I
nte
rna
t
io
na
l J
o
urna
l o
f
E
lect
rica
l a
nd
Co
m
p
ute
r
E
ng
in
ee
ring
(
I
J
E
CE
)
Vo
l.
7
,
No
.
2
,
A
p
r
il
201
7
,
p
p
.
754
~
7
5
8
I
SS
N:
2088
-
8708
,
DOI
: 1
0
.
1
1
5
9
1
/
i
j
ec
e
.
v
7
i
2
.
p
p
7
5
4
-
7
5
8
754
J
o
ur
na
l ho
m
ep
a
g
e
:
h
ttp
:
//ia
e
s
jo
u
r
n
a
l.c
o
m/o
n
lin
e/in
d
ex
.
p
h
p
/I
JE
C
E
Fabrica
tion
a
nd
Ana
ly
sis
o
f
A
m
o
r
pho
us Silico
n TF
T
Sri
k
a
nth
G
1
,
Ya
dh
ura
j
SR
2
,
Su
bra
m
a
ny
a
m
T
K
3
,
Sa
t
hees
h
B
a
bu
G
a
nd
la
4
,
U
m
a
B
V
5
1
,5
De
p
a
rtem
e
n
t
o
f
El
e
c
tro
n
ics
a
n
d
c
o
m
m
u
n
ica
ti
o
n
E
n
g
in
e
e
rin
g
,
R
V
C
o
ll
e
g
e
o
f
En
g
in
e
e
rin
g
,
Be
n
g
a
lu
ru
,
In
d
ia
2
,
3,
4
I
n
ter Disc
ip
li
n
a
ry
Re
s
e
a
rc
h
C
e
n
ter,
R
V
Co
ll
e
g
e
o
f
En
g
in
e
e
rin
g
,
Be
n
g
a
lu
ru
,
I
n
d
ia
Art
icle
I
nfo
AB
ST
RAC
T
A
r
ticle
his
to
r
y:
R
ec
eiv
ed
J
u
l 3
0
,
2
0
1
6
R
ev
i
s
ed
Sep
2
9
,
2
0
1
6
A
cc
ep
ted
Dec
1
3
,
2
0
1
6
T
h
e
d
isp
la
y
te
c
h
n
o
lo
g
y
a
n
d
larg
e
a
re
a
e
l
e
c
tro
n
ics
g
o
t
m
o
m
e
n
tu
m
w
it
h
th
e
in
tro
d
u
c
ti
o
n
o
f
T
F
T
d
e
v
i
c
e
s.
T
F
T
s
c
a
n
b
e
m
a
d
e
u
sin
g
d
iff
e
re
n
t
se
m
ico
n
d
u
c
ti
n
g
m
a
teria
ls
o
r
o
rg
a
n
ic
c
o
n
d
u
c
ti
n
g
m
a
teria
ls
a
s
th
e
a
c
ti
v
e
la
y
e
r.
Eac
h
o
n
e
o
f
th
e
m
d
iff
e
r
s in
th
e
ir
p
e
rf
o
r
m
a
n
c
e
d
e
p
e
n
d
in
g
o
n
th
e
m
a
teria
l
u
se
d
f
o
r
th
e
a
c
ti
v
e
la
y
e
r.
In
th
is
p
a
p
e
r,
f
a
b
rica
ti
o
n
o
f
a
m
o
rp
h
o
u
s sili
c
o
n
T
F
T
u
sin
g
P
EC
V
D
is
c
a
rried
o
u
t
.
S
im
u
latio
n
o
f
th
e
a
-
S
i:
H
T
F
T
is
a
lso
c
a
rried
o
u
t
w
it
h
th
e
d
im
e
n
sio
n
s sim
il
a
r
to
th
a
t
o
f
th
e
m
a
sk
s u
se
d
f
o
r
th
e
f
a
b
rica
ti
o
n
.
T
h
e
I
d
-
V
d
p
lo
t
f
o
r
b
o
th
t
h
e
sim
u
latio
n
a
n
d
f
a
b
rica
ti
o
n
is
o
b
tain
e
d
a
n
d
stu
d
ied
.
K
ey
w
o
r
d
:
Am
o
r
p
h
o
u
s
Sil
ico
n
Fab
r
icatio
n
P
E
C
VD
Sp
u
tter
i
n
g
T
h
in
Fil
m
T
r
an
s
is
to
r
Co
p
y
rig
h
t
©
2
0
1
7
In
stit
u
te o
f
A
d
v
a
n
c
e
d
E
n
g
i
n
e
e
rin
g
a
n
d
S
c
ien
c
e
.
Al
l
rig
h
ts
re
se
rv
e
d
.
C
o
r
r
e
s
p
o
nd
ing
A
uth
o
r
:
Srik
a
n
th
G,
Dep
ar
te
m
en
t o
f
E
lectr
o
n
ics a
n
d
C
o
m
m
u
n
icatio
n
E
n
g
in
ee
r
i
n
g
,
R
V
C
o
lle
g
e
o
f
E
n
g
i
n
ee
r
in
g
,
M
y
s
o
r
e
R
o
ad
,
B
en
g
al
u
r
u
,
I
n
d
i
a
5
6
0
0
5
9
.
