In
d
o
n
e
sian
Jou
r
n
al of
Ele
c
tr
i
c
a
l
En
g
in
e
erin
g
an
d
C
om
pu
ter S
c
ien
ce
Vol.
14, No.
1, April 2019,
pp.
295~302
ISSN: 2502-
4752,
DOI
:
10.115
91/ijeecs.
v
14.
i
1
.
pp295-302
295
Jou
rn
a
l
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o
me
pa
ge
:
ht
tp:
//i
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e
score
.
com
/
j
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s
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e
x
.
p
hp/
i
j
eec
s
Influenc
e of optimization of con
trol factor
s
on threshold volta
ge
of 18 nm HfO2/TiSi2 N
M
O
S
No
ra
n
i
A
ta
n
1
,
B
u
rh
a
n
uddin Bin Yeo
p
Ma
j
lis
2
,
Ibrah
i
m B
i
n
Ahmad
3
, K. H. C
h
o
ng
4
1,
3,
4
Dep
a
rtm
e
nt
o
f
Elect
ron
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c an
d Co
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cati
on Eng
i
n
eerin
g
, U
n
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iti
T
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n
a
ga N
asi
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a
l, M
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ays
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a
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Ins
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Nano
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nics
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EN),
U
n
i
v
e
rsiti
Kebangsaan Malay
sia
(
U
K
M
), M
al
aysia
Art
i
cl
e In
fo
ABSTRACT
A
r
tic
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y
:
R
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v
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Sep
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,
2
018
Re
vise
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ov
26,
201
8
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act
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h
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t
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i
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d
t
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b
e
s
t
val
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e
o
f
i
nteract
ion
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om
b
i
na
t
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o
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t
r
ol
s
f
act
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ac
t
o
rs
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achi
e
ve
t
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est
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f
th
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ge.
In
C
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d
e
si
gn
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th
e
th
resh
o
l
d
v
o
lt
age
i
s
t
he
b
ench
m
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rkin
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o
f
p
h
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sical
p
aram
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f
o
r
det
e
rmin
i
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the
f
u
nct
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onal
o
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tr
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ual
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ricati
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s
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s
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K
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pyri
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stit
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of
Adv
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En
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All
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Corres
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Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN: 2502-
4752
I
n
do
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e
si
an
J
E
l
e
c
E
n
g
&
C
o
m
p
S
ci
, V
o
l
.
1
4
,
No. 1, April 2019 :
295 –
3
02
29
6
als
o
g
i
v
es
e
ffe
ct
t
o
the
d
o
p
i
n
g
o
f
the
tra
n
s
i
st
or.
The
re
se
a
r
c
h
er
c
oun
ter
cha
l
l
e
ng
in
g
t
o
d
eve
l
o
p
t
he
s
m
a
ller
si
z
e
trans
is
t
o
r
.
T
he
r
esea
rche
r
are
fa
ci
ng
l
o
t
s
of
p
ro
b
l
em
t
h
a
t
n
e
e
d
to
b
e
t
a
k
i
ng
a
c
o
unt
i
n
th
e
sc
al
ing
down
of
MOSF
ET
such
a
s
car
rier
m
ob
i
l
i
t
y
d
i
l
a
p
id
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t
i
o
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be
ca
use
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du
l
t
er
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tio
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e
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ere
gate
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ne
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w
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b
e
com
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hi
ghe
r
a
nd
h
o
t
cha
n
n
e
l
ca
rrier
[
1].
More
tim
e,
c
on
c
e
ntra
tio
n
a
n
d
c
ons
iste
nce
nee
d
t
o
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s
pe
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d
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o
m
a
ke
t
he
trans
i
s
t
or
i
s
fu
nct
i
on
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u
cc
ess
f
ul
ly.
The
thre
s
hol
d
v
o
lta
g
e
(
V
T
H
)
is
one
o
f
the
m
a
i
n
d
iffic
u
lt
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in
p
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d
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ci
n
g
a
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sca
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tra
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si
s
t
or
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f
t
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alue
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o
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ac
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v
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d
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t
w
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f
f
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c
t
t
h
e
w
h
o
l
e
s
y
s
t
e
m
o
f
t
h
e
dev
i
ce
an
d
w
orst c
ase,
the
d
ev
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w
ill
not
f
un
cti
o
n at
a
l
l
.
I
t
i
s
c
a
u
se
d t
h
e
do
pin
g
f
l
u
c
t
ua
t
i
ons
[
2]
Base
d
o
n
p
revi
o
u
s
re
se
arc
h
,
ther
e
a
r
e
tw
o
w
a
y
s
t
o
sol
v
e
the
pro
b
l
ems
a
b
ov
e
wi
th
t
h
e
g
ood
com
b
i
n
a
t
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o
n
b
e
tw
e
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n
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g
h
-k
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ie
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ric
a
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me
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a
te
t
hat
is
b
e
tw
ee
n
H
f
O
2
a
n
d
T
iS
i2
[
3]
.
A
not
her
so
l
u
t
i
on
is
t
he
o
pt
imiza
t
i
o
n
o
n
p
roce
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p
ar
am
eter
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L
27
Ta
g
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c
h
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me
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o
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s
p
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o
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t
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Ta
g
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ch
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od
L
27
o
rth
ogo
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for
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O
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hre
s
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o
l
d
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V
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H
w
h
e
r
e
the
resu
l
t
s
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o
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t
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t
a
1
8
nm
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t
e
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h
P
M
O
S
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i
s
t
o
r
w
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h
V
T
H
v
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lue of -0.
30
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t is
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in
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R
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201
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pred
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a
n
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prod
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num
eri
c
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lly
[
4].
I
n
t
hi
s
w
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r
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,
to
e
xam
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ne
N
M
O
S
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nct
i
o
n
a
lit
y
a
nd
e
l
ec
t
r
ical
c
ha
r
a
c
t
e
ri
st
i
c
s
18n
m
NM
OS
w
i
t
h
hi
gh-
k
m
a
teria
l
s
a
nd
m
e
ta
l
g
a
te
t
ra
ns
istor
w
a
s
modele
d
a
nd
sim
u
l
a
t
e
d.
T
he
N
MO
S
fa
brica
t
i
o
n
pr
oce
s
s
w
a
s
exe
c
u
t
e
d
b
y
u
s
ing
S
I
LV
A
C
O
,
A
TH
ENA
modu
le
w
her
eas
t
o
ver
i
fy
t
he
NMOS
e
le
c
t
rica
l
c
h
ar
act
e
r
ist
i
cs
dev
i
ce
w
er
e
pe
r
f
orm
e
d
by
us
i
ng
A
TLA
S
modu
le
s
im
u
l
a
t
or
.
In
t
h
i
s
wo
rk
,
th
e
opt
i
m
i
z
a
t
i
o
n
p
r
o
cess
by
u
si
ng
ort
h
o
g
ona
l
arr
a
y
L
2
7
Ta
g
u
c
h
i
me
tho
d
n
e
e
d
s
o
n
ly
f
i
v
e
i
m
porta
nt
p
r
o
c
e
ss
par
a
m
e
ters
t
o
be
c
o
n
s
i
de
r
e
d
in
t
he
des
i
g
n
o
f
e
xpe
r
i
m
e
nts
w
i
t
h
i
ntera
c
t
i
o
n.
I
n
t
h
e
p
r
ev
i
o
us
e
x
p
e
r
im
ent
,
w
h
i
ch
s
t
u
d
i
es
t
h
e
p
ro
ce
ss
by
u
sing
t
h
e
Tag
u
c
h
i
L
9
o
rt
ho
g
ona
l
arra
y
it
ca
n
be
c
onc
l
ude
d
t
h
at
t
he
H
alo
I
mpl
a
nt
ati
o
n
was
sel
ect
ed
a
s
do
mi
n
a
nt
f
a
c
t
o
r
(fa
c
tor
E).
Th
is
r
esea
rch
w
a
s
st
udy
i
ng
the
e
ffe
c
t
s
of
i
n
t
e
r
ac
ti
o
n
s
(
EXA),
(EXB),
(
EXC)
a
nd
(
EXD)
i
n
deter
m
i
n
at
i
on
of
t
he
o
p
t
im
al
c
om
bi
na
t
i
on
of
c
o
n
tro
l
f
act
ors.
T
h
e
five
p
ar
am
eter
s
t
h
a
t
d
e
s
ired
t
o
ta
k
e
a
s
atte
n
t
ion
a
r
e
A
d
jus
t
me
nt
V
TH
I
m
p
l
a
nta
t
i
o
n,
C
o
m
pensa
t
i
o
n
Im
pl
a
n
t
a
t
i
o
n,
C
om
pensa
t
io
n
Ener
g
y
Im
pl
a
n
tat
i
on,
S
our
ce/D
r
ain
I
m
plan
ta
t
i
o
n
a
n
d
H
a
l
o
Im
p
l
a
n
ta
ti
on
a
s
t
h
e
y
g
et
i
nt
o
do
a
f
fe
ct
t
hresh
o
l
d
v
o
l
t
a
g
e
(V
TH)
,
i
n t
h
e fabric
a
tio
n o
f
18nm
N
M
O
S
de
vice.
