
sensor
circuit
is
operated
in
weak
in
v
ersion
re
gion
of
MOSFETs.
The
proposed
digital
interf
ace
circuit
con
v
erts
current
into
time
using
Current-to-T
ime
Con
v
erter
(ITC)
and
con
v
erts
time
to
digital
data
using
counter
.
T
empera-
ture
range
can
be
programmed
by
adjusting
pulse
width
of
the
trigger
and
clock
frequenc
y
of
counter
.
The
proposed
circuit
w
as
simulated
using
HSPICE
with
1P
,
5M,
3-wells,
0.18-
m
CMOS
process
(BSIM3v3.2,
LEVEL53).
From
the
simulation
of
proposed
circuit,
temperature
range
is
programmed
to
be
0
°C
to
100
°C,
it
is
obtained
that
resolution
of
the
proposed
circuit
is
0.392
°C
with
-0.89/+0.29
°C
inaccurac
y
and
the
total
po
wer
consump-
tion
is
22.3
W
in
25
°C.
Copyright
©
2018
Institute
of
Advanced
Engineering
and
Science
.
All
rights
r
eserved.
Corresponding
A
uthor:
K
oichi
T
anno
Department
of
Electrical
and
System
Engineering,
Uni
v
ersity
of
Miyazaki
1-1
Gakuenkibanadai-nishi,
Miyazaki,
889-2192,
Japan
tanno@cc.miyazaki-u.ac.jp
1.
INTR
ODUCTION
Engineering
is
an
inno
v
ati
v
e
field
that
its
origin
ideas
leading
to
e
v
erything,
including
biology
and
medical
area.
Applicat
ion
of
engineering
in
biology
and
medical
area
is
then
called
biomedical
e
n
gi
neering.
The
purpose
of
this
field
is
combining
the
design
and
problem
solving
skills
of
engineering
with
medical
and
biology
sciences
to
adv
ance
health
care
treatment,
including
diagnosis,
monitoring,
and
therap
y
[1].
In
the
recent
years,
there
is
a
l
o
t
of
research
focus
on
biomedical
engineering.
This
topic
is
becoming
interesting
and
challenging
due
to
t
he
increase
of
system
comple
xity
,
human
population
and
its
distrib
ution.
One
of
the
most
important
components
in
biomedical
engineering
is
sensor
.
This
component
is
v
ery
impor
-
tant
because
it
is
directly
connected
to
ph
ysical
phenomenon
[2,
3].
In
man
y
biomedical
applications,
sensor
plays
a
crucial
role
to
collect
data
from
man
y
objects
such
as
human
body
temperature,
en
vironment
humidity
and
oxygen
le
v
els
in
the
air
.
The
often
utilized
sensor
in
biomedical
applications
is
temperature
sensor
,
because
temperature
is
a
highly
important
parameter
to
monitor
,
identify
,
or
control
man
y
conditions
in
biomedical
field,
such
as
diagnos-
ing
human
disease,
temperature
monitoring
in
operating
rooms
and
pre
v
enting
bacteria
gro
wth
in
some
places.
By
kno
wing
the
useful
of
temperature
sensor
in
man
y
biomedical
applications,
the
a
v
ailability
of
a
temperature
sensor
which
can
be
used
in
v
arious
biomedical
applications
is
highly
recommended.
The
problem
is
dif
ferent
biomedical
application
has
dif
ferent
temperature
range
to
be
measured.
It
means
that
the
sensor
must
ha
v
e
wide
temperature
range.
Ho
we
v
er
,
wide
temperature
range
causes
the
resolution
of
its
digital
data
decreases.
T
o
k
eep
the
resolution
high,
high-bit
analog
to
digital
(ADC)
must
be
applied.
Ne
v
ertheless,
it
will
decrease
the
speed
and
increase
the
po
wer
consumption.
Furthermore,
in
biomedical
applications,
not
only
high
sensiti
vity
temperature
sensor
is
needed
b
ut
also
lo
w
v
oltage
and
lo
w
po
wer
temperature
sensor
is
strongly
required
[4],
[5],
[6].