E
m
ail: sr
i
k
a
n
t
h
g
2
0
0
7
@
r
ed
if
f
m
ail.
co
m
1.
I
NT
RO
D
UCT
I
O
N
T
h
in
f
il
m
tr
an
s
is
to
r
(
T
FT)
d
e
v
ice
s
h
av
e
r
ev
o
l
u
tio
n
is
ed
th
e
d
is
p
la
y
tech
n
o
lo
g
y
.
I
t
is
a
th
r
ee
ter
m
in
al
d
ev
ice
w
it
h
g
ate
ter
m
i
n
al
in
s
u
lated
f
r
o
m
th
a
t
o
f
t
h
e
s
o
u
r
ce
a
n
d
d
r
ain
ter
m
i
n
al
s
.
T
FT
s
w
er
e
co
n
ce
p
tu
ali
s
ed
a
s
ea
r
l
y
as
1
9
2
5
,
b
u
t
th
eir
ap
p
licatio
n
g
ai
n
ed
m
o
m
en
t
u
m
w
it
h
th
e
d
e
m
o
n
s
tr
atio
n
o
f
h
y
d
r
o
g
en
ated
a
m
o
r
p
h
o
u
s
s
ilico
n
(a
-
Si:
H)
T
FT
in
1
9
7
9
w
it
h
s
ilico
n
n
itrid
e
as
t
h
e
d
ielec
tr
ic
[
1
]
.
Su
ch
a
d
ev
ice
ca
n
b
e
f
ab
r
icate
d
at
a
lo
w
er
co
s
t,
less
f
ab
r
icatio
n
ti
m
e
a
n
d
les
s
n
u
m
b
er
o
f
s
tep
s
.
T
h
ey
ar
e
ef
f
icie
n
tl
y
b
ei
n
g
u
s
ed
i
n
t
h
e
d
is
p
l
a
y
ap
p
licatio
n
s
a
n
d
h
av
e
f
o
u
n
d
it
s
w
a
y
to
al
m
o
s
t
e
v
er
y
h
o
u
s
e
h
o
ld
,
as
a
p
ar
t
o
f
T
V
s
et
s
,
ce
ll
p
h
o
n
e
d
is
p
la
y
s
,
as
d
is
p
la
y
s
f
o
r
tab
lets
a
n
d
m
an
y
m
o
r
e.
O
n
e
o
f
t
h
e
m
o
s
t
s
i
g
n
i
f
ica
n
t
ad
v
an
tag
e
s
o
f
a
T
FT
is
th
at
it
ca
n
b
e
f
ab
r
icate
d
o
n
f
le
x
ib
le
s
u
b
s
tr
a
tes
an
d
at
lo
w
er
te
m
p
er
at
u
r
e
s
,
an
d
h
a
s
th
er
e
f
o
r
e
attr
ac
ted
m
u
c
h
atte
n
tio
n
o
f
r
esear
ch
es a
n
d
i
n
d
u
s
tr
ies s
i
n
c
e
its
f
ir
s
t s
u
cc
ess
f
u
l d
e
m
o
n
s
tr
a
tio
n
[
2
]
.
T
h
e
o
p
er
atio
n
o
f
th
e
T
FT
is
m
u
ch
s
i
m
ilar
to
th
a
t
o
f
M
OSFET
s
;
h
o
w
e
v
er
,
th
e
cu
r
r
e
n
t
ca
r
r
y
i
n
g
ca
p
ab
ilit
y
o
f
t
h
e
f
o
r
m
er
is
n
o
t
as
g
o
o
d
as
t
h
at
o
f
t
h
e
la
tter
.
T
h
e
co
n
d
u
ctio
n
c
h
an
n
el
i
n
a
T
F
T
is
f
o
r
m
ed
in
th
e
ac
cu
m
u
lat
io
n
r
e
g
i
m
e,
w
h
ile
t
h
at
o
f
a
MO
S
FET
is
f
o
r
m
ed
i
n
t
h
e
in
v
er
s
io
n
r
eg
i
m
e.
T
h
e
s
o
u
r
ce
an
d
d
r
ai
n
ar
e
s
y
m
m
etr
ic
i
n
b
o
th
t
h
ese
d
e
v
ic
es,
th
at
i
s
,
eit
h
er
o
f
t
h
e
m
ca
n
b
e
u
s
ed
as
a
s
o
u
r
ce
o
r
a
d
r
ain
d
ep
en
d
in
g
o
n
th
e
v
o
ltag
e
ap
p
lied
to
th
e
m
.
