I
nte
rna
t
io
na
l J
o
urna
l o
f
E
lect
rica
l a
nd
Co
m
pu
t
er
E
ng
ineering
(
I
J
E
CE
)
Vo
l.
11
,
No
.
6
,
Dec
em
b
er
2
0
2
1
,
p
p
.
4
8
3
3
~
4
8
3
9
I
SS
N:
2
0
8
8
-
8
7
0
8
,
DOI
: 1
0
.
1
1
5
9
1
/
ijece
.
v
1
1
i
6
.
pp
4
8
3
3
-
4
8
3
9
4833
J
o
ur
na
l ho
m
ep
a
g
e
:
h
ttp
:
//ij
ec
e.
ia
esco
r
e.
co
m
Aiming
t
o
t
he sup
erio
r of phos
pho
r
patter
n:
In
f
luenc
e of Si
O
2
na
no
pa
rticles on
pho
tolum
inescenc
e int
ensi
ficatio
n o
f
YA
G
:
Ce
M
y
H
a
nh
Ng
uy
en
T
hi
1
,
T
hu
c
M
inh
B
ui
2
,
Ng
uy
en
Do
a
n
Q
uo
c
Anh
3
1
F
a
c
u
lt
y
o
f
M
e
c
h
a
n
ica
l
En
g
in
e
e
ri
n
g
,
In
d
u
strial
U
n
iv
e
rsit
y
o
f
Ho
C
h
i
M
i
n
h
Cit
y
,
Vie
t
n
am
2
F
a
c
u
lt
y
o
f
El
e
c
tri
c
a
l
a
n
d
El
e
c
tro
n
ics
En
g
in
e
e
rin
g
,
N
h
a
Tran
g
Un
i
v
e
rsity
,
Vie
t
n
a
m
3
P
o
we
r
S
y
ste
m
Op
t
imiz
a
ti
o
n
Re
s
e
a
rc
h
G
ro
u
p
,
F
a
c
u
lt
y
o
f
El
e
c
tri
c
a
l
a
n
d
E
lec
tro
n
ics
E
n
g
i
n
e
e
rin
g
,
To
n
D
u
c
Th
a
n
g
U
n
iv
e
rsit
y
,
Vie
t
n
a
m
Art
icle
I
nfo
AB
S
T
RAC
T
A
r
ticle
his
to
r
y:
R
ec
eiv
ed
No
v
1
5
,
2
0
2
0
R
ev
is
ed
Ma
y
1
1
,
2
0
2
1
Acc
ep
ted
Ma
y
2
3
,
2
0
2
1
Yttri
u
m
a
lu
m
in
u
m
g
a
r
n
e
t
(YA
G
:
RE)
ra
re
-
e
a
rth
-
d
o
p
e
d
p
h
o
sp
h
o
rs
h
a
v
e
g
re
a
t
p
h
o
to
l
u
m
in
e
sc
e
n
c
e
(P
L)
c
h
a
ra
c
teristics
a
n
d
a
re
c
o
m
m
o
n
l
y
u
se
d
i
n
l
ig
h
t
-
e
m
it
ti
n
g
re
c
ti
fy
in
g
t
u
b
e
s.
T
h
e
RE
e
lem
e
n
ts
u
se
d
i
n
th
e
se
p
h
o
s
p
h
o
rs,
h
o
we
v
e
r,
a
re
p
re
c
io
u
s
a
n
d
in
sh
o
rtag
e
.
Th
e
p
ro
d
u
c
ti
o
n
o
f
p
h
o
sp
h
o
r
u
s
c
o
n
tain
i
n
g
a
li
m
it
e
d
a
m
o
u
n
t
o
f
RE
c
o
n
te
n
t
is
t
h
e
re
fo
re
e
ss
e
n
ti
a
l.
On
e
so
lu
ti
o
n
is
t
o
m
a
n
u
fa
c
tu
re
N
a
n
o
c
o
m
p
o
site
p
h
o
sp
h
o
rs
th
a
t
u
se
a
n
in
e
x
p
e
n
siv
e
a
n
d
m
o
re
e
a
sily
a
v
a
il
a
b
le
c
o
n
te
n
t
a
s
a
m
a
tri
x
fo
r
RE
o
x
i
d
e
.
In
th
is
re
se
a
rc
h
,
we
d
e
v
e
lo
p
e
d
a
YA
G
:
Ce
/S
iO2
Na
n
o
c
o
m
p
o
site u
sin
g
a
s
o
l
-
g
e
l
p
ro
c
e
d
u
re
;
i
n
o
r
d
e
r
to
imp
u
lse
m
ice
ll
e
fo
rm
a
ti
o
n
a
n
d
a
g
g
lo
m
e
r
a
ti
o
n
,
p
o
l
y
(e
th
y
len
e
g
ly
c
o
l)
a
n
d
u
re
a
h
a
v
e
b
e
e
n
a
d
d
e
d
,
re
sp
e
c
ti
v
e
ly
.
X
-
ra
y
d
iffr
a
c
ti
o
n
,
sc
a
n
n
in
g
a
n
d
tran
sm
issio
n
e
lec
tro
n
m
icro
sc
o
p
y
(TE
M
)
a
n
d
e
n
e
rg
y
-
d
isp
e
rsiv
e
X
-
ra
y
sp
e
c
tro
sc
o
p
y
we
re
u
se
d
to
c
h
a
ra
c
teriz
e
th
e
Na
n
o
c
o
m
p
o
sites
.
In
p
ro
p
o
sin
g
a
n
e
x
p
lan
a
ti
o
n
f
o
r
t
h
is
e
n
h
a
n
c
e
m
e
n
t,
we
d
e
fin
e
d
t
h
e
c
o
n
c
e
n
tratio
n
o
f
S
iO
2
t
h
a
t
p
r
o
d
u
c
e
d
o
p
ti
m
u
m
P
L
e
n
h
a
n
c
e
m
e
n
t
a
n
d
u
se
d
g
e
o
m
e
tri
c
m
o
d
e
ls
a
s
we
ll
a
s
th
e
c
h
a
ra
c
te
riza
ti
o
n
c
o
n
se
q
u
e
n
c
e
s.
O
u
r
re
su
l
ts
d
e
m
o
n
str
a
ted
th
a
t
a
1
0
%
S
iO
2
c
o
n
c
e
n
tratio
n
p
r
o
d
u
c
e
d
a
1
2
0
%
P
L
in
ten
si
ty
o
f
p
u
re
YA
G
:Ce
.
TE
M
a
n
a
l
y
sis
re
v
e
a
led
th
a
t
S
iO
2
n
a
n
o
p
a
rt
icle
s
fil
led
t
h
e
v
o
id
s
b
e
twe
e
n
th
e
YA
G
:Ce
c
ry
sta
ls'
sin
g
le
g
ra
in
b
o
r
d
e
rs,
h
e
n
c
e
in
h
ib
it
in
g
li
g
h
t
sc
a
tt
e
rin
g
,
re
su
lt
in
g
i
n
i
n
c
re
a
se
d
P
L.
Th
i
s
p
ro
c
e
d
u
re
wo
u
ld
b
e
b
e
n
e
fici
a
l
fo
r
th
e
sy
n
th
e
sis
o
f
l
o
w
-
RE
a
n
d
h
i
g
h
-
P
L
p
h
o
s
p
h
o
rs o
n
a
wi
d
e
sc
a
le.
K
ey
w
o
r
d
s
:
C
o
lo
r
u
n
if
o
r
m
ity
L
u
m
in
o
u
s
f
l
u
x
Mie
-
s
ca
tter
in
g
th
eo
r
y
SiO
2
T
h
is i
s
a
n
o
p
e
n
a
c
c
e
ss
a
rticle
u
n
d
e
r th
e
CC B
Y
-
SA
li
c
e
n
se
.
C
o
r
r
e
s
p
o
nd
ing
A
uth
o
r
:
Ng
u
y
en
Do
a
n
Qu
o
c
An
h
Facu
lty
o
f
E
lectr
ical
an
d
E
lectr
o
n
ics E
n
g
in
ee
r
in
g
T
o
n
Du
c
T
h
an
g
U
n
iv
er
s
ity
No
.