A
lo
w
po
wer
and
lo
w
v
oltage
temperature
sensor
has
been
proposed
and
reported
[7],
[8].
This
sensor
in
J
ournal
Homepage:
http://iaescor
e
.com/journals/inde
x.php/IJECE
I
ns
t
it
u
t
e
o
f
A
d
v
a
nce
d
Eng
ine
e
r
i
ng
a
nd
S
cie
nce
w
w
w
.
i
a
e
s
j
o
u
r
n
a
l
.
c
o
m
,
DOI:
10.11591/ijece.v8i2.pp946-953
Evaluation Warning : The document was created with Spire.PDF for Python.
IJECE
ISSN:
2088-8708
947
general
achie
v
es
lo
w
po
wer
c
o
ns
umption,
b
ut
it
has
small
sensiti
vity
.
The
other
high
sensiti
vity
temperature
sensors
are
also
proposed
[9],
[10].
Ho
we
v
er
,
these
sensors
are
not
lo
w
v
oltage
and
it
consumes
high
po
wer
.
The
other
problem
is
that
man
y
con
v
entional
on-chip
temperature
sensor
circuits
use
BJT
(
V
be
)
to
sense
temperature
[4],
[9],
[11],
[12].
The
problem
of
BJT
is
not
able
to
be
implemented
in
the
same
chip
in
man
y
standard
CMOS
processes.
This
means
that
cost
of
f
abrication
will
increase.
The
last
problem
is
that
man
y
cores
of
temperature
sensor
circuits
use
e
xternal
bias
circ
uits
or
high
v
alue
resistor
[8],
[9],
[13].
These
require
lar
ge
chip
areas.
A
lo
w
v
oltage
and
lo
w
po
wer
temperature
sensor
circuit
with
digital
output
for
health
care
monitoring
system
has
been
proposed
in
[14].
This
sensor
can
achie
v
e
lo
w
v
oltage,
lo
w
po
wer
,
high
sensiti
vity
and
high
resolution.
Ho
we
v
er
,
this
sensor
is
special
for
health
care
monitoring
system
whose
temperature
range
only
33
°C
to
45
°C,
and
it
can
not
to
be
used
for
other
biomedical
applications
with
dif
ferent
temperature
range.
This
paper
proposes
a
ne
w
temperature
sensor
circuits
based
on
pre
vious
w
ork
[14]
with
addition
of
pro-
grammable
temperature
range
digitali
zation.
In
this
paper
,
the
analysis
of
the
circuits,
simulation
results
and
the
measurement
of
f
abricated
temperature
sensor
core
are
reported
in
detail.
This
paper
is
or
g
anized
as
follo
ws.
The
pre
vious
research
and
impro
v
ement
are
presented
in
Sect.
2.
In
Sect.
3,
the
simulation
results
of
the
designed
circuit
and
measurement
of
f
abrication
temperature
sensor
core
are
presented.
Finally
,
Sect.
4
concludes
this
paper
.
2.
PREVIOUS
RESEARCH
AND
IMPR
O
VEMENT
In
this
section,
the
pre
vious
research
[14]
and
its
impro
v
ement
are
presented
in
detail.
Fig.
1
s
ho
ws
the
block
diagram
of
the
proposed
temperature
sensor
in
pre
vious
research.
This
proposed
temperature
sensor
consists
of
some
sub
circuits:
sensor
core
circuit
[3],
v
oltage
t
o
current
con
v
erter
(VIC)
circuit,
1/x
circuit,
current
to
time
con
v
erter
(ITC)
circuit
[15],
and
counter
.
Figure
1.
Block
diagram
of
the
proposed
inte
grated
temperature
sensor
with
digital
output
2.1.
T
emperatur
e
Sensor
Cor
e
Figure
2
sho
ws
the
t
emperature
sensor
core
circuit.
The
temperature
sensor
core
implementation
consists
of
sensor
block
and
start-up
block.
The
start-up
block
(
M
s
1
,
M
s
2
and
M
s
3
)
is
circuit
to
force
turn
on
the
sensor
block,
and
t
his
block
does
not
af
fect
the
output
v
oltage.