T
he
T
a
g
u
c
hi m
eth
od
i
nvo
l
v
i
n
g
an
al
y
s
i
s
o
f
con
t
ro
l
f
acto
r
i
n
w
h
i
c
h
o
f
t
h
e
f
a
c
t
o
r
s
s
h
o
u
l
d
b
e
m
a
n
i
p
u
l
a
t
e
d
a
n
d
f
i
n
e
l
y
a
d
j
u
s
t
e
d
to
p
r
oduc
e
a
n
i
mp
rove
me
n
t
o
f
r
e
su
lts.
By
u
si
n
g
a
n
L2
7
or
tho
g
o
n
a
l
a
rray,
t
he
se
c
o
u
l
d
he
l
p
t
o
fi
n
d
o
ut
mu
lt
i
p
l
e
m
a
n
ipul
at
ed
f
a
c
t
o
rs
o
n
ea
ch
cha
r
ac
t
e
ris
tic
a
nd
fas
t
er
var
i
a
tio
n i
n
a
m
ore econ
o
mic
a
l
wa
y
a
n
d
sa
ve
tim
e [5].
2.
RESEARCH
M
ETH
O
D
The
fa
bric
a
tio
n
proc
es
s
ste
p
s
of
1
8
nm
N
MO
S
in
A
thena
m
o
du
l
e
f
r
o
m
V
W
F
a
r
e
a
s
f
o
l
l
o
w
s
.
The
first
ste
p
i
n
fa
brica
tio
n
is
a
c
re
ati
ng
t
h
e
i
n
i
t
i
a
l
s
u
bst
r
a
te
from
a
Silic
o
n
p
-t
ype
(
bor
on
d
o
p
ed)
w
i
t
h
a
d
opi
ng
7
x10
14
a
t
o
m
s
/
c
m
3
a
nd
orie
n
t
a
t
i
o
n
<10
0
>
.
N
e
xt
i
s
to
g
e
n
era
t
e
re
t
r
ogr
ade
P
-
we
l
l
b
y
grow
in
g
a
dr
y
ox
y
g
en
2
0
0
Å
on
the
to
p
o
f
t
he
s
ubs
trate
for
2
0
m
in
ute
s
w
ith
9
7
0
o
C
a
nd
do
pe
d
w
ith
B
or
o
n
.
The
d
o
se
i
s
3.75
x
1
0
12
a
t
o
m
s
/
c
m
3
a
nd
e
n
ergy
impla
n
tat
i
on
is
1
0
0
K
e
V
.
T
h
i
s
w
a
fe
r
has
unde
rg
o
n
e
t
h
e
annea
lin
g
pro
c
e
s
s
a
t
90
0
o
C
a
n
d
i
t
n
e
e
ds
36
m
i
n
u
t
e
s
i
n
N
i
t
r
o
g
en
a
nd
a
l
s
o
3
6
m
i
n
u
te
s
i
n
d
r
y
O
x
yge
n.
N
ex
t,
t
h
e
e
tc
h
e
d
proce
ss
w
a
s
rem
ove
t
he
m
a
s
kin
g
o
x
i
de
a
nd
c
r
ea
t
e
t
he
S
ha
llow
Tre
n
c
h
I
sola
ti
o
n
(S
TI
)
of
1
3
0
-
Å
t
hic
k
ness
i
n
a
n
n
ea
l
i
ng
proce
s
s
w
i
th
d
r
y
O
x
y
g
e
n
i
n
25
m
inu
t
e
s
a
t
90
0
o
C.
T
he
n
fo
l
l
ow
e
d
b
y
a
L
o
w
P
r
essure
C
hem
i
c
a
l
V
apor
D
e
pos
i
tio
n
pro
c
e
s
s
(LP
C
V
D
)
a
nd
Reac
tive
Ion
Et
c
h
i
n
g
(
R
IE)
proce
ss.
The
P
h
osp
hor
S
ilica
t
e
G
l
ass
(
P
S
G
)
w
a
s
de
ve
l
o
ped
o
n
t
o
p
o
f
s
u
b
s
t
r
ate
a
f
ter
w
a
fer
is
unde
rg
o
i
n
g
t
he
a
n
n
ea
lin
g
proc
ess
a
t
8
50
o
C
for
15
min
u
t
es.
A
f
ter
c
o
mp
le
te
t
he
p
r
o
ce
ss
o
f
grow
i
ng
a
n
d
an
ne
ale
d
1
.
1
n
m
G
a
te
O
x
id
e
Th
i
c
k
n
ess
(TO
X
),
t
he
B
oron
D
i
-
fl
u
o
ride (BF
2) w
i
t
h
1
.67
577
x1
0
7
a
tom
s
/cm
3
B
oron a
nd t
h
e
ene
r
g
y
5K
e
V
w
i
t
h
a
ti
lt ang
l
e of 7
o
was i
m
p
lanted
at
t
he
N
-w
e
l
l
a
c
t
i
ve.
F
o
l
l
ow
ed
b
y
de
po
sit
i
on
pr
oce
s
s
of
i
ns
ul
a
t
or
t
hat
i
s
H
af
niu
m
d
i
o
x
i
de
(
di
e
l
e
c
tr
ic
perm
it
t
i
v
ity H
fO
2,
op
t
=
2
2
)
on t
o
p o
f
bul
k S
i
l
i
c
o
n. In
th
is
r
esea
rch t
h
e
len
g
t
h o
f
H
fO
2
m
a
ter
i
al
w
a
s
18 nm
and
on
the
to
p
o
f
t
he
i
nsu
l
a
t
or
w
a
s
t
he
d
ep
os
i
tio
n
pro
c
e
s
s
of
g
ate
m
a
ter
i
a
l
,
Titan
i
um
S
ilic
ide
(
T
i
S
i
2
).
The
N
M
O
S
d
e
v
ice,
I
n
d
i
um
w
it
h
dose
13.
30
0x
1
0
13
a
t
o
m
s
/
c
m
3
a
t
30
°
an
gle
and
en
e
r
gy
,
2
9
0
K
e
V
w
as
u
sed
i
n
H
a
lo
I
m
p
l
a
n
t
a
tio
n
proce
s
s.
B
y
usi
n
g
c
h
e
m
ical
v
a
por
d
epo
s
i
tio
n
p
roc
e
s
s,
t
he
s
ide
w
a
ll
s
pac
e
r
w
a
s
de
ve
lo
p
w
ith
a
0
.0
4
7
μm
S
ilico
n
N
itr
ide
l
a
yer.
A
ga
i
n
,
a
r
sen
i
c
w
i
t
h
a
d
os
ag
e
o
f
4
.0
x10
12
a
t
o
m
s
/
c
m
3
w
a
s
u
s
e
d
i
n
So
u
r
ce
/
D
rai
n
I
mp
l
a
nt
a
t
io
n
p
r
o
c
es
s
fo
llowe
d
by
pho
sp
ho
rou
s
w
i
t
h
a
dosa
g
e
of
1
.7
5x
1
0
12
a
t
o
m
s
/
c
m
3
.
N
e
xt
p
roc
e
ss
is
t
o
de
ve
l
o
p
a
0
.
3
m
l
aye
r
o
f
B
o
ro
n
P
h
o
s
p
h
or
S
i
l
i
c
at
e
Gl
a
ss
(B
PSG)
an
d
foll
o
w
ed
b
y
t
h
e
anne
a
l
i
n
g
proc
e
s
s
of
s
truc
tur
e
a
t
8
5
0
o
C.
T
he
l
as
t
i
m
pla
n
tat
i
on
proc
ess
is
C
om
pe
nsa
t
i
on
Impla
n
ta
ti
o
n
w
it
h
P
hosp
h
o
ro
us d
ose of 2.5x
1
0
13
at
o
m
s
/cm
3
.
La
st
b
ut n
o
t
lea
st,
t
h
e proce
s
s
of de
p
osi
t
i
o
n the
A
l
u
m
i
num m
a
te
ri
al
o
n
t
o
p
o
f
t
h
e
s
t
r
u
c
t
u
r
e
a
n
d
e
t
c
h
i
n
g
a
c
c
o
r
d
i
n
g
l
y
t
o
f
o
r
m
m
e
t
a
l
c
on
tac
t
s
for
S
ource
a
nd
D
r
a
i
n
[
6
-7].
T
he
n,
t
he
trans
i
s
t
or
u
n
d
e
r
goes
t
h
e
A
TLA
S
m
odu
le
t
o
m
easure
t
h
e
e
l
e
c
tr
ical
c
hara
cteris
t
i
c
i
n
o
rder
t
o
st
u
d
y
t
h
e
thres
h
o
l
d
v
o
l
ta
ge,
VTH
of
t
h
e
d
ev
ice
w
i
t
h
r
efere
n
ce
to
I
T
R
S
2
0
1
1
[
8
].
