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15
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Decem
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er
20
25
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p
.
5
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3
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1
9
2
I
SS
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tech
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to
id
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p
ar
ticu
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k
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s
[
1
]
.
E
v
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n
th
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u
g
h
t
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tech
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iq
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es a
r
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Evaluation Warning : The document was created with Spire.PDF for Python.
I
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I
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t J E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
15
,
No
.
6
,
Decem
b
e
r
20
25
:
5
1
8
3
-
5
1
9
2
5184
p
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s
s
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r
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Giv
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ased
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lecu
la
r
d
etec
tio
n
am
o
n
g
th
e
m
an
y
tech
n
o
lo
g
ies
u
s
e
d
in
DNA
an
aly
s
is
i
s
th
e
n
an
o
s
h
ee
t
f
ield
-
ef
f
ec
t
tr
an
s
is
to
r
(
NSFET
)
-
b
ased
b
io
s
en
s
o
r
.
NSFET
-
b
ased
b
io
s
en
s
o
r
s
ar
e
s
o
lid
-
s
tate
in
s
tr
u
m
e
n
ts
th
at
ca
n
id
en
tif
y
p
H
v
ar
iatio
n
s
b
r
o
u
g
h
t o
n
b
y
i
n
ter
ac
tio
n
s
b
etwe
en
DNA
m
o
lecu
les.
T
h
ese
s
en
s
o
r
s
'
s
m
all
s
i
ze
,
h
ig
h
s
en
s
itiv
ity
,
q
u
ick
r
ea
ctio
n
tim
e,
an
d
lab
el
-
f
r
ee
d
etec
tio
n
ca
p
ab
ilit
ies
ar
e
s
o
m
e
o
f
th
ei
r
ad
v
a
n
tag
es
o
v
er
co
n
v
en
ti
o
n
al
d
etec
tio
n
tech
n
iq
u
es.
NSFET
-
b
ased
b
io
s
en
s
o
r
s
ar
e
esp
ec
iall
y
well
-
s
u
ited
f
o
r
p
o
in
t
-
of
-
ca
r
e
test
in
g
,
r
ea
l
-
tim
e
m
o
n
ito
r
in
g
,
an
d
cu
s
to
m
ized
m
ed
icin
e
p
u
r
p
o
s
es b
ec
au
s
e
o
f
th
eir
ch
ar
ac
ter
is
tics
.
I
n
v
esti
g
atin
g
th
e
d
ev
elo
p
m
en
t
o
f
NSFET
-
b
ased
b
io
s
en
s
o
r
s
an
d
its
im
p
licatio
n
s
f
o
r
tech
n
o
lo
g
ically
im
p
r
o
v
e
d
h
ea
lth
ca
r
e
is
th
e
ai
m
o
f
th
is
p
r
o
ject.
B
y
co
m
b
in
in
g
DNA
an
aly
s
is
tech
n
iq
u
es
with
NSFET
-
b
ased
b
io
s
en
s
o
r
s
,
s
p
ec
if
ic
g
en
etic
b
io
m
ar
k
e
r
s
ass
o
ciate
d
with
b
lo
o
d
ca
n
ce
r
s
ca
n
b
e
f
o
u
n
d
.
B
etter
tr
ea
tm
en
t
s
tr
ateg
ies
an
d
b
etter
p
atien
t
o
u
tco
m
es
m
a
y
r
esu
lt
f
r
o
m
th
e
s
u
b
s
eq
u
e
n
t
ad
v
a
n
ce
m
e
n
ts
in
ea
r
ly
ca
n
ce
r
id
en
tific
atio
n
,
wh
ich
m
ay
allo
w
clin
ical
p
r
o
f
ess
io
n
als to
in
te
r
v
en
e
at
th
e
ea
r
lies
t stag
es o
f
th
e
d
is
ea
s
e.
NSFET
-
b
ased
b
io
s
en
s
o
r
s
h
elp
m
o
n
ito
r
p
H
lev
els
a
n
d
io
n
co
n
ce
n
tr
atio
n
s
in
b
io
lo
g
ical
in
v
e
s
tig
atio
n
s
an
d
h
ea
lth
ca
r
e
f
ac
ilit
ies,
en
a
b
lin
g
r
esear
c
h
er
s
an
d
m
ed
ic
al
p
er
s
o
n
n
el
to
m
a
k
e
well
-
i
n
f
o
r
m
e
d
d
ec
is
io
n
s
.
NSFET
-
b
ased
s
en
s
o
r
s
h
elp
in
d
u
s
tr
ial
p
r
o
ce
s
s
co
n
tr
o
l
b
y
g
u
ar
an
teein
g
i
d
ea
l
co
n
d
itio
n
s
f
o
r
f
o
o
d
p
r
o
ce
s
s
in
g
an
d
f
er
m
e
n
tatio
n
,
wh
ic
h
p
r
es
er
v
es
th
e
q
u
ality
an
d
s
af
ety
o
f
th
e
f
in
al
p
r
o
d
u
ct.
Fu
r
th
e
r
m
o
r
e,
NSFET
-
b
ased
s
en
s
o
r
s
in
co
r
p
o
r
ated
in
to
m
a
n
ag
em
en
t
s
y
s
tem
s
en
ab
le
t
h
e
h
y
d
r
o
p
o
n
ics
an
d
a
g
r
icu
ltu
r
e
s
ec
to
r
s
to
tr
ac
k
n
u
tr
itio
n
al
r
eq
u
ir
em
en
ts
an
d
m
ax
im
ize
th
e
d
ev
el
o
p
m
en
t
o
f
p
lan
ts
.
T
h
ese
ex
am
p
les
illu
s
tr
ate
th
e
s
ig
n
if
ican
ce
o
f
m
an
a
g
em
en
t
a
p
p
licatio
n
s
a
s
ce
n
tr
alize
d
p
latf
o
r
m
s
,
e
n
ab
l
in
g
th
e
co
llectio
n
,
v
is
u
aliza
tio
n
,
an
d
an
aly
s
is
o
f
NSFET
-
b
ased
s
en
s
o
r
s
d
ata.
T
h
r
o
u
g
h
th
e
i
n
teg
r
atio
n
o
f
NSFET
-
b
ased
s
en
s
o
r
s
,
m
an
ag
em
en
t
ap
p
licatio
n
s
en
h
an
ce
m
o
n
ito
r
in
g
ca
p
ab
ili
ties
,
s
et
th
r
esh
o
ld
s
,
g
en
er
ate
aler
ts
,
an
d
s
u
p
p
o
r
t
d
ata
-
d
r
i
v
en
d
ec
is
io
n
s
f
o
r
ef
f
ec
tiv
e
m
an
a
g
em
en
t in
d
iv
er
s
e
f
ield
s
.
Her
e
is
th
e
s
tr
u
ctu
r
e
o
f
th
e
p
ap
er
:
An
in
tr
o
d
u
ctio
n
s
tr
ess
es
th
e
im
p
o
r
tan
ce
o
f
ea
r
ly
d
etec
tio
n
in
p
r
ev
en
tin
g
s
er
io
u
s
c
o
m
p
licatio
n
s
,
d
en
g
u
e
f
ev
er
'
s
b
r
o
ad
p
r
e
v
alen
ce
,
an
d
th
e
co
m
p
lex
ity
o
f
its
s
er
o
ty
p
es,
all
o
f
wh
ich
co
n
tr
ib
u
te
to
d
en
g
u
e
f
e
v
er
'
s
s
ta
tu
s
as
a
wo
r
ld
wid
e
h
ea
lth
p
r
o
b
lem
.
C
u
r
r
en
t
d
ia
g
n
o
s
tic
tech
n
o
lo
g
ies
ar
e
r
ev
iewe
d
in
th
e
b
ac
k
g
r
o
u
n
d
an
d
liter
atu
r
e
s
ec
tio
n
,
with
an
em
p
h
asis
o
n
th
eir
lim
itatio
n
s
an
d
th
e
in
cr
ea
s
in
g
in
ter
est
in
f
ield
-
ef
f
ec
t
tr
an
s
is
to
r
-
b
ased
(
FET
)
b
io
s
en
s
o
r
s
.
T
h
e
s
u
g
g
ested
tech
n
iq
u
e
d
etails
th
e
m
ater
ial
s
elec
tio
n
,
f
u
n
ctio
n
aliza
tio
n
p
r
o
ce
s
s
,
an
d
s
im
u
latio
n
u
s
in
g
v
is
u
al
tech
n
o
lo
g
y
c
o
m
p
u
ter
-
ai
d
ed
d
esig
n
(
T
C
AD
)
to
o
ls
to
cr
ea
te
a
n
ew
u
ltra
s
en
s
itiv
e
d
en
g
u
e
v
i
r
u
s
(
DE
NV)
b
i
o
s
en
s
o
r
ca
lled
a
g
ate
-
all
-
ar
o
u
n
d
n
a
n
o
s
h
ee
t
f
ield
-
ef
f
ec
t
tr
an
s
is
to
r
(
GAA
NSFE
T
)
.
T
h
e
n
e
x
t
p
ar
t,
“
d
e
v
ice
s
im
u
latio
n
an
d
d
esig
n
p
ar
am
eter
s
,
”
g
o
es
in
to
f
u
r
th
er
d
etail
ab
o
u
t
th
e
elec
tr
ical
an
d
s
tr
u
ctu
r
al
p
r
o
p
er
ties
tak
en
in
to
ac
co
u
n
t
d
u
r
in
g
th
e
s
im
u
lat
io
n
p
r
o
ce
s
s
.