The
sensor
block
is
constructed
using
M
1
-
M
5
.
Where,
M
1
,
M
2
and
M
3
are
operated
in
weak
in
v
ersion
re
gion,
whereas
M
4
and
M
5
can
be
operated
in
both
weak
and
strong
in
v
ersion
re
gion.
I
ds
of
the
MOSFET
operate
in
the
weak
in
v
ersion
re
gion
is
represented
by
the
follo
wing
equation.
I
ds
=
I
0
W
L
exp
V
g
s
V
th
+
V
ds
nV
1
exp
V
ds
V
(1)
I
0
=
2
nC
ox
V
2
(2)
V
=
k
q
T
k
(3)
n
=
1
+
C
d
C
ox
(4)
Where
V
is
the
thermal
v
oltage,
k
(=
1.38
10
23
J/K)
is
the
Boltzmann’
s
constant,
q
(=
1.60
10
19
C)
is
the
electron
char
ge,
T
K
is
the
absolute
temperature,
n
is
slope
f
actor
,
is
DIBL
(Drain
Induced
Barri
er
Lo
wering)
coef
ficient,
is
carrier
mobility
,
C
d
is
capacitance
of
the
depletion
layer
,
C
ox
is
capacitance
of
the
oxide
layer
.
In
(1),
if
V
ds
4
V
,
1
exp
(
V
ds
/V
)
is
satisfied,
as
the
results
exp
(
V
ds
/V
)
can
be
ignored.
Furthermore,
because
it
is
well-kno
wn
that
V
ds
is
small
v
alue,
(
V
g
s
V
th
)
V
ds
can
be
satisfied.
From
these
conditions,
(1)
can
be
re
written
to
(5).
I
ds
=
I
0
W
L
exp
V
g
s
V
th
nV
(5)
CMOS
T
emper
atur
e
Sensor
with
Pr
o
gr
ammable
T
emper
atur
e
Rang
e
for
Biomedical
...
(Agung
Setiab
udi)
Evaluation Warning : The document was created with Spire.PDF for Python.
948
ISSN:
2088-8708
(a)
(b)
Figure
2.
T
emperature
Sensor:
(a)
Core
circuit,
(b)
Cascade
connection
of
temperature
sensor
core
V
P
T
AT
1
=
nV
ln
W
2
=L
2
W
1
=L
1
I
1
I
2
+
V
th
1
V
th
2
(6)
And
the
threshold
v
oltage
with
the
body
ef
fect
of
MOSFET
is
generally
gi
v
en
by
(7).
V
th
=
V
th
0
+
p
j
2
F
+
V
sb
j
p
j
2
F
j
(7)
Where
V
th
0
is
the
zero-bias
threshold
v
oltage,
is
the
body
ef
fect
coef
ficient,
2
F
is
the
surf
ace
potential
parameter
.
If
V
sb
is
small
enough,
(7)
can
be
approximated
as
follo
ws.
V
th
V
th
0
+
V
sb
2
p
2
F
(8)
From
Fig.
2
(a)
it
can
be
kno
wn
that
V
sb
1
=
0
and
V
sb
2
=
V
P
T
AT
1
,
then
V
P
T
AT
1
can
be
e
xpressed
as
by
(9)
V
P
T
AT
1
=
nV
ln
W
2
=L
2
W
1
=L
1
I
1
I
2
1
+
1
2
p
2
F
(9)
It
is
assumed
that
=
0.61
and
2
F
=
0.7,
the
denominator
of
(9)
is
calculated
as
follo
ws
1
+
1
2
p
2
F
=
1
:
365
n
0
(10)
Slope
f
actor
n
is
kno
wn
to
be
a
v
alue
of
approximately
1.5,
therefore,
it
can
be
considered
that
n’
is
relati
v
el
y
close
to
the
v
alue
of
n
.
As
a
result,
V
P
T
A
T
1
can
be
e
xpressed
by
equation
(11).