T
he
c
om
ple
t
e
di
agr
a
m
o
f
18
n
m
g
ate
len
g
t
h s
t
ruc
t
ur
e
as
s
how
n
in
F
igure
1.
In
t
his
se
ct
i
on,
T
ag
uch
i
m
e
t
h
od
L2
7
or
t
h
o
g
ona
l
arr
a
y
is
u
sed
t
o
s
t
udy
a
n
d
m
ode
l
i
n
g
o
f
varia
b
i
l
ity
o
f
Evaluation Warning : The document was created with Spire.PDF for Python.
Ind
ones
i
a
n
J
E
lec
En
g & Co
m
p
S
c
i
IS
S
N
: 2502-
47
52
Inf
l
ue
nce o
f
op
ti
m
i
z
a
t
i
on o
f
con
t
r
o
l
fac
t
ors on
t
h
res
h
old vol
t
age
o
f
1
8
n
m
H
f
O
2
/T
iS
i2 NMO
S
(Nora
n
i
Ata
n
)
29
7
18
nm
N
M
O
S
de
v
i
c
e
p
erf
o
rma
n
ce
w
it
h
fi
ve
r
e
l
e
v
an
t
pr
ocess
pa
ram
e
te
rs
w
ith
d
iffere
nt
l
e
v
e
l
s
as
s
how
n
in
Tab
l
e
1.
M
ea
nw
h
ile,
the
t
w
o
noise
f
ac
tors
a
re
P
hos
p
h
o
r
S
il
i
c
a
t
e
G
la
ss
(
P
S
G
)
te
m
p
era
t
ure
a
nd
Boro
n
P
hosp
h
o
r
S
i
l
i
c
a
te
G
la
ss
(BP
S
G)
t
em
pera
t
u
r
e
w
ere
va
ried
w
i
t
h
2
l
e
v
el
s
are
liste
d
in
T
a
b
l
e
2
.
Base
d
on
t
he
Tag
u
c
h
i
L
27
o
r
th
og
o
n
al
a
rr
ay
t
ha
t
i
s
t
he
2
7
expe
rime
nt
s
w
e
re
g
e
nera
t
e
d
from
t
h
e
c
om
bina
t
i
o
n
b
e
t
w
e
en
f
iv
e
proce
s
s
pa
ram
e
ter
s
w
i
t
h
tw
o
no
i
s
e
fact
ors
t
o
g
e
t
t
he
f
o
u
r
re
adi
ngs
o
f
thre
sho
l
d
v
o
lta
ge
(
V
T
H
)
f
or
e
ve
ry
r
ow
of
e
x
p
erim
en
t.
F
i
gure
1.
A
dopi
n
g
pr
o
fi
l
e
of
the N
M
O
S
18
nm
g
ate
l
e
ng
th
Tab
l
e
1.
C
on
tr
ol F
ac
t
o
r
s
a
n
d
the
i
r
Ran
ges
S
y
m
bol
C
ontro
l
Fac
t
or
U
nit
Le
vel
1
Le
vel
2
Le
ve
l
3
A
Adjust
m
e
nt
V
TH
I
m
p
l
a
nt
a
tion
a
t
o
m
/
c
m
3
2.
00x1
0
10
[A1]
10.
00x
10
10
[A2]
18.
0x10
10
[A
3
]
B
C
o
m
p
e
n
s
a
tion I
m
pla
n
ta
tion
a
t
o
m
/
c
m
3
4.
50x1
0
12
[B
1]
6.
00x1
0
12
[B
2]
8.
50x10
12
[B
3
]
C
C
o
m
p
e
n
s
a
tion
E
n
ergy
I
m
pla
n
t
a
tion
Ke
V
30
[C
1]
40
[C
2]
50
[C
3
]
D
Sourc
e
-
D
r
a
i
n
I
m
pla
n
ta
tion
a
t
o
m
/
c
m
3
4.
00x1
0
12
[D1]
12.
00x
10
12
[D2]
20.
00x10
12
[D
3
]
E
Ha
lo I
m
p
la
nt
a
tion
a
t
o
m
/
c
m
3
15.
00x
10
12
[E
1]
15.
60x
10
12
[E
2
]
16.
20x10
12
[E3]
Table
2.
N
oi
se
F
a
c
tor
and i
t
s Ra
nges
S
y
m
bol
N
oi
se
f
ac
tor
uni
t
L
e
vel
1
Le
ve
l
2
X
P
S
G
T
e
mp
er
atu
r
e
°C
845
[X1]
850
[X
2
]
Y
BPS
G
T
e
m
p
e
r
a
t
u
r
e
°
C
850
[Y1]
855
[Y
2
]
3.
RESULT
S
A
N
D
ANALY
S
IS
The
re
su
l
t
s
of
V
TH
w
ere
analyz
e
d
a
nd
proc
e
s
se
d
us
ing
t
h
e
Taguc
h
i
L27
o
r
t
h
o
gon
a
l
a
rra
y
m
et
ho
d
w
ith
t
w
o
c
om
b
i
na
t
i
o
n
s
of
m
ai
n
fac
t
ors
to
g
e
t
t
he
o
pt
ima
l
d
e
s
ign
.
T
h
e
n
,
t
h
e
op
tim
ized
r
es
ults
w
er
e
si
m
u
late
d
ag
ai
n
u
s
i
n
g
ANOVA
a
n
a
l
y
si
s
and
t
h
e
l
a
st
c
o
n
fi
rmat
io
n
st
ag
e
fr
o
m
T
a
g
uch
i
m
eth
o
d
i
n
orde
r
to
v
er
i
f
y
t
h
e
pred
ic
t
e
d
o
p
t
i
m
a
l
a
nd
fin
a
l
l
y
t
o
g
e
t
t
he
a
ccur
a
te
r
e
s
u
lt.
B
e
l
ow
a
r
e
t
h
e
p
r
o
c
e
s
s
o
f
o
p
t
i
m
i
z
a
t
i
o
n
p
r
o
c
e
s
s
para
me
ters
u
si
ng Ta
guc
h
i
L2
7
or
t
ho
g
ona
l
arr
a
y.
B
y
u
s
i
ng
t
h
e
s
p
eci
fied
T
a
g
uc
hi’s
L
27
ort
h
o
g
o
n
a
l
a
r
r
ay
t
a
b
le
,
th
ere
w
e
re
t
w
e
nty-se
ven
e
xpe
r
i
me
nts
w
e
r
e
p
erfor
m
e
d
w
i
t
h
t
h
e
c
om
bi
na
tio
n des
i
g
n
p
a
r
am
eter
s
i
n
T
a
b
l
e
1
a
n
d
Tab
l
e 2
re
spec
t
i
ve
l
y
.
F
our
s
pe
c
i
m
e
ns
w
e
r
e
s
imulate
d
f
or
e
a
c
h
of
t
h
e
p
a
r
am
eter
c
om
bi
na
tio
ns
t
o
pro
duc
e
t
h
e
c
o
mplete
d
resp
o
n
se
f
or
V
TH
a
nd
t
h
e
data
i
s
l
i
s
t
e
d
i
n
Ta
ble
3.
T
h
e
n
e
x
t
ste
p
w
a
s
t
o
determ
i
n
e
t
h
e
s
ig
n
i
fica
nt
c
o
n
t
r
o
l
fac
t
or
s
tha
t
g
ive
s
m
or
e
e
f
f
e
c
t
iv
en
ess
to
t
he
d
evi
ce
c
h
a
r
ac
t
e
ri
sti
c
s.
T
h
e
re
fo
re
,
t
h
e
b
e
s
t
sol
u
tio
n
i
s
u
si
ng
th
e
S
i
gn
al
-t
o
-
N
o
i
s
e
ra
t
i
o
,
(SNR
)
t
o
f
in
d
ou
t
the
o
p
t
im
a
l
p
roce
ss
p
a
r
am
ete
r
s
and
ana
l
yz
e
th
e
e
xpe
r
i
me
nt
a
l
d
a
t
a.
H
e
n
ce
,
the
larg
e
r
S
NR
corr
espo
n
d
s
t
o
p
re
sent
t
he
b
e
t
t
e
r
per
f
orm
a
nc
e
cha
r
ac
t
e
ris
t
i
c
[
9
].
A
s
a
resul
t
,
the
op
t
i
m
a
l
le
ve
l
of
t
he
p
rocess
p
a
r
a
m
e
t
e
r
i
s
t
h
e
l
e
v
e
l
w
i
t
h
t
h
e
h
i
g
h
e
s
t
S
N
R
[
1
0
-
1
1
]
.
V
T
H
v
a
l
u
e
s
i
n
Tab
l
e
3
,
t
h
e
d
a
t
a
of
m
e
a
n
(
μ),
v
a
ri
an
ce
a
nd
Si
g
n
al-
t
o-No
ise
(
S
NR)
Nom
i
na
l-t
h
e-
B
e
tter
(NTB),
c
a
n
b
e
c
a
l
cu
l
a
t
e
d
by
u
si
ng
t
h
e
f
ormu
l
a
s
bel
o
w
[1
2]:
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN: 2502-
4752
I
n
do
n
e
si
an
J
E
l
e
c
E
n
g
&
C
o
m
p
S
ci
, V
o
l
.
