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t
y
f
ac
to
r
alo
n
g
s
id
e
tu
n
in
g
ca
p
ab
ilit
y
,
a
co
n
ti
n
u
o
u
s
t
u
n
ab
le
ME
MS
in
d
u
cto
r
is
p
r
o
p
o
s
ed
.
P
DM
S
is
u
s
ed
i
n
t
h
is
p
r
o
j
ec
t
to
ac
h
iev
e
a
co
n
f
i
g
u
r
ab
le
tu
n
i
n
g
f
o
r
in
d
u
ctan
ce
v
al
u
es.
T
h
e
P
DM
S
i
n
th
i
s
p
r
o
j
ec
t
is
u
s
ed
to
cr
ea
te
a
ch
an
n
e
l
f
o
r
a
f
er
r
o
f
lu
id
-
b
ased
liq
u
id
to
f
lo
w
i
n
to
it
a
n
d
ac
r
o
s
s
th
e
s
o
le
n
o
id
in
d
u
cto
r
.
A
h
ig
h
p
er
m
e
ab
ilit
y
o
f
f
er
r
o
f
l
u
id
-
b
ased
liq
u
id
w
ill
s
i
g
n
if
ican
t
l
y
i
m
p
r
o
v
e
t
h
e
q
u
al
it
y
f
ac
to
r
o
f
t
h
e
i
n
d
u
cto
r
d
esi
g
n
[
6
]
.
I
n
s
tead
o
f
u
s
i
n
g
a
n
o
r
m
al
ap
p
r
o
ac
h
,
a
n
e
w
tec
h
n
iq
u
e
o
f
d
esig
n
in
g
t
h
e
s
o
le
n
o
id
in
d
u
ct
o
r
is
p
r
o
p
o
s
ed
.
A
w
ir
e
b
o
n
d
in
g
tec
h
n
iq
u
e
is
u
s
ed
in
t
h
i
s
w
o
r
k
to
i
n
teg
r
ate
w
it
h
P
DM
S.
T
h
is
tec
h
n
iq
u
e
i
s
p
r
es
en
ted
i
n
s
u
c
h
a
w
a
y
th
a
t
li
n
es
o
f
co
p
p
er
an
d
b
o
n
d
w
ir
e
s
,
co
n
n
ec
ted
to
f
o
r
m
a
w
i
n
d
in
g
s
o
le
n
o
id
in
d
u
cto
r
o
n
to
p
o
f
s
ilico
n
s
u
b
s
tr
ate
.
2.
RE
S
E
ARCH
M
E
T
H
O
D
I
n
th
i
s
p
r
o
j
ec
t,
t
w
o
p
ar
ts
o
f
th
e
in
d
u
cto
r
d
esig
n
s
w
ill
b
e
ex
p
lain
ed
.
T
h
e
f
ir
s
t
p
ar
t
is
t
h
e
P
DM
S
f
ab
r
icatio
n
p
r
o
ce
s
s
.
T
h
is
is
i
m
p
o
r
ta
n
t
f
o
r
th
e
d
esi
g
n
a
s
it
w
il
l
b
e
u
s
ed
to
p
r
o
v
id
e
th
e
ch
an
n
el
f
o
r
f
er
r
o
f
l
u
id
-
b
ased
liq
u
id
to
f
lo
w
ac
r
o
s
s
th
e
s
o
len
o
id
ME
MS
i
n
d
u
cto
r
.
S
p
ec
if
icatio
n
s
o
f
P
DM
S
ar
e
e
x
p
lain
ed
f
o
r
a
clea
r
v
ie
w
i
n
d
i
m
en
s
io
n
s
p
er
s
p
ec
tiv
e.
T
h
e
s
ec
o
n
d
p
ar
t
is
th
e
d
esig
n
o
f
th
e
s
o
le
n
o
id
ME
MS
in
d
u
cto
r
.
A
f
ter
th
a
t,
th
e
s
o
len
o
id
ME
MS
in
d
u
c
to
r
w
i
ll
b
e
s
tack
ed
to
g
eth
er
w
it
h
P
DM
S
to
o
b
tain
a
co
n
tin
u
o
u
s
t
u
n
ab
le
ME
M
S
in
d
u
cto
r
.
A
p
r
o
s
a
n
d
co
n
s
o
f
u
s
in
g
w
ir
e
b
o
n
d
in
g
tec
h
n
iq
u
e
a
ls
o
ex
p
lai
n
ed
i
n
t
h
i
s
s
ec
t
io
n
.
T
h
e
s
i
m
u
latio
n
w
a
s
ca
r
r
ied
o
u
t
b
y
u
s
i
n
g
a
3
D
f
u
ll
-
w
av
e
elec
tr
o
m
a
g
n
etic
f
i
eld
s
to
o
l,
A
NSYS
HF
SS
wh
er
e
th
e
r
esu
l
ts
o
f
in
d
u
cta
n
ce
v
a
lu
e
s
,
q
u
alit
y
f
ac
t
o
r
an
d
tu
n
i
n
g
r
a
n
g
e
w
er
e
r
ec
o
r
d
ed
an
d
an
al
y
s
ed
.