T
h
e
v
o
ltag
e
at
th
e
g
ate
w
h
e
n
ab
o
v
e
a
ce
r
tain
th
r
esh
o
ld
w
ill
cr
ea
te
a
co
n
d
u
ctin
g
ch
an
n
el
b
et
w
ee
n
t
h
e
s
o
u
r
ce
an
d
th
e
d
r
ai
n
,
an
d
w
h
en
th
er
e
is
a
p
o
ten
tial
d
r
o
p
b
etw
ee
n
s
o
u
r
ce
an
d
d
r
ain
,
cu
r
r
en
t star
t
s
f
lo
w
i
n
g
b
et
w
ee
n
th
e
m
.
Ma
n
y
s
tr
u
c
tu
r
es
o
f
T
FT
s
ar
e
av
ailab
le.
B
ased
o
n
th
e
p
o
s
i
tio
n
o
f
t
h
e
g
a
te
an
d
co
n
tact
s
,
th
e
y
ar
e
class
i
f
ied
as
:
a.
T
o
p
g
ate
to
p
co
n
tact
b.
T
o
p
g
ate
b
o
tto
m
co
n
tact
c.
B
o
tto
m
g
ate
to
p
co
n
tact
d.
B
o
tto
m
g
ate
b
o
tto
m
co
n
tact
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2088
-
8708
I
J
E
C
E
Vo
l.
7
,
No
.
2
,
A
p
r
il 2
0
1
7
:
7
5
4
–
758
755
T
h
e
d
if
f
er
en
t
s
tr
u
ct
u
r
es a
r
e
as
s
h
o
w
n
in
F
ig
u
r
e
1.
Fig
u
r
e
1
.
Stru
ct
u
r
e
o
f
T
FT
s
I
n
th
i
s
p
ap
er
w
e
r
ep
o
r
t
th
e
s
i
m
u
latio
n
a
n
d
f
ab
r
icatio
n
o
f
b
o
tto
m
g
ate
to
p
co
n
tact
a
m
o
r
p
h
o
u
s
s
ilico
n
T
F
T
.
T
h
e
s
i
m
u
latio
n
o
f
a
-
S
i:
H
T
FT
is
d
o
n
e
w
it
h
t
h
e
d
i
m
en
s
io
n
s
s
i
m
ilar
to
t
h
at
u
s
ed
f
o
r
t
h
e
m
as
k
s
.
T
h
e
I
d
-
V
d
p
lo
t
f
r
o
m
th
e
f
ab
r
icatio
n
a
n
d
s
i
m
u
latio
n
ar
e
o
b
tain
ed
an
d
s
t
u
d
ied
.
T
h
e
s
i
m
u
latio
n
i
s
ca
r
r
ied
o
u
t
u
s
in
g
Sil
v
ac
o
A
tla
s
to
o
l.
T
h
e
f
ab
r
icatio
n
is
ca
r
r
ied
o
u
t
u
s
in
g
t
h
e
P
E
C
VD
(
P
las
m
a
E
n
h
an
ce
d
C
h
e
m
ical
Vap
o
u
r
Dep
o
s
itio
n
)
,
s
p
u
tter
i
n
g
an
d
th
er
m
al
e
v
ap
o
r
atio
n
f
ac
i
liti
e
s
a
v
ailab
le
a
t
R
V
co
lleg
e
o
f
E
n
g
in
ee
r
i
n
g
,
B
en
g
al
u
r
u
,
I
n
d
ia.
T
h
e
I
d
-
V
d
p
lo
t
o
f
th
e
d
ev
ice
is
o
b
tain
ed
u
s
in
g
t
h
e
A
g
i
len
t B
L
1
5
0
0
an
al
y
s
er
.
T
h
e
r
est
o
f
th
e
p
ap
er
is
o
r
g
an
is
ed
as
f
o
llo
w
s
.
T
h
e
s
ec
o
n
d
s
ec
tio
n
p
r
o
v
id
es
a
d
escr
ip
tio
n
o
f
th
e
f
ab
r
icatio
n
p
r
o
ce
s
s
an
d
th
e
t
h
i
r
d
s
ec
tio
n
p
r
o
v
id
es
a
d
escr
ip
ti
o
n
o
f
th
e
s
i
m
u
latio
n
.
T
h
e
f
o
u
r
th
s
ec
tio
n
p
r
o
v
id
es
a
co
m
p
ar
is
o
n
o
f
t
h
e
r
esu
l
ts
o
b
tain
ed
w
h
ic
h
i
s
f
o
llo
w
ed
b
y
th
e
co
n
clu
d
in
g
s
ec
tio
n
.
2.
F
AB
RICAT
I
O
N
T
h
e
f
ab
r
icate
d
d
ev
ice
h
as
a
b
o
tto
m
g
a
te
to
p
co
n
tact
s
tr
u
ct
u
r
e.
Flo
at
g
las
s
i
s
u
s
ed
a
s
t
h
e
s
u
b
s
tr
ate
m
ater
ial.
Am
o
r
p
h
o
u
s
s
i
lico
n
i
s
u
s
ed
f
o
r
th
e
ac
ti
v
e
m
ater
ial.