V
P
T
AT
1
=
n
n
0
V
ln
W
2
=L
2
W
1
=L
1
I
1
I
2
V
ln
W
2
=L
2
W
1
=L
1
I
1
I
2
k
q
ln
W
2
=L
2
W
1
=L
1
I
1
I
2
T
K
(11)
From
(11),
it
can
be
found
that
V
P
T
AT
1
of
the
proposed
circuit
is
directly
proportional
to
T
K
.
Moreo
v
er
,
it
could
be
understood
that
the
output
v
oltage
of
Fig.
2
is
proportional
to
absolute
temperature.
The
sensiti
vity
of
the
sensor
can
then
be
increased
using
cascade
connection
of
the
ci
rcuit.
Fig.
2
(b)
sho
ws
the
cascade
connection
of
circuit
Fig.
2
(a).
Using
(11),
V
P
T
AT
n
of
Fig.
2
(b)
is
as
follo
ws.
V
P
T
A
T
n
=
k
q
ln
W
12
=L
12
W
11
=L
11
I
11
I
12
T
K
+
V
P
T
AT
n
1
(12)
Using
(11)
and
(12),
VPT
A
T2
is
then
gi
v
en
by
V
P
T
AT
n
=
k
q
ln
W
2
=L
2
W
1
=L
1
I
1
I
2
+
:
:
:
+
W
12
=L
12
W
11
=L
11
I
11
I
12
T
K
(13)
From
(13),
since
the
output
v
oltage
can
be
e
xpressed
by
summation
of
the
log
arithmic
term,
this
method
can
be
used
to
increase
sensiti
vity
ef
fecti
v
ely
.
IJECE
V
ol.
8,
No.
2,
April
2018:
946
–
953
Evaluation Warning : The document was created with Spire.PDF for Python.
IJECE
ISSN:
2088-8708
949
2.2.
V
oltage
to
Curr
ent
Con
v
erter
(VIC)
Figure
3
sho
ws
V
oltage
to
Current
Con
v
erter
(VIC).
From
the
figure
it
can
be
inferred
that
V
m
=
V
in
,
and
hence
the
follo
wing
equation
can
be
obtained.
I
R
=
V
in
R
(14)
I
R
is
then
copied
by
t
w
o
current
mirrors
(
M
v
i
1
,
M
v
i
3
,
M
v
i
4
,
and
M
v
i
5
)
to
I
P
T
AT
.
If
the
ratio
of
W
/
L
between
M
v
i
1
Figure
3.
V
oltage
to
Current
Con
v
erter
(VIC)
and
M
v
i
3
are
m
and
n
,
and
M
v
i
4
and
M
v
i
5
are
identical,
then
the
follo
wing
equation
can
be
obtained.
I
P
T
A
T
=
n
m
V
in
R
(15)
2.3.
1/x
Cir
cuit
and
Curr
ent
to
T
ime
Con
v
erter
(ITC)
Figure
4
sho
ws
the
1/x
circuit
and
ITC.
The
1/x
circuit
is
formed
using
M
t
1
,
M
t
2
,
M
t
3
,
and
M
t
4
which
are
operated
in
weak
in
v
ersion
re
gion.
Based
on
translinear
principle
in
weak
in
v
ersion
re
gion
I
a
can
be
gi
v
en
by
the
follo
wing
equation.
I
a
=
I
2
r
ef
I
P
T
AT
(16)
Where
I
r
ef
is
current
source
which
ha
v
e
no
temperature
dependenc
y
,
V
b
is
supplied
by
reference
v
oltage
circuit,
and
I
P
T
AT
is
the
output
current
of
v
oltage
to
current
con
v
erter
.
Th
e
temperature
dependence
of
I
a
is
v
ery
s
mall
because
it
utilizes
translinear
principle.
Figure
4.
Current
to
T
ime
Con
v
erter
(ITC)
The
operating
principle
of
ITC
could
be
described
as
follo
ws,
When
V
tg
r
sho
wn
in
ITC
circuit
is
lo
w
,
M
x
3
,
M
x
4
,
and
M
x
5
are
OFF
,
and
the
circuit
is
in
the
idle
mode.
Therefore,
V
p
reaches
V
dd
,
as
the
result,
T
out
becomes
Lo
w
.