P
DM
S
is
ch
o
s
e
n
i
n
t
h
is
w
o
r
k
b
ec
au
s
e
o
f
i
ts
c
h
ar
ac
ter
is
tic
o
f
h
a
v
i
n
g
a
lo
w
r
elat
iv
e
p
er
m
itti
v
it
y
o
f
2
.
3
.
T
h
is
ad
v
a
n
ta
g
e
w
i
ll
n
o
t
in
f
l
u
en
ce
t
h
e
m
a
g
n
etic
f
iel
d
o
f
t
h
e
s
o
len
o
id
i
n
d
u
cto
r
w
h
ic
h
i
s
cr
u
c
ial
f
o
r
o
b
tain
in
g
a
h
ig
h
q
u
ali
t
y
f
ac
to
r
.
T
h
e
P
DM
S
ch
an
n
el
i
s
d
esi
g
n
ed
w
ith
a
len
g
t
h
,
w
id
th
a
n
d
h
eig
h
t
o
f
1
4
.
8
m
m
,
0
.
5
3
m
m
a
n
d
0
.
2
m
m
r
e
s
p
ec
tiv
el
y
(
F
ig
u
r
e
1
)
.
T
h
e
o
v
er
all
len
g
th
,
w
id
t
h
an
d
h
ei
g
h
t
o
f
P
DM
S
ar
e
1
8
m
m
,
3
m
m
an
d
2
m
m
r
esp
ec
ti
v
el
y
.
B
o
th
en
d
o
f
th
e
P
DM
S
h
as
a
d
ia
m
eter
o
f
1
m
m
w
h
ic
h
ar
e
u
s
ed
f
o
r
in
j
ec
tio
n
o
f
th
e
f
er
r
o
f
l
u
id
-
b
ased
l
iq
u
id
i
n
t
o
th
e
c
h
an
n
el.
A
g
ap
o
f
1
m
m
f
r
o
m
th
e
h
o
le
s
to
t
h
e
ed
g
e
o
f
P
DM
S
at
ea
ch
s
id
e
is
i
m
p
o
r
tan
t
i
n
o
r
d
er
to
av
o
id
an
y
cr
ac
k
s
an
d
leak
a
g
es
f
r
o
m
th
e
f
er
r
o
f
l
u
id
liq
u
id
.
I
n
Fi
g
u
r
e
2
(
a)
,
th
e
P
DM
S
w
a
s
s
tac
k
ed
at
th
e
to
p
o
f
s
il
ico
n
s
u
b
s
tr
ate.
I
n
Fi
g
u
r
e
2
(
b
)
,
th
e
s
o
le
n
o
id
i
n
d
u
cto
r
is
p
lace
d
in
s
id
e
o
f
t
h
e
ch
an
n
el.
T
h
is
m
eth
o
d
i
s
b
ett
er
co
m
p
ar
e
to
m
icr
o
t
u
b
in
g
b
ec
au
s
e
it
w
il
l
i
n
cr
ea
s
e
t
h
e
el
ec
tr
o
m
a
g
n
etic
f
ield
ar
o
u
n
d
th
e
s
o
len
o
id
in
d
u
c
to
r
an
d
h
en
ce
i
n
cr
ea
s
e
th
e
q
u
alit
y
f
ac
to
r
o
f
th
e
d
ev
ice.
Un
lik
e
m
icr
o
tu
b
i
n
g
,
a
w
a
ll
o
f
t
u
b
es
w
i
ll
e
v
en
tu
al
l
y
r
ed
u
c
e
th
e
ef
f
ec
t
o
f
e
lectr
o
m
a
g
n
et
i
c
f
ield
d
u
e
to
a
g
ap
d
is
ta
n
ce
b
et
w
ee
n
b
o
n
d
w
ir
e
s
an
d
m
a
g
n
et
ic
liq
u
id
i
n
s
id
e
th
e
tu
b
e.
(
a)
(
b
)
(
c)
Fig
u
r
e
1
.
T
o
p
v
ie
w
(
a)
,
b
o
tto
m
v
ie
w
(
b
)
an
d
clo
s
e
v
ie
w
(
c)
o
f
P
DM
S
0
.
2
m
m
0
.
5
3
m
m
Ho
l
e
f
o
r
f
e
r
r
o
f
l
u
i
d
i
n
j
e
c
t
i
o
n
M
i
c
r
o
c
h
a
nn
e
l
1
4
.
8
mm
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8708
I
J
E
C
E
Vo
l.
7
,
No
.
2
,
A
p
r
il 2
0
1
7
:
9
26
–
9
32
928
(
a)
(b
)
Fig
u
r
e
2
.