I
n
th
e
r
esu
lts
an
d
d
is
cu
s
s
io
n
s
ec
tio
n
,
we
s
h
o
w
h
o
w
th
e
s
en
s
o
r
r
ea
cts
to
d
if
f
er
e
n
t
co
n
ce
n
tr
ati
o
n
s
o
f
DE
NV
a
n
d
co
m
p
ar
e
its
s
en
s
itiv
ity
an
d
s
p
ec
if
icity
to
t
h
at
o
f
m
o
r
e
t
r
ad
itio
n
al
b
i
o
s
en
s
in
g
m
et
h
o
d
s
.
T
h
e
p
ap
er
co
n
tin
u
es
b
y
d
is
cu
s
s
in
g
th
e
NSFET
b
io
s
en
s
o
r
an
d
h
o
w
it
co
u
ld
b
e
u
s
e
d
in
p
o
r
tab
le,
ea
s
y
-
to
-
u
s
e,
a
n
d
f
u
tu
r
e
-
in
teg
r
ate
d
p
o
in
t
-
of
-
ca
r
e
d
iag
n
o
s
tic
s
y
s
tem
s
.
T
h
e
co
n
clu
s
io
n
w
r
ap
s
u
p
th
e
s
tu
d
y
b
y
s
u
m
m
ar
izin
g
it
s
m
ain
p
o
i
n
ts
an
d
o
u
tlin
in
g
its
f
u
tu
r
e
d
ir
ec
tio
n
s
,
wh
ich
m
ay
in
v
o
l
v
e
ap
p
ly
in
g
th
e
f
in
d
in
g
s
in
th
e
r
ea
l
wo
r
l
d
o
r
ex
p
a
n
d
in
g
th
e
s
tu
d
y
to
o
th
e
r
in
f
ec
tio
u
s
d
is
ea
s
es.
2.
L
I
T
E
R
AT
U
RE
R
E
VI
E
W
Ad
v
an
ce
s
in
m
ed
ical
d
iag
n
o
s
tics
h
av
e
b
ee
n
m
ad
e
p
o
s
s
ib
le
b
y
th
e
ex
p
lo
itatio
n
o
f
a
d
is
tin
ct
class
o
f
n
an
o
m
ater
ials
with
s
p
ec
ial
f
e
atu
r
es
b
y
ad
v
an
ce
s
in
n
an
o
s
cien
ce
an
d
n
a
n
o
tech
n
o
lo
g
y
[
3
]
.
Nan
o
s
tr
u
ctu
r
ed
m
ater
ials
ca
n
b
e
tailo
r
e
d
to
v
ar
io
u
s
s
izes
an
d
f
o
r
m
s
a
n
d
h
av
e
ex
ce
llen
t
p
h
y
s
ical
an
d
ch
em
ical
p
r
o
p
er
ties
.
I
n
cr
ea
s
ed
c
h
em
ical
ac
tiv
ity
,
a
h
ig
h
s
u
r
f
ac
e
-
to
-
v
o
lu
m
e
r
ati
o
,
an
d
elec
tr
ical
b
eh
a
v
io
r
th
a
t
m
ay
b
e
ad
ju
s
ted
m
ak
e
th
ese
m
ate
r
ials
attr
ac
tiv
e
f
o
r
m
o
lecu
le
lev
el
d
etec
tio
n
in
th
e
n
an
o
d
o
m
ain
.
Fo
llo
wi
n
g
th
e
f
o
r
m
atio
n
o
f
th
e
b
io
in
ter
f
ac
e
,
th
e
n
an
o
m
a
ter
ials
ar
e
ess
en
tia
l
f
o
r
elec
tr
o
n
co
n
d
u
ctio
n
an
d
b
io
m
o
lecu
le
im
m
o
b
ilizatio
n
.
Fu
r
th
er
m
o
r
e
,
th
e
d
e
v
elo
p
m
e
n
t
o
f
s
m
aller
d
e
v
ices
is
m
ad
e
p
o
s
s
ib
le
b
y
th
e
m
ater
ials
'
m
o
d
e
s
t
d
im
en
s
io
n
s
.
T
h
e
s
en
s
itiv
ity
,
s
elec
tiv
ity
,
an
d
ac
cu
r
ac
y
o
f
th
e
POC
d
ev
ice
ca
n
b
e
s
ig
n
if
ican
tly
im
p
r
o
v
e
d
b
y
u
s
in
g
n
an
o
m
ater
ials
lik
e
g
r
ap
h
en
e,
ca
r
b
o
n
n
an
o
tu
b
es
(
C
NT
s
)
,
n
an
o
p
ar
ticles,
q
u
an
tu
m
d
o
ts
,
n
an
o
r
o
d
s
,
an
d
n
an
o
wir
es
in
to
th
e
b
io
s
en
s
o
r
m
an
u
f
ac
t
u
r
in
g
p
r
o
c
ess
.
T
h
e
u
s
e
o
f
n
an
o
m
ater
ials
in
th
e
p
r
o
d
u
ctio
n
o
f
POC
d
ev
ices
h
as
led
to
th
e
d
ev
elo
p
m
e
n
t
o
f
s
ev
er
al
tr
a
n
s
d
u
ctio
n
m
eth
o
d
s
,
i
n
clu
d
in
g
o
p
tical,
elec
tr
ical,
elec
tr
o
ch
em
i
ca
l,
m
ass
-
s
en
s
itiv
e,
m
ag
n
etic,
an
d
th
er
m
o
m
etr
ic.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2088
-
8
7
0
8
Desig
n
a
n
d
p
erfo
r
ma
n
ce
a
n
a
l
ysis
o
f a
n
N
S
F
E
T
-
b
a
s
ed
b
io
s
e
n
s
o
r
fo
r
…
(
Tu
la
s
i R
a
d
h
ika
P
a
tn
a
la
)
5185
On
e
-
d
im
en
s
io
n
al
(
1
D)
m
etal
o
x
id
es,
am
o
n
g
o
th
er
n
a
n
o
m
ater
ials
,
h
av
e
s
h
o
wn
p
r
o
m
is
e
in
th
e
p
r
o
d
u
ctio
n
o
f
p
o
in
t
-
of
-
ca
r
e
d
iag
n
o
s
tic
d
ev
ices
b
ec
a
u
s
e
o
f
t
h
eir
s
tr
o
n
g
ad
s
o
r
p
tio
n
ca
p
a
b
ilit
ies,
h
ig
h
s
u
r
f
ac
e
r
ea
ctiv
ity
,
im
p
r
o
v
ed
elec
tr
o
n
-
tr
an
s
f
er
k
in
etics,
a
n
d
ap
p
r
o
p
r
iate
im
m
o
b
ilizatio
n
m
atr
ic
es
f
o
r
b
io
m
o
lecu
le
co
n
ju
g
atio
n
.
C
o
m
m
o
n
1
D
m
etal
o
x
id
es
th
at
p
r
o
v
id
e
a
b
io
co
m
p
atib
le
s
u
r
f
ac
e
with
in
cr
ea
s
ed
b
io
lo
g
ical
ac
tiv
ity
in
clu
d
e
alu
m
in
u
m
o
x
id
e
(
Al2
O3
)
,
titan
iu
m
o
x
id
e
(
T
iO2
)
,
zir
c
o
n
iu
m
o
x
i
d
e
(
Z
r
O2
)
,
ce
r
i
u
m
o
x
id
e
(
C
eO2
)
,
m
ag
n
esiu
m
o
x
id
e
(
Mg
O)
,
ir
o
n
o
x
i
d
e
(
Fe3
O4
)
,
m
an
g
an
ese
o
x
id
e
(
M
n
O)
,
b
a
r
iu
m
o
x
id
e
(
B
aO)
,
co
p
p
er
o
x
id
e
(
C
u
O)
,
v
a
n
ad
iu
m
o
x
id
e
(
V2
O5
)
,
an
d
zin
c
o
x
id
e
(
Z
n
O)
[
4
]
.
B
ec
au
s
e
o
f
i
ts
s
p
ec
ial
q
u
alities
,
in
clu
d
in
g
its
b
r
o
ad
b
an
d
g
a
p
(
3
.
3
7
eV)
,
f
r
ee
-
e
x
cito
n
b
in
d
in
g
e
n
er
g
y
(
6
0
m
eV)
,
s
tr
o
n
g
elec
tr
o
c
h
em
ical
ch
ar
ac
ter
is
tics
,
an
d
h
ig
h
is
o
el
ec
tr
ic
p
o
in
t
(
I
E
P=9
.
5
)
,
Z
n
O
h
as
g
ar
n
er
ed
in
cr
ea
s
in
g
i
n
ter
est
in
b
io
s
en
s
in
g
[
5
]
,
[
6
]
.
Z
n
O
is
a
v
iab
le
tem
p
late
f
o
r
cr
ea
tin
g
POC
d
ev
ices
b
ec
au
s
e
o
f
its
in
cr
ea
s
ed
elec
tr
o
n
m
o
b
ilit
y
a
n
d
d
if
f
u
s
io
n
co
ef
f
icien
t
wh
en
co
m
p
ar
ed
to
o
th
e
r
m
etal
o
x
id
es.