When
a
short
single
pulse
is
a
pp
l
ied
to
the
g
ate
of
M
x
5
,
not
only
M
x
5
b
ut
also
M
x
3
and
M
x
4
become
ON,
CMOS
T
emper
atur
e
Sensor
with
Pr
o
gr
ammable
T
emper
atur
e
Rang
e
for
Biomedical
...
(Agung
Setiab
udi)
Evaluation Warning : The document was created with Spire.PDF for Python.
950
ISSN:
2088-8708
because
V
p
becomes
Lo
w
.
As
the
result,
I
a
flo
w
in
C
,
and
C
store
the
char
ges
that
are
proportional
I
a
.
During
this
period,
T
out
is
high.
The
capacitor
C
is
continuousl
y
char
ged,
and
V
p
is
i
n
c
reasing.
When
V
p
reaches
the
threshold
v
oltage
of
In
v
1
(
V
inv
1
),
T
out
is
lo
w
,
M
x
3
and
M
x
4
become
OFF
and
M
x
2
becomes
ON,
respecti
v
ely
.
Therefore,
the
char
ge
of
C
is
dischar
ged
through
M
x
2
,
and
then
the
circuit
returns
to
the
idle
mode.
Using
(16),
T
out
can
be
gi
v
en
by
T
out
=
C
V
inv
1
I
2
r
ef
I
P
T
AT
(17)
From
(17),
it
can
be
inferred
that
T
out
is
proportional
to
I
P
T
AT
.
T
out
can
be
con
v
erted
to
the
digital
v
alue
by
counting
up
the
period
of
high
le
v
el
in
T
out
by
a
counter
.
2.4.
Pr
ogrammable
T
emperatur
e
Range
Digitalization
In
the
sub
section
2.3
it
has
been
e
xplained
that
digital
v
alue
of
the
measured
temperature
can
be
obtained
by
counting
up
the
high
le
v
el
period
of
T
out
by
a
counter
.
Ho
we
v
er
,
if
T
out
is
directly
connected
to
counter
,
it
will
be
inef
fecti
v
e.
Because
it
is
kno
wn
from
equation
(17)
that
T
out
is
proportional
to
absolute
temperature.
It
means
that
the
high
le
v
el
of
T
out
will
appear
as
f
ar
as
the
temper
ature
is
lar
ger
than
absolute
zero.
In
the
other
hand,
it
is
well
kno
wn
that
in
the
biomedical
applications,
the
measured
temperature
is
much
higher
than
absolute
zero,
for
e
xample
the
critical
human
body
temperature
is
35
°C
(h
ypothermia)
to
41.5
°C
(h
yperp
yre
xia).
Thus,
if
T
out
is
directly
connected
to
counter
,
the
temperature
range
of
digital
con
v
ersion
result
will
be
dif
ficult
to
be
adjust
ed.
Moreo
v
er
,
the
digital
con
v
ersion
will
not
reach
high
resolution.
In
T
out
-counter
direct
connection,
the
temperature
range
can
be
adjusted
using
clock
frequenc
y
of
the
counter
.
The
higher
clock
frequenc
y
of
counter
,
the
more
narro
w
temperature
range
that
can
be
con
v
ert
to
digital
data.
Oppositely
to
the
temperature
range,
the
resolution
of
digital
data
is
higher
.
Ho
we
v
er
,
for
narro
w
temperature
range
biomedical
applications,
T
out
-counter
direct
connection
is
still
not
ef
fecti
v
e
w
ay
to
be
used.
Because
T
out
pulse
width
is
start
to
appear
right
after
absolute
zero
temperature,
and
increases
proportionally
as
temperature
in-
creases.
Therefore,
if
the
minimum
temperature
of
the
biomedical
appl
ications
is
much
lar
ger
than
absolute
zero,
the
unnecessary
con
v
ersion
will
e
xist.
This
problem
will
also
mak
e
the
adjustment
dif
ficult,
because
the
counter
will
be
o
v
erflo
w
man
y
times
before
start
to
con
v
erts
desired
T
out
pulse
width.
Figure
5
sho
ws
the
desired
con
v
ersion
and
unnecessary
con
v
ersion
in
T
out
pulse
width.