1
9
Ng
u
y
en
Hu
u
T
h
o
Stre
e
t,
T
an
Ph
o
n
g
W
ar
d
,
Dis
tr
ict
7
,
Ho
C
h
i M
in
h
C
ity
,
Vietn
am
E
m
ail:
n
g
u
y
e
n
d
o
a
n
q
u
o
ca
n
h
@
td
tu
.
ed
u
.
v
n
1.
I
NT
RO
D
UCT
I
O
N
As
o
n
e
o
f
th
e
m
o
s
t
s
ig
n
if
ica
n
t
p
h
o
s
p
h
o
r
s
f
o
r
w
h
ite
-
lig
h
t
-
em
itti
n
g
r
ec
tify
in
g
tu
b
es
ar
e
r
ar
e
-
ea
r
th
(
R
E
)
-
d
o
p
e
d
y
ttri
u
m
alu
m
in
u
m
g
ar
n
ets
(
YAG:
R
E
)
[
1
]
-
[
3
]
.
R
E
io
n
s
s
u
ch
as
C
e
a
n
d
T
b
ar
e
n
ec
ess
ar
y
as
d
o
p
in
g
m
ate
r
ials
f
o
r
th
e
p
r
ep
ar
atio
n
o
f
YAG:
R
E
p
h
o
s
p
h
o
r
s
with
s
tr
o
n
g
lu
m
in
escen
ce
p
ar
ticu
lar
ities
.
T
h
er
e
ar
e,
h
o
wev
er
,
a
v
a
r
iety
o
f
is
s
u
es
with
th
e
m
ate
r
ials
b
ein
g
u
s
ed
,
s
u
ch
as
th
e
s
u
p
p
ly
o
f
R
E
m
ater
ials
b
ein
g
im
p
ac
ted
b
y
th
e
i
n
cr
ea
s
in
g
co
s
ts
an
d
th
e
ex
p
o
r
t
lim
itatio
n
s
en
f
o
r
ce
d
b
y
p
r
o
d
u
cin
g
c
o
u
n
tr
ies.
T
h
er
ef
o
r
e,
it
is
im
p
er
ativ
e
to
cr
ea
te
alter
n
at
iv
e
p
h
o
s
p
h
o
r
s
s
u
ch
as
n
o
v
e
l
p
h
o
s
p
h
o
r
s
,
i.e
.
R
E
-
f
r
ee
p
h
o
s
p
h
o
r
s
,
7
-
1
0
o
r
n
an
o
s
tr
u
ctu
r
e
d
p
h
o
s
p
h
o
r
s
(
Nan
o
co
m
p
o
s
ite
p
h
o
s
p
h
o
r
s
)
cr
ea
ted
to
co
n
s
er
v
e
r
eso
u
r
ce
s
b
y
co
m
b
i
n
in
g
R
E
o
x
id
es
with
af
f
o
r
d
ab
le
m
ate
r
ials
1
1
an
d
1
2
.
SiO
2
n
an
o
p
ar
ti
cles
ar
e
id
ea
l
ca
n
d
id
ates
f
o
r
t
h
e
R
E
o
x
id
es
h
o
s
t
m
atr
ix
to
war
d
s
Nan
o
co
m
p
o
s
ite
p
h
o
s
p
h
o
r
o
u
s
m
ater
ials
,
s
i
n
ce
SiO
2
is
in
ex
p
en
s
iv
e
an
d
clea
r
in
th
e
v
is
ib
le
-
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
7
0
8
I
n
t J E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
11
,
No
.
6
,
Dec
em
b
e
r
2
0
2
1
:
4
8
3
3
-
4
8
3
9
4834
lig
h
t
ar
ea
an
d
h
as
v
ir
tu
ally
n
o
ef
f
ec
t
o
n
th
e
s
tr
en
g
th
o
f
p
h
o
to
lu
m
in
escen
ce
(
PL)
[
4
]
-
[
6
]
.
I
n
ad
d
itio
n
,
as
a
r
esu
lt
o
f
th
e
tr
ap
p
i
n
g
o
f
o
x
id
e
p
ar
ticles
o
n
SiO
2
n
a
n
o
p
a
r
ticles,
PL
s
p
ec
tr
a
ca
n
b
e
p
r
ese
r
v
ed
with
o
u
t
p
ea
k
ch
an
g
in
g
.
Usi
n
g
a
s
p
r
ay
-
p
y
r
o
ly
s
is
m
eth
o
d
,
W
an
g
et
a
l.
p
r
o
d
u
ce
d
a
Gd
2
O
3
:
E
u
p
h
o
s
p
h
o
r
co
m
p
r
is
in
g
SiO
2
n
an
o
p
a
r
ticles.
As
a
r
esu
lt
o
f
i
m
p
r
o
v
e
d
cr
y
s
tallizatio
n
,
th
is
Nan
o
co
m
p
o
s
ite
p
h
o
s
p
h
o
r
h
as
h
ig
h
l
u
m
in
escen
ce
ef
f
icien
cy
[
7
]
-
[
9
]
.
Via
a
s
p
r
ay
-
d
r
y
i
n
g
p
r
o
ce
s
s
,
Mik
r
aj
u
d
d
in
d
o
cu
m
en
te
d
th
e
s
y
n
th
es
is
o
f
s
tab
le
p
h
o
to
lu
m
in
escen
t
Z
n
O
co
llo
id
s
i
n
a
SiO
2
n
an
o
p
ar
ticle
m
atr
i
x
.
W
h
ile
SiO
2
ca
n
th
eo
r
eti
ca
lly
im
p
r
o
v
e
t
h
e
p
er
f
o
r
m
an
ce
o
f
p
h
o
s
p
h
o
r
u
s
,
t
h
e
ap
p
licatio
n
o
f
SiO
2
n
a
n
o
p
a
r
ticles
to
im
p
r
o
v
e
th
e
p
er
f
o
r
m
an
ce
o
f
YAG:
C
e
p
h
o
s
p
h
o
r
s
h
av
e
n
o
t
y
et
b
ee
n
r
ep
o
r
ted
to
th
e
b
est
o
f
o
u
r
k
n
o
wled
g
e.
T
h
e
f
ir
s
t
f
ab
r
icatio
n
o
f
YAG:
C
e
/
SiO
2
Nan
o
co
m
p
o
s
ite
p
h
o
s
p
h
o
r
s
ar
e
r
ep
o
r
ted
in
th
is
ar
ticle.
T
h
e
cu
r
r
en
t
s
y
n
th
esis
was
ca
r
r
ied
o
u
t
u
s
in
g
a
m
o
d
if
ied
s
o
l
-
g
el
p
r
o
ce
s
s
with
ad
d
itiv
es
(
a
p
o
l
y
m
er
a
n
d
u
r
ea
)
in
co
m
p
ar
is
o
n
to
o
th
er
d
o
cu
m
en
ted
ap
p
r
o
ac
h
es
f
o
r
t
h
e
s
y
n
th
esis
o
f
p
h
o
s
p
h
o
r
o
u
s
m
ater
ials
r
eq
u
ir
in
g
s
p
ec
if
ic
an
d
c
o
m
p
lex
p
r
o
ce
s
s
es;
th
is
m
eth
o
d
is
p
r
o
m
is
in
g
f
o
r
in
d
u
s
tr
ial
ap
p
licatio
n
s
(
i.e
.
d
ir
ec
t
s
y
n
th
esis
an
d
lar
g
e
-
s
ca
le
p
r
o
d
u
ctio
n
)
.
Po
ly
(
eth
y
len
e
g
ly
co
l)
(
PEG)
in
d
u
ce
s
th
e
f
o
r
m
in
g
o
f
m
icelles
in
th
is
p
r
o
ce
s
s
,
an
d
u
r
ea
f
ac
ilit
ates
ag
g
lo
m
er
atio
n
d
u
r
in
g
p
ar
tic
le
f
o
r
m
atio
n
[
1
0
]
,
[
1
1
]
.
Su
b
s
eq
u
en
tly
,
o
n
a
h
u
g
e
s
ca
le,
a
YAG:
C
e
p
h
o
s
p
h
o
r
with
a
s
p
h
er
ical
m
o
r
p
h
o
lo
g
y
ca
n
b
e
d
ir
ec
tly
g
en
er
ated
.