Mo
r
eo
v
er
,
th
e
a
d
d
itio
n
o
f
n
a
n
o
p
ar
ticles
to
Z
n
O
m
atr
ices
en
h
an
ce
s
th
eir
elec
tr
ical,
o
p
tical,
an
d
s
u
r
f
ac
e
co
n
tact
p
r
o
p
er
ties
,
im
p
r
o
v
in
g
th
eir
b
io
s
en
s
in
g
ca
p
ab
ilit
ies
[
7
]
.
A
d
d
itio
n
ally
,
th
e
elec
tr
o
s
p
in
n
i
n
g
a
p
p
r
o
ac
h
m
ak
es
it
s
im
p
le
to
d
o
p
e
o
r
i
n
co
r
p
o
r
ate
th
e
r
ig
h
t
n
an
o
m
ater
ial
to
cr
ea
te
co
m
p
o
s
ite
o
r
d
o
p
ed
Z
n
O
n
an
o
wir
es
[
8
]
,
[
9
]
.
Flex
ib
le
m
ater
ials
lik
e
p
ap
er
s
an
d
p
o
ly
m
er
s
ar
e
cu
r
r
e
n
tly
b
ein
g
em
p
lo
y
ed
m
o
r
e
an
d
m
o
r
e
as
s
u
b
s
tr
ates
f
o
r
POC
d
e
v
ice
f
ab
r
icatio
n
s
in
ce
th
ey
ar
e
d
is
p
o
s
ab
le,
af
f
o
r
d
ab
le,
ca
n
b
e
p
r
o
d
u
ce
d
in
lar
g
e
q
u
an
titi
es,
an
d
h
av
e
th
e
p
o
te
n
tial
to
b
e
in
teg
r
ate
d
with
wea
r
ab
le
tech
n
o
lo
g
y
f
o
r
s
m
ar
t
POC
d
iag
n
o
s
tics
[
1
0
]
.
B
ec
au
s
e
p
o
ly
m
er
-
b
ased
s
u
b
s
tr
ates,
in
clu
d
in
g
p
o
ly
et
h
y
len
e
ter
ep
h
th
alate
(
PET
)
,
h
a
v
e
b
en
ef
its
o
v
er
p
ap
er
-
b
ased
s
u
b
s
tr
ates,
th
ey
ca
n
with
s
tan
d
tem
p
er
atu
r
es
u
p
t
o
1
8
0
d
eg
r
ee
s
C
elsi
u
s
an
d
en
ab
le
tem
p
er
atu
r
e
-
co
n
tr
o
lled
p
r
o
ce
s
s
es
[
1
1
]
.
Ad
d
itio
n
ally
,
liq
u
id
s
am
p
les
ar
e
n
o
t
ab
s
o
r
b
e
d
b
y
p
o
ly
m
er
-
b
ase
d
s
u
b
s
tr
ates,
wh
ich
s
p
ee
d
s
u
p
th
e
p
r
ec
is
e
co
n
v
e
y
a
n
ce
o
f
tar
g
et
s
am
p
les f
o
r
d
etec
tio
n
[
1
2
]
,
[
1
3
]
.
Ho
wev
er
,
f
le
x
ib
le
s
u
b
s
tr
ate
-
b
ased
POC
d
ev
ices
ar
e
s
till
in
th
e
ea
r
ly
s
tag
es
o
f
d
ev
elo
p
m
en
t,
esp
ec
ially
wh
en
it
co
m
es
to
f
l
ex
ib
le
b
io
s
en
s
o
r
s
with
n
a
n
o
m
ater
ial
in
teg
r
atio
n
[
1
4
]
.
As
a
r
esu
lt,
we
an
ticip
ate
th
at
n
ew
g
en
er
atio
n
s
o
f
f
lex
ib
le
s
u
b
s
tr
ate
-
b
ased
POC
d
e
v
ices,
in
c
o
n
ju
n
ctio
n
with
w
ir
eless
an
d
m
o
b
ile
tech
n
o
lo
g
ies,
will
cr
ea
te
a
m
u
ltit
u
d
e
o
f
o
p
p
o
r
tu
n
ities
f
o
r
t
h
e
d
ev
elo
p
m
en
t
o
f
wea
r
ab
le,
r
eliab
le,
an
d
ea
r
ly
d
iag
n
o
s
tics
d
ev
ices.
I
n
th
is
r
e
g
ar
d
,
th
e
d
ev
elo
p
m
en
t
o
f
f
lex
i
b
le
s
u
b
s
tr
ate
in
teg
r
ated
b
io
s
en
s
o
r
s
b
ased
o
n
Z
n
O
n
an
o
wir
es f
o
r
POC
ap
p
licatio
n
is
th
e
m
ain
g
o
al
o
f
t
h
is
th
esis
.
T
h
e
L
atin
wo
r
d
“
s
en
tire
,
”
w
h
ich
m
ea
n
s
to
i
d
en
tify
,
is
wh
er
e
th
e
ter
m
“
s
en
s
o
r
”
co
m
es
f
r
o
m
[
1
5
]
.
A
s
en
s
o
r
is
a
d
ev
ice
th
at
g
e
n
e
r
ates
m
atch
in
g
o
u
tp
u
t
s
ig
n
al
s
in
a
m
ea
s
u
r
ab
le
f
o
r
m
in
r
esp
o
n
s
e
to
s
p
ec
if
ic
ex
ter
n
al
s
tim
u
li,
s
u
ch
as
ex
p
o
s
u
r
e
to
an
aly
tes,
ch
an
g
es
in
am
b
ien
t
co
n
d
itio
n
s
,
o
r
m
o
d
if
ic
atio
n
s
to
s
o
m
e
o
f
it
s
p
h
y
s
ical
p
r
o
p
er
ties
.
Sen
s
o
r
s
ar
e
p
r
im
ar
ily
d
iv
id
e
d
in
to
two
ca
teg
o
r
ies
b
ased
o
n
th
eir
m
o
d
es
o
f
o
p
er
atio
n
:
ch
em
ical
an
d
p
h
y
s
ical
s
en
s
o
r
s
.
Ph
y
s
ical
s
en
s
o
r
s
ar
e
s
en
s
in
g
d
e
v
ices
th
at
r
esp
o
n
d
to
a
n
y
p
h
y
s
ical
q
u
alities
,
in
clu
d
in
g
elec
tr
o
m
ag
n
etic
wa
v
es,
p
r
ess
u
r
e,
a
n
d
s
o
u
n
d
[
1
6
]
.
L
ik
ewise,
a
ch
em
ical
s
en
s
o
r
is
a
d
etec
tin
g
d
e
v
ice
th
at
r
esp
o
n
d
s
to
a
n
y
ch
e
m
ical
s
tim
u
li (
s
u
ch
as sm
ell
an
d
an
a
ly
te
ex
p
o
s
u
r
e
)
an
d
g
en
er
ates i
n
f
o
r
m
atio
n
th
at
ca
n
b
e
m
ea
s
u
r
ed
an
aly
tically
[
1
7
]
.
T
h
e
an
aly
te
in
ter
ac
tio
n
o
r
s
tim
u
lu
s
at
th
e
s
en
s
o
r
'
s
p
ar
ticu
lar
r
ea
ctio
n
s
ite
ca
u
s
es
a
ch
an
g
e
in
its
ch
em
ica
l
an
d
p
h
y
s
ical
ch
ar
ac
ter
is
tics
,
wh
ich
r
esu
lts
in
a
co
r
r
esp
o
n
d
i
n
g
elec
tr
ical
s
ig
n
al
[
1
8
]
.
A
f
ter
th
at,
th
is
s
ig
n
al
is
s
en
t to
a
p
r
o
ce
s
s
in
g
u
n
it f
o
r
r
es
p
o
n
s
e
an
aly
s
is
.
T
h
e
th
r
ee
p
r
im
ar
y
co
m
p
o
n
e
n
ts
o
f
a
b
io
s
en
s
o
r
ar
e
as
f
o
llo
ws:
i)
a
b
io
r
ec
o
g
n
itio
n
lay
er
th
at
in
ter
ac
ts
with
th
e
tar
g
et
co
m
p
o
u
n
d
s
in
a
b
io
alay
te,
s
u
ch
as
an
en
z
y
m
e,
an
tib
o
d
y
,
ce
lls
,
o
r
tis
s
u
e;
ii)
a
tr
an
s
d
u
cin
g
co
m
p
o
n
en
t
th
at
tr
a
n
s
f
o
r
m
s
th
e
p
h
y
s
ico
ch
e
m
ical
ch
an
g
es
b
r
o
u
g
h
t
ab
o
u
t
b
y
b
io
c
h
em
ical
in
ter
ac
tio
n
in
to
an
elec
tr
ical,
o
p
tical,
th
er
m
al
,
m
ag
n
etic,
o
r
ac
o
u
s
tic
s
ig
n
al;
an
d
iii)
th
e
s
ig
n
al
p
r
o
ce
s
s
in
g
u
n
it,
wh
ich
p
r
o
ce
s
s
es
th
e
s
ig
n
al
an
d
tr
an
s
m
its
th
e
in
f
o
r
m
atio
n
o
f
a
p
ar
ticu
lar
tar
g
e
t
in
ter
ac
tio
n
[
1
9
]
.