Sil
ico
n
Nitr
id
e
is
u
s
ed
f
o
r
th
e
g
ate
d
ielec
tr
ic
an
d
alu
m
in
iu
m
i
s
u
s
ed
f
o
r
th
e
co
n
t
ac
ts
.
T
h
e
d
i
m
en
s
io
n
s
o
f
t
h
e
m
a
s
k
ar
e
lis
ted
in
T
ab
le
1
.
T
h
e
m
ask
s
ar
e
as
s
h
o
w
n
in
Fi
g
u
r
e
2
.
No
te
th
at
w
i
th
t
h
e
g
iv
e
n
m
as
k
s
et,
f
o
u
r
T
FT
d
ev
ices c
an
b
e
f
ab
r
icate
d
o
n
a
s
i
n
g
le
s
u
b
s
tr
ate.
T
ab
le
1
.
Dim
e
n
s
io
n
s
o
f
t
h
e
M
ask
L
a
y
e
r
D
i
me
n
si
o
n
A
mo
r
p
h
o
u
s S
i
l
i
c
o
n
S
q
u
a
r
e
o
f
3
mm
G
a
t
e
A
S
t
r
i
p
w
i
t
h
a
w
i
d
t
h
o
f
2
5
0
µ
m
D
i
st
a
n
c
e
b
e
t
w
e
e
n
so
u
r
c
e
a
n
d
d
r
a
i
n
1
0
0
µ
m
Fig
u
r
e
2
.
Ma
s
k
s
u
s
ed
f
o
r
th
e
T
F
T
Evaluation Warning : The document was created with Spire.PDF for Python.
I
J
E
C
E
I
SS
N:
2
0
8
8
-
8708
F
a
b
r
ica
tio
n
a
n
d
A
n
a
lysi
s
o
f A
mo
r
p
h
o
u
s
S
ilico
n
TFT
(
S
r
ika
n
th
G
)
756
T
h
e
m
a
s
k
s
ar
e
m
ad
e
o
f
s
teel
an
d
ap
p
r
o
x
im
a
tel
y
1
m
m
i
n
t
h
ick
n
e
s
s
.
T
h
e
m
as
k
o
f
Fi
g
u
r
e
2
a
is
u
s
ed
f
o
r
th
e
d
ep
o
s
itio
n
o
f
a
-
Si:
H
a
n
d
SiN
x
,
th
e
m
a
s
k
o
f
2
b
is
u
s
e
d
f
o
r
th
e
d
ep
o
s
itio
n
o
f
s
o
u
r
ce
an
d
d
r
ain
w
h
ile
t
h
e
o
n
e
in
Fi
g
u
r
e
2
c
is
u
s
ed
f
o
r
th
e
d
ep
o
s
itio
n
o
f
g
ate.
Dif
f
er
en
t
p
r
o
ce
s
s
es
ar
e
u
s
ed
f
o
r
th
e
d
ep
o
s
itio
n
o
f
d
if
f
er
en
t
la
y
er
s
an
d
ar
e
li
s
ted
i
n
T
ab
le
2
.
T
h
e
d
ep
o
s
itio
n
p
r
o
ce
s
s
f
o
r
th
ese
la
y
er
s
is
r
e
f
i
n
ed
b
y
ca
r
r
y
in
g
o
u
t
d
ep
o
s
itio
n
p
r
o
ce
s
s
m
u
l
tip
le
ti
m
es
a
n
d
r
ec
o
r
d
in
g
th
e
o
u
tco
m
e
o
f
t
h
e
s
a
m
e.
T
ab
le
2
.
P
r
o
ce
s
s
es u
s
e
d
f
o
r
th
e
d
ep
o
s
itio
n
ea
ch
la
y
er
L
a
y
e
r
P
r
o
c
e
ss
A
mo
r
p
h
o
u
s S
i
l
i
c
o
n
P
EC
V
D
S
i
l
i
c
o
n
N
i
t
r
i
d
e
P
EC
V
D
A
l
u
mi
n
i
u
m
S
p
u
t
t
e
r
i
n
g
o
r
T
h
e
r
mal
e
v
a
p
o
r
a
t
i
o
n
T
h
e
am
o
r
p
h
o
u
s
s
ilico
n
is
d
ep
o
s
ited
u
s
in
g
t
h
e
P
E
C
VD.
T
h
e
r
ea
ctan
t
g
a
s
es
ar
e
s
ila
n
e
(
SiH
4
)
an
d
h
y
d
r
o
g
e
n
(
H
2
)
alo
n
g
w
it
h
p
h
o
s
p
h
i
n
e
(
P
H
3
)
w
h
ic
h
i
s
u
s
ed
a
s
th
e
d
o
p
an
t.
Sil
ico
n
n
itrid
e
d
ep
o
s
itio
n
also
u
s
e
s
th
e
m
et
h
o
d
o
f
P
E
C
VD.
T
h
e
r
ea
ctan
t
g
ase
s
ar
e
s
ila
n
e
(
SiH
4
)
an
d
a
m
m
o
n
ia
(
N
H
3
)
.