T
o
mak
e
easier
temperature
range
adjustment
and
more
ef
fecti
v
e
con
v
ersion,
unnecessary
con
v
ersion
must
be
eliminated.
In
other
w
ord,
the
counter
counting
up
only
in
desired
con
v
ersion
re
gion
in
T
out
pulse
width.
T
o
perform
this
function,
the
connection
between
T
out
and
counter
is
modified.
This
architecture
is
sho
wn
in
Fig.
6.
Figure
5.
Desired
con
v
ersion
in
T
out
pulse
width
Figure
6.
ITC-Counter
connection
architecture
Using
architecture
in
Fig.
6,
the
temperature
range
can
be
programmed
or
adjusted
not
only
by
clock
frequenc
y
of
the
counter
b
ut
also
by
pulse
width
of
the
t
rigger
(
V
tg
r
).
Since
V
tg
r
is
connected
to
R
st
using
an
in
v
erter
,
the
counter
will
be
in
reset
condition
and
it
does
not
count
up
as
f
ar
as
the
V
tg
r
is
high.
Thus,
the
con
v
ersion
only
in
desired
temperature
range
can
be
performed
by
k
eeping
high
V
tg
r
from
t
0
to
t
1
sho
wn
in
Fig.
5.
The
pulse
width
of
V
tg
r
is
written
in
equation
(18).
The
clock
frequenc
y
of
the
counter
then
can
be
calculated
using
equation
(19).
V
tg
r
P
W
=
t
1
t
0
(18)
f
cl
k
=
2
N
1
t
2
t
1
(19)
Where
t
1
is
pulse
width
of
minimum
temperature
in
temperature
range,
t
2
is
pulse
width
of
maximum
temperature
in
temperature
range,
and
N
is
resolution
of
the
counter
(bit).
Generating
pulse
and
clock
with
v
arious
IJECE
V
ol.
8,
No.
2,
April
2018:
946
–
953
Evaluation Warning : The document was created with Spire.PDF for Python.
IJECE
ISSN:
2088-8708
951
width
and
frequenc
y
is
an
easy
thing
that
can
be
performed
in
programmable
de
vices,
lik
e
microcontroller
and
microprocessor
.
In
other
w
ord,
the
temperature
range
of
the
proposed
temperature
sensor
is
easily
programmable,
so
that
it
can
be
used
in
v
arious
biomedical
applications.
3.
SIMULA
TION
RESUL
TS
AND
MEASUREMENT
OF
F
ABRICA
TED
TEMPERA
TURE
SENSOR
CORE
The
performance
of
the
proposed
circuit
w
as
e
v
aluated
using
HSPICE
with
1P
,
5M,
3-well,
0.18-m
CMOS
process
(BSIM3v3.2
LEVEL53).
All
simulations
use
1.0
V
supply
v
oltage.
Figure
7
sho
ws
the
simulation
result
of
sensor
core
circuit
in
the
temperature
range
of
-40
°C
to
160
°C.
V
P
T
AT
1
is
output
of
single
sensor
core,
and
V
P
T
AT
2
is
the
output
of
cascade
connection
of
tw
o
sensor
cores.
From
this
simulation,
it
w
as
obtained
that
sensiti
vity
of
single
sensor
core
is
0.392
mV/C
with
0.78
%
nonlinearity
.
This
sensiti
vity
could
be
increased
using
cascade
connection
lik
e
sho
wn
by
V
P
T
AT
2
,
its
sensiti
vity
is
0.783
mV/°C,
with
0.89
%
nonlinearity
.
Figure
7.
V
P
T
A
T
-T
emperature
characteristic
Figure
8.
Measurement
result
of
f
abricated
sensor
core
Figure
9.
Inaccurac
y
of
f
abricated
sensor
core
Figure
10.
Pulse
width-temperature
characteristic
In
order
to
v
erify
the
performance
of
temperature
sensor
core,
this
temperature
sensor
core
is
f
abricated
using
0.6
m
CMOS
process.
Figure
8
sho
ws
the
a
v
erage
measurement
results
of
10
dif
ferent
chips.