A
th
o
r
o
u
g
h
in
v
esti
g
atio
n
was
ca
r
r
ied
o
u
t
in
th
is
r
esear
ch
to
d
eter
m
i
n
e
th
e
ap
p
r
o
p
r
iate
a
m
o
u
n
t
o
f
SiO
2
n
an
o
p
ar
ticles
n
ee
d
e
d
to
ac
h
iev
e
th
e
f
u
ll
in
te
n
s
ity
o
f
PL,
an
d
th
e
i
n
ten
s
ity
o
f
PL
was
co
m
p
a
r
ed
with
th
at
o
f
p
u
r
e
p
h
o
s
p
h
o
r
u
s
YAG.
R
elied
o
n
th
eo
r
etica
l
co
n
s
id
er
a
ti
o
n
s
,
a
m
ec
h
an
is
m
f
o
r
th
e
cr
e
atio
n
o
f
p
h
o
s
p
h
o
r
p
ar
ticles an
d
lig
h
t r
e
f
r
ac
tio
n
is
also
p
r
o
p
o
s
ed
.
2.
E
XP
E
R
I
M
E
N
T
2
.
1
.
P
re
pa
ra
t
io
n o
f
SiO
2
-
e
m
bedd
ed
s
t
ruct
ure
T
o
in
v
esti
g
ate
th
e
ef
f
ec
t
o
f
SiO
2
n
an
o
co
m
p
o
s
ite
o
n
th
e
p
h
o
to
lu
m
in
escen
ce
o
f
YAG:Ce
i
n
th
e
L
E
D
p
ac
k
ag
e,
th
e
c
o
m
p
a
r
is
o
n
b
et
wee
n
o
u
r
p
r
o
p
o
s
ed
SiO
2
-
em
b
ed
d
ed
L
E
D
co
n
f
ig
u
r
atio
n
a
n
d
a
tr
ad
itio
n
al
L
E
D
s
tr
u
ctu
r
e
(
with
o
u
t
SiO
2
)
was
co
n
d
u
cte
d
.
Fig
u
r
e
1
p
r
o
v
id
es
th
e
p
h
y
s
ical
m
o
d
el
o
f
th
e
s
im
u
lated
W
L
E
D.
T
h
e
p
r
ep
ar
atio
n
o
f
SiO
2
-
em
b
e
d
d
e
d
W
L
E
D
s
tr
u
c
tu
r
e
ca
n
b
e
d
et
ailed
as
f
o
llo
ws:
F
ir
s
t,
it
is
n
e
ce
s
s
ar
y
to
g
r
o
w
a
n
u
n
in
ten
tio
n
ally
d
o
p
e
d
GaN
lay
er
o
n
t
h
e
o
r
ig
i
n
al
p
atter
n
e
d
s
ap
p
h
ir
e
s
u
b
s
tr
ate
o
f
th
e
L
E
D.
T
h
en
,
th
e
m
etal
o
r
g
an
ic
ch
em
ical
v
ap
o
r
d
ep
o
s
itio
n
(
MO
C
V
D)
was
ap
p
lied
to
co
n
v
en
tio
n
ally
d
e
v
elo
p
a
GaN
lay
er
with
o
u
t
d
o
p
in
g
SiO
2
n
an
o
p
ar
ticles
(
u
-
GaN
)
o
n
th
e
c
-
p
lan
e
PS
S.
I
t
is
n
o
ted
th
at
th
is
u
-
GaN
lay
er
h
as
a
th
ick
n
ess
o
f
3
µm
.
An
in
ter
lay
er
with
a
th
i
ck
n
ess
o
f
1
0
0
n
m
u
s
in
g
SiO
2
NPs
was
p
lace
d
o
n
t
h
e
u
-
GaN
u
s
in
g
p
lasma
-
en
h
an
ce
d
ch
em
ical
v
ap
o
r
d
e
p
o
s
itio
n
to
c
r
ea
te
n
a
n
o
-
p
illar
s
in
th
e
GaN
f
ilm
.
B
ef
o
r
e
cr
ea
tin
g
t
h
e
SiO
2
n
an
o
p
illar
s
in
to
th
e
u
-
GaN
,
an
etch
m
ask
o
f
Ni
d
o
t
s
h
o
u
ld
b
e
p
r
ep
ar
ed
b
y
d
ep
o
s
itin
g
a
Ni
lay
er
o
n
SiO
2
lay
er
b
y
e
-
b
ea
m
e
v
ap
o
r
atio
n
an
d
s
u
b
s
eq
u
e
n
tly
1
-
m
in
u
te
r
a
p
id
th
e
r
m
al
an
n
ea
lin
g
th
e
c
o
m
b
in
ati
o
n
o
f
Ni,
SiO
2
an
d
GaN
with
N
2
f
lo
ws
at
8
5
0
o
C
.
Af
ter
th
at,
th
e
etch
i
n
g
m
eth
o
d
o
f
in
d
u
ctiv
ely
c
o
u
p
led
p
lasm
a
was
u
s
ed
to
etch
d
o
wn
th
e
SiO
2
lay
er
i
n
to
th
e
GaN
b
y
1
.
5
m
with
O
2
,
C
F
4
an
d
C
l
2
g
ases
,
r
esp
ec
tiv
e
ly
[
1
2
]
-
[
1
5
]
.
T
h
en
af
ter
,
b
u
f
f
er
e
d
o
x
id
e
etch
an
ts
elim
i
n
ated
th
e
r
em
ai
n
in
g
Ni
n
a
n
o
-
d
o
ts
o
n
SiO
2
n
an
o
-
p
illar
s
.
As
a
co
n
s
eq
u
e
n
ce
,
a
GaN
p
r
o
to
ty
p
e
was
p
r
ep
ar
ed
with
Nan
o
-
p
illar
s
ar
r
an
g
ed
v
er
tically
.
T
h
e
SiO
2
n
an
o
p
ar
ticles,
wh
ich
h
av
e
co
llo
id
al
d
iam
eter
o
f
1
0
0
n
m
,
wer
e
s
u
b
s
eq
u
en
tly
f
illed
in
th
e
air
-
v
o
id
am
o
n
g
th
e
p
i
llar
s
o
n
GaN
u
s
in
g
5000
-
r
p
m
s
p
in
-
co
atin
g
f
o
r
3
0
s
.
T
h
en
,
a
n
o
th
e
r
GaN
lay
er
w
as
f
ir
m
ly
r
e
g
r
o
wn
o
n
th
ese
SiO
2
p
illar
s
,
f
o
llo
wed
b
y
d
ev
elo
p
i
n
g
3
-
µm
th
ick
n
-
GaN
s
h
ee
t
d
o
p
in
g
s
ilico
n
.
I
n
s
eq
u
en
ce
,
a
m
u
ltiq
u
an
t
u
m
-
well
(
MQ
W
)
ar
ea
an
d
a
s
h
ee
t
o
f
Mg
-
d
o
p
ed
p
-
GaN
w
h
o
s
e
th
ick
n
ess
is
2
0
0
n
m
we
r
e
g
r
o
wn
[
1
6
]
-
[
1
8
]
.
Her
e,
th
e
Mg
-
d
o
p
ed
p
-
GaN
lay
er
p
lay
s
a
r
o
le
as
a
to
p
c
o
n
tact
lay
er
o
f
th
e
s
tr
u
ctu
r
e
.
Als
o
,
th
e
tr
ad
itio
n
al
u
-
GaN
g
r
o
wn
o
n
PS
S
with
o
u
t
u
s
in
g
SiO
2
n
an
o
co
m
p
o
s
ite
was f
ab
r
icate
d
f
o
r
r
ef
e
r
en
ce
an
d
co
m
p
ar
is
o
n
.
(
a)
(
b
)
Fig
u
r
e
1
.
T
h
e
p
h
y
s
ical
m
o
d
el
o
f
th
e
s
im
u
lated
W
L
E
D;
(
a)
p
h
o
to
g
r
a
p
h
o
f
W
L
E
Ds s
am
p
le,
(
b
)
th
e
s
im
u
lated
W
L
E
Ds m
o
d
el
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2
0
8
8
-
8
7
0
8
A
imin
g
to
th
e
s
u
p
erio
r
o
f p
h
o
s
p
h
o
r
p
a
tter
n
:
I
n
flu
en
ce
o
f S
iO
2
n
a
n
o
p
a
r
ticles o
n
…
(
My
Ha
n
h
N
g
u
ye
n
Th
i
)
4835
A
f
ield
em
is
s
io
n
s
ca
n
n
in
g
el
ec
tr
o
n
m
ic
r
o
s
co
p
y
(
FE
-
SEM
)
was
u
s
ed
to
ac
h
ie
v
e
th
e
cr
o
s
s
-
s
ec
tio
n
im
ag
es
o
f
th
e
SiO
2
NP
L
E
D.