Nu
m
er
o
u
s
v
ar
iab
les,
in
clu
d
in
g
th
e
m
ed
iu
m
'
s
p
H,
tem
p
er
atu
r
e,
p
o
llu
tan
ts
,
an
d
th
e
ty
p
e
an
d
s
tab
ilit
y
o
f
th
e
m
ater
ial
s
em
p
lo
y
ed
in
th
e
b
io
s
en
s
o
r
'
s
co
n
s
tr
u
ctio
n
,
af
f
e
ct
h
o
w
well
th
e
b
io
s
en
s
o
r
p
er
f
o
r
m
s
.
T
h
e
p
r
im
a
r
y
p
ar
ts
o
f
th
e
b
io
s
en
s
o
r
ar
e
s
h
o
wn
in
Fig
u
r
e
1
[
2
0
]
.
T
h
e
p
r
im
ar
y
co
m
p
o
n
en
t
o
f
a
b
io
s
en
s
o
r
is
a
b
io
r
ec
ep
to
r
o
r
m
o
lecu
lar
r
ec
o
g
n
itio
n
.
T
h
e
s
tab
ilit
y
,
s
p
ec
if
icity
,
an
d
af
f
in
ity
f
o
r
th
e
tar
g
et
a
n
aly
te
ar
e
d
eter
m
in
ed
b
y
th
e
p
r
o
p
er
id
en
tific
atio
n
an
d
f
u
n
ctio
n
aliza
tio
n
o
f
th
e
b
i
o
r
e
co
g
n
itio
n
elem
e
n
t
[
2
1
]
.
T
h
e
b
ar
o
r
ec
e
p
to
r
'
s
s
en
s
it
iv
ity
an
d
s
elec
tiv
ity
s
to
p
th
e
o
th
er
s
u
b
s
tan
ce
in
th
e
b
io
s
am
p
le
f
r
o
m
i
n
ter
f
er
in
g
.
T
h
e
m
o
s
t
o
f
ten
u
tili
ze
d
b
io
r
ec
ep
to
r
s
in
clu
d
e
n
u
cleic
ac
id
s
,
en
zy
m
es,
an
tib
o
d
ies,
an
d
ce
l
ls
.
Fig
u
r
e
2
d
ep
icts
Sch
em
at
ic
r
ep
r
esen
tatio
n
o
f
th
e
in
ter
ac
tio
n
b
etwe
en
th
e
tar
g
et
an
aly
te
an
d
th
e
b
io
r
ec
o
g
n
itio
n
elem
en
ts
in
th
e
co
n
te
x
t o
f
DE
NV
v
ir
u
s
d
etec
tio
n
.
B
ec
au
s
e
en
zy
m
e
-
b
ased
b
i
o
r
e
co
g
n
itio
n
elem
en
ts
ca
n
c
o
n
v
er
t
ca
taly
ze
d
p
r
o
d
u
ctio
n
p
r
o
d
u
cts
lik
e
lig
h
t,
h
ea
t,
an
d
elec
tr
o
n
s
in
to
q
u
an
tifia
b
le
s
ig
n
als,
th
ey
ar
e
m
o
r
e
ap
p
ea
lin
g
f
o
r
b
i
o
s
en
s
in
g
ap
p
licatio
n
s
.
T
h
e
en
zy
m
e'
s
im
m
o
b
ilizatio
n
tech
n
iq
u
e,
p
H,
tem
p
e
r
atu
r
e,
an
d
lay
er
th
ick
n
ess
all
af
f
ec
t
h
o
w
well
en
zy
m
e
-
b
ased
b
io
s
en
s
o
r
s
wo
r
k
[
2
2
]
.
A
liv
in
g
ce
ll'
s
in
ter
ac
tio
n
with
t
h
e
ex
tr
ac
ellu
lar
an
d
in
tr
ac
ellu
lar
s
u
r
r
o
u
n
d
in
g
s
,
as
well
as
with
an
y
p
h
y
s
io
lo
g
ical
p
ar
am
eter
s
,
an
d
t
h
e
tr
an
s
f
o
r
m
atio
n
o
f
th
e
b
io
r
ep
o
r
ter
'
s
r
esp
o
n
s
e
in
to
a
q
u
a
n
tifia
b
le
s
ig
n
al
f
o
r
m
th
e
b
asis
o
f
ce
ll
-
b
ased
r
ec
o
g
n
itio
n
.
Mic
r
o
o
r
g
an
i
s
m
s
,
in
clu
d
in
g
b
ac
ter
ia,
f
u
n
g
u
s
,
an
d
ce
ll p
r
o
tein
s
,
ca
n
f
u
n
ctio
n
as
b
io
r
ec
ep
to
r
s
t
o
id
en
tify
a
p
ar
ticu
la
r
m
o
lecu
le
o
r
an
aly
te.
Du
e
to
s
ig
n
al
a
m
p
lific
atio
n
,
th
ese
b
io
r
ec
ep
to
r
s
h
av
e
a
r
ed
u
ce
d
d
etec
tio
n
lim
it.
O
n
e
o
f
t
h
e
m
ain
o
b
s
tacle
s
is
im
m
o
b
ilizin
g
ce
lls
o
n
th
e
s
en
s
o
r
s
u
r
f
ac
e
an
d
lin
k
in
g
t
h
em
with
tr
an
s
d
u
ce
r
s
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
7
0
8
I
n
t J E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
15
,
No
.
6
,
Decem
b
e
r
20
25
:
5
1
8
3
-
5
1
9
2
5186
Fig
u
r
e
1
.
B
io
s
en
s
o
r
s
with
tim
e
lin
e
T
h
e
id
en
tific
atio
n
o
f
n
u
cleic
ac
id
s
(
DNA,
R
NA,
an
d
p
e
p
tid
es)
d
ep
e
n
d
s
o
n
th
e
s
tr
u
ct
u
r
a
l
alter
atio
n
b
r
o
u
g
h
t
ab
o
u
t
b
y
tar
g
et
b
in
d
in
g
.
Mu
ta
g
en
icity
,
in
te
r
ca
latio
n
s
,
s
tr
an
d
b
r
ea
k
ag
e,
o
r
co
v
al
en
t
o
r
n
o
n
c
o
v
alen
t
ch
em
ical
b
in
d
i
n
g
t
o
th
e
n
u
c
leic
ac
id
ca
n
all
ca
u
s
e
th
is
s
tr
u
ctu
r
al
alter
atio
n
[
2
3
]
.
T
h
e
id
en
tific
atio
n
o
f
co
m
p
lem
en
tar
y
s
tr
an
d
s
b
y
s
in
g
le
-
s
tr
an
d
DNA
to
cr
ea
te
d
o
u
b
le
-
s
tr
an
d
DNA
th
r
o
u
g
h
h
y
d
r
o
g
en
b
o
n
d
s
an
d
th
e
m
ea
s
u
r
em
en
t
o
f
th
e
s
ig
n
al
g
en
er
ated
b
y
t
h
is
b
io
ch
em
ical
r
ea
ctio
n
f
o
r
m
th
e
b
asis
o
f
t
h
e
DNA
b
io
s
en
s
o
r
's
o
p
er
atio
n
.
I
n
a
c
o
m
p
lex
m
ix
tu
r
e,
th
ese
co
m
p
o
n
e
n
ts
h
av
e
a
h
ig
h
lev
el
o
f
s
elec
tiv
ity
to
war
d
s
th
e
tar
g
et
s
p
ec
ies.
W
h
en
cr
ea
tin
g
b
io
s
en
s
o
r
s
b
ased
o
n
n
u
cleic
ac
id
r
ec
o
g
n
iti
o
n
elem
en
ts
,
th
e
im
m
o
b
ilizatio
n
s
tep
o
n
to
th
e
s
en
s
in
g
s
u
r
f
ac
e
is
cr
u
cial.
T
h
e
s
ev
er
al
b
i
o
r
ec
o
g
n
itio
n
c
o
m
p
o
n
e
n
ts
af
f
ix
ed
to
th
e
s
en
s
o
r
s
u
r
f
ac
e
an
d
th
eir
in
ter
ac
tio
n
s
with
th
e
tar
g
et
a
n
aly
te
ar
e
d
ep
icted
in
Fig
u
r
e
2
.
Fig
u
r
e
2
.
I
n
ter
ac
tio
n
b
etwe
en
th
e
tar
g
et
an
aly
te
a
n
d
th
e
b
io
r
ec
o
g
n
itio
n
elem
e
n
ts
I
n
v
asiv
e
tr
ea
tm
e
n
ts
lik
e
b
i
o
p
s
ies
an
d
im
ag
i
n
g
m
eth
o
d
s
h
av
e
h
is
to
r
ically
b
ee
n
u
s
ed
to
o
b
tain
tis
s
u
e
s
am
p
les
f
o
r
a
n
aly
s
is
in
ca
n
ce
r
d
iag
n
o
s
is
[
2
4
]
.
E
v
en
wh
ile
th
ese
tech
n
iq
u
es
h
av
e
b
ee
n
q
u
ite
h
elp
f
u
l
in
th
e
id
en
tific
atio
n
o
f
ca
n
ce
r
,
th
e
y
f
r
eq
u
e
n
tly
h
a
v
e
d
r
awb
ac
k
s
,
i
n
clu
d
in
g
th
e
r
eq
u
ir
e
m
en
t
f
o
r
s
p
ec
ialis
t
f
ac
ilit
ie
s
,
in
v
asiv
en
ess
,
an
d
a
len
g
th
y
p
r
o
ce
d
u
r
e.