1
4
,
No. 1, April 2019 :
295 –
3
02
29
8
SNR (NTB),
NT
B
=
10
Log
10
2
2
(
1
)
W
h
ere:
M
ea
n
,
μ
=
n
n
i
........
(
2
)
Var
i
a
n
ce,
1
1
2
n
n
i
i
(
3
)
B
a
s
e
d
o
n
t
h
e
(
1
)
,
(
2
)
a
n
d
(
3
)
,
n
i
s
t
h
e
n
u
m
b
e
r
o
f
t
e
s
t
s
,
Y
i
s
t
he
e
x
p
erim
enta
l
va
l
u
e
of
t
he
V
TH
.
A
s
s
how
n
in
(
1)
a
nd
(2)
ar
e
the
form
ula
s
t
o
cal
cu
la
te
m
e
a
n
va
lu
es
a
n
d
v
aria
n
c
e
v
a
l
u
e
s
r
esp
ect
iv
el
y
.
B
y
a
p
p
l
y
i
n
g
t
h
e
b
o
t
h
f
o
r
m
u
l
a
s
,
t
h
e
S
N
R
(
N
T
B
)
,
f
o
r
t
h
e
N
M
O
S
d
e
vice
w
a
s
c
alcu
late
d
and
t
h
e
resu
l
t
s
wer
e
liste
d
in
T
ab
le
3
.
In
t
his
w
o
rk,
the
thr
e
sh
old
v
o
lta
ge
o
f
t
h
e
1
8
nm
d
e
v
ic
e
be
lo
ng
s
t
o
t
h
e
N
om
i
n
a
l
-t
h
e
-Bet
ter
qua
l
ity
c
har
act
e
r
ist
i
cs.
Tabl
e 3
.
1
8
n
m
NM
O
S
S
t
a
t
i
s
ti
c
a
l
R
e
su
lt
-Tagu
c
hi
L27
Ort
ho
gon
al
A
rray
E
xp.
No
T
hre
s
hol
d vol
ta
ge
M
ean
V
ar
i
a
n
c
e
S
N
R
(
N
o
m
i
n
al
-
the
Be
tte
r
),
dB
X
1
Y
1
X
1
Y
2
X
2
Y
1
X
2
Y
2
1
0.
2595
53
0
.
246368
0
.
2546
36
0
.
245
6
8
5
0.
2515
61
4
.
494E-
5
31.
49
2
0.
2578
64
0
.
245786
0
.
2578
64
0
.
245
7
8
6
0.
2518
25
4
.
863E-
5
31.
15
3
0.
2778
43
0
.
267783
0
.
2779
13
0
.
267
7
9
1
0.
2728
325
3
.
394E-
5
33.
41
4
0.
2632
42
0
.
256632
0
.
2632
42
0
.
256
3
2
4
0.
2598
60
1
.
511E-
5
36.
46
5
0.
2632
68
0
.
256326
0
.
2681
62
0
.
256
8
1
5
0.
2611
428
3
.
191E-
5
33.
30
6
0.
2324
32
0
.
213123
0
.
2324
32
0
.
213
1
2
3
0.
2227
775
1
.
243E-
4
26.
01
7
0.
3263
26
0
.
312531
0
.
3263
26
0
.
312
5
3
1
0.
3194
285
6
.
343E-
5
32.
06
8
0.
3264
37
0
.
312537
0
.
3264
37
0
.
312
5
3
7
0.
3194
87
6
.
441E-
5
32.
00
9
0.
2653
48
0
.
253485
0
.
2653
49
0
.
253
4
9
2
0.
2594
185
4
.
689E-
5
31.
57
10
0
.
2584
41
0
.
247844
0
.
2538
47
0
.
235
4
7
8
0.
2489
025
9
.
892E-
5
27.
97
11
0
.
2483
27
0
.
232732
0
.
2483
27
0
.
232
7
3
2
0.
2405
295
8
.
107E-
5
28.
53
12
0
.
2437
49
0
.
237493
0
.
2437
49
0
.
237
4
9
4
0.
2406
213
1
.
304E-
5
36.
47
13
0
.
3232
69
0
.
312326
0
.
3232
69
0
.
321
3
2
6
0.
3200
475
2
.
734E-
5
35.
74
14
0
.
2586
83
0
.
245868
0
.
2586
91
0
.
245
8
6
9
0.
2522
778
5
.
477E-
5
30.
65
15
0
.
3802
73
0
.
372926
0
.
3802
73
0
.
372
9
6
7
0.
3766
098
1
.
789E-
5
38.
99
16
0
.
3675
27
0
.
356752
0
.
3675
27
0
.
356
7
5
2
0.
3621
395
3
.
87E-5
35.
30
17
0
.
3740
23
0
.
363402
0
.
3740
23
0
.
363
4
0
2
0.
3687
125
3
.
76E-5
35.
58
18
0
.
3824
98
0
.
378249
0
.
3824
98
0
.
378
2
4
9
0.
3803
735
6
.
018E-
6
43.
81
19
0
.
3263
29
0
.
312563
0
.
3268
32
0
.
312
5
6
3
0.
3195
718
6
.
673E-
5
31.
93
20
0
.
3287
02
0
.
312872
0
.
3287
11
0
.
312
8
7
1
0.
3207
89
8
.
358E-
5
30.
90
21
0
.
2432
53
0
.
232532
0
.
2432
53
0
.
232
5
3
2
0.
2378
925
3
.
831E-
5
31.
69
22
0
.
3283
14
0
.
312831
0
.
3283
14
0
.
312
8
3
1
0.
3205
725
7
.
993E-
5
31.
09
23
0
.
2652
99
0
.
252995
0
.
2652
90
0
.
259
9
5
9
0.
2608
858
3
.
399E-
5
33.
01
24
0
.
2681
07
0
.
256811
0
.
2681
14
0
.
256
8
1
1
0.
2624
608
1
.
28E-4
32.
09
25
0
.
3329
32
0
.
321582
0
.
3321
79
0
.
321
7
4
2
0.
3271
088
3
.
966E-
5
34.
31
26
0
.
2963
22
0
.
286932
0
.
2932
41
0
.
286
9
3
2
0.
2908
568
2
.
245E-
5
35.
83
27
0
.
3273
23
0
.
3123
0
2
0
.
3273
23
0
.
312
3
0
2
0.
3198
125
7
.
521E-
5
31.
34
The
S
N
R
(N
om
i
n
a
l
-
t
he-
B
et
t
e
r),
data
from
Table
3
is
c
om
pu
ted
bas
e
d
o
n
t
he
S
NR
a
na
lysis
to
deter
m
i
n
e
w
h
i
c
h
the
l
e
ve
l
of
t
he
p
roses
para
me
ters
t
h
a
t
i
n
fl
uen
c
e
t
o
th
e
ch
ang
i
ng
of
t
he
c
ha
rac
t
eris
t
i
c
s
o
f
t
h
e
dev
i
ce
.
The c
a
l
c
ula
t
io
n da
ta
is
show
s in Ta
b
le
4.
Table 4.
Resu
lt
of
SNR
(N
TB
), Proses Par
a
m
e
ter
s
Fa
ctor
C
ontrol
Fa
c
t
or
SN
R (
N
T
B
)
,
d
B
Ove
r
a
ll S
N
R (NT
B
)
,
dB
Le
vel
1
Le
vel
2
Le
ve
l
3
A
Ad
ju
s
t
me
n
t
VT
H
I
m
p
l
a
n
t
a
t
io
n
31.
94
34.
78
32.
47
B
C
o
m
p
e
n
s
a
tion
I
m
pla
n
t
a
t
i
on
31.
51
33.
04
34.
64
C
C
o
m
p
e
n
s
a
tion
E
n
ergy
I
m
p
la
nt
a
tion
34.
10
32.
25
32.
84
33.
06
D
Sourc
e
/
Dra
i
n
I
m
pla
n
t
a
tion
33.
66
33.
89
31.
65
E
Halo I
m
p
la
nt
a
t
i
o
n
32.
93
32.
33
33.
93
Evaluation Warning : The document was created with Spire.PDF for Python.
Ind
ones
i
a
n
J
E
lec
En
g & Co
m
p
S
c
i
IS
S
N
: 2502-
47
52
Inf
l
ue
nce o
f
op
ti
m
i
z
a
t
i
on o
f
con
t
r
o
l
fac
t
ors on
t
h
res
h
old vol
t
age
o
f
1
8
n
m
H
f
O
2
/T
iS
i2 NMO
S
(Nora
n
i
Ata
n
)
29
9
Thro
ug
h
thi
s
i
nf
orma
tion,
t
h
e
d
om
ina
t
ing
fa
ctor
c
a
n
b
e
d
e
term
in
ed
f
rom
t
h
e
hi
gh
est
v
a
lu
e
s
S
NR
(NTB),
in
e
ver
y
f
a
c
t
or.