Fu
ll
v
ie
w
o
f
P
DM
S
o
n
to
p
o
f
s
ilico
n
s
u
b
s
tr
ate
(
a)
an
d
clo
s
e
v
ie
w
o
f
s
o
len
o
id
M
E
MS
in
d
u
c
to
r
in
s
id
e
o
f
P
DM
S c
h
an
n
el
(
b
)
I
n
a
s
ec
o
n
d
p
ar
t,
a
tech
n
iq
u
e
k
n
o
w
n
as
w
ir
e
b
o
n
d
in
g
is
p
r
esen
ted
h
er
e.
A
b
asic
p
r
in
cip
le
o
f
in
d
u
cto
r
s
tate
th
at
w
h
e
n
a
n
o
r
m
al
co
il
o
f
w
ir
e
is
w
r
ap
p
ed
ar
o
u
n
d
a
m
ag
n
etic
m
ater
ial,
a
m
a
g
n
e
ti
c
f
ield
is
p
r
o
d
u
ce
d
w
h
e
n
t
h
e
c
u
r
r
en
t
f
lo
w
s
t
h
r
o
u
g
h
it.
B
y
u
s
in
g
t
h
e
s
a
m
e
p
r
in
c
i
p
le
,
n
u
m
b
er
s
o
f
co
p
p
er
lin
e
p
atter
n
ed
o
n
a
s
ilico
n
s
u
b
s
tr
ate
ar
e
b
o
n
d
ed
to
g
e
th
er
w
it
h
b
o
n
d
w
ir
e
s
to
f
o
r
m
a
w
i
n
d
in
g
s
o
le
n
o
id
i
n
d
u
cto
r
.
T
h
e
b
o
n
d
w
ir
es
w
ill
ac
t
as
a
b
r
id
g
e
f
o
r
a
cu
r
r
en
t
to
f
lo
w
s
f
r
o
m
t
h
e
f
ir
s
t
co
p
p
er
lin
e
to
th
e
s
ec
o
n
d
co
p
p
er
lin
e.
T
h
is
m
eth
o
d
i
s
co
m
p
atib
le
w
it
h
t
h
e
P
DM
S
b
ec
au
s
e
th
e
ch
a
n
n
el
o
f
P
DM
S
ca
n
f
it
th
e
w
h
o
le
d
esi
g
n
o
f
t
h
e
s
o
len
o
id
i
n
d
u
c
to
r
(
Fig
u
r
e
2
(
b
)
)
.
T
h
e
len
g
th
,
w
i
d
th
a
n
d
h
ei
g
h
t
o
f
b
o
n
d
w
ir
e
s
w
er
e
ca
lc
u
lated
b
y
u
s
in
g
eq
u
a
tio
n
(
1
)
.
A
cc
o
r
d
in
g
to
eq
u
atio
n
(
1
)
,
th
e
in
d
u
cta
n
ce
v
alu
e
ca
n
b
e
esti
m
ated
b
y
m
o
d
if
y
i
n
g
th
e
n
u
m
b
er
o
f
t
u
r
n
s
,
s
i
ze
s
o
f
th
e
s
o
len
o
id
in
d
u
cto
r
an
d
t
h
e
p
er
m
ea
b
i
lit
y
o
f
th
e
m
ag
n
etic
liq
u
id
i.e
.
f
er
r
o
f
lu
id
-
b
ased
.
(
)
(
1
)
w
h
er
e
an
d
r
ep
r
esen
tin
g
v
ac
u
u
m
p
er
m
ea
b
ilit
y
(
4
π
×
1
0
-
7
H)
an
d
f
er
r
o
f
l
u
id
p
er
m
ea
b
ilit
y
(
5
.
4
H/m
)
.
N
is
th
e
n
u
m
b
e
r
o
f
t
u
r
n
s
o
f
w
i
n
d
i
n
g
co
ils
.
,
an
d
ar
e
th
e
w
id
th
,
t
h
ick
n
e
s
s
a
n
d
len
g
th
o
f
co
p
p
er
co
ils
.
I
n
t
h
is
ca
s
e,
w
id
t
h
,
t
h
ic
k
n
ess
an
d
le
n
g
t
h
ar
e
r
ep
r
esen
ti
n
g
t
h
e
co
p
p
er
lin
es
a
n
d
b
o
n
d
w
ir
e
s
.
T
o
o
b
tain
a
GHz
f
r
eq
u
e
n
c
y
o
f
s
o
len
o
id
in
d
u
cto
r
,
a
n
u
m
b
er
o
f
lo
s
s
es
n
ee
d
to
b
e
ex
a
m
i
n
ed
.
T
h
e
lo
s
s
es
s
u
c
h
as
s
er
ies
r
esis
ta
n
ce
,
o
h
m
ic
lo
s
s
es,
ed
d
y
cu
r
r
en
t
ef
f
ec
t
an
d
s
k
i
n
ef
f
ec
t
ar
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m
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en
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H.
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D.
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.
Evaluation Warning : The document was created with Spire.PDF for Python.