T
h
e
m
ea
s
u
r
em
en
ts
o
f
p
h
o
to
lu
m
in
escen
ce
wer
e
ca
r
r
ie
d
o
u
t
at
th
e
r
o
o
m
tem
p
er
atu
r
e,
with
th
e
ex
citatio
n
s
o
u
r
ce
o
f
a
2
5
m
W
He
-
C
d
laser
at
3
2
5
n
m
lin
e.
I
n
d
iu
m
co
n
tact
o
n
-
waf
er
test
in
g
was
ap
p
lied
to
d
eter
m
in
e
th
e
p
r
o
p
er
ties
o
f
cu
r
r
e
n
t
-
v
o
ltag
e
(
I
-
V)
an
d
o
p
tical
o
u
tp
u
t
(
L
-
I
)
.
T
h
e
attain
ed
r
esu
lts
o
f
th
e
SiO
2
n
an
o
-
p
illar
em
b
ed
d
e
d
s
tr
u
ctu
r
e
we
r
e
c
o
m
p
ar
ed
with
th
o
s
e
f
r
o
m
th
e
r
ef
e
r
en
ce
m
o
d
el,
g
iv
en
th
at
th
ese
s
tr
u
ctu
r
es
wer
e
p
r
o
d
u
ce
d
u
n
d
e
r
th
e
s
am
e
g
r
o
wth
co
n
d
itio
n
s
.
I
n
ad
d
itio
n
to
th
a
t,
th
e
e
x
p
er
im
en
tal
f
in
d
in
g
s
wer
e
p
u
t
in
to
co
m
p
a
r
is
o
n
with
th
e
r
esu
lts
f
r
o
m
s
im
u
latio
n
f
o
r
a
m
o
r
e
in
-
d
ep
th
an
aly
s
is
.
Sin
ce
th
e
co
n
f
ig
u
r
atio
n
o
f
th
is
ex
p
er
im
en
t
an
d
PS
S
was
d
esig
n
ed
to
in
cr
ea
s
e
th
e
p
er
f
o
r
m
an
ce
o
f
lig
h
t
ex
tr
ac
tio
n
f
o
r
d
if
f
er
en
t
L
E
D
s
tr
u
ctu
r
al
d
esig
n
s
,
th
e
p
lan
is
to
lear
n
h
o
w
to
ac
h
iev
e
b
etter
e
n
h
an
ce
m
e
n
t
i
n
th
e
e
f
f
icien
cy
o
f
th
e
s
im
u
latio
n
,
en
s
u
r
in
g
t
h
at
g
eo
m
etr
ic
v
ar
iatio
n
s
ar
e
co
n
s
is
ten
t
an
d
co
m
p
lem
en
tar
y
to
ea
ch
o
th
er
e
v
en
th
o
u
g
h
th
e
f
u
n
ctio
n
s
ar
e
o
v
er
l
ap
p
in
g
.
2
.
2
.
Sca
t
t
er
ing
co
m
pu
t
a
t
io
n
Acc
o
r
d
in
g
to
Mie
-
s
ca
tter
in
g
th
eo
r
y
[
1
9
]
-
[
2
5
]
,
th
e
s
ca
tter
in
g
co
ef
f
icie
n
t
μ
sca
(
λ)
,
an
is
o
tr
o
p
y
f
ac
to
r
g
(
λ)
,
an
d
r
ed
u
ce
d
s
ca
tter
in
g
c
o
ef
f
icien
t
δ
sca
(
λ)
ca
n
b
e
co
m
p
u
ted
b
y
th
e
ex
p
r
ess
io
n
s
(
1
)
,
(
2
)
,
an
d
(
3
)
:
(
)
=
∫
(
)
(
,
)
(
1
)
(
)
=
2
∫
∫
(
,
,
)
1
−
1
(
)
(
2
)
=
(
1
−
)
(
3
)
w
h
er
e
N
(
r
)
in
d
icate
s
th
e
d
is
t
r
ib
u
tio
n
d
e
n
s
ity
o
f
d
if
f
u
s
io
n
al
p
ar
ticles
(
m
m
3
)
,
is
th
e
s
ca
tter
in
g
cr
o
s
s
s
ec
tio
n
s
(
mm
2
)
,
p
(
θ,
λ,
r
)
is
th
e
p
h
ase
f
u
n
ctio
n
,
λ
is
th
e
li
g
h
t
wav
elen
g
th
(
n
m
)
,
r
is
r
a
d
iu
s
o
f
d
if
f
u
s
io
n
al
p
ar
ticles
(
µm
)
,
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e
s
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tte
r
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le
(
°
C
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,
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d
f(
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e
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ize
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is
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ib
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tio
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ctio
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o
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th
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if
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o
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th
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s
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h
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r
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u
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lay
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r
,
wh
ich
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n
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e
ca
lcu
lated
as
(
4
)
,
(
5
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:
(
)
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(
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(
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(
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(
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=
(
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(
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(
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+
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(
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(
5
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N
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(
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d
N
phos
(
r
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,
wh
ich
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en
s
ities
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t
h
e
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if
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s
iv
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d
th
e
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s
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r
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ize
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n
.
K
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th
e
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m
b
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o
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th
e
d
if
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it
f
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ich
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ex
p
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y
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w
h
er
e
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r
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th
e
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ass
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ed
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y
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:
(
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3
[
(
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(
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wh
er
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ρ
diff
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r
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ex
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ess
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e
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ile
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h
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cr
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tal’
s
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en
s
ity
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As d
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o
n
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tr
ated
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Mie
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s
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h
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sca
ca
n
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e
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er
f
o
r
m
ed
as
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8
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:
=
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(
2
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|
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w
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k
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n
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d
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n
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e
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m
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u
ted
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y
(
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,
(
1
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:
(
,
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́
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)
(
)
−
(
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́
(
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(
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(
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(
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w
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,
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-
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e
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f
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n
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t
i
o
n
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
7
0
8
I
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t J E
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&
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11
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6
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Dec
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e
r
2
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4836
T
h
er
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r
e,
th
e
r
elativ
e
r
ef
r
ac
tiv
e
in
d
ices
o
f
d
if
f
u
s
iv
e
g
r
ai
n
s
(
m
dif
)
an
d
p
h
o
s
p
h
o
r
cr
y
s
tals
(
m
phos
)
in
clu
d
ed
in
t
h
e
s
ilico
n
e
a
r
e
co
m
p
u
ted
v
ia
th
e
f
o
llo
win
g
ex
p
r
ess
io
n
:
=
⁄
an
d
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=
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⁄
.
T
h
en
th
e
p
h
ase
f
u
n
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n
ca
n
b
e
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p
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as
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1
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e
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T
o
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s
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late
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e
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d
r
o
p
h
o
b
ic
C
d
Se
-
Z
n
S
co
r
e
-
s
h
ell
QDs
with
SiO
2
,
we
h
av
e
estab
lis
h
e
d
a
s
im
p
le
two
-
s
tep
p
r
o
ce
s
s
in
g
p
ath
.
W
ith
th
is
m
eth
o
d
,
Sil
ica
-
Nan
o
c
o
m
p
o
s
ites
co
n
tain
in
g
m
u
ltip
le
QDs
at
in
cr
ed
ib
ly
h
ig
h
c
o
n
ce
n
tr
atio
n
s
h
av
e
b
ee
n
p
r
o
d
u
ce
d
.
As
a
f
ir
s
t
s
tag
e,
th
e
s
p
ay
-
d
r
y
in
g
m
eth
o
d
was
u
tili
ze
d
f
o
r
ass
em
b
led
-
QDs
p
r
ep
ar
atio
n
.
T
h
e
s
p
r
ay
-
d
r
y
in
g
m
eth
o
d
h
as
also
b
ee
n
u
s
ed
to
th
e
co
llo
id
al
n
an
o
p
a
r
ticles
'
ev
ap
o
r
atio
n
-
ass
is
ted
s
elf
-
ass
em
b
ly
.