The
h
i
ghe
s
t
S
N
R
(
N
T
B)
m
ea
ns
t
he
b
et
te
r
qua
l
i
t
y
c
har
acter
i
s
t
i
c
of
t
h
r
e
s
hold
v
o
l
t
a
g
e
,
V
T
H
[
1
3
]
.
R
e
f
e
r
t
o
T
abl
e
4
,
A
2
,
B
3
,
C
1
,
D
2
a
nd
E
3
a
s
t
he
d
om
ina
t
or
f
a
c
t
o
r
fo
r
factor
A
,
fa
ct
or
B
,
fa
ct
or
C
,
fact
o
r
D
a
nd
fac
t
or
E
r
e
s
pe
ct
ive
l
y.
T
he
a
ve
rag
e
v
a
l
ue
s
o
f
S
N
R
(
N
T
B
)
d
a
t
a
i
s
3
3
.
0
6
d
B
a
n
d
t
h
e
eva
l
ua
tio
n r
e
su
lt
w
i
t
h
o
u
t
in
tera
cti
o
ns
p
roce
ss
is
A
2 B3 C
1 D
1
E
3.
In
t
hi
s
s
ecti
o
n
f
o
r
an
a
l
y
s
i
s
o
f
AN
OVA
r
e
s
u
lt
w
i
t
h
in
t
e
ra
ct
i
o
n
,
Ta
g
u
c
h
i
L2
7
ort
h
o
gon
a
l
a
r
r
ay
w
a
s
use
d
t
o
op
t
i
m
i
ze
t
he
p
ro
c
e
ss
pa
ram
e
te
rs
v
a
r
iat
i
on
in
18
N
M
O
S
d
e
vice
w
i
t
h
c
o
n
si
der
i
n
g
the
i
n
te
rac
tio
n
effect
betw
ee
n
fac
t
or
A
,
fa
ctor
B
,
fac
t
or
C
,
fac
t
or
D
w
i
t
h
fa
ct
or
E
.
T
h
e
a
i
m
i
s
t
o
c
a
l
c
u
l
a
t
e
t
h
e
a
v
e
r
a
g
e
v
a
l
u
e
o
f
t
h
e
in
t
e
rac
t
i
on
of
f
ac
tor
E
tha
t
i
s
H
a
lo
I
m
p
la
n
t
at
i
on
(E
1,
E
2,
E
3)
w
i
t
h
o
t
h
e
r
f
a
c
t
o
r
s
s
u
c
h
a
s
A
d
j
u
s
t
m
e
n
t
V
T
H
Im
pl
a
n
tat
i
on
(
A
1,
A
2,
A
3),
C
o
mpe
n
sa
t
i
o
n
Im
planta
t
i
o
n
(B1,
B
2,
B
3
)
,
Co
mp
e
n
sati
on
En
e
r
gy
I
mp
l
a
n
t
a
t
i
o
n
(C1,
C
2,
C
3)
,
a
nd
S
o
urc
e
/D
r
a
i
n
I
m
p
l
a
n
t
a
t
i
on
(
D
1,
D
2,
D
3)
.
Base
d
o
n
t
h
e
i
n
tera
ct
io
n
form
ulae,
a
ll
t
h
e
da
ta
w
e
r
e
t
r
a
nsfer
t
o
t
he
g
ra
phs
a
n
d
s
tud
y
t
h
e
i
n
t
era
c
ti
ons
b
etw
e
en
pr
ocess
pa
ra
me
t
e
rs
t
o
S
N
R
(N
TB)
a
s
s
h
o
w
n
i
n
F
i
gure
2
u
n
t
il
F
i
gure
5
.
T
he
p
rese
nce
of
i
n
t
e
r
a
c
tion
t
h
rou
g
h
g
r
ap
hs
c
a
n
b
e
obser
v
e
d
by
the
e
x
ist
e
nce
of
line
s
tha
t
i
nt
ersec
t
and
inc
o
n
s
is
te
n
c
y
am
ong t
h
e
fac
t
or
s i
n
v
o
lv
e
d
.
F
i
gure
2.
T
he
i
nter
ac
ti
o
n
be
t
w
e
en
H
alo Impla
n
tat
i
o
n
and
A
d
j
u
stm
ent V
T
H
Im
plan
ta
ti
o
n
F
i
gure
2
s
how
s
t
h
e
grap
h
i
n
t
e
r
acti
o
n
be
tw
e
e
n
A
d
j
u
stm
e
nt
V
TH
I
mp
lan
t
ati
o
n
(
f
ac
t
o
r
A
)
a
nd
H
a
lo
Im
pl
a
n
tat
i
on
(f
actor
E
)
.
T
he
g
r
a
ph
show
s
3
l
i
ne
s,
w
hich
a
re
A
1,
A
2
and
A
3
a
re
i
nte
r
sec
t
.
S
o
d
eter
mine
d
t
h
e
hi
ghe
s
t
S
N
R
(N
T
B)
leve
l
on
li
nes t
h
a
t
in
t
er
se
ct w
it
h fact
or
E
3
is A
2
(39.7
6
d
B).
Re
fe
r
to
F
i
g
ur
e
3
a
l
s
o
s
h
o
w
s
t
he
i
n
t
era
c
t
i
on
be
t
w
ee
n
C
o
m
p
en
sa
ti
on
I
m
pl
a
n
t
a
tio
n
(fa
ctor
B
)
w
ith
Halo
I
mplantation
(factor
E
).
F
ro
m
the
graph
for
S
N
R
(NTB),
t
he
re
h
ave
inte
rac
t
i
o
n
be
t
w
ee
n
li
nes
B
1
,
B2
and
B3.
F
r
om
t
he gr
a
p
h
,
t
h
e
h
i
g
h
es
t S
N
R
(NTB)
l
e
ve
l t
h
at i
nter
s
e
c
t
i
on
w
ith
E
3 pa
ram
e
ter
is B3 (35.
5
7
d
B).
F
i
gure
3.
T
he inter
ac
ti
o
n
bet
w
e
en H
alo Impla
n
tat
i
o
n and
Com
p
ens
a
t
io
n Im
plan
tat
i
on
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN: 2502-
4752
I
n
do
n
e
si
an
J
E
l
e
c
E
n
g
&
C
o
m
p
S
ci
, V
o
l
.
1
4
,
No. 1, April 2019 :
295 –
3
02
30
0
F
i
gure
4
show
s
the
in
tera
ct
ion
r
e
su
lt
be
tw
e
e
n
C
o
mpe
n
sa
t
i
o
n
E
ner
g
y
I
mpla
nta
tio
n
(fa
ctor
C
)
an
d
H
a
l
o
I
m
p
l
a
n
t
a
t
i
o
n
(
f
a
c
t
o
r
E
)
.
T
h
e
g
r
a
p
h
s
h
o
w
s
3
l
i
n
e
s
w
h
i
c
h
a
r
e
C
1
,
C
2
a
n
d
C
3
a
r
e
c
r
o
s
s
e
d
t
o
e
a
c
h
o
t
h
e
r
a
t
E1
l
e
v
el.
Be
tw
ee
n
le
ve
l
E
2
a
nd
leve
l
E3,
t
h
e
li
ne
C
2
is
i
n
t
erse
ct
w
ith
l
i
n
e
C3.
Res
u
l
t
s
how
s
t
h
e
h
i
ghe
r
value
of
S
N
R
(
N
T
B)
o
f
Compe
n
sa
t
i
o
n
E
ne
rg
y
Im
pla
n
ta
t
i
o
n
is
i
n
t
e
r
ac
ti
on
w
it
h
Ha
l
o
i
mpl
a
nt
at
io
n
i
s
C
1
w
ith
36.4
4
d
B.
F
i
gur
e 4.
The
intera
c
tio
n
bet
w
ee
n hal
o
im
p
lan
t
a
t
i
o
n
an
d c
o
mpe
n
s
a
t
i
o
n
en
e
r
gy
i
mp
l
a
nt
at
ion
F
i
gure
5
s
h
ow
s
t
h
e
S
N
R
(N
T
B
)
i
n
t
e
rac
tio
n
betw
e
e
n
S
o
u
rc
e/D
r
a
i
n
I
mp
l
a
nt
a
tio
n
(f
a
c
t
o
r
D)
a
n
d
Halo
Im
pl
a
n
tat
i
on
(f
actor
E
)
.
T
he
g
ra
ph
d
i
s
p
lays
t
he
2
l
i
n
es
a
re
c
ro
ssi
n
g
t
o
eac
h
o
t
h
e
r
w
h
i
c
h
are
betw
ee
n
li
ne
D
1
and
li
ne D
2
a
t
l
eve
l
E
1. T
he
h
ig
hes
t
va
l
ue
o
f
S
N
R (
N
TB)
fo
r
S
o
u
r
ce/D
r
ain
Im
plan
ta
ti
o
n
i
s D
2
w
it
h
3
4
.
5
6 dB.
