Effect of Deposition Temperature on Self-Catalyzed ZnO Nanorods via Chemical Vapour Deposition Method

Indonesian Journal of Electrical Engineering and Computer Science

Effect of Deposition Temperature on Self-Catalyzed ZnO Nanorods via Chemical Vapour Deposition Method

Abstract

The morphological, structural, optical and electrical properties of ZnO nanorods are investigated as a function of deposition temperature. The ZnO nanorods were grown on ZnO seed catalyst layer at temperatures between 750oC – 825oC using thermal chemical vapour deposition method.  Sample deposited at 825oC showed the highest crystalline orientation. The FE-SEM micrographs and the intense peak along (002) direction in the XRD spectra of this sample implied that the nanorods possess c-axis orientation. PL spectra showed two common ZnO peaks which centered at 380 nm and 540 nm. Two-point probe I-V measurement revealed ohmic behaviour with the gold metal contact, whereby the current increase with the deposition temperature.

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