Alu
m
i
n
iu
m
is
d
ep
o
s
ited
u
s
i
n
g
th
e
t
h
er
m
a
l e
v
ap
o
r
atio
n
o
r
s
p
u
tter
in
g
an
d
its
r
esi
s
ta
n
ce
is
m
ea
s
u
r
ed
w
h
ic
h
i
s
ab
o
u
t 1
.
2
o
h
m
.
T
h
e
f
ab
r
icatio
n
p
r
o
ce
s
s
s
tar
ts
w
it
h
t
h
e
d
ep
o
s
itio
n
o
f
th
e
g
ate
o
v
er
th
e
g
la
s
s
s
u
b
s
tr
ate.
A
la
y
er
o
f
SiN
x
is
d
ep
o
s
ited
o
v
er
it.
T
h
e
a
-
Si:
H
is
t
h
e
n
d
ep
o
s
ited
o
n
to
p
o
f
th
e
d
ielec
tr
ic
lay
er
a
n
d
f
in
al
l
y
t
h
e
s
o
u
r
c
e
an
d
d
r
ain
.
T
h
e
th
ick
n
es
s
o
f
t
h
e
a
m
o
r
p
h
o
u
s
s
il
ico
n
is
6
2
n
m
a
n
d
th
at
o
f
th
e
s
ilico
n
n
itrid
e
is
m
ea
s
u
r
ed
to
b
e
ab
o
u
t 7
.
5
u
m
.
T
h
e
s
n
ap
s
h
o
t o
f
th
e
f
ab
r
icate
d
T
FT
is
as sh
o
wn
in
Fig
u
r
e
3
.
Fig
ir
e
3
.
Fab
r
icate
d
T
F
T
As
alr
ea
d
y
m
en
t
io
n
ed
u
s
in
g
t
h
e
g
i
v
e
n
m
as
k
s
f
o
u
r
T
FT
s
ca
n
b
e
f
ab
r
icate
d
o
n
a
s
i
n
g
le
s
u
b
s
tr
ate.
T
h
e
Gate
,
So
u
r
ce
an
d
Dr
ain
co
n
tac
ts
ar
e
m
ar
k
ed
i
n
th
e
f
i
g
u
r
e.
3.
SI
M
UL
AT
I
O
N
T
h
e
s
i
m
u
latio
n
is
ca
r
r
ied
o
u
t
u
s
i
n
g
Sil
v
ac
o
A
tlas
to
o
l.
T
h
e
d
i
m
en
s
io
n
s
o
f
t
h
e
T
FT
ar
e
ch
o
s
en
to
b
e
s
i
m
ilar
to
th
at
o
f
t
h
e
m
a
s
k
.
T
h
e
th
ic
k
n
es
s
es
o
f
t
h
e
T
FT
lay
er
s
ar
e
m
ea
s
u
r
ed
af
ter
t
h
e
f
ab
r
icatio
n
o
f
th
e
T
FT
an
d
th
e
s
a
m
e
i
s
u
s
ed
f
o
r
th
e
s
i
m
u
latio
n
.
Fig
u
r
e
4
s
h
o
w
s
th
e
s
tr
u
ct
u
r
e
o
f
t
h
e
s
i
m
u
lated
T
FT
.
T
h
e
th
ick
n
e
s
s
o
f
th
e
s
o
u
r
ce
,
d
r
ain
an
d
g
a
te
ar
e
ch
o
s
en
to
b
e
0
.
0
5
u
m
.
T
h
e
s
i
m
u
lated
T
F
T
also
h
as
a
b
o
tto
m
g
ate
to
p
co
n
tact
s
tr
u
ct
u
r
e.
T
h
e
ch
an
n
el
len
g
t
h
h
er
e
is
1
0
0
u
m
.
I
n
th
e
s
i
m
u
la
tio
n
,
o
x
id
e
la
y
er
is
u
s
ed
f
o
r
th
e
s
u
b
s
tr
ate.
An
d
a
p
ass
iv
at
io
n
la
y
er
is
al
s
o
s
h
o
w
n
f
o
r
th
e
d
ev
ice.
Du
r
in
g
t
h
e
f
ab
r
icatio
n
it
is
o
f
ten
d
if
f
ic
u
lt
to
g
et
th
e
d
esire
d
q
u
alit
y
o
f
d
ep
o
s
itio
n
.
An
e
x
a
m
p
le
o
f
s
u
c
h
a
ca
s
e
i
s
t
h
e
d
ec
r
ea
s
e
in
th
e
le
n
g
th
o
f
t
h
e
ch
a
n
n
el
d
u
e
to
s
p
r
ea
d
in
th
e
d
ep
o
s
ited
l
a
y
er
f
o
r
s
o
u
r
ce
a
n
d
d
r
ain
(
alu
m
in
i
u
m
)
.
A
s
i
m
u
lat
i
o
n
is
ca
r
r
ied
o
u
t
w
it
h
th
e
c
h
a
n
n
el
le
n
g
t
h
b
ein
g
5
0
u
m
to
o
b
tain
th
e
I
d
-
V
d
p
lo
t
f
o
r
th
is
ca
s
e.