From
this
figure
it
can
be
kno
wn
that
the
output
v
oltage
of
the
temperature
sensor
core
is
proportional
to
temperature.
The
a
v
erage
sensiti
vity
of
10
measured
chips
is
0.8343
mV/°C.
Figure
9
sho
ws
the
accurac
y
of
f
abricated
temperature
sensor
core.
From
this
measurement
it
w
as
obtained
that
its
inaccurac
y
is
-1.144/+1.059
mV
or
2.70%
nonlinearity
.
Figure
10
sho
ws
the
relationship
between
temperature
and
pulse
width.
In
these
simulations,
temperature
CMOS
T
emper
atur
e
Sensor
with
Pr
o
gr
ammable
T
emper
atur
e
Rang
e
for
Biomedical
...
(Agung
Setiab
udi)
Evaluation Warning : The document was created with Spire.PDF for Python.
952
ISSN:
2088-8708
T
able
1.
A
comparison
of
the
main
performance
parameters
of
temperature
sensor
circuit
P
arameter
This
w
ork
[4]
[5]
[16]
[17]
[18]
Po
wer
Supply(V)
1.0
3.3
0.5,
1.0
2.2
-
3
3.3
1.0
Po
wer
consumption(
W)
22.3
429
0.119
10
-
27
10
25
Range
(°C)
programmable
-50
to
125
-10
to
30
10
to
80
0
to
100
50
to
120
Inaccurac
y
(°C)
-0.98
to
+0.29
-0.5
to
+0.5
-0.8
to
+1.0
-1.8
to
+1.0
-0.7
to
+0.9
-1.0
to
+0.8
Process
(
m)
0.18
0.5
0.18
0.35
0.35
0.09
w
as
changed
from
-40
°C
to
160
°C
in
step
of
10
°C.
As
a
result,
it
w
as
obtained
that
the
puls
e
width
w
as
proportional
to
temperature
wi
th
0.276
s/°C
sensiti
vity
and
2.14
%
nonlinearity
.
Based
on
the
data
from
these
simulations,
temperature
range
programmability
of
this
proposed
circuit
is
v
erified
by
programming
its
temperature
range
t
o
be
0
°C
to
100
°C.
Using
equations
(18)
and
(19)
the
pulse
width
of
V
tg
r
and
clock
frequenc
y
of
the
counter
(
CP
)
are
70.9
s
and
9.59
MHz,
respecti
v
ely
.
Figure
11.
D
out
-temperature
characteristic
Figure
12.
Inaccurac
y
of
the
proposed
temperature
sensor
Figure
11
sho
ws
digital
output
of
the
simulati
on
result
after
the
temperature
range
of
the
sensor
is
pro-
grammed
to
be
0
°C
to
100
°C.
From
the
simulation
it
w
as
obtained
that
digital
code
D
out
is
proportional
to
temperature.
The
digital
code
of
this
simulation
w
as
0
to
255.
This
means
that
1
LSB
is
equal
to
0.392
°C.
Figure
12
sho
ws
the
accurac
y
of
the
proposed
inte
grated
temperature
sensor
circuit.
The
accurac
y
measurement
w
as
done
using
tw
o
calibration
points
(0
°C
and
100
°C).
From
this
measurement
it
w
as
obtained
that
inaccurac
y
of
t
he
proposed
circuit
is
-0.98/+0.29
°C.
From
these
simulation
results
it
can
be
v
erified
that
the
temperature
range
of
the
sensor
can
be
programmed
well.
The
po
wer
consumption
of
the
proposed
circuit
in
25
°C
is
22.3
W
.
This
v
alue
is
sum
of
all
circuits,
sensor
core
(1.72
W),
VIC
(1.21
W),
1/x
circuit
(0.331
W),
ITC
(1.16
W),
and
counter
(17.8
W).
Lastly
,
a
comparison
of
main
performance
parameters
of
temperature
sensor
is
summarized
in
T
able
1.
4.
CONCLUSION
In
this
paper
,
the
inte
grated
temperature
sensor
circuit
is
constructed
using
sensor
core,
v
oltage-to-current
con
v
erter
(VIC),
1/x
circuit,
current-to-time
con
v
erter
(ITC)
and
counter
.