C
o
n
s
eq
u
en
tly
,
th
e
r
e
is
an
in
cr
ea
s
in
g
d
em
an
d
f
o
r
n
o
v
el,
n
o
n
-
in
v
asiv
e
tech
n
iq
u
es
th
at
ca
n
im
p
r
o
v
e
e
ar
ly
id
en
tific
atio
n
,
allo
w
f
o
r
r
ea
l
-
tim
e
m
o
n
ito
r
in
g
,
an
d
s
u
p
p
o
r
t
in
d
i
v
id
u
alize
d
tr
ea
tm
en
t
p
lan
s
.
T
ec
h
n
iq
u
es
f
o
r
DNA
-
b
ased
an
aly
s
is
h
av
e
b
ec
o
m
e
a
v
iab
le
way
t
o
tr
an
s
f
o
r
m
ca
n
ce
r
d
iag
n
o
s
is
.
T
h
ese
m
eth
o
d
s
o
f
f
er
th
e
p
o
s
s
ib
ilit
y
o
f
s
en
s
itiv
e
an
d
s
p
ec
if
ic
d
etec
tio
n
b
y
lo
o
k
in
g
at
th
e
d
is
tin
ct
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2088
-
8
7
0
8
Desig
n
a
n
d
p
erfo
r
ma
n
ce
a
n
a
l
ysis
o
f a
n
N
S
F
E
T
-
b
a
s
ed
b
io
s
e
n
s
o
r
fo
r
…
(
Tu
la
s
i R
a
d
h
ika
P
a
tn
a
la
)
5187
g
en
etic
f
in
g
er
p
r
in
ts
f
o
u
n
d
in
ca
n
ce
r
ce
lls
.
I
t
is
p
o
s
s
ib
le
to
d
etec
t
th
e
p
r
esen
ce
o
f
th
e
d
is
ea
s
e,
class
if
y
it,
an
d
tr
ac
k
h
o
w
well
a
tr
ea
tm
en
t is wo
r
k
in
g
b
y
u
s
in
g
g
en
etic
b
io
m
ar
k
er
s
lin
k
ed
to
b
lo
o
d
m
alig
n
an
cies.
A
tech
n
iq
u
e
th
at
h
as
d
r
awn
i
n
ter
est
is
th
e
NSFET
-
b
ased
b
io
s
en
s
o
r
,
wh
ic
h
h
as
t
h
e
p
o
ten
tial
to
im
p
r
o
v
e
DNA
-
b
ased
ca
n
ce
r
d
iag
n
o
s
is
.
So
lid
-
s
tate
d
e
v
ices
ca
lled
NSFET
-
b
ased
b
io
s
en
s
o
r
s
m
ay
id
e
n
tify
p
H
v
ar
iatio
n
s
b
r
o
u
g
h
t
o
n
b
y
in
ter
ac
tio
n
s
with
DNA
m
o
lec
u
les
[
2
5
]
.
T
h
ese
s
en
s
o
r
s
'
s
m
all
s
ize,
h
ig
h
s
en
s
itiv
ity
,
q
u
ic
k
r
ea
ctio
n
tim
e,
an
d
lab
el
-
f
r
ee
d
etec
tio
n
ca
p
a
b
ilit
ies ar
e
ju
s
t a
f
ew
o
f
th
e
m
an
y
b
en
ef
its
th
ey
h
av
e
s
h
o
wn
o
v
e
r
tr
ad
itio
n
al
d
etec
tio
n
tech
n
iq
u
es.
Fu
r
th
e
r
m
o
r
e
,
NSFET
-
b
ased
b
io
s
en
s
o
r
s
ar
e
a
p
p
ea
lin
g
f
o
r
u
s
e
in
h
ea
lth
ca
r
e
ap
p
licatio
n
s
d
u
e
t
o
th
eir
p
o
te
n
tial
f
o
r
p
o
in
t
-
of
-
ca
r
e
test
in
g
an
d
r
ea
l
-
tim
e
m
o
n
i
to
r
in
g
.
Hen
ce
,
th
is
wo
r
k
p
r
es
en
ts
a
n
o
b
le
b
lo
o
d
d
etec
tio
n
tech
n
iq
u
e
with
th
e
h
elp
o
f
NSFET
d
ev
ice
f
o
r
b
lo
o
d
ca
n
ce
r
d
etec
tio
n
with
th
e
tar
g
et
an
aly
te.
3.
DE
S
I
G
N
AND
S
I
M
U
L
A
T
I
O
N
O
F
NSFET
B
I
O
S
E
NSO
R
Utilizin
g
1
0
n
m
tech
n
o
lo
g
y
,
t
h
e
NS
-
FET
d
ev
ice
b
o
asts
a
th
r
ee
-
d
im
en
s
io
n
al
(
3
D)
s
tr
u
ctu
r
e.
Fig
u
r
e
1
s
h
o
ws
th
e
1
0
n
m
d
ev
ice
f
r
o
m
b
o
th
th
e
f
r
o
n
t
a
n
d
t
h
e
s
id
e.
W
ith
a
L
g
o
f
1
0
n
m
an
d
a
f
in
wid
th
o
f
1
0
n
m
,
th
e
NS
-
FET
is
m
an
u
f
ac
tu
r
ed
.
T
wen
ty
n
an
o
m
eter
s
is
th
e
to
tal
h
eig
h
t
o
f
th
e
ch
an
n
el
an
d
th
e
two
f
in
s
,
ea
ch
o
f
wh
ich
is
ten
n
an
o
m
eter
s
tall.
T
h
e
p
lan
n
e
d
ch
an
n
el
s
p
ac
in
g
f
o
r
th
e
NS
-
FET
is
1
5
n
m
,
an
d
i
t
h
as
two
ch
an
n
els.
T
h
e
th
r
ee
-
d
im
e
n
s
io
n
al
p
er
s
p
e
ctiv
e
o
f
th
e
GAA
NSFET
i
s
d
ep
icted
in
Fig
u
r
e
3
(
a)
.
T
h
e
co
d
e
f
o
r
th
e
d
e
v
ice
is
cr
ea
ted
u
s
in
g
v
is
u
al
T
C
AD.
A
th
ick
n
ess
o
f
5
to
9
n
m
is
ac
h
iev
ed
b
y
th
e
d
e
v
ice.
T
h
e
g
ad
g
et
h
as
a
wid
th
th
at
v
ar
ies b
etwe
en
1
0
a
n
d
5
0
n
m
.
I
n
th
e
p
r
o
ce
s
s
o
f
m
ak
i
n
g
d
e
v
i
ce
s
u
s
in
g
SOI
tech
n
o
lo
g
y
,
th
e
B
u
r
ied
Ox
id
e
lay
er
o
f
SiO2
m
ater
ial
is
u
s
ed
b
ec
au
s
e
it
p
r
o
v
id
es
lo
wer
p
ar
asit
ic
ca
p
ac
itan
ce
,
b
etter
s
witch
in
g
,
a
n
d
l
o
w
p
o
wer
d
is
s
ip
atio
n
.
T
h
e
v
ir
tu
al
b
u
ild
i
n
g
'
s
cr
o
s
s
-
s
ec
tio
n
is
d
is
p
lay
ed
in
Fig
u
r
e
3
(
b
)
.
Fig
u
r
e
3
.
T
h
e
th
r
ee
-
d
im
en
s
io
n
al
p
er
s
p
ec
tiv
e
o
f
(
a)
s
im
u
lated
d
ev
ice
s
tr
u
ctu
r
e
o
f
NSFET
d
e
v
ice
an
d
(
b
)
cr
o
s
s
-
s
ec
tio
n
al
v
iew
o
f
th
e
d
ev
ice
Fig
u
r
e
3
s
h
o
ws
th
e
s
ch
em
a
tic
o
f
th
e
b
io
s
en
s
o
r
t
h
at
h
a
s
b
ee
n
s
u
g
g
ested
,
th
e
g
ate
-
all
-
ar
o
u
n
d
n
an
o
s
h
ee
t
f
ield
-
ef
f
ec
t
tr
an
s
is
to
r
(
GAA
NSFET
)
.
T
h
e
s
o
u
r
c
e,
d
r
ain
,
an
d
g
ate
ar
e
s
h
o
wn
i
n
th
e
3
D
m
o
d
el
in
Fig
u
r
e
3
(
a)
,
alo
n
g
with
th
e
n
a
n
o
s
h
ee
t
ch
an
n
el,
wh
ic
h
is
en
ca
s
ed
in
th
e
g
ate
elec
tr
o
d
e
f
o
r
b
etter
elec
tr
o
s
tatic
co
n
tr
o
l
an
d
in
c
r
ea
s
ed
s
en
s
itiv
ity
.
T
h
e
g
ate
is
s
ep
ar
ated
f
r
o
m
th
e
s
o
u
r
ce
an
d
d
r
ain
r
e
g
io
n
s
u
s
in
g
s
p
ac
er
s
,
an
d
th
e
d
ev
ice
is
co
n
s
tr
u
cted
ato
p
a
b
u
r
ied
o
x
id
e
(
B
OX)
lay
er
th
at
p
r
o
v
id
es
s
u
p
p
o
r
t
to
th
e
f
u
lly
d
ep
leted
s
ilico
n
-
ato
p
-
in
s
u
lato
r
(
FD
-
SOI
)
p
latf
o
r
m
,
f
u
r
th
er
en
h
an
cin
g
p
er
f
o
r
m
an
ce
an
d
m
in
im
izin
g
leak
a
g
e.