Fi
g
u
r
e
5
s
h
o
w
s
t
h
e
s
tr
u
ctu
r
e
o
f
t
h
e
s
i
m
u
lated
d
ev
ice
w
it
h
th
e
c
h
a
n
n
el
le
n
g
t
h
b
ein
g
5
0
u
m
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2088
-
8708
I
J
E
C
E
Vo
l.
7
,
No
.
2
,
A
p
r
il 2
0
1
7
:
7
5
4
–
758
757
Fig
u
r
e
4
.
Stru
ct
u
r
e
o
f
th
e
Si
m
u
lated
T
FT
(
1
0
0
u
m
c
h
a
n
n
el
le
n
g
t
h
)
Fig
u
r
e
5
.
Stru
ct
u
r
e
o
f
th
e
Si
m
u
lated
T
FT
(
5
0
u
m
ch
an
n
el
le
n
g
th
)
4.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
N
T
h
e
I
d
-
V
d
s
tu
d
y
o
f
th
e
f
ab
r
ica
ted
T
F
T
is
d
o
n
e
u
s
i
n
g
Ag
ile
n
t
B
L
1
5
0
0
s
er
ies
eq
u
ip
m
e
n
t
.
I
t
is
f
o
u
n
d
th
at
t
w
o
o
f
th
e
d
ev
ice
s
h
ad
d
e
f
ec
ts
i
n
f
ab
r
icatio
n
a
n
d
co
u
l
d
n
o
t
b
e
te
s
ted
f
o
r
t
h
e
I
d
-
V
d
p
lo
t,
w
h
ile
t
h
e
I
d
-
V
d
p
lo
t f
o
r
th
e
o
th
er
t
w
o
d
ev
ices i
s
s
h
o
w
n
i
n
Fi
g
u
r
e
6
a
an
d
6
b.
(
a)
(
b
)
Fig
u
r
e
6
.
(
a)
I
d
-
V
d
p
lo
t f
o
r
th
e
f
ab
r
icate
d
T
F
T
s
h
o
w
i
n
g
a
li
n
e
ar
cu
r
v
e
w
it
h
o
u
t sa
tu
r
atio
n
,
(
b
)
Id
-
V
d
p
lo
t f
o
r
th
e
f
ab
r
icate
d
T
F
T
s
h
o
w
i
n
g
s
atu
r
atio
n
f
o
r
a
v
er
y
lo
w
v
al
u
e
o
f
t
h
e
cu
r
r
en
t
Fig
u
r
e
6
(
a
)
s
h
o
w
s
a
li
n
ea
r
cu
r
v
e
w
it
h
o
u
t
an
y
s
at
u
r
atio
n
,
w
h
ile
t
h
e
o
n
e
i
n
Fi
g
u
r
e
6
(
b
)
s
h
o
w
s
s
atu
r
atio
n
f
o
r
a
v
er
y
lo
w
v
al
u
e
o
f
t
h
e
c
u
r
r
en
t.
I
t
is
clea
r
t
h
at
i
n
th
e
f
ir
s
t
ca
s
e
t
h
e
d
e
v
ic
e
ch
ar
ac
ter
is
t
ics
is
d
eter
io
r
ated
,
w
h
ile
i
n
th
e
s
ec
o
n
d
ca
s
e
th
e
cu
r
r
en
t
is
o
f
v
e
r
y
lo
w
v
al
u
e.
T
h
is
ca
n
h
ap
p
en
b
ec
au
s
e
o
f
th
e
u
n
w
an
ted
s
tr
es
s
an
d
th
e
s
tr
ai
n
g
e
n
er
ated
in
th
e
d
ep
o
s
ited
l
a
y
er
s
.
Su
c
h
f
ac
to
r
s
m
ig
h
t
lea
d
to
th
e
cr
ea
tio
n
o
f
d
ef
ec
t
r
eg
io
n
s
in
t
h
e
a
-
S
i:
H
la
y
er
r
ed
u
cin
g
its
cu
r
r
e
n
t
ca
r
r
y
in
g
ca
p
ab
ilit
y
.
A
s
i
m
ilar
b
eh
a
v
io
u
r
is
also
f
o
u
n
d
if
th
e
s
o
u
r
ce
-
d
r
ain
d
is
ta
n
ce
i
s
v
er
y
s
m
all.
O
th
er
f
ac
to
r
s
th
at
m
ig
h
t
r
e
s
u
l
t
i
n
s
u
c
h
d
eter
io
r
atio
n
in
cl
u
d
e
t
h
e
m
an
u
al
h
an
d
li
n
g
o
f
t
h
e
m
a
s
k
s
,
an
d
its
m
is
ali
g
n
m
e
n
t.