Du
r
i
n
g
th
e
o
p
er
atio
n
o
f
s
p
r
a
y
-
d
r
y
in
g
,
s
o
lv
en
t
ev
ap
o
r
atio
n
c
au
s
es
s
h
r
in
k
ag
e
o
f
d
r
o
p
lets
co
m
p
r
is
in
g
n
an
o
p
ar
t
icles
wh
ich
ar
e
th
en
ass
em
b
led
in
s
id
e
d
r
o
p
lets
d
u
e
to
c
ap
illar
y
f
o
r
ce
.
T
h
e
ae
r
o
s
o
l
s
p
r
ay
m
eth
o
d
,
in
p
ar
ti
cu
lar
,
s
ig
n
if
ican
tly
en
h
a
n
ce
s
s
o
lv
en
t
ev
ap
o
r
atio
n
an
d
lim
its
th
e
s
elf
-
as
s
em
b
ly
o
f
n
a
n
o
p
ar
ticles
with
in
th
e
d
r
o
p
let.
I
n
r
ea
lity
,
d
if
f
er
e
n
t
n
an
o
p
ar
ticles
wer
e
s
elf
-
ass
em
b
led
u
s
in
g
th
e
ae
r
o
s
o
l
-
b
ased
s
p
r
ay
p
r
o
ce
s
s
to
f
o
r
m
m
eso
s
p
h
er
e.
I
n
th
is
a
n
aly
s
is
,
to
lu
en
e
-
d
is
p
er
s
ed
QDs
wer
e
s
p
r
ay
ed
u
ltra
s
o
n
ically
at
2
5
0
u
C
f
o
r
s
o
lv
en
t
ev
ap
o
r
atio
n
an
d
h
y
d
r
o
p
h
o
b
ic
QD
a
s
s
em
b
ly
.
T
h
e
ag
g
r
e
g
ates
with
h
ig
h
p
o
r
o
s
ity
an
d
co
m
p
lex
s
h
ap
es
wer
e
s
h
ap
ed
b
y
th
e
s
p
r
ay
ed
QDs,
an
d
ev
e
n
tu
ally
b
ein
g
d
is
tr
ib
u
ted
in
to
h
y
d
r
o
p
h
ilic
eth
an
o
l.
Af
ter
b
ein
g
h
ea
ted
at
2
5
0
u
C
f
o
r
a
f
ew
s
ec
o
n
d
s
,
th
e
QDs
s
till
r
etain
ed
th
e
s
u
r
f
ac
e'
s
h
y
d
r
o
p
h
o
b
ic
q
u
ality
an
d
co
u
ld
b
e
r
ea
d
ily
d
is
p
er
s
ed
i
n
to
lu
en
e.
T
h
e
s
u
b
s
eq
u
e
n
t
a
d
d
in
g
s
o
lu
tio
n
o
f
T
E
OS
an
d
aq
u
eo
u
s
am
m
o
n
ia
r
esu
lted
in
th
e
f
o
r
m
atio
n
o
f
SiO
2
th
in
f
ilm
s
a
r
o
u
n
d
s
p
r
ay
-
d
i
s
p
er
s
ed
QD
ag
g
r
eg
ates.
I
t
is
d
em
o
n
s
tr
ated
th
at
a
h
y
d
r
o
ly
tic
r
ea
ctio
n
o
f
T
E
OS
an
d
am
m
o
n
ia
attr
ib
u
tes
to
th
e
d
ir
ec
t
f
o
r
m
ati
o
n
1
5
-
n
m
t
h
ick
SiO
2
lay
er
s
o
n
th
e
QDs a
f
ter
a
r
ea
ctio
n
tim
e
o
f
2
h
o
u
r
s
.
As
ca
n
b
e
s
ee
n
in
F
ig
u
r
e
2
,
co
n
tin
u
ed
r
esp
o
n
s
e
ex
p
an
d
ed
t
h
e
am
o
u
n
t
o
f
QD
-
s
ilica
Nan
o
co
m
p
o
s
ite
p
ar
ticles u
p
to
a
f
ew
m
ic
r
o
m
et
er
s
.
T
h
e
tem
p
o
r
al
ev
o
lu
tio
n
o
f
p
h
o
to
n
em
is
s
io
n
s
p
ec
tr
a
th
r
o
u
g
h
o
u
t th
e
g
r
o
win
g
p
r
o
ce
s
s
o
f
s
ilica
n
an
o
p
a
r
ticles
co
u
ld
b
e
s
ee
n
in
Fig
u
r
e
3
.
O
n
ly
af
ter
th
e
in
c
o
r
p
o
r
atio
n
o
f
T
E
OS/NH4
OH,
th
e
QD
-
s
ilica
n
an
o
-
co
m
p
o
s
ite
em
is
s
io
n
in
ten
s
ity
was
s
tr
o
n
g
ly
m
in
im
ized
.
So
m
e
g
r
o
u
p
s
h
av
e
r
ep
o
r
ted
th
at
af
te
r
th
e
f
o
r
m
atio
n
o
f
QD
-
s
ilica
Nan
o
co
m
p
o
s
ite
p
ar
ticles,
th
e
e
m
is
s
io
n
in
ten
s
ity
o
f
QD
s
d
ec
r
ea
s
ed
co
n
s
id
er
ab
ly
.
T
h
e
d
ep
letio
n
o
f
p
h
o
to
lu
m
i
n
escen
ce
in
ten
s
ity
af
ter
th
e
f
o
r
m
atio
n
o
f
s
ilica
lay
er
o
n
th
e
QDs’
s
u
r
f
ac
e
h
as
g
en
er
ally
b
ee
n
v
iewe
d
as th
e
cr
ea
tio
n
o
f
th
e
n
o
n
-
r
ad
iativ
e
r
e
co
m
b
in
atio
n
ch
a
n
n
el.
I
n
th
e
s
y
n
th
esis
o
f
th
e
QD
-
SiO
2
n
an
o
co
m
p
o
s
ite
p
ar
t
icles,
th
e
lig
an
d
ex
ch
an
g
e
o
f
s
ilan
e
p
r
im
er
o
r
h
y
d
r
o
l
y
ze
d
T
E
OS
o
cc
u
r
r
ed
an
d
in
cr
ea
s
e
th
e
s
u
r
f
ac
e
d
ef
ec
ts
,
an
d
th
e
n
o
n
-
r
ad
iativ
e
r
ec
o
m
b
in
atio
n
ch
a
n
n
el
was
co
n
s
eq
u
en
tly
f
o
r
m
ed
.
I
n
g
en
er
al,
th
is
p
ar
tially
-
h
y
d
r
o
ly
ze
d
-
T
E
OS r
ap
id
lig
an
d
ex
c
h
a
n
g
e
ca
u
s
ed
th
e
T
E
OS
d
is
tr
ib
u
ted
o
n
th
e
s
u
r
f
ac
e
o
f
QDs
to
b
e
in
a
d
is
o
r
d
er
ed
ar
r
a
n
g
em
en
t.
Ad
d
itio
n
ally
,
OH
2
io
n
s
ca
n
r
em
o
v
e
th
e
o
r
g
a
n
ic
lig
an
d
s
o
n
t
h
e
s
u
r
f
ac
e
o
f
QDs
in
aq
u
eo
u
s
am
m
o
n
ia
s
o
lu
tio
n
f
o
r
t
h
e
T
E
OS
co
n
d
en
s
atio
n
,
p
r
o
b
ab
ly
v
ia
th
e
cr
ea
tio
n
o
f
h
y
d
r
o
x
id
e
co
m
p
lex
es
alo
n
g
w
ith
th
e
in
c
o
m
p
lete
s
u
r
f
ac
e
p
ass
iv
atio
n
.
T
h
u
s
,
f
o
r
h
ig
h
p
h
o
to
lu
m
in
escen
ce
p
r
ess
u
r
e,
it
is
ad
v
is
ab
le
to
av
o
id
th
e
aq
u
eo
u
s
am
m
o
n
ia
s
o
lu
tio
n
’
s
d
ir
ec
t
r
ea
ctio
n
.
Ho
wev
er
,
s
in
ce
w
e
u
s
ed
an
aq
u
eo
u
s
am
m
o
n
ia
s
o
lu
tio
n
f
o
r
t
h
e
T
E
OS
h
y
d
r
o
ly
s
is
,
as
s
tated
b
y
s
ev
er
al
s
tu
d
ies,
a
g
r
ad
u
al
d
ec
lin
e
in
em
is
s
io
n
in
ten
s
ity
s
ee
m
s
u
n
av
o
id
ab
le.