T
wo
n
an
o
s
h
ee
t
lay
er
s
im
p
lan
ted
b
etwe
en
h
ig
h
-
k
(
Hf
O₂)
an
d
l
o
w
-
k
(
SiO₂)
d
i
elec
tr
ics
ar
e
s
h
o
wn
in
t
h
e
cr
o
s
s
-
s
ec
tio
n
al
v
iew
o
f
th
e
d
ev
ice
in
Fig
u
r
e
3
(
b
)
.
T
h
e
s
en
s
itiv
ity
is
im
p
r
o
v
ed
b
y
th
e
h
ig
h
-
k
d
ielec
tr
ic'
s
en
h
an
ce
m
en
t
o
f
th
e
g
ate
ca
p
ac
itan
ce
,
p
a
r
asit
ic
ca
p
ac
itan
ce
is
r
ed
u
ce
d
b
y
t
h
e
lo
w
-
k
d
ielec
tr
ic,
an
d
t
h
e
en
tire
s
tack
is
wr
ap
p
ed
b
y
t
h
e
g
ate
in
a
GAA
ar
r
an
g
em
en
t.
Fo
r
p
o
in
t
-
of
-
ca
r
e
b
io
s
en
s
in
g
a
p
p
licatio
n
s
lik
e
ea
r
ly
d
en
g
u
e
v
ir
u
s
d
etec
tio
n
,
t
h
is
n
an
o
s
ca
le
s
tr
u
ctu
r
e
s
h
o
ws p
r
o
m
is
e
f
o
r
p
r
ec
is
e
co
n
tr
o
l a
n
d
u
l
tr
asen
s
itiv
e
d
etec
tio
n
.
T
o
m
o
d
el
th
e
g
en
er
atio
n
-
r
e
co
m
b
in
atio
n
p
r
o
ce
s
s
,
T
C
AD
em
p
lo
y
s
m
o
d
els
s
u
ch
as
th
e
d
en
s
it
y
g
r
ad
ien
t
m
o
d
el
f
o
r
q
u
an
tu
m
p
o
ten
tial
co
r
r
ec
tio
n
,
th
e
R
o
u
ls
t
o
n
m
o
d
el
f
o
r
n
ar
r
o
w
b
a
n
d
g
a
p
m
o
d
elin
g
,
an
d
th
e
co
h
er
en
t
s
ca
tter
in
g
a
n
d
L
o
m
b
ar
d
i
s
u
r
f
ac
e
m
o
b
ilit
y
m
o
d
e
ls
f
o
r
t
h
e
B
r
illo
u
in
s
ca
tter
in
g
m
ec
h
a
n
is
m
.
T
h
e
s
im
u
latio
n
'
s
d
ev
ice
s
ettin
g
s
ar
e
d
is
p
lay
ed
in
T
a
b
le
1
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
7
0
8
I
n
t J E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
15
,
No
.
6
,
Decem
b
e
r
20
25
:
5
1
8
3
-
5
1
9
2
5188
T
ab
le
1
.
T
C
AD
s
im
u
latio
n
d
e
v
ice
p
ar
am
eter
s
R
e
g
i
o
n
D
i
me
n
si
o
n
G
a
t
e
l
e
n
g
t
h
10
nm
To
x
(
H
i
g
h
-
K)
1
nm
To
x
(
L
o
w
-
K)
1
nm
S
p
a
c
i
n
g
o
x
i
d
e
(
Lo
w
-
K)
10
nm
S
p
a
c
i
n
g
o
x
i
d
e
(
H
i
g
h
-
K)
5
nm
S
/
D
d
o
p
i
n
g
c
o
n
c
e
n
t
r
a
t
i
o
n
1
E
2
0
F
i
n
p
i
t
c
h
20
nm
F
i
n
h
e
i
g
h
t
10
nm
F
i
n
w
i
d
t
h
10
nm
W
o
r
k
f
u
n
c
t
i
o
n
4
.
5
eV
B
o
x
45
nm
T
h
e
NS
h
as
a
th
ick
n
ess
o
f
5
–
1
0
n
an
o
m
eter
s
an
d
a
b
r
ea
d
th
o
f
1
0
–
5
0
n
a
n
o
m
eter
s
.
T
h
e
p
r
im
ar
y
o
b
jectiv
e
o
f
th
e
r
esear
ch
is
t
o
f
in
d
th
e
o
p
tim
al
d
im
e
n
s
io
n
s
b
y
c
o
n
s
id
er
in
g
th
e
n
an
o
s
h
e
et's
th
ick
n
ess
an
d
wid
th
.
T
h
e
b
u
ilt
d
ev
ice'
s
s
i
m
u
latio
n
r
esu
lts
f
o
r
m
th
e
b
a
s
is
f
o
r
an
ex
am
i
n
atio
n
o
f
th
e
d
ev
ice'
s
n
u
m
er
o
u
s
p
ar
am
eter
s
.
As
s
h
o
w
n
in
Fig
u
r
e
4
,
th
e
elec
tr
ic
f
ield
is
s
tr
o
n
g
er
in
th
e
s
p
ac
e
r
r
e
g
io
n
o
f
th
e
d
ev
ice.
L
ess
n
o
ticea
b
le
is
th
e
im
p
ac
t
o
n
th
e
ch
an
n
el.
At
VDS=0
.
7
5
v
o
lt
an
d
VGS=0
.
7
v
o
lt,
Fig
u
r
e
5
s
h
o
ws
th
e
p
o
ten
tial
v
ar
iatio
n
o
f
th
e
s
im
u
lated
NS
FET
an
d
th
e
d
is
tr
ib
u
tio
n
o
f
th
e
d
o
p
in
g
co
n
ce
n
tr
atio
n
(
Nd
)
o
f
th
e
d
ev
ice.
Fig
u
r
e
4
.
Do
p
in
g
c
o
n
ce
n
tr
atio
n
(
Nd
)
o
f
th
e
s
im
u
lated
NSFET
Fig
u
r
e
5
.
Po
ten
tial d
is
tr
ib
u
tio
n
o
f
th
e
s
im
u
lated
GAA
NSFET
4.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
N
T
o
d
ia
g
n
o
s
e
t
h
e
d
en
g
u
e
v
ir
u
s
h
er
e
we
d
esig
n
ed
th
e
NSFET
b
ased
b
io
s
en
s
o
r
s
.
T
h
e
d
if
f
e
r
en
t
o
x
id
e
m
ater
ials
ar
e
u
s
ed
to
co
n
s
tr
u
c
t
th
e
NSFET
an
d
th
e
b
est
o
x
id
e
is
s
elec
ted
u
s
in
g
th
e
s
im
u
latio
n
r
esu
lts
.
Vis
u
al
T
C
AD
was u
s
ed
to
s
im
u
late
t
h
e
tr
an
s
is
to
r
in
o
r
d
er
to
o
b
tain
v
ar
io
u
s
p
r
o
p
er
ties
,
s
u
ch
as V
-
I
,
DI
B
L
,
an
d
SS
.
4
.
1
.
Sp
a
ce
re
g
i
o
n m
a
t
er
ia
ls
a
nd
t
ra
ns
is
t
o
r
cha
ra
ct
er
is
t
ics
Fig
u
r
e
6
s
h
o
ws
th
e
r
esu
lts
o
n
a
lin
ea
r
s
ca
le
a
n
d
Fig
u
r
e
7
s
h
o
ws
th
e
r
esu
lts
o
n
a
lo
g
ar
ith
m
ic
s
ca
le
f
o
r
b
etter
v
is
u
aliza
tio
n
o
f
th
e
s
u
b
th
r
esh
o
ld
b
eh
av
io
r
.
B
o
th
f
ig
u
r
es
s
h
o
wca
s
e
th
e
tr
an
s
f
er
p
r
o
p
er
ties
o
f
th
e
p
r
o
p
o
s
ed
GAA
NSFET
d
ev
ice
u
n
d
er
v
a
r
ied
d
ielec
tr
ic
co
n
d
itio
n
s
.
W
h
en
s
tu
d
y
in
g
th
e
s
en
s
itiv
ity
an
d
s
witch
in
g
ca
p
ab
ilit
y
o
f
th
e
tr
an
s
is
to
r
,
th
ese
g
r
ap
h
s
ar
e
ess
e
n
tial,
esp
ec
ially
f
o
r
b
io
s
en
s
in
g
p
u
r
p
o
s
es.
Fo
r
th
e
s
ak
e
o
f
co
n
s
is
ten
cy
an
d
th
er
m
al
s
tab
ilit
y
ac
r
o
s
s
p
er
f
o
r
m
an
ce
p
ar
am
eter
s
,
th
e
s
im
u
latio
n
s
ass
u
m
e
th
at
all
s
p
atial
r
eg
io
n
s
with
in
th
e
d
e
v
ice
k
ee
p
a
co
n
s
tan
t
tem
p
er
atu
r
e
o
f
3
0
0
K.
C
r
itical
d
e
v
ice
m
e
tr
ics
lik
e
th
r
esh
o
ld
v
o
ltag
e,
ON/OFF
cu
r
r
en
t
r
atio
,
s
u
b
th
r
esh
o
ld
s
lo
p
e
(
SS
)
,
a
n
d
d
r
ain
-
in
d
u
ce
d
b
ar
r
ier
lo
we
r
in
g
(
DI
B
L
)
ca
n
b
e
ev
alu
ated
u
s
in
g
th
e
tr
an
s
f
er
c
h
ar
ac
ter
is
tics
,
wh
ich
p
lo
t
th
e
d
r
ain
cu
r
r
e
n
t
v
er
s
u
s
g
ate
v
o
lt
ag
e.