Ba
se
d
on
i
n
for
m
a
t
io
n
a
n
a
l
y
s
i
s
a
b
ove,
the
o
p
timum
c
om
bin
a
t
i
o
n
f
o
r
V
T
H
val
u
e
of
1
8
nm
N
M
O
S
dev
i
ce
t
hat
take
s
i
n
t
o
a
cc
oun
t
the
effec
t
o
f
i
n
ter
act
i
on is
A
2
B3
C
1
D
2
E3.
F
i
gur
e 5.
The
intera
c
tio
n
bet
w
ee
n H
a
l
o
I
mpl
a
n
t
a
t
io
n
and
S
ource
/
D
r
ain I
m
plan
ta
t
i
o
n
3.1.
C
on
fir
m
ati
o
n
Te
st
T
h
e
e
n
d
o
f
t
h
e
s
i
m
u
l
a
t
i
o
n
w
i
t
h
t
h
e
n
o
i
s
e
f
a
c
t
o
r
o
f
t
h
e
f
i
n
a
l
t
e
s
t
v
er
if
i
c
at
io
n
sh
o
u
l
d
b
e
ca
r
r
ied
o
u
t
t
o
verify
t
he
acc
u
r
ac
y
of
t
he
f
or
e
cast
Ta
guc
h
i
m
etho
d.
T
he
c
om
bi
na
tio
n
o
f
o
p
t
im
um
c
o
n
trol
f
a
c
t
o
rs
A
2
B
3
C
1
D1 E3
are list
e
d in Ta
b
l
e
5.
Table 5.
C
om
b
i
na
t
i
o
n
o
f O
p
ti
m
u
m
L27 A
n
al
ys
is for
18 nm
N
MO
S
Sym
bol
C
ontrol
fa
c
t
or
U
nit
Le
ve
l
Be
st
V
a
l
u
e
A
A
d
just
m
e
nt
V
TH
I
m
p
l
a
nt
at
ion
a
t
o
m
/
c
m
3
2
10.
00
x
10
10
B
C
o
m
p
e
n
s
a
t
i
on
I
m
pl
a
n
t
a
tion
a
t
o
m
/
c
m
3
3
8
.
50
x
10
12
C
C
o
m
p
e
n
sa
tion
E
n
e
r
gy
I
m
p
l
a
nta
tion
ke
V
1
30
D
Sourc
e
-
D
rain
I
m
p
la
nta
t
i
o
n
a
t
o
m
/
c
m
3
1
4
.
00
x
10
12
E
Hal
o
I
m
p
la
nt
a
tion
a
t
o
m
/
c
m
3
3
16.
20
x
10
12
Evaluation Warning : The document was created with Spire.PDF for Python.
Ind
ones
i
a
n
J
E
lec
En
g & Co
m
p
S
c
i
IS
S
N
: 2502-
47
52
Inf
l
ue
nce o
f
op
ti
m
i
z
a
t
i
on o
f
con
t
r
o
l
fac
t
ors on
t
h
res
h
old vol
t
age
o
f
1
8
n
m
H
f
O
2
/T
iS
i2 NMO
S
(Nora
n
i
Ata
n
)
30
1
Tab
l
e
6
sh
ow
s
t
h
e
l
i
s
t
s
of
t
he
p
er
cen
ta
ge
d
i
f
fer
e
nce
betw
ee
n
t
h
e
res
u
l
t
s
o
f
t
he
c
om
b
i
na
t
i
on
w
i
t
h
out
t
h
e
in
te
rac
t
io
n
a
n
d
c
o
mbin
a
tio
n
w
i
t
h
i
nt
erac
t
i
on
d
u
r
ing
dev
i
ce
o
p
timiza
tio
n
pr
ocess
is
c
arrie
d
o
u
t
,
w
h
ic
h
i
t
refers
t
o
the
no
m
i
nal
va
l
u
e
projec
t
e
d
by
I
TR
S
20
12.
T
he
f
ina
l
d
eci
si
o
n
anal
ysi
s
m
et
hod
s
in
d
e
s
i
g
n
i
ng
m
o
d
e
l
L2
7
Ta
g
u
c
h
i
18
n
m
N
M
O
S
d
e
v
ice
s
h
ow
s
t
h
a
t
t
he
t
w
o
e
xper
i
m
e
nts
in
w
h
i
c
h
t
h
e
i
nt
era
c
t
i
o
n
o
r
w
it
ho
ut
in
t
e
rac
t
i
on
ta
k
e
e
ffec
t
of
V
T
H
v
a
l
ue
w
it
hi
n
the
ra
nge
o
f
t
h
e
n
o
mi
na
l
va
l
u
e
(0.
3
0
2
1
2.7%
v
o
l
t
s
).
H
ow
eve
r
,
the
pe
rce
n
t
a
ge
o
f
t
h
e
e
x
peri
m
e
nt
t
ha
t
ta
ke
s
in
to
a
c
c
o
u
n
t
t
he
e
f
fe
c
t
o
f
th
e
in
tera
ct
i
o
n
is
b
et
t
e
r
tha
n
n
o
m
inal
val
u
es
w
i
t
h
o
u
t
ta
ki
ng
in
tera
c
tio
n
w
i
t
h
1
.
1
6
%
.
A
n
a
l
y
s
is
s
how
s
t
h
at
t
h
e
k
ey
f
a
c
to
r
o
r
f
ac
t
o
r
E
i
n
t
h
i
s
Ha
lo
Im
pl
a
n
tat
i
on
d
o
sa
ge
f
ac
tor
had
inte
rac
t
i
on w
i
t
h
o
ther
c
ontr
o
l
f
ac
tor
s
.
Ta
ble
6.
A
naly
sis
of
P
er
centa
ge
Thre
s
h
o
l
d
V
o
lta
ge,
V
T
H
18
nm
N
M
O
S
B
e
f
ore
Inte
r
a
c
tion
Af
t
e
r I
n
te
r
a
ct
ion
I
T
R
S
v
a
l
u
e
No
is
e F
a
c
t
o
r
(
0
C)
X
2,
Y2
X
2,
Y
2
0.302
volts
C
o
m
b
i
n
a
tion
of
o
p
t
i
m
u
m
f
ac
tors
A
2
B
3
C
1
D
2
E
3
A
2
B
3 C
1
D
1 E
3
T
h
re
shold
volta
ge,
V
T
H
0.
3152
v
o
lts
0
.
3055
v
o
lts
P
e
r
c
e
n
t
a
g
e
f
r
o
m
nom
in
a
l
v
a
l
ue
4
.
37%
1
.
16%
4.
CONCL
U
S
ION
Thi
s
r
e
s
ea
rch
p
r
ov
es
t
ha
t
th
e
t
h
re
shol
d
vol
t
a
g
e
i
s
eff
ect
ed
b
y
t
h
e
co
nt
ro
l
f
acto
r
s,
V
TH
o
f
18
n
m
N
M
O
S
t
ra
nsi
s
t
o
r
w
a
s
succ
ess
f
u
l
f
o
u
nd
t
o
get
h
er
w
ith
t
he
o
ptim
al
fa
c
t
ors
le
vel
pre
d
ic
te
d
by
T
a
guc
hi
m
eth
o
d
.
H
a
lo
I
m
p
la
nta
t
io
n
fac
t
or
h
as
b
e
e
n
ide
n
tif
i
e
d
as
k
e
y
f
ac
t
o
r
had
in
tera
ct
i
o
n
w
i
th
o
t
h
er
c
o
n
tr
ol
f
ac
t
o
r
s
s
uc
h
as
Co
mp
e
n
sati
on
Imp
l
a
n
t
a
t
i
on
,
Co
mp
en
sa
tion
E
n
e
rgy
Imp
l
a
n
t
a
ti
on
,
S
o
u
r
ce
/D
rain
I
mp
la
nta
tio
n.
T
he
re
fore
,
it
h
as
b
e
e
n
pro
v
e
n
t
hat
1
8
n
m
tra
n
si
s
t
or
c
an
b
e
a
c
h
ieve
d
pro
duc
e
d
t
h
e
V
T
H
v
a
l
u
e
i
s
w
e
l
l
w
i
t
h
i
n
t
h
e
I
T
R
S
20
1
2
re
q
u
i
r
e
ment
s of
0
.3
02 ±
12.
7% v
ol
ts.
ACKNOW
LEDG
E
MEN
T
S
The
a
u
t
h
ors
w
o
u
l
d
li
ke
t
o
e
xpress
tha
n
k
f
u
l
t
o
I
n
st
i
t
u
t
e
o
f
M
icr
o
e
ng
in
ee
ri
ng
a
nd
N
a
n
o
e
l
e
ct
roni
c
s
(IMEN
)
U
n
ive
r
sit
i
K
e
b
a
ngs
a
a
n Ma
la
ys
i
a
(
U
K
M
), Mi
n
is
try o
f
H
i
gher
E
d
u
ca
ti
on (
M
O
E
), and Ce
ntre
of
Micr
o
and
N
a
n
o
En
g
i
n
ee
ri
ng (Ce
M
N
E
) U
N
ITEN
for
fi
n
a
n
c
i
a
l
, fac
i
l
i
tie
s
a
nd
mora
l su
pp
ort t
h
rou
g
h
o
u
t
t
h
e p
r
oj
e
c
t
.