Sev
er
al
p
ath
s
,
s
u
ch
as
in
itial
s
alin
izatio
n
,
a
n
d
th
e
f
o
r
m
atio
n
o
f
s
ev
er
al
s
h
ells
o
n
QDs,
wer
e
p
r
o
p
o
s
ed
in
an
attem
p
t
to
r
ed
u
ce
th
e
p
h
o
to
lu
m
in
escen
ce
-
in
ten
s
ity
d
eg
r
ad
atio
n
o
f
QDs
d
u
r
in
g
th
e
p
r
o
ce
s
s
o
f
f
o
r
m
in
g
SiO
2
s
h
ell,
s
ee
Fig
u
r
e
4
.
T
h
e
o
r
ig
in
al
s
alin
izatio
n
tech
n
iq
u
e
,
in
s
p
ec
if
ic,
h
as
b
ee
n
s
h
o
w
n
to
b
e
s
u
cc
ess
f
u
l
in
m
ain
tain
in
g
t
h
e
q
u
an
tu
m
y
ie
ld
o
f
th
e
o
r
ig
in
al
QDs
af
ter
b
ein
g
e
n
ca
p
s
u
lated
with
SiO
2
Nan
o
co
m
p
o
s
ite.
Hen
ce
,
we
d
ec
id
ed
to
im
p
le
m
en
t
an
in
itial
s
alin
izatio
n
tech
n
iq
u
e
in
th
is
an
aly
s
is
to
r
e
d
u
ce
th
e
s
u
b
s
tan
tial
d
ec
r
ea
s
e
in
th
e
in
ten
s
ity
o
f
p
h
o
to
lu
m
in
escen
ce
af
te
r
th
e
cr
ea
tio
n
o
f
SiO
2
lay
er
s
.
I
n
a
s
p
r
ay
-
d
is
p
er
s
ed
QD
m
ix
tu
r
e,
3
-
am
in
o
p
r
o
p
y
l
-
t
r
ieth
o
x
y
s
ilan
e
(
APS)
was
a
d
d
ed
an
d
r
ea
c
ted
f
o
r
1
0
m
in
u
tes
t
o
s
alin
ize
th
e
QDs
u
n
d
er
s
tirr
in
g
.
T
o
th
ick
en
th
e
SiO
2
lay
er
s
,
th
e
T
E
OS
a
n
d
a
q
u
eo
u
s
am
m
o
n
ia
s
o
l
u
tio
n
wer
e
ad
d
e
d
in
s
eq
u
en
ce
.
Her
e,
af
ter
APS
ad
d
itio
n
,
th
e
p
h
o
to
n
em
is
s
io
n
in
ten
s
ity
o
f
t
h
e
s
p
r
ay
-
d
is
p
er
s
ed
QD
s
o
lu
ti
o
n
was
m
ain
tain
ed
,
as
s
how
n
in
Fig
u
r
e
5
.
A
n
d
af
ter
th
e
ad
d
itio
n
o
f
T
E
OS/
NH
4
OH,
th
e
r
ate
o
f
PL
d
is
p
lay
ed
o
n
ly
a
s
m
all
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2
0
8
8
-
8
7
0
8
A
imin
g
to
th
e
s
u
p
erio
r
o
f p
h
o
s
p
h
o
r
p
a
tter
n
:
I
n
flu
en
ce
o
f S
iO
2
n
a
n
o
p
a
r
ticles o
n
…
(
My
Ha
n
h
N
g
u
ye
n
Th
i
)
4837
r
ed
u
ctio
n
u
n
til
th
e
r
ea
ctio
n
tim
e
was
1
h
.
Ph
o
to
lu
m
in
escen
ce
was
wea
k
en
ed
b
y
1
5
-
2
0
%
as
th
e
r
ea
ctio
n
p
r
o
ce
ed
e
d
f
u
r
th
er
.
T
h
is
r
esu
lt,
in
f
ac
t,
is
m
u
ch
s
m
aller
in
co
m
p
ar
is
o
n
with
th
at
o
f
th
e
A
PS
-
f
r
ee
s
y
n
th
esis
.
Af
ter
T
E
OS/
NH
4
OH
ad
d
itio
n
,
th
e
d
ec
r
ea
s
e
i
n
PL
i
n
ten
s
ity
p
r
o
b
ab
ly
s
u
g
g
ests
in
ad
eq
u
at
e
p
ass
iv
atio
n
o
f
t
h
e
QD
s
u
r
f
ac
e
b
y
APS.
Fig
u
r
e
2
.
Scatter
in
g
co
ef
f
icien
ts
o
f
SiO
2
p
ar
ticles at
4
5
0
n
m
an
d
5
5
0
n
m
Fig
u
r
e
3
.
T
h
e
p
h
ase
f
u
n
ctio
n
o
f
SiO
2
p
ar
ticles at
4
5
0
n
m
an
d
5
5
0
n
m
Fig
u
r
e
4
.
T
h
e
r
ed
u
ce
d
s
ca
tter
i
n
g
co
ef
f
icien
t o
f
SiO
2
p
ar
ticles at
d
if
f
er
en
t sizes an
d
wav
elen
g
th
at
;
(
a)
4
5
0
n
m
an
d
(
b
)
550
nm
Fig
u
r
e
5
.
T
h
e
s
ca
tter
in
g
cr
o
s
s
s
ec
tio
n
o
f
SiO
2
p
ar
ticles
at
d
if
f
er
en
t sizes an
d
wav
ele
n
g
th
at
;
(
a)
4
5
0
n
m
an
d
(
b
)
5
5
0
nm
3.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
N
T
h
e
lu
m
in
escen
ce
c
h
an
g
es
i
n
co
n
n
ec
tio
n
with
d
if
f
er
en
t
SiO
2
d
o
p
ed
co
n
ten
ts
in
th
e
wh
ite
L
E
Ds
p
ac
k
ag
in
g
s
tr
u
ctu
r
e
esti
m
ate
d
at
1
2
0
m
A
ar
e
s
h
o
wn
in
Fig
u
r
e
6
.
Similar
f
o
r
war
d
v
o
ltag
es
o
f
all
test
in
g
in
s
tr
u
m
en
ts
ar
e
ab
o
u
t
3
.
0
5
V
at
2
0
m
A.
Sin
ce
t
h
er
e
a
r
e
n
o
u
s
ed
a
n
tire
f
lectio
n
c
o
atin
g
s
b
ein
g
f
o
u
n
d
in
th
e
cu
r
r
en
t
p
ath
s
,
th
er
e
is
n
o
e
f
f
e
ct
o
n
th
e
ass
o
ciate
d
elec
tr
ical
p
r
o
p
e
r
ties
.
Alth
o
u
g
h
an
an
ti
-
r
ef
lectio
n
co
v
er
in
g
co
u
ld
b
e
u
s
ed
to
wid
en
th
e
cr
itical
an
g
le,
th
e
r
ed
u
ctio
n
in
Fre
s
n
el
r
ef
lectio
n
was
p
o
s
s
i
b
le
to
ac
h
iev
e
[
1
9
]
.
Mo
r
eo
v
er
,
th
e
s
ca
tter
in
g
ef
f
ec
t
m
ay
also
b
e
en
h
an
ce
d
as
th
e
s
u
r
f
ac
e
o
f
th
e
h
y
b
r
id
SiO
2
m
icr
o
s
p
h
er
e/n
a
n
o
s
p
h
er
e
was
r
o
u
g
h
e
n
ed
d
u
e
to
a
n
tire
f
lectio
n
co
atin
g
.
So
,
it
is
p
o
s
s
ib
le
to
f
u
r
th
er
en
h
an
ce
th
e
lu
m
in
o
u
s
ef
f
icien
cy
o
f
th
e
L
E
D
p
ac
k
ag
es.
As
ca
n
b
e
s
ee
n
f
r
o
m
Fig
u
r
e
6
,
th
e
co
n
ce
n
t
r
atio
n
o
f
u
s
ed
SiO
2
af
f
ec
ts
th
e
lu
m
in
o
u
s
f
lu
x
o
f
t
h
e
p
ac
k
ag
es,
in
wh
ich
th
e
h
ig
h
er
co
n
ce
n
tr
atio
n
o
f
SiO
2
th
e
b
etter
th
e
lu
m
in
o
u
s
ef
f
icien
cy
.