T
h
e
s
i
m
u
latio
n
r
es
u
lt
s
f
o
r
th
e
d
ev
ice
ar
e
as sh
o
w
n
in
Fig
u
r
e
7
(
a
)
an
d
7
(
b
)
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
J
E
C
E
I
SS
N:
2
0
8
8
-
8708
F
a
b
r
ica
tio
n
a
n
d
A
n
a
lysi
s
o
f A
mo
r
p
h
o
u
s
S
ilico
n
TFT
(
S
r
ika
n
th
G
)
758
(
a
)
(
b
)
Fig
u
r
e
7
. (
a
)
I
d
-
V
d
p
lo
t f
o
r
th
e
s
i
m
u
lated
T
FT
(
C
h
an
n
el
L
e
n
g
th
1
0
0
u
m
)
, (
b
)
I
d
-
V
d
p
lo
t f
o
r
th
e
s
i
m
u
lated
T
FT
(
C
h
a
n
n
el
L
e
n
g
th
5
0
u
m
)
I
t
is
f
o
u
n
d
t
h
at
t
h
e
r
es
u
lt
s
f
r
o
m
t
h
e
s
i
m
u
latio
n
also
s
h
o
w
a
d
eter
io
r
atin
g
b
eh
a
v
io
u
r
w
h
e
n
th
e
c
h
an
n
el
len
g
th
is
to
o
s
h
o
r
t
(
s
h
o
w
n
i
n
Fig
u
r
e
7
(
b
)
)
.
W
h
ile
th
e
d
e
s
ir
ed
d
i
m
en
s
io
n
s
ar
e
m
ain
tain
ed
,
o
th
er
f
ac
to
r
s
li
k
e
s
tr
ess
a
n
d
s
tr
ai
n
i
n
t
h
e
la
y
er
i
n
t
u
r
n
lead
i
n
g
to
d
ef
ec
t
g
e
n
er
atio
n
ca
n
d
ec
r
ea
s
e
th
e
c
u
r
r
en
t
ca
r
r
y
i
n
g
ca
p
ab
ilit
y
o
f
th
e
d
ev
ice.
T
h
is
th
r
o
w
s
s
o
m
e
li
g
h
t
o
n
th
e
b
eh
a
v
io
u
r
o
f
th
e
s
at
u
r
atio
n
cu
r
r
en
t
in
t
h
e
s
i
m
u
la
tio
n
an
d
f
ab
r
icatio
n
r
es
u
lts
m
e
n
tio
n
ed
i
n
th
i
s
s
ec
tio
n
.
5.
CO
NCLU
SI
O
N
T
h
e
f
ab
r
icatio
n
o
f
th
e
a
m
o
r
p
h
o
u
s
s
i
lico
n
T
FT
is
ca
r
r
ied
o
u
t
in
t
h
e
f
ac
ilit
y
a
v
ailab
le
at
R
V
C
o
lle
g
e
o
f
E
n
g
i
n
ee
r
in
g
,
B
an
g
a
lo
r
e,
an
d
s
i
m
u
latio
n
o
f
T
FT
u
s
in
g
Sil
v
ac
o
A
tlas
.
T
h
e
I
d
-
V
d
c
h
ar
ac
t
er
is
tics
f
o
r
b
o
th
th
e
f
ab
r
icate
d
an
d
s
i
m
u
lated
T
FT
ar
e
o
b
tain
ed
an
d
s
tu
d
ied
.
T
h
e
r
ea
s
o
n
s
f
o
r
d
eter
io
r
a
tio
n
o
f
th
e
d
r
ain
cu
r
r
e
n
t
i
s
d
u
e
to
s
tr
ess
a
n
d
th
e
s
tr
ai
n
i
n
th
e
d
ep
o
s
ited
la
y
er
s
,
w
h
ic
h
in
th
e
ca
s
e
o
f
t
h
e
a
m
o
r
p
h
o
u
s
s
ilico
n
ca
n
cr
ea
te
d
ef
ec
ts
a
n
d
r
ed
u
ce
its
c
u
r
r
en
t
ca
r
r
y
i
n
g
ca
p
ab
ilit
y
,
v
er
y
s
h
o
r
t
ch
an
n
el
len
g
t
h
.
I
t
co
u
ld
also
b
e
d
u
e
to
t
h
e
m
is
a
lig
n
m
e
n
t
o
f
t
h
e
m
a
s
k
s
o
r
d
u
e
to
th
e
er
r
o
r
s
in
h
er
e
n
t
w
it
h
h
u
m
a
n
h
a
n
d
lin
g
o
f
t
h
e
m
as
k
s
.
A
g
o
o
d
y
ield
,
a
b
est
p
er
f
o
r
m
a
n
ce
d
ev
ice
a
n
d
t
h
e
r
ep
ea
tab
ilit
y
o
f
p
r
o
ce
s
s
w
it
h
d
esire
d
c
h
ar
ac
ter
is
tics
ar
e
th
e
p
r
im
ar
y
g
o
als
o
f
an
y
f
ab
r
icatio
n
p
r
o
ce
s
s
.