REFE
RENCES
[1]
H.S.
P W
o
ng
,
“
Beyo
nd
th
e
con
ven
tio
nal tran
si
stor,”
IBM J. RE
S
.
&
D
E
V
. V
o
l. 46 No
. 2
/
3 M
a
rch/May
, 2
00
2.
[2]
As
ho
k
K.
G
oe
l
et
c.
a
l.
,
“
O
p
t
im
i
zati
on
of
D
evi
ce
Perf
o
r
m
a
nce
Us
i
ng
S
e
micon
d
u
c
to
r
T
C
AD
T
oo
ls
,”
SILVA
C
O
I
n
te
r
n
at
io
na
l
P
r
o
d
u
c
t
D
e
s
c
r
i
pt
io
n,
S
I
L
V
A
C
O I
n
te
r
n
at
io
na
l
h
t
t
p
:
/
/
w
w
w
.
s
i
lv
a
c
o.
c
o
m/
pr
o
d
u
c
ts
/d
e
s
c
r
i
p
t
i
o
n
s
,
19
95
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[3]
At
an,
N.B.
,
Bin
Ahmad,
I
.
,
B
in
Y
eop
Majlis,
B,
“
E
ffect
s
of
h
ig
h-K
d
i
e
l
ectrics
w
it
h
m
e
t
a
l
g
a
t
e
f
o
r
e
lectri
cal
chara
c
teri
stics
o
f
1
8nm
N
M
O
S
d
e
vice,
”
Semi
conduct
o
r E
l
ectroni
cs
(
I
CSE
)
, 20
14 IEEE Interna
t
ional Con
f
erence
(I
C
S
E
)
2
014, Pa
g
e(s): 56
– 59.
[4]
No
rani
B
inti
A
tan,
B
urhan
u
d
d
i
n
B
i
n
Y
eop
M
a
jlis,
Ib
ra
h
i
m
Bin
Ah
m
ad
,
“
A
nal
y
si
s
th
e
Eff
ect
o
f
Co
nt
rol
F
acto
r
s
Op
ti
mizati
o
n
on
t
he T
hresh
o
l
d
Vol
tag
e
o
f
1
8
nm
P
M
OS
Usi
ng
L
27 T
agu
c
hi
M
ethod
,”
In
t
e
rn
ational
Confer
ence o
n
El
ectri
cal,
Electron
i
c,
Comm
unica
ti
on
and Co
n
t
r
o
l En
g
i
neer
ing
(
I
CEE
C
C 20
17)
, p.
53.
[5]
El
gomati,
e
t
al.,
"
Ap
pl
icati
o
n
o
f
T
agu
c
hi
M
e
t
hod
in
t
he
O
p
t
im
i
z
at
ion
o
f
P
ro
ces
s
V
a
riation
for
32nm
C
M
O
S
Tech
nol
og
y,"
Au
stra
l
i
a
n
J
o
urna
l o
f
Bas
i
c
a
n
d
Ap
plie
d
Sc
ie
n
c
e
s
, 5(7), pp. 346
-355, 2011.
[6]
Husam
Ah
mad
E
l
go
mati,
“
Char
acter
i
z
ing
Coba
lt
Silic
i
d
e
and
G
a
te
Di
electri
c
T
h
i
c
kn
ess
in
6
5
n
m
NM
OS
D
ev
ice,”
M
a
s
t
e
r
of S
c
ien
c
e
T
h
esi
s
, Un
iver
s
i
t
i
Keb
a
n
g
sa
an
M
a
la
ysi
a
, 2007
.
[7]
Belal
Ahm
e
d
Ham
e
da,
“
O
ptim
izatio
n
o
f
P
MO
S
65
nm
U
sin
g
T
aguch
i
M
e
t
hod
,”
Mas
t
e
r
of Sc
ie
n
c
e The
s
is,
Universiti Keba
ngs
aan
Malays
ia,
200
7.
[8]
ITRS
. 2012
, “IT
RS Report
. ww
w
.ITR
S2012.ne
t
”
.
[9]
Do
ug
las
C. M
ontg
o
m
e
ry, “Desi
g
n
a
nd
An
a
ly
s
i
s of
Ex
p
erimen
ts
”,
Jo
hn Wi
ley
&
S
o
n
s
In
c.
, 6th
Ed
ition
, 2
00
5.
[10]
S
.
N
assif,
A
.
Stro
jwas
,
and
S.
D
irecto
r
,
“F
abri
cs
i
i:
A
s
ta
t
i
st
ically
b
as
ed
I
C
f
a
bricati
on
p
r
oces
s
s
i
m
u
l
a
to
r,”
IE
E
E
Tran
sac
t
io
ns
on
Compu
t
e
r
-
A
id
e
d
De
sign
o
f
In
te
gr
ate
d
C
i
rc
ui
ts
an
d S
y
ste
m
s
, vo
l
. 3, pp.
40–46,
198
4
.
[11]
S
r
iv
atsav
a
,
T.
K
achru
,
and
D
.
S
yl
ester,
“
L
o
w
-
p
o
wer-des
ig
n
sp
ace
e
xp
lo
ra
tio
n
c
o
n
side
ring
p
roc
e
s
s
va
ria
t
io
n
u
s
in
g
rob
u
s
t
o
p
t
imizat
io
n,”
IE
EE
Tra
n
sact
ion
s
on Co
mput
er-Aid
e
d
D
e
si
g
n
of Int
e
g
r
ated
Cir
c
uits an
d
S
y
st
ems
,
v
o
l
. 2
6(
1)
,
pp
. 6
7–7
9, 20
07.
[12]
Do
ug
las
C., et al.,
“
D
esign an
d Analy
s
is of Ex
perim
e
nts,”
Jo
hn
Wiley
&
S
ons
In
c.
, 6
t
h
Ed
itio
n 2
005.
[13]
S
Ug
ur
E
sm
e,
“
Appli
cati
on
of
T
agu
c
hi
o
f
T
a
guch
i
M
et
ho
d
fo
r
th
e
O
p
timiza
t
ion
of
r
esi
s
tance
Spot
W
elding
P
r
oces
s,”
The
Ara
b
ia
n
J
o
urna
l fo
r
sc
ie
nc
e
a
n
d
En
gine
e
r
ing
,
Vol. 34,
No.2B,
20
09
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SSN: 2502-
4752
I
n
do
n
e
si
an
J
E
l
e
c
E
n
g
&
C
o
m
p
S
ci
, V
o
l
.
1
4
,
No. 1, April 2019 :
295 –
3
02
30
2
B
I
OGRAPHIES
O
F AUTHO
RS
N
o
rani
B
t
e
A
t
a
n
receiv
e
d
h
e
r
B.
E
n
g
.
(Ho
n
s)
i
n
Elect
ri
cal
E
n
g
in
ee
ring
from
U
n
i
v
ersiti
T
eknolog
i
M
a
ra
(
UIT
M
)
and
M
S
c
in
E
lec
t
rical
a
nd
E
l
ectron
i
c
E
n
g
i
neeri
n
g
f
r
o
m
U
n
i
ve
rsit
i
Te
na
ga
N
a
sio
n
al
(
U
N
ITE
N
)
in
1
995
and
2
0
0
8
r
espect
iv
ely
.
S
h
e
i
s
current
l
y
pu
rsu
i
ng
t
he
P
h
.
D
d
e
g
r
e
e
i
n
el
ectrical
e
n
g
i
n
eerin
g
at
I
ns
titu
t
e
M
i
croen
g
i
n
eeri
ng
and
nan
o
e
l
ect
ro
ni
cs
(IM
EN),
U
n
i
versiti
K
e
bang
saan
M
al
ay
sia (UKM
). She
h
as 7
y
ears
o
f
w
o
r
ki
ng exp
e
rienc
e
in
t
he
i
nd
ustrie
s
a
s
a
R
&
D
d
e
sig
n
s
e
n
io
r
e
n
gi
neer
a
t
M
a
tsus
hita
T
elevision
and
Netw
ork
(M
)
S
d
n
.
B
h
d
.
S
h
a
h
A
l
a
m
,
S
e
l
a
n
g
o
r
,
M
a
lay
s
ia.
S
h
e
has
i
nvolv
e
s
i
n
e
lect
ric
a
l
d
e
si
gn
an
d
r
a
d
i
o
f
requ
ency
t
un
in
g
f
o
r
col
o
u
r
te
le
v
i
sio
n
p
ro
du
c
t
io
n
for
in
te
rn
a
t
io
na
l
g
l
o
b
a
l
e
xp
orts.
Re
sp
on
s
ibl
e
f
or
t
he
q
uality
a
nd
c
ost
red
u
cti
o
n
desi
gn
fo
r
P
a
nas
oni
c
TVs
bran
d
on
v
ario
us
m
o
d
el
s,
a
n
d
t
o
release
them
f
or
m
as
s
pro
d
u
c
t
io
n.