T
o
u
n
d
er
s
tan
d
m
o
r
e
th
e
lu
m
i
n
o
u
s
p
r
o
p
er
ty
o
f
th
e
SiO
2
-
d
o
p
e
d
p
ac
k
a
g
es,
we
u
tili
ze
d
th
e
tr
an
s
m
is
s
io
n
-
ab
s
o
r
p
tio
n
a
n
d
h
az
e
an
ly
s
is
es
to
ch
ar
ac
ter
ize
th
e
ef
f
ec
ts
o
f
SiO
2
-
p
h
o
s
p
h
o
r
-
s
ilico
n
e
co
m
b
i
n
atio
n
f
o
r
f
u
r
th
er
s
tu
d
y
.
I
t w
as p
o
in
ted
o
u
t th
at
th
e
en
h
n
ac
em
en
t in
th
e
ab
s
o
r
p
tio
n
p
er
ce
n
tag
e
o
f
t
h
e
SiO
2
-
in
ter
g
ar
ted
co
n
f
ig
u
r
atio
n
was
ab
o
u
t
1
0
%
(
f
r
o
m
3
2
%
to
4
2
%
ap
p
r
o
x
im
tely
)
at
4
6
0
n
m
wa
v
elen
g
th
,
c
o
m
p
ar
ed
to
th
at
o
f
th
e
u
n
d
o
p
e
d
SiO
2
s
tr
u
ctu
r
e.
T
h
is
im
p
r
o
v
em
en
t
led
t
o
th
e
in
cr
ea
s
e
in
y
ello
w
-
lig
h
t
p
o
r
ti
o
n
in
th
e
SiO
2
-
em
b
b
ed
e
d
p
ac
k
ag
es,
th
u
s
in
cr
ea
s
in
g
th
e
lu
m
en
o
u
tp
u
t.
I
n
th
i
s
an
aly
s
is
,
th
e
ef
f
ec
tiv
e
in
d
ex
wo
u
ld
ch
an
g
e
with
th
e
d
if
f
er
en
t
SiO
2
n
an
o
p
ar
ticle
co
n
ce
n
tr
atio
n
s
af
ter
d
o
p
in
g
th
e
SiO
2
n
an
o
p
ar
ticle
in
th
e
p
h
o
s
p
h
o
r
u
s
s
h
ee
t.
I
n
co
m
p
ar
is
o
n
,
th
e
s
ilico
n
e,
p
h
o
s
p
h
o
r
u
s
an
d
SiO
2
n
a
n
o
p
a
r
ticle
r
ef
r
ac
tiv
e
in
d
ices
(
R
I
)
ar
e
1
.
4
,
1
.
8
a
n
d
2
.
2
3
.
T
h
e
R
I
o
f
th
e
SiO
2
n
an
o
p
ar
ticle
p
h
o
s
p
h
o
r
o
u
s
lay
er
is
th
en
d
eter
m
in
ed
b
y
:
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
7
0
8
I
n
t J E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
11
,
No
.
6
,
Dec
em
b
e
r
2
0
2
1
:
4
8
3
3
-
4
8
3
9
4838
R
I
=
V
1
RI
1
+ V
2
RI
2
+ V
3
RI
3
I
n
wh
ich
,
V
1
,
V
2
an
d
V
3
in
d
i
ca
te
th
e
c
o
n
ce
n
tr
atio
n
s
o
f
ea
ch
m
ater
ials
,
in
cl
u
d
in
g
th
e
s
ilico
n
e,
th
e
p
h
o
s
p
h
o
r
an
d
SiO
2
n
an
o
p
a
r
ticle.
I
t
is
n
o
ted
th
at
th
ese
c
o
n
c
en
tr
atio
n
v
al
u
es
ar
e
ca
lcu
lated
in
th
e
weig
h
t
r
ati
o
o
f
th
e
m
ater
ials
.
T
h
e
r
atio
o
f
SiO
2
co
n
ce
n
tr
atio
n
to
p
h
o
s
p
h
o
r
co
n
ce
n
tr
atio
n
in
t
h
e
p
ac
k
a
g
e
was
1
%
wt.
an
d
3
%
wt.
C
o
n
s
eq
u
en
tly
,
th
e
p
h
o
s
p
h
o
r
lay
e
r
R
I
s
is
1
.
4
2
8
an
d
1
.
4
4
5
i
n
ea
ch
lay
er
.
A
T
FC
al
c3
2
s
im
u
latio
n
was
u
s
ed
to
ad
d
r
ess
th
e
ef
f
ec
t
o
f
th
e
v
ar
io
u
s
r
e
f
r
ac
tiv
e
in
d
ex
lay
er
s
.
T
h
e
lig
h
t
e
x
tr
ac
tio
n
v
alu
e
o
f
th
e
SiO
2
-
n
an
o
p
a
r
t
icle
d
is
p
er
s
ed
s
tr
u
ctu
r
e
is
q
u
ite
clo
s
e
to
th
at
o
f
th
e
tr
ad
itio
n
al
o
n
e,
with
o
u
t
SiO
2
p
ar
ticle,
b
ec
a
u
s
e
o
f
th
e
alm
o
s
t
eq
u
al
r
ef
r
ac
tiv
e
i
n
d
ex
.
T
h
er
ef
o
r
e,
th
e
e
n
h
an
ce
m
en
t
o
f
SiO
2
n
an
o
p
ar
ticle
d
i
s
p
en
s
in
g
s
tr
u
ctu
r
e
lu
m
en
f
lu
x
co
u
ld
b
e
cr
e
d
ited
s
o
lely
to
th
e
SiO
2
n
a
n
o
p
ar
ticl
e'
s
d
is
p
er
s
in
g
im
p
ac
t.
Hen
ce
,
th
e
s
ca
tter
in
g
e
f
f
ec
t
o
f
SiO
2
p
ar
ticles
s
h
o
u
ld
b
e
an
aly
ze
d
,
an
d
a
s
im
u
latio
n
b
ase
d
o
n
th
e
Mie
-
s
ca
tter
in
g
t
h
eo
r
y
was
co
n
d
u
cted
f
o
r
th
at
p
u
r
p
o
s
e.
I
n
th
is
ex
p
er
im
en
tal
m
o
d
el,
we
d
i
d
n
o
t
u
s
e
th
e
y
ello
w
p
h
o
s
p
h
o
r
p
ar
tic
les,
ju
s
t
o
n
ly
th
e
SiO
2
n
an
o
p
a
r
ticles
wer
e
p
r
esen
ted
in
th
e
p
ac
k
a
g
es.
T
h
is
is
to
r
ed
u
ce
th
e
c
o
m
p
lex
ity
o
f
th
e
s
tr
u
ctu
r
e
an
d
th
e
f
ab
r
icatio
n
p
r
o
ce
s
s
.
At
a
wav
elen
g
th
o
f
4
6
0
n
m
,
th
e
r
ef
r
ac
tiv
e
in
d
ex
o
f
th
e
SiO
2
with
s
ilico
n
e
was d
eter
m
in
ed
at
2
.
2
3
.
T
h
e
SiO
2
p
ar
ticle
s
ize
was
r
o
u
g
h
ly
3
0
0
n
m
a
n
d
th
e
d
o
p
ed
c
o
n
ce
n
t
r
atio
n
o
f
SiO
2
wer
e
ab
o
u
t
1
%
an
d
3
%
wt.
,
r
esp
ec
tiv
ely
.
B
ef
o
r
e
ex
ce
ed
in
g
5
0
0
n
m
,
th
e
h
az
e
am
p
litu
d
e
o
f
th
e
v
ir
tu
al
s
y
s
tem
s
tr
u
ctu
r
e
with
a
lo
wer
SiO
2
d
o
p
an
t
c
o
n
ten
t
wa
s
alm
o
s
t
1
0
0
p
e
r
ce
n
t
an
d
d
ec
r
ea
s
ed
s
tead
ily
wh
en
th
e
wav
el
en
g
th
s
u
r
p
ass
ed
th
e
m
ar
k
o
f
5
0
0
n
m
.
W
e
also
o
b
s
er
v
ed
a
s
im
ilar
ity
o
f
t
h
e
s
ca
tter
in
g
ef
f
ec
t
o
f
SiO
2
b
etwe
en
th
e
e
x
p
er
im
e
n
tal
r
esu
lts
an
d
th
e
s
im
u
lated
r
esu
lts
.