Fu
r
t
h
er
w
o
r
k
is
b
ein
g
ca
r
r
ied
o
u
t
in
o
r
d
er
to
im
p
r
o
v
e
th
e
d
ep
o
s
itio
n
p
r
o
ce
s
s
an
d
to
f
ab
r
icate
m
o
r
e
ef
f
icien
t T
FT
s
w
it
h
a
g
o
o
d
y
ield
.
ACK
NO
WL
E
D
G
E
M
E
NT
S
W
e
th
an
k
Ma
d
h
u
r
a
N
T
alw
ar
,
R
esear
ch
Sch
o
lar
at
I
DR
C
,
R
V
C
o
lle
g
e
o
f
E
n
g
in
ee
r
in
g
,
an
d
B
en
g
al
u
r
u
f
o
r
h
er
v
al
u
ab
le
ad
v
ice
an
d
i
n
p
u
t
s
f
o
r
th
e
f
ab
r
icat
io
n
o
f
th
e
T
FT
.
RE
F
E
R
E
NC
E
S
[1
]
Yu
e
Ku
o
,
―
T
h
in
F
il
m
T
ra
n
sisto
r
Tec
h
n
o
lo
g
y
—
P
a
st,
P
re
se
n
t
,
a
n
d
F
u
tu
re
‖
,
t
h
e
El
e
c
tro
c
h
e
m
ica
l
S
o
c
iet
y
In
ter
f
a
c
e
,
S
p
rin
g
,
2
0
1
3
.
[2
]
M
.
Ha
tan
o
,
H.
Ha
m
a
m
u
ra
,
M
.
M
a
tsu
m
u
ra
,
Y.
T
o
y
o
ta,
M
.
T
a
i,
M
.
Oh
k
u
ra
,
a
n
d
T
.
M
iy
a
z
a
w
a
,
ECS
T
ra
n
s.
,
3
(8
),
3
5
(2
0
0
6
)
.
[3
]
L
.
J.
Ch
e
n
,
Y.
C.
W
u
,
J.
H.
Ch
ian
g
,
M
.
F
.
Hu
n
g
,
C.
W
.
Ch
a
n
g
,
a
n
d
P
.
W
.
S
u
,
―
Co
m
p
re
h
e
n
siv
e
stu
d
y
o
f
p
i
-
g
a
te
n
a
n
o
w
ires
p
o
ly
-
S
i
T
F
T
n
o
n
-
v
o
latil
e
m
e
m
o
r
y
w
it
h
a
n
H
f
O2
c
h
a
r
g
e
trap
p
in
g
la
y
e
r‖
,
IEE
E
T
ra
n
s.
Na
n
o
tec
h
n
o
l
.
,
v
o
l.
1
0
,
n
o
.
2
,
p
p
.
2
6
0
–
2
6
5
,
M
a
r.
2
0
1
1
.
[4
]
B.
Y.
T
su
i,
C.
P
.
L
in
,
C.
F
.
H
u
a
n
g
,
a
n
d
Y.
H.
X
iao
,
―
0
.
1
μ
m
p
o
ly
-
S
i
th
i
n
f
il
m
tran
sisto
rs
f
o
r
s
y
ste
m
-
on
-
p
a
n
e
l
(S
o
P
)
a
p
p
li
c
a
ti
o
n
s,‖ in
IEDM
T
e
c
h
.
Dig
.
,
2
0
0
5
,
p
p
.
9
1
1
–
9
1
4
.
[5
]
C.
W
.
T
a
n
g
,
S
.
A
.
V
a
n
S
ly
k
e
,
A
p
p
l.
P
h
y
s.
L
e
tt
.
5
1
(
1
9
8
7
)
9
1
3
.
[6
]
H.
A
z
iz,
Z
.
P
o
p
o
v
ic,
S
.
X
ie,
A
.
M
.
Ho
r,
N.
X
.
Hu
,
C
.
T
rip
p
,
G
.
X
u
,
A
p
p
l.
P
h
y
s.
L
e
tt
.
7
2
(
7
)
(1
9
9
8
)
7
5
6
.
[7
]
S
.
F
.
L
im
,
L
.
Ke
,
W
.
W
a
n
g
,
S
.
J.
Ch
u
a
,
A
p
p
l.
P
h
y
s.
L
e
tt
.
7
8
(
1
5
)
(2
0
0
1
)
2
1
1
6
.
[8
]
A
.
Cu
e
v
a
s,
F
.
Ch
e
n
,
J.
T
a
n
,
H.
M
ä
c
k
e
l,
S
.
W
in
d
e
rb
a
u
m
a
n
d
K.
R
o
t
h
,
4
th
W
C
P
EC,
W
a
ik
o
lo
a
,
1
1
4
8
(
2
0
0
6
)
.
[9
]
H.
M
ä
c
k
e
l
a
n
d
R.
L
ü
d
e
m
a
n
n
,
J.
A
p
p
l.
P
h
y
s.
92
,
2
6
0
2
(2
0
0
2
)
.
Evaluation Warning : The document was created with Spire.PDF for Python.