T
h
e
s
witch
in
g
ef
f
icien
cy
,
leak
a
g
e
cu
r
r
en
t,
a
n
d
s
en
s
itiv
ity
to
s
m
all
ch
an
g
e
s
ca
u
s
ed
b
y
in
ter
ac
tio
n
s
b
etw
ee
n
tar
g
et
an
tig
en
s
ar
e
all
d
ete
r
m
in
ed
b
y
th
ese
f
ac
to
r
s
tak
en
to
g
eth
e
r
.
T
h
is
s
tu
d
y
aim
s
to
u
n
d
e
r
s
tan
d
th
e
i
n
f
lu
en
ce
o
f
v
ar
i
o
u
s
d
ielec
tr
ic
m
ater
ial
co
m
b
in
ati
o
n
s
o
n
tr
an
s
f
e
r
ch
ar
ac
ter
is
tics
b
y
ev
alu
atin
g
Air
,
SiO₂,
Hf
O₂
+
SiO₂,
an
d
Hf
O₂
+
Nitr
id
e.
On
e
ex
am
p
le
is
Hf
O
₂,
wh
ich
h
as
a
h
ig
h
k
v
alu
e
a
n
d
is
u
s
ed
to
in
cr
ea
s
e
g
ate
c
o
n
tr
o
l
a
n
d
d
ec
r
ea
s
e
leak
ag
e
th
r
o
u
g
h
in
cr
ea
s
in
g
g
a
te
ca
p
ac
itan
ce
.
On
th
e
o
th
e
r
h
an
d
,
p
air
in
g
s
with
lo
w
k
d
iele
ctr
ics,
s
u
ch
as
air
o
r
SiO₂,
h
av
e
v
ar
io
u
s
ef
f
ec
ts
o
n
th
e
elec
tr
o
s
tatic
en
v
ir
o
n
m
en
t.
B
y
co
m
p
ar
in
g
th
ese
co
n
f
ig
u
r
atio
n
s
,
we
h
o
p
e
to
f
in
d
th
e
o
n
e
th
at
wo
r
k
s
b
est
with
th
e
NSFET
b
io
s
en
s
o
r
in
ter
m
s
o
f
elec
tr
ical
p
er
f
o
r
m
an
c
e
an
d
s
en
s
itiv
ity
f
o
r
d
en
g
u
e
v
ir
u
s
d
etec
tio
n
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J E
lec
&
C
o
m
p
E
n
g
I
SS
N:
2088
-
8
7
0
8
Desig
n
a
n
d
p
erfo
r
ma
n
ce
a
n
a
l
ysis
o
f a
n
N
S
F
E
T
-
b
a
s
ed
b
io
s
e
n
s
o
r
fo
r
…
(
Tu
la
s
i R
a
d
h
ika
P
a
tn
a
la
)
5189
Fig
u
r
e
6
.
Pro
p
er
ties
o
f
th
e
p
r
o
p
o
s
ed
GAA
NSFET
(
lin
ea
r
s
ca
le)
f
o
r
tr
an
s
f
er
(
I
D~VG
S)
Fig
u
r
e
7
.
T
h
e
p
r
o
p
o
s
ed
GAA
NSFET
'
s
tr
an
s
f
er
ch
ar
ac
ter
is
tics
(
I
D~VG
S)
o
n
a
lo
g
ar
ith
m
ic
s
ca
le
T
h
e
r
atio
o
f
o
n
c
u
r
r
e
n
t
to
o
f
f
cu
r
r
e
n
t
is
a
u
s
ef
u
l
in
d
icato
r
o
f
f
ield
ef
f
ec
t
tr
a
n
s
is
to
r
(
FET
)
elec
tr
ical
p
er
f
o
r
m
an
ce
.
T
h
e
o
n
-
s
tate
cu
r
r
en
t to
th
e
Vg
,
o
r
I
ON,
is
a
m
e
asu
r
e
o
f
th
e
FET
'
s
p
o
wer
h
an
d
lin
g
ca
p
ab
ilit
y
an
d
an
in
d
icatio
n
o
f
h
o
w
well
it
co
n
d
u
cts
cu
r
r
en
t
wh
en
tu
r
n
e
d
o
n
.
Vth
is
an
im
p
o
r
tan
t
p
a
r
a
m
eter
f
o
r
h
o
w
FET
-
b
ased
cir
cu
its
wo
r
k
,
h
o
w
C
MO
S
cir
cu
its
ar
e
d
esig
n
ed
,
an
d
h
o
w
tr
an
s
is
to
r
s
wo
r
k
.
T
o
o
p
tim
ize
tr
an
s
is
to
r
p
er
f
o
r
m
an
ce
in
in
teg
r
ate
d
cir
c
u
its
,
o
n
e
m
u
s
t
b
e
awa
r
e
th
at
t
h
e
th
r
esh
o
l
d
v
o
ltag
e
ca
n
b
e
c
h
an
g
ed
.
B
o
th
v
ir
tu
al
d
ev
ices w
ith
v
ar
iab
le
s
p
ac
e
m
ater
ial
h
av
e
th
eir
th
r
esh
o
ld
v
o
l
tag
es sh
o
wn
in
T
ab
le
2
.
T
ab
le
2
.
T
h
r
esh
o
ld
v
o
ltag
e
(
V
th
)
f
o
r
NS
-
FET
an
d
FIN
FET
f
o
r
v
ar
ia
b
le
s
p
ac
e
r
eg
io
n
S
p
a
c
e
s
M
a
t
e
r
i
a
l
NS
-
F
ET(V
t
h
)
S
i
O
2
0
.
2
5
A
i
r
0
.
2
5
H
f
O
2
+
S
i
O
2
0
.
2
5
N
i
t
r
i
d
e
+
H
f
O
2
0
.
2
6
T
h
e
I
ON/I
OFF
r
atio
,
s
o
m
etim
es
ca
lled
th
e
s
witch
in
g
r
atio
,
is
a
way
to
q
u
an
tify
th
e
p
er
f
o
r
m
an
ce
o
f
a
s
em
ico
n
d
u
cto
r
d
ev
ice.
B
ec
au
s
e
it
r
ev
ea
ls
h
o
w
well
th
e
tr
an
s
is
to
r
ca
n
g
o
f
r
o
m
its
ON
(
co
n
d
u
ctin
g
)
to
its
OFF
(
n
o
n
-
c
o
n
d
u
ctin
g
)
s
tate,
it
p
la
y
s
an
im
p
o
r
tan
t
r
o
le
in
d
ig
ita
l
cir
cu
it
d
esig
n
a
n
d
w
h
en
th
i
n
k
in
g
ab
o
u
t
p
o
wer
ef
f
icien
cy
.
T
h
e
I
ON/I
OFF
r
ati
o
is
th
e
r
atio
o
f
th
e
I
D
(
I
ON)
wh
en
th
e
tr
an
s
is
to
r
is
ON
to
t
h
e
I
D
(
I
OFF)
wh
en
it is
OFF.
4
.
2
.
Sens
it
iv
it
y
s
t
ud
y
Qu
an
tify
in
g
th
e
s
en
s
o
r
'
s
ab
ilit
y
to
d
etec
t
d
if
f
er
e
n
t
am
o
u
n
ts
o
f
th
e
tar
g
et
(
s
u
ch
as
th
e
NS1
an
tig
en
o
r
th
e
en
tire
v
ir
u
s
)
is
th
e
g
o
al
o
f
a
s
en
s
itiv
ity
r
esear
ch
f
o
r
a
De
n
g
u
e
v
ir
u
s
d
etec
tio
n
NSFET
d
ev
ice.
T
h
is
aid
s
in
f
ig
u
r
in
g
o
u
t
th
e
d
y
n
am
ic
r
an
g
e,
r
esp
o
n
s
e
co
n
s
is
ten
cy
,
an
d
L
im
it
o
f
Dete
ctio
n
(
L
OD)
.
T
h
e
s
en
s
itiv
ity
o
f
th
e
s
im
u
lated
NSFET
b
io
s
en
s
o
r
v
ar
ies
with
th
e
s
p
ac
er
m
ater
ial.
Air
,
SiO2
,
Hf
O2
+SiO2
,
a
n
d
Hf
O2
+n
itrid
e
ar
e
th
e
f
o
u
r
d
i
f
f
er
en
t
s
p
ac
er
s
th
at
we
h
av
e
u
s
ed
in
o
u
r
e
x
p
er
im
e
n
t.
W
h
en
it
co
m
es
to
th
e
o
p
er
atio
n
o
f
th
e
NSFET
b
io
s
en
s
o
r
in
th
e
m
ed
ical
f
ield
,
it
is
th
e
m
o
s
t
im
p
o
r
tan
t
co
n
s
id
er
atio
n
.
Usi
n
g
b
lo
o
d
as
an
e
lectr
o
ly
te
s
o
lu
tio
n
,
we
co
m
p
u
ted
t
h
e
d
esire
d
m
o
d
el.
Fig
u
r
e
8
d
is
p
lay
s
th
e
tr
a
n
s
f
er
ch
ar
ac
ter
is
tics
o
f
th
e
NSFET
b
io
s
en
s
o
r
s
with
v
ar
io
u
s
d
ielec
tr
ic
s
p
ac
er
s
.