D
e
a
l
in
g
wi
th
v
e
n
do
rs
f
or
c
omp
o
n
e
n
t
s
a
n
d
d
e
v
i
c
e
s
t
e
s
t
,
a
nd
c
onducts
v
erifi
c
a
t
ion
o
n
TV
p
e
r
fo
r
m
a
n
c
e
ba
se
d
on
c
u
s
to
me
r’s
c
om
pla
i
n
t
s
a
n
d
th
e
u
p
-to
da
t
e
techn
o
l
o
g
y
r
equ
i
rem
e
nt
.
H
e
r
resear
ch
i
nt
erests
i
nclu
de
n
ano
dev
i
ce
i
n
teg
r
ati
o
n
and
dev
i
ce
modelling,
A
r
t
if
ic
ial
Intel
l
igence,
P
ow
er
E
l
ectroni
c
and
Pow
e
r
Q
u
ality.
She
is
c
urr
e
n
tl
y
working
at
C
ollege
o
f
E
ngi
neeri
ng,
U
n
i
v
e
rsiti
Tenag
a
N
as
io
nal
(Unite
n
)
,
M
a
l
a
y
a
si
a
as
a
lectu
r
er.
S
h
e
is
c
urrent
ly
d
o
i
ng
P
H
D
degre
e
w
ith
U
n
i
versit
i
Keb
a
ng
saan
M
alay
si
a
(U
KM),
M
al
ay
sia.
H
er
P
H
D
r
esearch
,
wh
ic
h
is
s
up
e
r
vi
se
d
b
y
Pro
f
.
Dr
.
Ibra
h
i
m
Bin
Ah
ma
d
a
n
d
Pr
of
D
a
t
o’
D
r
Burh
a
n
ud
din
Bin
Ye
o
p
Majlis.
She
has
been
actively
i
n
volved
i
n
resear
ch
a
nd
s
hort
co
u
r
ses
p
r
oject
s.
S
h
e
h
as
c
om
p
l
eted
v
a
riou
s
proj
ects
f
u
n
d
ed
b
y
MOS
T
I.
S
he
i
s
curren
tly
a
n
En
g
i
ne
er
reg
i
st
ered
w
ith
t
h
e
Bo
ard
o
f
E
ngi
neers
M
a
lay
s
ia
(
BEM
)
and
a M
ember of the I
nst
i
tute of Eng
i
n
eers
Malays
ia (I
E
M).
Burhanuddin
Yeop
M
ajlis
i
s
a
pr
of
ess
o
r
o
f
m
i
c
ro
el
ectronics
a
nd
now
t
he
D
i
r
e
c
t
o
r
of
I
nstitu
t
e
o
f
M
i
c
r
o
e
ng
in
eeri
n
g
an
d
Nan
o
e
lect
ron
i
cs(IM
EN).
H
e
rec
e
ived
t
he
P
h.
D
d
e
gree
f
r
om
U
ni
versity
o
f
D
u
rham
, UK in 19
8
8
. He
rec
e
i
v
ed
th
e
M
.S
c. d
egree f
r
o
m
Univers
it
y of W
al
es, UK in
19
80, and
B.S
c
.(H
ons)
f
r
om
UKM
i
n
19
79. H
e
is
senio
r m
e
m
b
er o
f th
e Instit
u
t
i
o
n
o
f
E
lect
ric
a
l,
E
l
ectro
n
i
cs
E
ngi
neers
(S
MI
EEE)
a
nd
f
el
l
o
w
of
M
a
l
aysian
S
olid
S
tat
e
S
ci
enc
e
a
n
d
Te
c
h
n
o
lo
gy
S
oc
e
ity
(F
M
A
SS
).
H
e
receiv
e
d
J
o
h
a
n
M
a
ng
ku
N
egar
a
(J
.M
.N.
)
f
ro
m
Y
a
ng
di-
Pe
rtu
a
n
Ag
on
g
in
2
00
8.
Receiv
e
d D
a
rjah
Dat
o' P
adu
k
a Mah
kot
a P
e
rak (D
.P
.M.P.) f
rom
th
e
Su
l
t
an o
f
Perak
.
Ib
rahim
Ah
mad
receiv
e
d
th
e
B.S
c
.
d
e
gree
in
P
hy
si
cs
i
n
19
8
0
f
ro
m
U
ni
versiti
K
e
bangsaan
M
a
lay
s
i
a
(
UKM).
H
e
received
t
h
e
M
.
S
c
.
deg
r
ee
in
N
ucl
earS
c
ience
and
A
n
al
yti
cal
P
hy
s
i
c
s
fro
m
U
K
M
an
d
Uni
v
ers
i
t
y
o
f
W
a
les
r
espect
iv
ely,
i
n
year
o
f
19
91
a
n
d
1
9
9
2
.
He
r
eceived
t
h
e
Ph.D
.
d
e
gree
i
n
E
l
e
ct
rical
,
Elect
ro
n
i
c
an
d
S
y
s
t
em
E
n
g
ineeri
ng
f
r
o
m
U
n
ivers
i
ti
KebangsaanMalaysi
a
i
n
2
0
0
7
.
He
w
as
a
N
ucl
e
ar
S
cien
ce
Offi
cer
a
t
Nuclear
E
nerg
y
Un
it
(
MIN
T
)
i
n
c
harge
of
R
adi
o
s
c
ope
p
ro
du
ctio
n
f
o
r
med
i
cal
a
n
d
i
nd
us
try
f
r
o
m
198
7
to
1
9
9
2
.
F
ro
m
19
93
t
o
199
6,
h
e
wo
rked
o
n
S
e
m
i
co
nd
ucto
r
T
e
c
h
no
lo
gy
Di
v
isio
n at M
al
a
y
si
an insti
tute
f
o
r
Mi
cro
e
lectro
ni
cs Res
earch C
ent
e
r
&
S
y
s
t
e
m
(
MIM
O
S
)
,
K
u
al
a
Lum
p
ur.
He
j
oined
th
e
D
e
partmen
t
o
f
El
e
ctri
cal,
El
ectronic
and
S
y
ste
m
E
n
g
in
ee
rin
g
,
Univers
i
t
y
K
eban
gs
aan
M
al
aysi
a
(U
KM
)
as
a
l
ectu
r
er
i
n
1
997
t
o
2
0
02,
a
nd
as
A
s
s
o
c
ia
t
e
P
rof
e
s
s
o
r
f
ro
m
2002
to
2
007
.
He
i
nv
ol
ved
in
s
ev
era
l
m
a
nag
e
m
e
n
t
a
nd
tech
ni
c
a
l
p
o
s
i
ti
ons
w
ith
M
INT,
M
IM
OS
,
Em
isis
S
m
a
rtkom
S
d
n
.
Bhd.
K
.Lu
m
pu
r,
B
um
i
Hibiy
a
S
d
n
.
Bhd.
K
.
L
u
m
p
u
r
a
n
d
U
K
M
.
H
e
i
s
c
u
r
r
e
n
t
l
y
a
P
r
o
f
e
s
s
o
r
w
i
t
h
t
h
e
D
e
p
a
r
t
m
e
n
t
o
f
Elect
ronics
a
nd
Commun
i
cat
ion
Engineer
ing,
U
ni
versiti
T
e
na
ga
N
as
ional,
M
alaysia
.
He
p
ub
lishe
d
ov
e
r
1
5
0
res
earch
p
apers
i
n
J
o
u
rnal
s
and
co
nf
erences
.
He
i
s
a
seni
or
m
em
b
e
r
of
t
he
I
nstitut
e
o
f
El
ectr
i
ca
l
an
d
E
l
ectro
ni
cs
E
ng
in
ee
rs
(
S
e
nior
M
IE
EE
);
M
e
m
ber
of
I
n
s
titu
te
o
f
Phy
s
ic
s
Ma
la
y
s
i
a
(
MI
P
M
)
an
d M
e
m
b
er of
M
a
lay
s
i
a
n A
s
s
o
ciat
io
n
of
S
olid
S
tat
e
s
S
c
i
e
nce (M
A
SS
).
K
.
H
.
Ch
ong,
g
radu
ated
w
i
t
h
B.
E
ng
(H
ons
)
i
n
E
lect
ron
i
cs
a
nd
El
ectri
cal,
M.
S
c
a
n
d
P
h
D
in
E
l
ectro
n
i
c
f
r
om
U
ni
versit
y
P
u
tra
Mal
a
ys
ia
i
n
year
2
00
0,
200
2
a
n
d
20
08
.
H
i
s
current
r
es
earch
in
te
r
e
st
s
in
c
l
u
d
e
Ar
t
i
f
ic
i
a
l
I
n
t
e
l
l
ig
e
n
t,
E
v
o
l
u
t
io
n
a
r
y
E
l
e
c
t
r
o
n
ic,
Ind
u
s
t
rial
P
ro
cess
Co
ntrol
and
A
u
tomat
i
c Contr
o
l
Sys
t
em.
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