Sensor
core
is
formed
using
CMOS
circuit
operated
in
weak
in
v
ersion
re
gion
and
it
i
s
insensiti
v
e
to
de
vice
parameter
of
f
abrication
process.
The
output
of
the
sensor
is
then
digitized
using
proposed
programmable
temperature
range
digital
interf
ace.
The
performance
of
the
proposed
circuit
w
as
e
v
aluated
using
HSPICE
with
1P
,
5M,
3-wells,
0.18-m
CMOS
process
(BSIM3v3.2
LEVEL53).
As
a
result,
sensiti
vity
of
temperature
sensor
core
is
0.783
mV/°C,
with
0.89
%
nonlinearity
in
-40
°C
to
160
°C.
This
temperature
sensor
core
has
been
f
abricated
using
0.6
m
CMOS
proces
s.
As
a
result
of
10
dif
ferent
chips
measurement
is
the
a
v
erage
sensiti
vity
of
f
abricated
chip
is
0.8343
mV/°C
in
10
°C
to
60
°C,
with
2.70%
nonlinearity
.
T
emperature
range
of
the
sensor
is
then
programmed
to
be
0
°C
t
o
100
°C
using
pulse
width
of
V
tg
r
and
IJECE
V
ol.
8,
No.
2,
April
2018:
946
–
953
Evaluation Warning : The document was created with Spire.PDF for Python.
IJECE
ISSN:
2088-8708
953
clock
frequenc
y
of
counter
(
CP
).
As
the
results
of
simulation,
resolution
of
the
sensor
that
its
temperature
range
has
been
programmed
is
0.392
°C
with
-0.98/+0.29
°C
inaccurac
y
and
total
po
wer
consumption
is
22.3
W
in
25
°C.
The
future
w
ork
of
this
research
is
designing
mask
layout
of
the
propos
ed
digital
interf
ace,
f
abrication
of
whole
circuit
in
one
prototype
chip
and
e
v
aluation
of
the
characteristic.
A
CKNO
WLEDGEMENT
This
w
ork
is
supported
by
VLS
I
Design
and
Education
Center
(VDEC),
the
Uni
v
ersit
y
of
T
ok
yo
in
collab-
oration
with
Synopsys,
Inc.
and
Cadence
Design
Systems,
Inc.
Refer
ences
[1]
A.
Goel,
and
G.
Singh,
”A
No
v
el
Lo
w
Noise
High
Gain
CMOS
Instrumentation
Amplifier
for
Biomedical
Applications,
”
International
Journal
of
Electrical
and
Computer
Engineering
(IJECE),
V
ol.
3,
No.
4,
pp.
516-
523,
Aug.
2013.
[2]
S.
Meti,
and
V
.G.
Sang
am,
”A
Thorough
Insight
to
T
echniques
for
Performance
Ev
aluation
in
Biologi
cal
Sen-
sors,
”
International
Journal
of
Electrical
and
Computer
Engineering
(IJECE),
V
ol.
6,
No.
3,
pp.
986-994,
Jun.
2016.
[3]
X.
Zhang,
H.
Zhang,
G.
Kang,
P
.
Zhang,
and
H.
Li,
”External
Biomedical
De
vice
Relaying
Body
Sensor
Netw
ork
scheme,
”
TELK
OMNIKA,
V
ol.
11,
No.
12,
pp.
71027109,
Dec.
2013.
[4]
M.
A.
P
.
Pertijs,
A.
Niederk
on,
X.
Ma,
B.
McKillop,
A.
Bakk
er
,
and
J.
H.
Huijsing,
”A
CMOS
T
emperature
Sensor
W
ith
a
3
Inaccurac
y
of
0.5
C
From
50
C
to
120
C,
”
IEEE
JOUN
AL
OF
SOLID-ST
A
TE
CIRCUITS,
V
ol.
40,
No.
2,
pp.
454460,
Feb
.
2005.
[5]
Z.
K.
La
w
,
A.
Bermak
and
H.
C.
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(Agung
Setiab
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