A
d
d
itio
n
ally
,
it
is
ev
id
en
t
f
r
o
m
s
en
s
itiv
ity
s
tu
d
ies
th
at
Hf
O2
+SiO2
d
ielec
tr
ic
s
p
ac
er
is
m
o
r
e
s
en
s
itiv
e
th
an
o
th
er
o
x
id
es f
o
r
a
r
an
g
e
o
f
5
f
g
/Ml
to
3
0
f
g
/Ml
o
f
NS1
an
tig
e
n
.
T
h
e
o
u
t
p
u
t d
r
ain
cu
r
r
en
t
o
f
Hf
O2
+SiO2
s
p
ac
er
is
3
.
7
m
A,
wh
ic
h
is
s
ig
n
if
ican
tly
h
ig
h
e
r
th
an
th
at
o
f
o
th
e
r
d
ielec
tr
ic
s
p
ac
er
s
th
at
wer
e
s
im
u
lated
f
o
r
th
e
NSFET
b
io
s
en
s
o
r
d
esig
n
.
Air
as
a
s
p
ac
er
d
ielec
tr
ic
h
as
th
e
l
o
west
s
en
s
it
iv
e
to
NS
-
1
an
tig
en
.
4
.
3
.
Det
ec
t
io
n o
f
deng
ue
us
ing
a
des
ig
ned NSF
E
T
bio
s
en
s
o
r
wit
h v
a
rio
us
DE
NV
co
nc
ent
ra
t
io
ns
T
h
e
NSFET
b
io
s
en
s
o
r
d
em
o
n
s
tr
ated
an
tig
en
a
n
d
a
n
tib
o
d
y
r
esp
o
n
s
e
to
De
n
g
u
e
v
ir
u
s
D
E
NV.
T
h
e
co
llectio
n
o
f
p
atien
t
s
am
p
les,
th
eir
p
r
eser
v
atio
n
i
n
co
ld
s
to
r
a
g
e,
an
d
th
ei
r
ap
p
licatio
n
t
o
th
e
NSFET
b
io
s
en
s
o
r
ar
e
all
s
tep
s
in
th
e
p
r
o
p
o
s
ed
p
r
o
ce
s
s
.
Fin
d
in
g
th
e
p
r
o
p
er
DE
NV
an
tig
en
an
d
an
tib
o
d
y
is
th
e
m
ain
o
b
jectiv
e
o
f
th
is
s
tu
d
y
.
An
tib
o
d
ies
o
r
ap
ta
m
er
s
th
at
b
i
n
d
s
elec
tiv
ely
to
d
en
g
u
e
v
ir
u
s
p
ar
ticles
o
r
p
r
o
tein
s
(
s
u
ch
as
t
h
e
NS1
an
tig
en
)
f
u
n
ctio
n
alize
th
e
s
u
r
f
ac
e
o
f
th
e
n
an
o
wir
e.
T
h
is
cr
ea
tes
a
b
io
r
ec
o
g
n
itio
n
i
n
ter
f
ac
e
o
n
th
e
NSFET
.
T
h
e
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
7
0
8
I
n
t J E
lec
&
C
o
m
p
E
n
g
,
Vo
l.
15
,
No
.
6
,
Decem
b
e
r
20
25
:
5
1
8
3
-
5
1
9
2
5190
s
u
r
f
ac
e
ch
ar
g
e
ch
an
g
es
wh
en
th
e
d
en
g
u
e
v
ir
u
s
o
r
its
p
r
o
tei
n
attac
h
es
its
elf
to
th
e
n
an
o
w
ir
e'
s
r
ec
ep
to
r
.
As
a
r
esu
lt,
th
e
tr
an
s
is
to
r
's
cu
r
r
en
t
f
lo
w
is
ch
an
g
ed
b
y
ch
an
g
in
g
th
e
co
n
d
u
ctiv
ity
o
f
th
e
n
an
o
wir
e
ch
an
n
el.
I
t
is
p
o
s
s
ib
le
to
m
ea
s
u
r
e
th
ese
elec
tr
ical
s
ig
n
al
v
ar
iatio
n
s
in
r
ea
l t
im
e
an
d
lin
k
th
em
with
th
e
v
ir
al
co
n
ce
n
tr
atio
n
.
R
esi
s
tan
ce
f
r
o
m
th
e
o
u
tp
u
t
ch
ar
ac
ter
is
tic
f
o
r
d
if
f
er
en
t
b
io
m
ar
k
er
s
f
r
o
m
0
to
3
0
f
g
/m
L
c
an
b
e
u
s
ed
to
id
en
tify
d
en
g
u
e
v
ir
u
s
p
ar
ti
cles
o
r
p
r
o
tein
s
.
T
h
e
lo
west
b
io
m
ar
k
e
r
s
o
lu
tio
n
t
h
at
ca
n
i
d
en
tify
th
e
tar
g
eted
p
r
o
tein
is
k
n
o
wn
as
th
e
lim
it
o
f
d
etec
tio
n
.
T
h
e
a
n
tib
o
d
y
m
o
d
if
icatio
n
was
in
v
esti
g
ated
f
o
r
th
at
d
ev
ice
r
esp
o
n
s
e.
T
h
e
lim
it
o
f
d
etec
ti
o
n
in
v
esti
g
atio
n
b
y
g
at
h
er
in
g
d
ev
ice
r
esp
o
n
s
e
is
s
h
o
wn
in
F
ig
u
r
e
9
.
Plo
ttin
g
th
e
d
ev
ice'
s
r
esp
o
n
s
e
d
r
ain
cu
r
r
en
t
(
I
D)
in
v
o
lv
es
ch
an
g
i
n
g
th
e
d
r
ain
v
o
ltag
e
b
etwe
en
-
0
.
1
an
d
+0
.
1
v
o
lts
.
T
h
e
g
r
ap
h
ic
m
ak
es
it
ev
i
d
en
t
h
o
w
m
u
ch
NS1
an
tig
en
s
wer
e
d
etec
ted
f
o
r
th
e
b
io
m
a
r
k
er
with
3
0
f
g
/m
L
.
I
t
is
ev
id
en
t
f
r
o
m
t
h
e
Fig
u
r
e
9
t
h
at
th
e
d
etec
tio
n
o
f
an
tig
en
is
h
i
g
h
ev
e
n
f
o
r
3
0
f
g
/m
L
o
f
d
e
n
g
u
e
v
ir
u
s
p
ar
ticles
o
r
p
r
o
tein
s
.
Fig
u
r
e
8
.
Sen
s
itiv
ity
o
f
th
e
NSFET
d
ev
ice
to
NS1
an
tig
en
with
v
ar
i
o
u
s
s
p
ac
er
m
ater
ials
Fig
u
r
e
9
.
L
im
it
o
f
d
etec
tio
n
o
f
DE
NV
b
io
m
ar
k
e
r
(
NS1
an
tig
en
)
5.
CO
NCLU
SI
O
N
I
n
o
r
d
er
to
d
etec
t
th
e
non
-
s
tr
u
ctu
r
al
p
r
o
tein
1
(
NS1
)
a
n
tig
en
,
a
b
io
m
a
r
k
er
r
elea
s
ed
in
to
th
e
b
lo
o
d
s
tr
ea
m
d
u
r
in
g
th
e
ea
r
ly
s
tag
es
o
f
d
e
n
g
u
e
in
f
ec
ti
o
n
,
th
is
wo
r
k
p
r
esen
ts
th
e
d
esig
n
a
n
d
s
im
u
latio
n
o
f
a
g
ate
-
all
-
ar
o
u
n
d
n
an
o
s
h
ee
t
f
iel
d
-
ef
f
ec
t
tr
an
s
is
to
r
(
GAA
NSFET
)
b
io
s
en
s
o
r
.
T
h
is
b
io
s
en
s
o
r
is
s
ee
n
as
a
h
ig
h
ly
p
r
o
m
is
in
g
s
o
lu
tio
n
f
o
r
ea
r
ly
d
en
g
u
e
v
ir
u
s
d
etec
tio
n
.
C
o
n
v
en
tio
n
al
d
iag
n
o
s
tic
p
r
o
ce
d
u
r
es
h
av
e
d
etec
tio
n
lim
its
m
u
ch
h
ig
h
er
th
a
n
th
e
s
en
s
o
r
'
s
r
em
ar
k
ab
le
s
en
s
itiv
ity
,
wh
ich
allo
ws
it
to
d
etec
t
NS1
co
n
ce
n
tr
atio
n
s
as
lo
w
as
3
0
f
em
to
g
r
a
m
s
p
er
m
illi
liter
(
f
g
/m
L
)
.
T
h
e
p
r
esen
ce
o
f
th
e
v
ir
u
s
ch
a
n
g
es
th
e
co
n
d
u
ctiv
ity
o
f
th
e
n
an
o
s
h
ee
t
ch
a
n
n
el,
wh
ich
is
m
ad
e
p
o
s
s
ib
le
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F
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Evaluation Warning : The document was created with Spire.PDF for Python.
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NC
E
S
[
1
]
J.
Z
o
u
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t
a
l
.
,
“
I
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[
2
]
M
.
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Y
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[
3
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T.
W
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my
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a
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[
4
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N
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[
5
]
S
.
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.
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i
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D
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En
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.
[
6
]
P
.
V
i
ma
l
a
e
t
a
l
.
,
“
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l
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-
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[
7
]
S
.
S
.
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ma
t
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,
G
.
D
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8
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A
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