T
h
e
h
az
e
in
ten
s
ity
f
o
r
d
o
p
in
g
with
a
h
ig
h
er
SiO
2
co
n
ten
t
was
ab
o
u
t
th
e
s
am
e
as f
o
r
wav
elen
g
t
h
s
r
an
g
i
n
g
f
r
o
m
3
0
0
to
7
0
0
n
m
.
T
h
e
ag
u
lar
co
r
r
elate
d
c
o
lo
r
tem
p
er
atu
r
e
(
C
C
T
)
d
ev
iatio
n
s
o
f
L
E
D
p
ac
k
ag
es
co
n
tain
in
g
v
ar
io
u
s
q
u
an
titi
es
o
f
SiO
2
n
a
n
o
p
a
r
ticles
wer
e
an
aly
ze
d
,
an
d
th
e
r
esu
l
ts
wer
e
p
r
esen
ted
in
Fig
u
r
e
7
.
As
th
e
in
s
tr
u
m
en
ts
wer
e
d
o
p
e
d
with
SiO
2
n
an
o
p
a
r
ticles,
th
e
co
n
s
is
ten
cy
o
f
th
e
an
g
le
-
d
ep
e
n
d
en
t
C
C
T
s
was
m
ar
k
ed
ly
im
p
r
o
v
ed
.
T
h
is
o
b
s
er
v
atio
n
r
e
v
ea
ls
th
at
th
e
in
cr
ea
s
e
o
f
t
h
e
d
o
p
an
t'
s
SiO
2
n
an
o
p
a
r
ticle
co
n
ce
n
tr
atio
n
cr
ea
ted
a
g
r
ea
ter
s
ca
tter
in
g
im
p
ac
t.
T
h
e
co
n
s
is
ten
cy
o
f
C
C
T
s
in
g
en
er
al
is
in
d
en
tifie
d
as
f
o
llo
ws:
T
h
e
g
r
ea
test
C
C
T
m
in
u
s
th
e
lo
west
C
C
T
.
T
h
e
r
ef
er
en
ce
C
C
T
was
p
lace
d
at
a
h
ig
h
lev
el
(
ap
p
r
o
x
im
ately
5
3
1
9
K)
w
ith
o
u
t
d
o
p
in
g
with
SiO
2
n
an
o
p
ar
ticles,
a
n
d
a
h
i
g
h
er
C
C
T
in
d
icate
d
a
h
ig
h
e
r
b
l
u
e
lig
h
t
ex
tr
ac
tio
n
,
wh
ic
h
in
d
u
ce
d
a
h
i
g
h
er
C
C
T
v
ar
ian
ce
.
T
h
e
C
C
T
d
if
f
e
r
en
ti
al
f
o
u
n
d
at
0
0
an
d
7
0
0
was
ef
f
ec
tiv
ely
r
e
m
o
v
e
d
wh
e
n
th
e
in
s
tr
u
m
en
ts
wer
e
d
o
p
ed
with
SiO
2
n
an
o
p
ar
ticles.
T
h
er
e
was
a
clea
r
im
p
ac
t
o
f
SiO
2
d
o
p
in
g
o
n
p
h
o
s
p
h
o
r
u
s
an
d
s
ilico
n
e
o
n
th
e
o
u
tp
u
t
o
f
th
e
p
ac
k
ed
u
n
it.
Fig
u
r
e
6
.
L
u
m
in
o
u
s
f
lu
x
es o
f
SiO
2
p
ar
ticles with
d
if
f
er
en
t c
o
n
ce
n
tr
atio
n
s
Fig
u
r
e
7
.
C
C
T
d
ev
iatio
n
s
o
f
SiO
2
p
ar
ticles with
d
if
f
er
en
t c
o
n
ce
n
tr
atio
n
s
4.
CO
NCLU
SI
O
N
I
n
th
is
an
aly
s
is
,
b
y
in
s
er
tin
g
SiO
2
n
an
o
p
ar
ticles
in
to
th
e
p
r
ec
u
r
s
o
r
s
o
lu
tio
n
,
th
e
im
p
r
o
v
e
m
en
t
o
f
th
e
PL
in
ten
s
ity
o
f
a
YAG:Ce
p
h
o
s
p
h
o
r
was
ac
co
m
p
lis
h
ed
.
T
h
e
in
clu
s
io
n
o
f
SiO
2
n
an
o
p
ar
ticles
d
ec
r
ea
s
ed
th
e
u
s
e
o
f
co
s
tly
m
ater
ials
s
u
ch
as
Y
an
d
C
e,
an
d
th
e
co
m
p
o
s
ite
p
h
o
s
p
h
o
r
u
s
'
PL
ef
f
icien
cy
w
as
h
ig
h
er
th
an
th
at
o
f
th
e
p
u
r
e
p
h
o
s
p
h
o
r
u
s
YAG:Ce.
T
h
e
m
ax
im
u
m
PL
in
te
n
s
ity
at
5
3
0
n
m
was
r
aised
to
1
2
0
%
th
at
o
f
a
p
u
r
e
YAG:Ce
s
am
p
le
b
y
r
aisi
n
g
t
h
e
v
o
lu
m
e
o
f
SiO
2
.
T
E
M
an
aly
s
is
o
f
th
e
YAG:Ce/
SiO
2
s
am
p
le
cr
o
s
s
-
s
ec
tio
n
r
ev
ea
led
th
at
SiO
2
f
illed
th
e
v
o
id
s
in
th
e
p
h
o
s
p
h
o
r
u
s
s
am
p
le
an
d
b
lo
c
k
ed
th
e
ab
s
o
r
p
tio
n
o
f
lig
h
t
at
th
e
YAG
an
d
SiO
2
in
ter
f
ac
e.
W
e
b
eliev
e
th
at
t
h
is
ap
p
r
o
ac
h
w
o
u
ld
s
tar
t
to
o
p
e
n
n
ew
an
d
ex
citin
g
s
tr
ateg
ies
f
o
r
th
e
s
y
n
th
esis
o
f
n
o
v
el
p
h
o
s
p
h
o
r
s
u
s
in
g
lo
wer
q
u
an
titi
es
o
f
co
s
t
ly
m
ater
ials
,
esp
ec
ia
lly
R
E
m
ater
ials
s
u
ch
as
C
e
an
d
Y.
W
e
also
ass
u
m
e
th
at
in
teg
r
atin
g
n
an
o
p
ar
ticle
tech
n
o
lo
g
y
with
th
e
s
y
n
t
h
esis
o
f
m
ater
ials
wo
u
ld
allo
w
R
E
m
ater
ials
to
b
e
u
s
ed
m
o
r
e
ef
f
ec
tiv
ely
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
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t J E
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&
C
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m
p
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n
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I
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N:
2
0
8
8
-
8
7
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8
A
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to
th
e
s
u
p
erio
r
o
f p
h
o
s
p
h
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r
p
a
tter
n
:
I
n
flu
en
ce
o
f S
iO
2
n
a
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o
p
a
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ticles o
n
…
(
My
Ha
n
h
N
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u
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n
Th
i
)
4839
ACK
NO
WL
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DG
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esear
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s
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p
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ted
b
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I
n
d
u
s
tr
ial
Un
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er
s
ity
o
f
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h
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(
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u
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1
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NC
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[1
]
S
.
Bin
d
a
i,
K
.
An
n
a
p
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r
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a
,
a
n
d
A
.
Tara
fd
e
r
,
"
Re
a
li
z
a
ti
o
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f
p
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sp
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p
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.
[2
]
L.
F
re
y
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t
a
l.
,
"
Hi
g
h
-
p
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rfo
rm
a
n
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e
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iele
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tri
c
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terfe
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fil
te
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[3
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N.
C.
A.
Ra
sh
id
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,
"
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p
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[4
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A.
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,
"
Eff
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c
o
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to
p
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p
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ty
,
"
J
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Op
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[5
]
M
.
Ro
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e
r,
"
Ev
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trad
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[6
]
C.
Zh
a
n
g
e
t
a
l
.
,
"
Al
l
-
in
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sili
c
o
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with
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icie
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Exp
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3
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.
[7
]
A
Co
rre
ia,
P
.
Ha
n
se
lae
r,
a
n
d
Y
.
M
e
u
re
t
,
"
Ho
li
st
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to
-
t
h
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2
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5
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9
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1
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3
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[2
4
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.
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